Johnson Electric Nanomotion SE Series User manual

Document Number: SE00458000-00 Page 1
SE Motors
User Manual
Vacuum & Non-Vacuum
Document No. SE00458000-00, Rev B
Date: December 2020
Nanomotion Ltd. POB 623, Yokneam 20692, Israel
Tel: [phone] Fax: [phone]
Web Site: www.nanomotion.com
E-mail:[e-mail]

Document Number: SE00458000-00 Page 2
Copyright
Copyright © 2018 by Nanomotion Ltd.
All rights reserved worldwide. No part of this publication may be reproduced, modified, transmitted,
transcribed, stored in retrieval system, or translated into any human or computer language, in any
form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without
the express written permission of Nanomotion Ltd., Mordot HaCarmel Industrial Park, Yokneam,
20692, Israel.
This document contains proprietary information and shall be respected as a proprietary document
with permission for review and usage given only to the rightful owner of the equipment to which
this document is associated.
Patent Information
Nanomotion products are covered under one or more of the following registered or applied for
patents.
US-7,439,652; US-7,247,971; US-7,211,929; US-7,199,507; US-7,183,690; US-7,119,477; US-
7,075,211; US-7,061,158; US-6,979,936; US-6,879,085; US-6,747,391; US-6,661,153; US-
6,617,759; US-6,473,269; US-6,384,515; US-6,367,289; US-6,247,338; US-6,244,076; US-
6,064,140; US-5,877,579; US-5,777,423; US-5,714,833; US-5,696,421; US-5,682,076; US-
5,640,063; US-5,616,980; US-5,453,653; US-8,514,301; US-8,351,104; US-7,876,509; US-
8,760,037; GB-2,458,146; GB-2,458,758; GB-2,446,428; EP-1,721,346; EP-1,186,063; EP-
1,800,356; EP-1,577,961; DE-6,993,2359; DK-1,186,063; DK-1,577,961; JP-4,317,508; JP-
4,484,652; JP-4,813,708; JP-5,420,171; JP-5,591,754; CN-1,014,54917; DE-6,994,1195; DE-
6,020,050,245,94; EP-0,633,616; JP-3,869,044; EP-1,127,380; EP-1,131,853; JP-3,869,162; JP-
3,981,683; EP-1,049,829; EP-0,712,170; DE-6,983,8991; JP-2,980,541; DK-1,127,380; DE-
6,942,974,4; US-9,806,640; IL-111597; IL-228621;DE-6,951,199,6; EP-0,712,170; EP-1,775,9383
(Patent Pending); US-2019/0097547 (Patent Pending); US-16/783,XXX (Patent Pending)

Document Number: SE00458000-00 Page 3
Contact Information
Website:
www.nanomotion.com
Customer Service
Contact your local distributor or email Nanomotion Ltd. Technical Support Department at
[e-mail], with detailed problem description, additions, corrections or
suggestions.
Nanomotion Ltd. Worldwide Headquarters
Mordot HaCarmel Industrial Park
HaCarmel Street, PO Box 623
Yokneam 20692
Tel: [phone]
Fax: [phone]
Email: [e-mail]
Nanomotion Inc - US Headquarters
1 Comac Loop, Suite 14B2
Ronkonkoma
NY 11779
Tel: [phone]
Fax:[phone]
Email: nanoU[email protected]m
Revision History
The revision history shows the last four revisions to this document.
ECO
Revision
Release date
Details
A
July 2018
Initial release of SE8 motor user manual
B
December 2020
Update design changes

Document Number: SE00458000-00 Page 4
Table of Contents
1. INTRODUCTION ......................................................................................................................................... 6
1.1. CE COMPLIANCE................................................................................................................................ 6
1.2. CONVENTIONS USED IN THIS MANUAL ......................................................................................... 6
1.3. RELATED PRODUCTS ........................................................................................................................ 7
1.4. RELATED DOCUMENTATION.............................................................................................................. 7
2. OVERVIEW OF THE SE MOTORS.............................................................................................................. 8
2.1. SE MOTOR SYSTEM .......................................................................................................................... 8
2.2. GENERAL PRECAUTIONS .................................................................................................................. 9
3. MOUNTING AND CONNECTING SE MOTORS........................................................................................ 10
3.1. PREPARING THE STAGE BASE........................................................................................................ 11
3.2. MOTOR MOUNTING HOLES ............................................................................................................ 11
3.3. Stage Carriage Design Guidelines.................................................................................................... 13
3.4. Bonding the Driving STRIP to the Carriage...................................................................................... 14
3.4.1. Mounting Ceramic STRIP on Linear Stage ............................................................................... 14
3.5. MOTOR INSTALLATION –LINEAR STAGES ...................................................................................... 16
3.5.1. Mounting SE4 and SE8 motors on Linear Stage ...................................................................... 16
3.6. ELECTRICAL CONNECTIONS ............................................................................................................. 18
3.6.1. Grounding the Motor.............................................................................................................. 18
3.7. Connecting a Standard Motor Cable ............................................................................................... 19
4. MOTOR CONDITIONING .......................................................................................................................... 21
4.1. Maintenance ................................................................................................................................... 22
5. SE MOTOR SPECIFICATIONS AND DIMENSIONS.................................................................................... 23
5.1. General Information........................................................................................................................ 23
5.2. SE MOTOR SPECIFICATIONS........................................................................................................... 24
6. THERMAL ENVELOPE OF PERFORMANCE............................................................................................. 26
6.1. STAGE HEAT DISSIPATION CONSIDERATION................................................................................ 26
6.2. An Example for Defining the EOP for AB7 Driver in Vacuum Environment .................................... 28
7. APPENDIX ................................................................................................................................................ 29

Document Number: SE00458000-00 Page 5
7.1. VACUUM MOTOR BAKING INSTRUCTIONS ..................................................................................... 29
7.1.1. Motors Only Procedure ........................................................................................................... 29
7.1.2. Full Systems with Motors Mounted......................................................................................... 30
7.1.3. Multiple Motors per Axis Systems ........................................................................................... 31
7.2. SE4 MECHANICAL DRAWINGS ....................................................................................................... 32
7.3. SE8 MECHANICAL DRAWINGS ....................................................................................................... 33

Document Number: SE00458000-00 Page 6
1. INTRODUCTION
This user manual provides general instructions for Nanomotion SE4 and SE8 motors. These
motors can be controlled and driven by different Nanomotion Drivers as well as by user developed
hardware. During planning and design of the motion system refer to both this manual and the user
manual for the Nanomotion Driver being used.
1.1. CE COMPLIANCE
Nanomotion SE motors comply with the following directives:
Safety: IEC 61010-1:1990
EMC: 89/336/EEC as amended by 92/31/EEC and 93/68/EEC
Harmonized Standards to which conformity is declared:
EN 50081- 2:1993/EN 55011:1991
Generic Emission Standards Class A for radiated emission and Class B for
conducted emission.
EN 50082- 2:1995 Generic Immunity Standard
1.2. CONVENTIONS USED IN THIS MANUAL
Throughout this manual commands are shown in BOLD and parameter values are shown in italics.
The following indicate information that is relevant to use and operation of the equipment.
NOTE:
Notes provide additional information that is not included in the normal text
flow.
CAUTION:
Caution provides information about actions that will adversely affect system
performance.
BKM
Best Known Methods:
Provides additional detailed information about operations and methods.
Danger: Indicates operations or activities that may cause damage to
equipment or injury to personnel.

Document Number: SE00458000-00 Page 7
1.3. RELATED PRODUCTS
The following table lists Nanomotion products covered by these instructions.
Product
Part Number
SE4 Vacuum Motor
SE8 Vacuum Motor
SE4-1-V-3
SE8-1-V-3
1.4. RELATED DOCUMENTATION
The following table lists related Nanomotion guides and manuals.
Document
Documentnumber
AB7 Driver User Manual
AB07458000-00

Document Number: SE00458000-00 Page 8
2. OVERVIEW OF THE SE MOTORS
The SE series of motors are high precision ceramic motors. The SE motors combine unlimited
stroke with high position resolution, in compact dimensions. The motors are used in applications
such as microscopy, precision motion, robotics, etc.
The SE motors are available in versions that are compatible with ambient air, vacuum and ultra-
high vacuum operating environments. These applications include wafer inspection and metrology,
scanning stages and lithography
When working with a Nanomotion AB7 Driver in Linear mode the motors provides a linear
response to the input voltage.
Motor
Controller / Driver
SE4-1-V-3
AB7-SE-E4
SE8-1-V-3
AB7-SE-E8
AB7-SE-E16 (for 2 motors connected together)
AB7-SE-E32 (for 4 motors connected together)
2.1. SE MOTOR SYSTEM
An SE motor is part of a motion system (Figure 1) consisting of the following parts:
SE Motors
SE4-1-V and SE8-1-V motors (provided with a 3m shielded cable)
Ceramic Drive Strip (only use ceramic driving strips and rings as supplied by
Nanomotion)
Driving Strip - for linear applications
Driving Ring/Disk - for rotary applications.
Driver
AB7 Driver with a Controller with a servo rate >8KHz
Optional encoder to provide position feedback
Some standard off-the-shelf controllers have been checked to provide high
performance with Nanomotion motors. Consult Nanomotion for specific
manufacturers and controllers.

Document Number: SE00458000-00 Page 9
Figure 1: Closed-Loop SE Motor Drive System Block Diagram
2.2. GENERAL PRECAUTIONS
When handling SE motors observe the following precautions:
• The motor has a high voltage inside when powered on. Do not open the motor!
• Do not apply electric power unless the motor is mounted and pre-loaded against a
driving strip or a driving ring.
• Do not immerse the motor in any solvent or cleaning agent.
• Use only a clean-room cloth (to prevent fiber leftovers) to wipe the motor case and
cover.
• Be sure that the motor, and especially the motor's tips, are not subjected to mechanical
shocks.
• Do not operate Nanomotion vacuum and high-vacuum motors in air pressure between
0.1 torr and 200 torr.

Document Number: SE00458000-00 Page 10
3. MOUNTING AND CONNECTING
SE MOTORS
For optimal motor performance, it is recommended to use only the Ceramic Drive Strips provided
by Nanomotion. These Ceramics have been specifically designed to work with Nanomotion
motors. Substituting this strip with any other material might reduce motor performance or damage
the motor.
Use of Ceramic Drive Strips from suppliers other than Nanomotion voids the
motor warranty.
Figure 2: Example Mounting Base (image is for reference only)