Keysight Technologies M9602A User manual

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M9602A and M9603A
PXIe Precision Source/Measure Units
15 MSa/s, 1 pA/100 fA, 60 V, 3.5 A DC/10.5 A pulse
Introduction
The Keysight M9602A and M9603A are PXIe precision SMUs which offer a best-
in-their-class narrow pulse width of 10 μs, a fast sampling rate of up to 15 MSa/s,
and a wide output range that enables dynamic/pulsed measurements for broad
emerging applications such as VCSEL optical devices and IC testing. This table
shows an overview of the M9602A and M9603A, product options, and associated
accessories. This guide provides step-by-step instructions to help you configure
the product to meet the desired test requirements.
Model number
M9602A
PXIe SMU, 15 MSa/s, 1 pA, 60 V, 3.5 A DC/10.5 A pulse
M9603A
PXIe Precision SMU, 15 MSa/s, 100fA, 60 V, 3.5 A DC/10.5 A
pulse
Accessories
PX0101A-001/002
BNC-to-ferrule terminal cable, 1.5 m/ 3 m
PX0103A-001/002
Triaxial to SMB cable, 1.5 m/ 3 m
PX0104A-001/002
High current triaxial cable, 4 A, 1.5 m/ 3 m
PX0105A-001/002
Low inductance BNC cable, 1.5 m/ 3 m
PX0108A-001/002
BNC-to-SMB cable, 1.5 m/ 3 m
Options
1A7
Calibration + uncertainties + guardbanding (not accredited)
A6J
ANSI Z540-1-1994 calibration
UK6
Commercial calibration certificate with test data

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Configuring Your Keysight M9602A/M9603A Precision SMU
Step 1. Define the required number of M9602A/M9603A modules
You need to define the required number of modules based on your application requirements.
Product
number
Required
slots
Number of
channels
Max.
Voltage
Max. Current
(DC/pulse)
Min. Voltage
resolution
Min. Current
resolution
Max. Sampling
rate
M9602A
1
1
60 V
3.5 A/10.5 A
6 μV
1 pA
15 MSa/s
M9603A
100 fA
The following items come as standard with each M9602A/M9603A PXIe precision SMU module:
Qty.
Additional information
Quick startup poster
1ea
Printed reference for quick startup (English)
Certificate of calibration
(without test data)
1ea
Certificate of calibration (without actual test data). If you
need the test data, please specify option UK6.
Short bar
1ea
Short bar to connect low terminals to chassis common;
orderable part number is M9601-87001 (includes 5 pcs.)
Connector-terminal block 2.5
mm 6-terminal
1ea
Connector-terminal block to connect external trigger
terminals and interlock terminal; orderable part number
is M9601-87002 (includes 5 pcs.)
Step 2. Select optional accessories
The following accessories are available for connection between M9602A and M9603A to your DUT.
Product number
Description
Note
PX0101A-001/002
BNC-to-ferrule terminal cable, 1.5 m/ 3 m
Trigger or interlock cable
PX0103A-001/002
Triaxial to SMB cable, 1.5 m/ 3 m
Low sense cable
PX0104A-001/002
High current triaxial cable, 4 A, 1.5 m/ 3 m
Standard high force and high sense
triaxial cable
PX0105A-001/002
Low inductance BNC cable, 1.5 m/ 3 m
High force cable for narrow pulse
less than 50 μs
PX0108A-001/002
BNC-to-SMB cable, 1.5 m/ 3 m
Low sense cable
N1254A-106
Triaxial(m) to BNC(f) adaptor
To connect PX0105A cable to high
force triaxial terminals of SMU.

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M9602A/M9603A front panel
As shown in Figure 1, the M9602A/M9603A has High force, Low force, High sense,
Low sense and Guard. It supports both two-wire and four-wire measurement, and low
current measurement with a guard.
Step 2-1. Select cable and accessories for connection between M9602A/M9603A and your DUT
You will need to select an appropriate accessory according to the connection type.
There are basically three types of connection configurations. The essential cables and
accessories are as follows:
Two-wire or
Four-wire
Pulse width
Recommended cable
High force
High sense
Low sense
Four-wire
<= 50 μs
Triaxial(m) to BNC(f)
+ Low inductance cable1
High current triaxial cable2
Triaxial-to-SMB cable3
> 50 μs or DC
High current triaxial cable
High current triaxial cable
Triaxial-to-SMB cable
Two-wire
High current triaxial cable
NA
NA
1. A low i nductance c able does not have Guard, and is limited in low current measurement. Guard connection is
required for low current measurement (~ 10 nA or less measurement.)
2. A low induc tance cable can be used, though it is limited in low current measu rement.
3. An SMB-BNC cabl e can be used, however, do not connect the outer shield, Low Force, to the chassis /frame ground
of the DUT when M9603A is grounded.
Figure 1. M9602A/M9603A Front panel
Two external trigger lines —
PXIe trigger lines are available on the
backplane
Interlock
One SMB terminal for Low sense
Two triaxial terminals for high force / sense
Low terminals
-
floating
-
grounded —attach a short bar
High force
Guard
High sense
Low force

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Four-wire connection for narrow pulse (<= 50 us)
Figure 2 shows the connection for 4-wire connections for narrow pulse (<= 50 us). For this configuration,
select the items shown in Table 1.
Note the following points for this connection:
•The low inductance cable does not have Guard, and is limited to low current measurement.
Guard connection is required for low current measurement (~ 10 nA or less measurement.)
•Do not connect the outer shield or Low Force to the chassis/frame ground of the DUT when
M9603A is grounded
Figure 2. Connection for 4-wire connection for narrow pulse (<= 50 us)
S
DUT Interface
DUT
In the case of
Low force = floating
If you perform grounded measurement,
attach the short bar.
Or if you perform floating measurement,
remove the short bar.
N1254A-106
Triaxial(m) to BNC(f)
PX0105A
Low inductance BNC cable
PX0104A
High current triaxial cable
PX0103A
Triaxial to SMB cable

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Table 1. Required items for 4-wire connection for narrow pulse (<= 50 us)
Product number
Description
Qty.
Note
PX0103A-001/002
Triaxial to SMB cable
1.5 m/ 3 m
1
Low sense
If your DUT interface is BNC, you can use a
PX0108A BNC-to-SMB cable, instead.
PX0104A-001/002
High current triaxial cable,
4 A 1.5 m/ 3 m
1
High sense
If your DUT interface is BNC, you can use a
PX0105A Low inductance BNC cable with
N1254A-106 Triaxial(m) to BNC(f) adaptor,
instead.
PX0105A-001/002
Low inductance BNC cable
1.5 m/ 3 m
1
High force
N1254A-106
Triaxial(m) to BNC(f)
adaptor
1
Used with PX0105A
Four-wire connection for pulse (> 50 µs) or DC
Figure 3 shows the connection for 4-wire connection for pulse (> 50 µs) or DC. For this configuration,
select the items shown in Table 2.
Figure 3. Connection for a 4-wire connection for pulse ( > 50 µs) or DC
S
DUT Interface
DUT
In the case of
Low force = floating
If you perform grounded measurement,
attach the short bar.
Or if you perform floating measurement,
remove the short bar.
PX0104A
High current triaxial cable
PX0104A
High current triaxial cable
PX0103A
Triaxial to SMB cable

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Table 2. Required items for 4-wire connection for pulse (> 50 µs) or DC
Product number
Description
Qty.
Note
PX0103A-001/002
Triaxial to SMB cable
1.5 m/ 3 m
1
Low sense
PX0104A-001/002
High current triaxial cable, 4 A
1.5 m/ 3 m
2
High force, High sense
Two-wire connection
Figure 4 shows the connection for 2-wire connection. For this configuration, select the items shown in
Table 3.
Table 3. Required items for 2-wire connection
Product number
Description
Qty.
Note
PX0104A-001/002
High current triaxial cable, 4 A
1.5 m/ 3 m
1
High Force
Figure 4. Connection for 2-wire connection.
S
DUT Interface
DUT
In the case of
Low force = floating
If you perform grounded measurement,
attach the short bar.
Or if you perform floating measurement,
remove the short bar.
PX0104A
High current triaxial cable

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Step 2-2. Select the cable if you utilized an interlock circuit
The M9602A/M9603A is equipped with an interlock safety feature to protect against exposure to
voltages above a user-specified value. You can engage the safety lock using interlock pins on the
connector located at the front panel. Normally, these pins are routed to a shielding box or test fixture
that must be closed to complete the interlock circuit.
You can install an interlock circuit as shown in Figure 3. If your shielding box has a BNC connector for
the interlock circuit, you can use the PX0101A-001 or 002 BNC to ferrule terminal cable with a
connector-terminal block to connect the M9602A/M9603A’s interlock pins to it. For more detailed
information, please refer to the Keysight M9602A/M9603A Startup Guide.
Step 2-3. Select the cables if you use an external trigger
There are trigger lines in the PXIe chassis available to synchronize the M9602A/M9603A with the other
PXIe modules. In addition, there are two external trigger lines available if you need to synchronize it with
an external instrument. You can use the PX0101A-001 or 002 BNC to ferrule terminal cable with a
connector-terminal block to connect the M9602A/M9603A’s external trigger lines to the external
instrument.
Figure 5. An example of interlock circuit installation
PX0101A-001 or 002 BNC
to ferrule terminal cable

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Step 3. Select software license type (Optional)
The PX0109A Quick I/V Measurement Software For PXIe Precision SMU is recommended for easy and
quick I/V measurement. Because it supports various license type, select the appropriate one for your
purpose. Please visit: www.keysight.com/find/px0109a in detail.
Product
License type
License term (36 months subscription)
License & support
PX0109A
Node-locked (fixed)
R-X45-001-Y
Transportable
R-X45-004-Y
USB Portable1
R-X45-005-Y
Floating (single site)
R-X45-002-Y
Floating (single region)
R-X45-006-Y
Node-locked (fixed)
R-X45-001-Y
1. USB portable license requires a certified USB dongle (availabl e for additional purchase. Keysight part number
PX0100-D10)
Step 4. Select a calibration plan
Step 4-1. Select a relevant calibration services plan (optional)
Factory calibration and certification of calibration comes as standard. The optional ISO 17025 (not
accredited), ANSI Z540, and commercial calibration certificate with test data are available as follows:
Description
Product number
Additional information
Calibration + uncertainties + guardbanding
(not accredited)
M9602A-1A7/
M9603A-1A7
Calibration certificate with
measurement results are available
only at time of purchase
ANSI Z540-1-1994 calibration
M9602A-A6J/
M9603A-A6J/
Calibration certificate with
measurement results are available
only at time of purchase
Commercial calibration certificate with test
data
M9602A-UK6/
M9603A-UK6
Calibration certificate with
measurement results are available
only at time of purchase
Step 4-2. Select recalibration service plans (optional)
The following options are available. If you need other options —for example, the standard compliant
calibration option —please contact your local Keysight office for availability.
Description
Product number
Calibration plan —return to Keysight —3 years
R-50C-011-3
Calibration plan —return to Keysight —5 years
R-50C-011-5

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Related Literature
Publication Title
Publication number
M9602A and M9603A PXIe Precision Source/Measure Unit, Data Sheet
3120-1427EN
PX0109A Quick I/V Measurement Software for PXIe Precision SMU, Technical
Overview
3121-1317EN
Keysight PXI and AXIe Products and Solutions, Catalog
5992-0600EN
Keysight PXI & AXIe Instruments, Software, Reference Solutions, and Services
5990-6379EN
Appendix. Tips for Connection between M9602A/M9603A and your DUT
Two-wire connection or four-wire connection
If you are measuring very small resistances or applying a very large current, you should use the four-
wire measurement method (also known as the Kelvin method). This technique uses both force and
sense terminals. Performing the measurement through the sense terminals (in which no current is
flowing) eliminates the undesirable effects of cable resistance.
Figure 6. Two-wire connection and four-wire connection configuration
4-wire connection
2-wire connection
DUT
High force
Low force
High sense
Low sense
DDUTU
T
High force
Low force
DUT
DUT

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This information is subject to change without notice. © Keysight Technologies, 2020 - 2021, Published in USA, September 14, 2021, 3120-1530.EN
Learn more at: www.keysight.com
For more information on Keysight Technologies’ products, applications, or services,
please contact your local Keysight office. The complete list is available at:
www.keysight.com/find/contactus
Guarding connections
Low current measurements (< 1 nA) requires a guarding to prevent leakage through the measurement
cable. Figure 7 illustrates a simplified overview of the guarding technique. Guarded measurements
require the use of triaxial cables. A follower (x1) buffer amplifier maintains the same potential between
the guard conductor and the center conductor. Since there is no voltage difference, there is no current
from the center conductor to the guard.
Note: in this example, the device interface also has a guarded shield to prevent leakage at the device
interface.
Figure 7. Guarding technique
A
DUT
x1
Guard shield
Shield
Low force
Guard
High force
M9602A/M9603A