2-3. Mounting
Securely mount this power unit on the mounting plate with reference to the outside
drawing in Fig. l. Form mounting, apply M3 small screws and consider the thickness of the
mounting plate to have a distance within 3mm to the main machine.
3. Wiring connection
3-1.Wiring connection with the mass flow controller (MFC) /
mass flow meter (MFM)
Connect the MFC or MFM to the 9P connector of this power unit with private purpose
cables corresponding thereto. When connecting the connector push-in it so that it mates
with the concavo-convex of the socket and pin units of the connector, and then tighten the
fixing thread on the cable side so as to prevent falling. See the attached connector shape
diagram and the standard schematics of model 3440 and 3660 mass flow controllers in the
attached Fig.1-4.
3-2 Wiring connection with the external appliances
Connect the external appliances to the 15P connector of this power unit with cables
applicable thereto. When connecting the connector, push-in it so that it mates with the
concavo-convex of the socket and pin units of the connector, and then tighten the fixing
thread on the cable side so as to prevent falling. See the connector shape diagram and the
standard schematics of model 3440 and 3660.mass how controllers in the attached Fig.1-4.