Johnson Electric Nanomotion SE Series User manual

Document Number: SE00458000-00 Page 1
SE Motors
User Manual
Vacuum & Non-Vacuum
Document No. SE00458000-00, Rev B
Date: December 2020
Nanomotion Ltd. POB 623, Yokneam 20692, Israel
Tel: [phone] Fax: [phone]
Web Site: www.nanomotion.com
E-mail:[e-mail]

Document Number: SE00458000-00 Page 2
Copyright
Copyright © 2018 by Nanomotion Ltd.
All rights reserved worldwide. No part of this publication may be reproduced, modified, transmitted,
transcribed, stored in retrieval system, or translated into any human or computer language, in any
form or by any means, electronic, mechanical, magnetic, chemical, manual, or otherwise, without
the express written permission of Nanomotion Ltd., Mordot HaCarmel Industrial Park, Yokneam,
20692, Israel.
This document contains proprietary information and shall be respected as a proprietary document
with permission for review and usage given only to the rightful owner of the equipment to which
this document is associated.
Patent Information
Nanomotion products are covered under one or more of the following registered or applied for
patents.
US-7,439,652; US-7,247,971; US-7,211,929; US-7,199,507; US-7,183,690; US-7,119,477; US-
7,075,211; US-7,061,158; US-6,979,936; US-6,879,085; US-6,747,391; US-6,661,153; US-
6,617,759; US-6,473,269; US-6,384,515; US-6,367,289; US-6,247,338; US-6,244,076; US-
6,064,140; US-5,877,579; US-5,777,423; US-5,714,833; US-5,696,421; US-5,682,076; US-
5,640,063; US-5,616,980; US-5,453,653; US-8,514,301; US-8,351,104; US-7,876,509; US-
8,760,037; GB-2,458,146; GB-2,458,758; GB-2,446,428; EP-1,721,346; EP-1,186,063; EP-
1,800,356; EP-1,577,961; DE-6,993,2359; DK-1,186,063; DK-1,577,961; JP-4,317,508; JP-
4,484,652; JP-4,813,708; JP-5,420,171; JP-5,591,754; CN-1,014,54917; DE-6,994,1195; DE-
6,020,050,245,94; EP-0,633,616; JP-3,869,044; EP-1,127,380; EP-1,131,853; JP-3,869,162; JP-
3,981,683; EP-1,049,829; EP-0,712,170; DE-6,983,8991; JP-2,980,541; DK-1,127,380; DE-
6,942,974,4; US-9,806,640; IL-111597; IL-228621;DE-6,951,199,6; EP-0,712,170; EP-1,775,9383
(Patent Pending); US-2019/0097547 (Patent Pending); US-16/783,XXX (Patent Pending)

Document Number: SE00458000-00 Page 3
Contact Information
Website:
www.nanomotion.com
Customer Service
Contact your local distributor or email Nanomotion Ltd. Technical Support Department at
[e-mail], with detailed problem description, additions, corrections or
suggestions.
Nanomotion Ltd. Worldwide Headquarters
Mordot HaCarmel Industrial Park
HaCarmel Street, PO Box 623
Yokneam 20692
Tel: [phone]
Fax: [phone]
Email: [e-mail]
Nanomotion Inc - US Headquarters
1 Comac Loop, Suite 14B2
Ronkonkoma
NY 11779
Tel: [phone]
Fax:[phone]
Email: nanoU[email protected]m
Revision History
The revision history shows the last four revisions to this document.
ECO
Revision
Release date
Details
A
July 2018
Initial release of SE8 motor user manual
B
December 2020
Update design changes

Document Number: SE00458000-00 Page 4
Table of Contents
1. INTRODUCTION ......................................................................................................................................... 6
1.1. CE COMPLIANCE................................................................................................................................ 6
1.2. CONVENTIONS USED IN THIS MANUAL ......................................................................................... 6
1.3. RELATED PRODUCTS ........................................................................................................................ 7
1.4. RELATED DOCUMENTATION.............................................................................................................. 7
2. OVERVIEW OF THE SE MOTORS.............................................................................................................. 8
2.1. SE MOTOR SYSTEM .......................................................................................................................... 8
2.2. GENERAL PRECAUTIONS .................................................................................................................. 9
3. MOUNTING AND CONNECTING SE MOTORS........................................................................................ 10
3.1. PREPARING THE STAGE BASE........................................................................................................ 11
3.2. MOTOR MOUNTING HOLES ............................................................................................................ 11
3.3. Stage Carriage Design Guidelines.................................................................................................... 13
3.4. Bonding the Driving STRIP to the Carriage...................................................................................... 14
3.4.1. Mounting Ceramic STRIP on Linear Stage ............................................................................... 14
3.5. MOTOR INSTALLATION –LINEAR STAGES ...................................................................................... 16
3.5.1. Mounting SE4 and SE8 motors on Linear Stage ...................................................................... 16
3.6. ELECTRICAL CONNECTIONS ............................................................................................................. 18
3.6.1. Grounding the Motor.............................................................................................................. 18
3.7. Connecting a Standard Motor Cable ............................................................................................... 19
4. MOTOR CONDITIONING .......................................................................................................................... 21
4.1. Maintenance ................................................................................................................................... 22
5. SE MOTOR SPECIFICATIONS AND DIMENSIONS.................................................................................... 23
5.1. General Information........................................................................................................................ 23
5.2. SE MOTOR SPECIFICATIONS........................................................................................................... 24
6. THERMAL ENVELOPE OF PERFORMANCE............................................................................................. 26
6.1. STAGE HEAT DISSIPATION CONSIDERATION................................................................................ 26
6.2. An Example for Defining the EOP for AB7 Driver in Vacuum Environment .................................... 28
7. APPENDIX ................................................................................................................................................ 29

Document Number: SE00458000-00 Page 5
7.1. VACUUM MOTOR BAKING INSTRUCTIONS ..................................................................................... 29
7.1.1. Motors Only Procedure ........................................................................................................... 29
7.1.2. Full Systems with Motors Mounted......................................................................................... 30
7.1.3. Multiple Motors per Axis Systems ........................................................................................... 31
7.2. SE4 MECHANICAL DRAWINGS ....................................................................................................... 32
7.3. SE8 MECHANICAL DRAWINGS ....................................................................................................... 33

Document Number: SE00458000-00 Page 6
1. INTRODUCTION
This user manual provides general instructions for Nanomotion SE4 and SE8 motors. These
motors can be controlled and driven by different Nanomotion Drivers as well as by user developed
hardware. During planning and design of the motion system refer to both this manual and the user
manual for the Nanomotion Driver being used.
1.1. CE COMPLIANCE
Nanomotion SE motors comply with the following directives:
Safety: IEC 61010-1:1990
EMC: 89/336/EEC as amended by 92/31/EEC and 93/68/EEC
Harmonized Standards to which conformity is declared:
EN 50081- 2:1993/EN 55011:1991
Generic Emission Standards Class A for radiated emission and Class B for
conducted emission.
EN 50082- 2:1995 Generic Immunity Standard
1.2. CONVENTIONS USED IN THIS MANUAL
Throughout this manual commands are shown in BOLD and parameter values are shown in italics.
The following indicate information that is relevant to use and operation of the equipment.
NOTE:
Notes provide additional information that is not included in the normal text
flow.
CAUTION:
Caution provides information about actions that will adversely affect system
performance.
BKM
Best Known Methods:
Provides additional detailed information about operations and methods.
Danger: Indicates operations or activities that may cause damage to
equipment or injury to personnel.

Document Number: SE00458000-00 Page 7
1.3. RELATED PRODUCTS
The following table lists Nanomotion products covered by these instructions.
Product
Part Number
SE4 Vacuum Motor
SE8 Vacuum Motor
SE4-1-V-3
SE8-1-V-3
1.4. RELATED DOCUMENTATION
The following table lists related Nanomotion guides and manuals.
Document
Documentnumber
AB7 Driver User Manual
AB07458000-00

Document Number: SE00458000-00 Page 8
2. OVERVIEW OF THE SE MOTORS
The SE series of motors are high precision ceramic motors. The SE motors combine unlimited
stroke with high position resolution, in compact dimensions. The motors are used in applications
such as microscopy, precision motion, robotics, etc.
The SE motors are available in versions that are compatible with ambient air, vacuum and ultra-
high vacuum operating environments. These applications include wafer inspection and metrology,
scanning stages and lithography
When working with a Nanomotion AB7 Driver in Linear mode the motors provides a linear
response to the input voltage.
Motor
Controller / Driver
SE4-1-V-3
AB7-SE-E4
SE8-1-V-3
AB7-SE-E8
AB7-SE-E16 (for 2 motors connected together)
AB7-SE-E32 (for 4 motors connected together)
2.1. SE MOTOR SYSTEM
An SE motor is part of a motion system (Figure 1) consisting of the following parts:
SE Motors
SE4-1-V and SE8-1-V motors (provided with a 3m shielded cable)
Ceramic Drive Strip (only use ceramic driving strips and rings as supplied by
Nanomotion)
Driving Strip - for linear applications
Driving Ring/Disk - for rotary applications.
Driver
AB7 Driver with a Controller with a servo rate >8KHz
Optional encoder to provide position feedback
Some standard off-the-shelf controllers have been checked to provide high
performance with Nanomotion motors. Consult Nanomotion for specific
manufacturers and controllers.

Document Number: SE00458000-00 Page 9
Figure 1: Closed-Loop SE Motor Drive System Block Diagram
2.2. GENERAL PRECAUTIONS
When handling SE motors observe the following precautions:
• The motor has a high voltage inside when powered on. Do not open the motor!
• Do not apply electric power unless the motor is mounted and pre-loaded against a
driving strip or a driving ring.
• Do not immerse the motor in any solvent or cleaning agent.
• Use only a clean-room cloth (to prevent fiber leftovers) to wipe the motor case and
cover.
• Be sure that the motor, and especially the motor's tips, are not subjected to mechanical
shocks.
• Do not operate Nanomotion vacuum and high-vacuum motors in air pressure between
0.1 torr and 200 torr.

Document Number: SE00458000-00 Page 10
3. MOUNTING AND CONNECTING
SE MOTORS
For optimal motor performance, it is recommended to use only the Ceramic Drive Strips provided
by Nanomotion. These Ceramics have been specifically designed to work with Nanomotion
motors. Substituting this strip with any other material might reduce motor performance or damage
the motor.
Use of Ceramic Drive Strips from suppliers other than Nanomotion voids the
motor warranty.
Figure 2: Example Mounting Base (image is for reference only)

Document Number: SE00458000-00 Page 11
3.1. PREPARING THE STAGE BASE
The application's SE motor and Carriage are mounted on the Stage base. The form of the Base and
the Carriage are application dependent. However, some basic rules are applicable to all designs in
order to ensure optimal performance.
It is critical that the stiffness of the stage along the direction perpendicular to
the motion direction of carriage travel is >50N/µm.
3.2. MOTOR MOUNTING HOLES
The SE4 and SE8 motors have a built-in preload setting. Therefore the motors are mounted in a
fixed position (Figure 3). The mounting configuration of SE4-1-V and SE8-1-V motors is shown in
Figure 3.
All dimensions in this document are in millimeters unless otherwise specified.
Isometric drawings use European standard display.
The mounting base for the motors must be an integral part of the stage
baseplate.
Figure 3: Mounting Base Dimensions for SE4-1-V and SE8-1-V Motors

Document Number: SE00458000-00 Page 12
The motor has 2 mounting options:
1. 4x M5 screws that are threaded to the motor. It is recommended to add slots for motor preload
adjustment.
2. 4x M4 through all screws (screws are passing through the M5 threads) to be threaded to the
mounting base
Location of the screws is shown in Figure 3.
The ceramic strip must be mounted perpendicular to the mounting base as shown in Figure 2 and
Figure 3. The size and position of the ceramic strip should follow the dimensions specified in
Figure 4, Figure 5 and Table 1.
Figure 4: Position of the Ceramic Drive Strip
Table 1 : Dimensions from Motor Mounting Base to Drive Strip
Motor Type
Dimension A
Dimension B
SE4-1-V
2 mm
12.5 mm
SE8-1-V
2 mm
22 mm
Figure 5: Ceramic Drive Strip Position for SE8-1-V motor

Document Number: SE00458000-00 Page 13
3.3. STAGE CARRIAGE DESIGN GUIDELINES
The Carriage is the customer designed portion of the Stage that is moved by the SE motor. The
interface between the Stage and the motor is the Ceramic Drive Strip. The designer must limit the
Stage motion (preferably via hardstops) to prevent a loss of contact between the motor tip(s) and
the Ceramic Drive Strip on the Carriage.
The Ceramic Drive Strip should not exceed the stage carriage. It must be supported by a solid,
even, backing along all its entire length to avoid breaking when motor is pressed against it. No
holes or grooves are allowed on the ceramic mounting surface or at a proximity to the surface to
allow smooth operation of the motor. The carriage motion should be limited to assure that motor
tips do not lose contact with the ceramic at any point. Hard limits are recommended on top of any
soft or electrical limits (see Figure 6) at the ends of the carriage movement.
Figure 6: Minimum Distance between motor tips and the edge of Ceramic Drive Strip
For example, design mechanical limiters so that the Driving Strip extends at least 5 mm beyond the
carriage's maximum positive or negative travel. The actual distance is dependent on the
application and usage of the motor.

Document Number: SE00458000-00 Page 14
3.4. BONDING THE DRIVING STRIP TO THE
CARRIAGE
The Driving Strip provides the interface between the motor's tips and the Carriage. It must present
a solid surface to ensure accuracy of movement as well as long operating life.
3.4.1. MOUNTING CERAMIC STRIP ON LINEAR STAGE
The Driving Strip is supplied with double-sided tape along one surface for mounting to the carriage.
The Driving Strip must be fully supported by the carriage along its full length and
width.
The Driving Strip must be secured to the Carriage at its center with epoxy to
ensure rigidity along the direction of motion.
The instructions given in this section refer to the standard Ceramics provided by
Nanomotion. Nanomotion does not guarantee performance attained by strips
purchased from other sources.
Ceramic Strip Mounting Instructions:
1. Clean the surface of the carriage where the Driving Strip will be bonded.
Use a suitable agent such as Isopropyl Alcohol, Ethanol or Acetone.
2. Peel off the self-adhesive backing paper on the Ceramic.
The self-adhesive tape is compatible with high-vacuum applications. .
Inspect visually to ensure there are no folds or large bubbles in the adhesive
layer before mounting the ceramic to the stage.
3. Position the Driving Strip on the surface of the carriage and press
along its
length. Ensure that bubbles or wrinkles do not form between the drive strip
and mounting surface.
4. Apply epoxy adhesive at the center of the Ceramic.
The epoxy should be applied along the line joininig of the ceramic strip and the
carriage over a minimum of 10 mm (see Figure 6 and Figure 7). Use one of the
following or a compatible adhesive, for vacuum and non-vacuum applications:
Huntsman Araldite 2014-1, Masterbond EP65HT-1, Henkel EA 934NA, Ablestik
2116.

Document Number: SE00458000-00 Page 15
Figure 7: Securing the Ceramic to the Stage
Figure 8: Epoxy Coverage on Flat and 90 Degree Joints
Ensure that the epoxy contacts the ceramic plate and the stage carriage.
Ensure that it does not flow onto the Ceramic Strip’s front surface where motor
tips operate.
5. Allow the required time period for curing according to the Epoxy
manufacturerspecifications.
6. Mount the Carriage on the Stage.
0.

Document Number: SE00458000-00 Page 16
3.5. MOTOR INSTALLATION –LINEAR
STAGES
After the Carriage is mounted on the Base the motor can be mounted. SE motors can be mounted
on either of the motor’s two flat surfaces.
To install SE motors using the M5 motor thread option, use the following items:
Allen wrench –M5 for SE8 motor.
Screw and washer –M5 for SE8 motors.
Screw length should be sufficient to pass the base and contact at least 1/ 2 the depth of the motor
body. If the screw protrudes from the motor, care should be taken that it does not interfere with the
movement of other stage parts such as the stroke of the upper axis.
3.5.1. MOUNTING SE4 AND SE8 MOTORS ON LINEAR
STAGE
Nanomotion SE4 and SE8 motors have a preload screw. The motor is supplied with the preload
screw in the locked position and ready for mounting on the stage.
1. Ensure that the preload ex-center is positioned such that the dot on its upper
surface is farthest from the reference point on the motor case (Figure 9(A)).
2. Set the motor in place and finger-tighten the four mounting screws (M5) and
washers. Apply a small amount of blue Loctite to the screws before
mounting.
The motor should be secure but able to move.
3. Press the motor so that the motor tips are against the Drive Strip.
4. Using a diagonal sequence, tighten the four mounting screws (M5).
T o ensure that the motor does not move during this process tighten the
screws 30% of the required torque first, then tighten them to full torque.
5. Apply a torque of 0.5 to 0.7 Nm to each screw.
6. Turn the Preload screw CW or CCW until the dot on the screw is closest to
the reference point on the motor top cover (Figure 9(B)).

Document Number: SE00458000-00 Page 17
Figure 9: Preloading of the SE4 and SE8 motors
7. Connect the motor as described in section 3.6 and perform motor
conditioning asdescribedinsection4.
0.

Document Number: SE00458000-00 Page 18
3.6. ELECTRICAL CONNECTIONS
The motor requires two electrical connections.
Systemground (provided through the shield of the motor power cable)
Power and control cable
3.6.1. GROUNDING THE MOTOR
Nanomotion motors must be grounded to maintain electrical continuity with the Driver and ensure
electrical safety for the system and users. The motor is connected to the driver ground via the
shield of the motor cable.
Failure to connect the motor to the system ground is a hazard to personnel
safety and equipment operation.

Document Number: SE00458000-00 Page 19
3.7. CONNECTING A STANDARD MOTOR
CABLE
Nanomotion guarantees proper Driver and motor performance only when a Nanomotion standard
cable is used. Consult Nanomotion before making any changes to cable lengths or cable types.
The Motor-Connected interlock is available on Nanomotion standard motor
connector.It disables high voltage onthe bare Driver connector, when the motor
is disconnected from the Driver.
Nanomotion's motors run at a resonant frequency and are sensitive to the
capacitance of the electrical circuit. Changing cable length or type affects the
total capacitance and will affect motor performance. Refer to user manual for
the installed Driver for maximum allowed cable length.
The Driver selected for the application must be tuned to the motor used in the
application.
Failure to tune the Driver to the motor may cause damage to Driver.
Changing the length of the motor cable will change the cable’s impedance,
requiring retuning of the Driver.
Nanomotion supplies motors with specific low capacitance cables
Standard motors: 110 pF/meter
Vacuum motors: 43p F/meter
Standard and vacuum motors have an interconnect cable with a 9 pin D-type female connector. The
following image and table provide pinout information.
Figure 10: Motor Connector
Pin
Function
Description
1
GND
System ground
2
N.C.
with AB7 Driver - Phase
3
Motor-Up
White wire - High voltage input
4
Motor-Common
Black wire - GND for AB7 and XCD Controller/Drivers
5
Motor-Down
Red wire - High voltage input

Document Number: SE00458000-00 Page 20
Pin
Function
Description
6
Motor-Connected
Safety input
Short pin 6 to pin 1 - enables Driver. Open on pin 6 -
disables the Driver.
7
GND
System ground - Connected to connector hood
8
N.C.
Not connected
9
N.C.
Not connected