Kurt J. Lesker R Series User manual

Kurt J. Lesker Company
6100220000 Rev. 1.03
1925 Worthington Ave
Clairton Pa, 15025
Telephone: [phone]
Fax: [phone]
R SERIES
RADIO FREQUENCY
POWER SUPPLY
OPERATOR’S MANUAL
Revision 1.03
Standard Configuration
Document Number 6100220000

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
i
Kurt J. Lesker Company
6100220000 Rev. 1.03
Introduction
Thank you for acquiring your new KJLC product. KJLC Radio Frequency Power Supplies are been
designed to provide the best value, ease of operation, and reliability for plasma processing systems.
This manual covers specifications, installation, and operation of the KJLC RX01 and LX01 Series
RF Power Supplies.
Information
To get answers for any questions you might have regarding your plasma or processing system, please
contact your system vendor first. Your system vendor knows the intimate details of how your
equipment interfaces and operates with the RF Power Supply and can efficiently resolve system
related problems.
For questions directly related to the RF Power Supply, you may call us, Monday through Friday,
8:00am to 8:00pm, United States Eastern Time, at:
1-800-245-1656
Service
For RF Power Supplies purchased with a processing system, or covered under a service contract from
your system vendor, please contact the system vendor to arrange for service.
For after-market or end user customers, a KJLC customer service representative will arrange for
service. Call us, Monday through Friday, 8:00am to 8:00pm, United States Eastern Time, at:
1-800-245-1656
Please note: Equipment returned to us without prior authorization or without a Return Materials
Authorization (RMA) number visible on the outside of the package will be refused.
How to Contact Us
Our address, telephone, and fax numbers are listed below.
Kurt J. Lesker Company
1925 Worthington Ave.
Clairton Pa, 15025
Telephone: [phone]
Fax: [phone]
Proprietary Information Notice
This document contains information proprietary to KJLC This document shall not be reproduced or
its contents disclosed without the written permission of KJLC This notice shall appear in all copies.

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
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TABLE OF CONTENTS
Safety Notes …………..………………………………………………………………... 1
RF Power Supply Model Features ..…….…..……………………………………..……. 3
Installation ..……………………………………..…………………………………….… 4
Mounting ………………………………………………………………...…………… 4
Supplied Accessories .………………………………..………………………………. 4
Ventilation .…………………………………………………………………..………. 4
Connection to a Water Cooling System ……...………………………………………. 5
Connecting to Water Inlet/Outlet Ports ……………………………………………. 5
Coolant Water Temperature and Flow Rate ……………………………………….. 6
Coolant Water Supply Lines ……………………………………………………….. 6
Solenoid Water Valve Installation …………………………………………………. 7
RF Output Connection ……………………………………………………………….. 7
Connection to AC Mains …………………………………………………………….. 8
System Interfacing …………………………………………………………………… 9
Front Panel Controls and Display..………………………..…………………………..… 10
Operation.…………………………………………..………………………………...…. 12
Front Panel Operation.……....……………………………...……………….…….….. 12
Analog Interface Operation..………………………………….…………………….... 16
Serial Interface Operation..…………………………..……………………………….. 18
Serial Command Reference …..………...………………………………………….. 20
Serial Command Details .………….………..…..………….………………………. 26
Configuring Programmable Parameters ..……………………………….……………. 41
Programmable Parameter Reference .……………………………………...……….. 41

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TABLE OF CONTENTS
Programmable Parameter Details…………………………………………..……….. 47
Rear Panel Controls and Connections…..…………………………………………..…… 62
R101, R101MKII, R301, R301MKII, L301, L301MKII Rear Panel ……………… 62
R601, L601, R1001, L1001 Rear Panel ...…………………………….……………. 62
R1001W Rear Panel ………………………………………………………………... 63
R2001, R2001H, R3001, L2001, L2001H, L3001 Rear Panel ….…………………. 64
R5001 Rear Panel …………………………..……….……………………………... 64
RF Output Connector ………………………………………………………………… 65
Power Inlet or Power Cord …………………………………………………………… 65
Mains Circuit Breaker ………………………………………………………………... 65
DCP Connector (R101, R101MKII, L101MKII, R301, R301MKII L301, L301MKII
Models only) …………………………………………………………………………. 66
CEX OUT Connector ………………………………………………………………… 66
CEX IN Connector …………………………………………………………………… 66
Fan Exhaust …………………………………………………………………………... 66
Analog Interface Connector…………………………...………………………...……. 67
Analog Interface Pin List ..………………….……………………………..…..…… 68
Typical Interface Circuits ………………………………………………………..… 74
Serial Interface Connector.……………………………………...……………………. 77
Serial Interface Connector Pin List ………………………………………………… 77
Serial Interface Wiring …………………………………………………………….. 78
Equipotential Bonding Terminal …………………………………………………….. 79
Valve Connector ……………………………………………………………………... 80
Valve Connector Pin List ………………………………………………………….. 80
Coolant Water IN Port ……………………………………………………………….. 81

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TABLE OF CONTENTS
Coolant Water OUT Port …………………………………………………………….. 81
Typical Interface Connections..………………………………………………..………... 82
Basic Analog Interfacing……………………………………………………..………. 82
External Feedback with Probe Inverter Option (Models R101, R101MKII, L101MKII,
R301, R301MKII, L301, L301MKII only) …………………………….. 83
Typical System Configuration ….……………………………………………….….…... 85
Maintenance..……………………………………………………………………..……... 86
Problem Solving..………………………………………………………………..………. 87
Technical Data …………...……………………………………………………...……… 90
RF Power Supply Identification ………………………………………………...……. 90
Specifications: R101……..………………………….…………………………...…… 91
Specifications: R101MKII ……………………………………………………...……. 97
Specifications: R301 …………………………………………………………….…… 100
Specifications: R301MKII……………………………………………………………. 103
Specifications: L301 …………………………………………………………………. 106
Specifications: L301MKII …………………………………………………………… 109
Specifications: R601 ………………………………….……………………………… 112
Specifications: L601 ……………………………………………….………………… 115
Specifications: R1001 ……………………………………………...………………… 118
Specifications: R1001W …………………………………...………………………… 121
Specifications: L1001 …………………………………………...…………………… 124
Specifications: R2001 …………………………………………………………..……. 127
Specifications: R2001H ……………………………………………………...………. 131
Specifications: L2001 ……………………………………………………..…………. 135
Specifications: L2001H ………………………………………………………………. 139
Specifications: R3001 ……………………………………………………...………… 143
Specifications: L3001 …………………………………………………...…………… 147
Specifications: R5001 …………………………………………..……………………. 151

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TABLE OF CONTENTS
Physical Dimensions: R101, R101MKII, R301, R301MKII, L301, L301MKII …….. 154
Physical Dimensions: R601, L601, R1001, R1001W, L1001 ……………………..… 156
Physical Dimensions: R2001, R2001H, L2001,L2001H, R3001, L3001 ……….…… 158
Physical Dimensions: R5001 ………………….....…………………………………... 160
Agency Compliance Information ..…………………………………………………… 162
Declaration Of Conformity (CE)
Models R101, R101MKII, L101, R301, R301MKII, L301, L301MKII, R601, L601,
R1001, L1001 ………………………………………….……………….……
162
Declaration Of Conformity (CE)
Models R2001, R2001H, L2001, L2001H, R3001, L3001 ………………………… 163
Semiconductor Equipment and Materials International (SEMI) …………...……… 164
KJLC 1 Year Limited Warranty..……………………………………………………... 165
Obtaining Service for your RF Power Supply……………………….…………..……… 165
Glossary of Terms..…………………………………………………………………..….. 166
Revision History...…………………………………………………………………….… 168

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
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Kurt J. Lesker Company
6100220000 Rev. 1.02
POINT
EQUIPOTENTIAL BONDING
!
GROUND
=PROTECTIVE
= CAUTION
=
HIGH
VOLTAGE
=RADIO FREQUENCY
ENERGY HAZARD
=
Safety Notes
KJLC RF Power Supplies have been designed and tested to meet strict safety requirements. These
include independent lab examination and approval, and compliance to established standards. Please
read the following instructions carefully before operating the RF Power Supply and refer to them as
needed to ensure the continued safe operation of the RF Power Supply.
Follow all warnings and instructions marked on or supplied with the product.
Symbology:
Unplug or disconnect this equipment from the power source before cleaning or re-configuring the
AC mains voltage.
Do not use this equipment near water, wet locations, or outdoors.
Do not place this equipment on an unstable cart, stand, or table. The RF Power Supply may fall,
causing personal injury or damage to the RF Power Supply .
This product is equipped with a power cord and grounding type plug. This is a safety feature. To
avoid electric shock, this unit must be connected to the power source in compliance with the National
Electrical Code ANSI C1 and/or any other codes applicable to the user. Improper installation may
result in a shock or fire hazard.
It is the responsibility of the installer to provide a proper protective ground from the RF Power
Supply to earth ground, in accordance with local and national electrical codes, and any other codes
applicable to the user.
The RF Power Supply should be operated from the type of power source indicated by the ratings
plate. If you are not sure of the type of power available, consult an electrician or your local power
company.
The power supply cord and plug is the disconnect device for this equipment. If the plug is
removed from the cord and the power cord is hard wired to the power source, it is the responsibility
of the installer to provide a disconnect device.
Do not allow anything to rest on the power cord or interconnecting cables. Do not locate the RF
Power Supply where persons will step on the power or interconnecting cables.
Slots and Openings in the equipment’s chassis are provided for ventilation. To ensure reliable
operation of the RF Power Supply, these openings must not be blocked, covered, or restricted.
Restricting the air inlets or exhaust will cause the unit to overheat. Sustained over temperature
conditions may degrade or damage the unit.
Never push objects of any kind into the slots and openings of the RF Power Supply’s enclosure.
They may touch dangerous voltage points or short out parts, which could result in a fire or electric
shock.
Never spill liquid of any kind on or into the RF Power Supply.

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
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Kurt J. Lesker Company
6100220000 Rev. 1.02
Never remove covers or guards that require a tool for removal. There are no operator serviceable
areas within these covers. Refer servicing to qualified service personnel.
CAUTION!
ELECTRICAL SHOCK HAZARD PRESENT
INSIDE UNIT, AT THE RF OUTPUT CONNECTOR,
AND AT THE MAINS INPUT CONNECTOR.
DO NOT REMOVE COVERS.
REFER SERVICING TO QUALIFIED SERVICE
PERSONNEL.
!

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
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Kurt J. Lesker Company
6100220000 Rev. 1.02
Radio Frequency Power Supply Features
KJLC RF Power Supplies are intended for use with radio frequency plasma processing systems and
radio frequency processing applications.
The RX01 and LX01-Series RF Power Supplies provide a level-controlled radio frequency power
output. Available frequencies are 100-460KHz (LX01 Series), 1.7-2.1MHz, and 13.56MHz (RX01-
Series) at power levels up to 5000 Watts. The RX01 and LX01-Series RF Power Supplies feature
operator-accessible controls, a visual display of power supply status, and control interfaces to the
user’s processing system. Other RF Power Supply features are listed below:
•Packages: R/L101, R/L301, R/L101MKII, R/L301MKII: ½ Rack, 3U High Package
R/L601, R/L1001: ½ Rack, 4U High Package
R/L2001, R/L3001: 19” Rack, 4U High Package
R5001: 19: Rack, 5U High Package
•Flexible AC Mains voltage:
R101, R/L301: 90-140VAC or 190-264VAC, selectable via transformer taps
R/L101MKII: 90-140VAC or 190-264VAC, universal input, no taps to configure.
R/L301MKII: 90-140VAC or 190-264VAC, universal input, no taps to configure.
R/L601: 90-140VAC or 190-264VAC, universal input, no transformer taps to configure
R/L1001: 190-264VAC, no transformer taps to configure.
R/L2001, R/L3001, R5001: 190-264VAC, no transformer taps to configure.
•User programmable 100 to 460KHz synthesized internal frequency source (L-Series)
•User programmable 1.7MHz to 2.1MHz synthesized internal frequency source (R-Series)
•Crystal-Controlled fixed frequency (R-Series)
•Programmable Variable Frequency Tuning. (1.7-2.1MHz R-Series, L-Series Models)
•Bright, easy to read 4 Line Vacuum Fluorescent Display, capable of displaying Forward and
Reflected RF Power, Control Mode, Power Supply status, and RF or DC Probe Voltage.
•Front panel controls for RF On/Off, mode selection, and programming
•Front Panel, Analog, and Serial control interfaces
•Forward Power and Load (Net) Power Leveling
•Scaleable Forward and Reflected power metering
(requires interface connection to user’s system)
•Scalable RF and DC Probe Voltage display
•Remote control operation via analog system interface connector
•Computer Control via RS-232/422/485 serial interface
•Common Exciter input and output
•Voltage Probe Inverter option available (100 Watt and 300 Watt models)
•Air Cooling (100-1000 Watt models)
•Water Cooling (models over 1000 Watts)

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Installation:
Recommended mounting:
KJLC RF Power Supplies are designed for placement on a tabletop or on a shelf within an
equipment rack, in a clean environment. The table or equipment rack must be capable of
supporting the full weight of the unit.
The RF Power Supply is supplied with Rack Mounting Ears. The mounting ears are designed
for securing the RF Power Supply to the equipment rack rail. The rack mounting ears are not
designed to support the weight of the RF Power Supply. The user must provide a shelf within
the equipment rack to support the weight of RF Power Supply. The user is responsible for
providing mounting hardware. RF Power Supply weights are listed by model type in the
technical specifications section of this manual.
Mounting Options for ½ -Rack RF Power supplies:
One (1) ½-rack RF Power Supply may be mounted in a 19” equipment rack with the use of an
optional single rack mount kit. The user must provide a shelf within the equipment rack to
support the weight of unit.
Two (2) ½-rack RF Power Supplies may be mounted in a 19” equipment rack with the use of
an optional dual rack mount kit. The user must provide a shelf within the equipment rack to
support the weight of two (2) ½-rack units.
Supplied Accessories:
Supplied accessories vary by model type. Supplied accessories may include power cords, rack
ears, water valves, and other accessory items. Refer to the appropriate RF Power Supply
model’s page in the technical specifications section of this manual.
Ventilation:
All of the RX01/LX01 series RF Power Supplies require ventilation, including the water-
cooled model types. The forced-air cooling requirements vary by model type. Refer to the
appropriate RF Power Supply model’s page in the technical specifications section of this
manual for the model-specific forced air cooling requirements. If the unit is mounted in an
equipment rack or other suitable enclosure, ensure there is adequate fresh (cool) air intake and
an exhaust path for the rear panel fan.
!
Placing the RF Power Supply in an unventilated or sealed enclosure
will create an “oven” effect and force the unit to shut down. Continued
operation under conditions of poor ventilation may degrade or damage
the RF Power Supply.
Maximum air intake temperature is +40°C

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Kurt J. Lesker Company
6100220000 Rev. 1.02
Connection To A Water Cooling System: (Water-cooled RF Power Supplies only)
Water-cooled RF Power Supplies requires connection to an external, user-supplied water
chiller or water re-circulation system. Two (2) 3/8” N.P.T. female ports are provided on the
rear panel of the unit. An external solenoid water valve is provided to prevent condensation
within the RF Power Supply.
Connecting to Water Inlet/Outlet Ports:
Water-cooled RF Power Supplies use 3/8” N.P.T. (tapered), dry-seal, hexagonal female fittings
for coolant water inlet and outlet port connections. Although the coolant water ports are brazed
to an internal bracket or heatsink, the coolant water ports can be damaged by excessive torque
when threading a fitting into the coolant water inlet and outlet ports.
Water Fitting Installation Method
Step Action
1. Wrap a layer of Teflon pipe sealant tape around the male threads of the
fitting to be installed in the water inlet or outlet port.
2. Thread the fitting into the water inlet or outlet port by hand until tight.
3. Place a wrench on the hexagonal coolant water port. Hold the wrench
steady to prevent rotation of the coolant water port.
4. Place a second wrench on the water fitting threaded into the coolant water
port in step 2.
5. Turn the water fitting with the second wrench one-quarter (1/4) to one-half
(1/2) turn clockwise to seat the fitting and create a dry seal.
6. Apply coolant water and ensure there are no leaks at the coolant water inlet
or outlet port threads.
Improper installation, removal, or over-tightening of water fittings will
damage the water inlet/outlet ports and cause water leaks. The water leak
may be internal and unobserved.
Damage to the water inlet/outlet ports and internal components
resulting from improper fitting installation or removal are not
covered by KJLC product warranty.
!
WARNING!
Improper coolant water fitting installation or removal may
cause water leaks and create an electrocution hazard.
Use the methods specified below to install or remove
coolant water fittings.

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
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Kurt J. Lesker Company
6100220000 Rev. 1.02
Water Fitting Removal Method
Step Action
1. Disable coolant water flower and drain the system or system segment
pertaining to the RF Power Supply. Drain the supply lines connected to the
RF Power Supply.
2. Place a wrench on the hexagonal coolant water port. Hold the wrench
steady to prevent rotation of the coolant water port
3. Place a second wrench on the water fitting to be removed from the coolant
water port.
4. Turn the water fitting with the second wrench one-quarter (1/4) to one-half
(1/2) turn counter-clockwise to un-seat seat the fitting.
5. Unthread the fitting from the coolant water inlet or outlet port by hand.
Coolant Water Temperature and Flow Rate:
Coolant water inlet temperature range is +15°C to +40°C. Recommended coolant water inlet
temperature range is +22°C to +28°C (to prevent condensation). Minimum coolant water flow
rate varies by model type. Refer to the appropriate RF Power Supply model’s page in the
technical specifications section of this manual for the model-specific coolant water flow rate.
Detailed coolant water specifications are located in the Technical Specifications section of this
manual.
To prevent condensation within the RF Power Supply, a solenoid water valve is provided.
Coolant Water Supply Lines:
To ensure sufficient coolant water flow, the coolant water supply and return lines must have an
inside diameter (I.D.) of 3/8 inch [9.52mm] or greater. Connect the water supply lines directly
to the system water supply manifold.
DO NOT connect the RF Power Supply’s coolant lines in series or “daisy-
chain” with other water-cooled equipment. Other water-cooled equipment
may have restricted water paths, resulting in insufficient water flow through
the RF Power Supply.
The RF Power Supply’s solenoid water valve disables the water flow
through the unit when the RF output is “off” or when the AC Mains is “off”.
Interrupting coolant water flow to other water-cooled equipment may cause
damage to that equipment.
!

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
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Kurt J. Lesker Company
6100220000 Rev. 1.02
Solenoid Water Valve Installation:
The solenoid water valve must be connected to the unit before connecting to the water re-
circulation system and enabling AC Mains power. To prevent condensation inside the RF
Power Supply, the solenoid water valve disables water flow when the RF output is “off” or
when the unit’s AC Mains power is disabled.
Note: Install or remove the solenoid water valve in accordance with the water fitting
installation or removal methods outlined above.
Step Action
1. Thread the pipe nipple on the “OUT” port of the solenoid valve into the “WATER
IN” port on the rear panel.
2. Connect the coolant water “supply” line to the “IN” port on the solenoid valve.
Use a wrench on the hex nipple between the water valve and the “WATER IN”
port to prevent over-tightening of the nipple into the “WATER IN” port.
3. Connect the coolant water “return” line to the “WATER OUT” port on the rear
panel.
4. Plug the water valve’s connector into the rear panel “VALVE” connector.
RF Output Connection:
Connect the RF Power Supply’s RF output to a suitable load via a coaxial cable. Depending on
the load configuration and application, several coaxial cable types may be used. Consult with
the KJLC sales department, customer service department, or a KJLC representative to select the
cable appropriate to your installation.
Coaxial cable types RG-213/U, RG-225/U or RG-393/U are typically used with RF Power
Supply installations.
!
Failure to install the solenoid water valve could allow condensation to
build up within the RF Power Supply and may result in internal
damage or a fire.
CAUTION: Do not enable mains power or operate the RF Power Supply
without connecting a suitable load to the RF Output connector. Operating
without a suitable load may damage the RF Power Supply and void the
warranty.
WARNING: Do not enable mains power or operate the RF Power Supply
without connecting a suitable load to the RF Output connector. Operating
without a suitable load connected to the RF Output connector may create a
Shock, Electrocution, or RF Energy Burn Hazard
!

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
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Kurt J. Lesker Company
6100220000 Rev. 1.02
Connection to AC Mains:
BEFORE connecting the RF Power Supply the AC mains,verify the AC Mains voltage
marked on the ratings plate, located on the top or side panel of the RF Power Supply, is
compatible with your AC Mains voltage. If the AC Mains voltage on the ratings plate is not
compatible with your AC Mains voltage, contact a KJLC service depot for assistance.
Models with detachable power cords:
Step Action
1 Ensure a suitable load is connected to the rear panel RF OUTPUT connector
2 Ensure the front panel power switch is in the “OFF” (0) position
3 Ensure the rear panel circuit breaker is in the “OFF” (0) position
4 Plug the power cord into the power inlet on the rear panel of the RF power
supply
5 Plug the power cord into the AC Mains power outlet
Models with captive power cords:
Step Action
1 Ensure a suitable load is connected to the rear panel RF OUTPUT connector
2 Ensure the front panel power switch is in the “OFF” (0) position
3 Ensure the rear panel circuit breaker is in the “OFF” (0) position
4 Plug the power cord into the AC Mains power outlet
!
CAUTION: CHECK YOUR MAINS VOLTAGE AND THE
MAINS VOLTAGE SPECIFIED ON THE RATINGS PLATE OR
CONSULT A QUALIFIED ELECTRICIAN BEFORE
CONNECTING THE RF POWER SUPPLY TO MAINS
POWER. CONNECTING THE RF POWER SUPPLY TO THE
WRONG MAINS VOLTAGE MAY DAMAGE THE RF POWER
SUPPLY AND VOID THE WARRANTY.

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Kurt J. Lesker Company
6100220000 Rev. 1.02
System Interfacing:
The RF Power Supply can be used “stand-alone” or can be interfaced with a processing system.
There are connectors on the rear panel dedicated to system interfacing. Refer to the Rear Panel
Controls and Connections section for detailed pin lists and signal descriptions. There are many
possible interface schemes – a full discussion of interface schemes is beyond the scope of this
document. Contact the KJLC customer service department if you require assistance with
interface connections. A brief summary of the connectors is listed below.
“Analog Control” Connector
Provides status and control signals for an external system controller to operate the RF Power
Supply. Because of different features available on different models, the Analog Control
connector pin-list is slightly different on some models. Refer to the Rear Panel Controls and
Connections section for interface details.
“Serial Interface” Connector
Serial communications port for computer control via RS-232, RS-422, or RS-485 protocols.
“CEX IN” Connector
Radio Frequency signal input. The RF Power Supply uses the signal present at this connector
as the frequency source when the RF Power Supply is configured for “slave” operation in a
multiple RF power supply system. The CEX IN signal must be the same frequency (or
frequency range) as the RF Power Supply’s internal frequency source.
“CEX OUT” Connector
Radio Frequency signal output. The signal present at this connector is the same frequency
the RF Power Supply is using to produce its RF output. This signal can be used as a
frequency signal source for other RF Power supplies in a multiple RF power supply system.
“DCP” Connector (optional, 100 Watt and 300 Watt models only)
Voltage Probe Inverter input. This optional circuit inverts the output of a passive DC
Voltage Probe when using external feedback for power regulation (voltage control). When
installed, a 0 to –10VDC signal applied to this connector produces a 0 to +10VDC output that
is routed to the Analog Interface connector’s FEEDBACK signal. Refer to the Analog
Interface Connector and Typical Interface Connections sections for details.
!The analog interface’s EXTERNAL INTERLOCK circuit must be
completed or the RF Power Supply will not turn on.
Refer to Rear Panel Controls and Connections for details.

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6100220000 Rev. 1.02
Front Panel Controls and Display:
Buttons (Model L301 Shown, functions are the same for all R/LX01 series models)
Item Name Description
1 Program/Run Toggles the RF Power Supply between the RUN mode and
PROGRAM mode. In Program mode, display line 3 changes to
show Programmable Menu Entry Options. The button legend
changes from “PGM” to “RUN” when in the Program mode.
2 Down Moves down the programming menu
3 Up Moves up the programming menu
4 Enter Programs (saves) changes made to a parameter
5 Value Up Changes Parameter Value - Increment
6 Value Down Changes Parameter Value - Decrement
7 RF ON/OFF Enables/Disables the RF output in “local” mode, disables the RF
output in any operational mode.
8 RF ON Indicator
Lamp
Glows RED when the RF Output is enabled (on).
9 RF OFF
Indicator Lamp
Glows BLUE when the RF output is disabled (off)
10 Power AC Mains power enable/disable

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Display
The front panel display shows the operational status of the RF Power Supply and provides legends
for the keypad.
Line Description
1 Power Display Line
Displays power setpoint and reflected power when the RF Output is disabled.
Displays forward power (or load power) and reflected power when the RF output is
enabled
2 Status Display Line
Displays the current control source, power control mode, exciter mode and
operational alarms. Operational alarms are displayed on the extreme right side of the
line (see the problem solving section for alarm details).
[CONTOL SOURCE] [POWER CONTROL MODE] [EXCITER MODE] [ALARM]
Control Source:
Panel = Front Panel Control
Analog = Analog Interface
Serial = Serial Interface
Power Control Mode:
PWR = Forward Power Leveling (internal power sensor)
PLS = Pulsing Enabled (internal power sensor)
VLT = Voltage Control (external feedback)
Exciter Mode:
MST = Master (internal frequency source)
SLV = Slave (external frequency source)
3 User Configurable Display Line
In RUN mode:
Displays DC Voltage Probe or RF Voltage Probe output
(User enabled or disabled)
In PROGRAM mode:
Displays a programmable parameter and its current setting.
4 Keypad Menu – button legends change depending on mode
LINE 1
LINE 2
LINE 3
LINE 4
SET: 0W REF:
PWR
DOWN
PANEL CONTROL
PGM
PANEL
UP
MST
0W
ENT

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Operation
Front panel operation of the RF Power Supply is simple. This section describes the use and
operation of the front panel controls in a “how to…” manner. Refer to the front panel illustration on
the previous page for item references.
Connect the RF Power Supply’s RF output to a 50-Ohm resistive load, Impedance
Matching network, processing system or other suitable load capable of handling the
unit’s full rated power output before enabling AC mains Power.
Basic Front Panel Operation
Mains Power On/Off:
Press the POWER button (item 10) to enable mains power – the front panel display will
illuminate and momentarily display the firmware revision and copyright. Press the POWER
button again to disable mains power.
Control Source:
The control source is the control interface for the RF Power Supply. The RF Power Supply has
three (3) user-selectable control sources.
•The “PANEL” control source is for front panel operation of the RF Power Supply.
•The “ANALOG” control source is for controlling the RF Power Supply from the user’s
system, via the rear panel ANALOG INTERFACE connector.
•The “SERIAL” control source is used for controlling the RF Power Supply from a computer
or system controller, via an RS-232, RS-422, or RS-485 interface.
To select a control source, follow the directions below:
PANEL control:
To change the control source to the front panel,
1. Press the PGM button (Item 1) once (enter the programming menu).
2. Press the DOWN button (item 2) or the UP button (item 3) until line 3 of the display
shows the current control source (PANEL CONTROL, ANALOG CONTROL, or
SERIAL CONTROL).
3. Press the VALUE UP button (item 5) or the VALUE DOWN button (item 6) until
PANEL CONTROL is displayed on line 3.
4. Press the ENT button (item 5) to save the selection.
5. Press the RUN button (item 1) to exit the programming menu.
ANALOG control:
To change the control source to the Analog interface connector,
1. Press the PGM button (Item 1) once.
2. Press the DOWN button (item 2) or the UP button (item 3) until line 3 of the display
shows the current control source (PANEL, ANALOG, or SERIAL CONTROL).
3. Press the VALUE UP button (item 5) or the VALUE DOWN button (item 6) until
ANALOG CONTROL is displayed on line 3.
4. Press the ENT button (item 5) to save the selection.
5. Press the RUN button (item 1) to exit the programming menu.
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R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
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Kurt J. Lesker Company
6100220000 Rev. 1.02
SERIAL control:
To change the control source to the Serial interface connector,
1. Press the PGM button (Item 1) once.
2. Press the DOWN button (item 2) or the UP button (item 3) until line 3 of the display
shows the current control source (PANEL, ANALOG, or SERIAL CONTROL).
3. Press the VALUE UP button (item 5) or the VALUE DOWN button (item 6) until
SERIAL CONTROL is displayed on line 3.
4. Press the ENT button (item 5) to save the selection.
5. Press the RUN button (item 1) to exit the programming menu.
Note: Pressing the RUN button (item 1) exits the programming menu. If changes were made
and the ENT button was not pressed, the changes will not be preserved after a power-off/power-
on cycle.
Note: The control source and control mode selections are saved when the ENT button is pressed.
The RF Power Supply will power-up in the same mode.
Leveling Mode:
The leveling mode is the method the RF Power Supply uses to regulate its output power. There
are three (3) leveling mode selections.
•The “PWR” (power) leveling mode uses the unit’s internal power sensor to regulate the RF
output power. There are two types of internal power leveling available on the RF Power
Supply:
1. Forward (FWD) Power leveling: The forward output power is measured by the RF
Power Supply’s internal power sensor and compared against the requested output
power (power setpoint). The unit’s power amplifier increases or decreases its output
to maintain the requested power setpoint. Reflected power is displayed and
monitored for internal protection.
2. Load Power Leveling: The forward and reflected power is measured by the RF Power
Supply’s internal power sensor. The reflected power signal is subtracted from the
forward power signal and compared against the requested net power (power setpoint)
to be delivered to the load. The unit’s power amplifier output increases or decreases
its output to maintain the net power delivered to the load. Reflected power is
displayed and monitored for internal protection.
•The “VOLTAGE” (VLT) leveling mode uses an external feedback voltage (derived from a
Voltage Probe in the processing system’s matching network or processing chamber) to
regulate the RF output power.

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
Page 14
Kurt J. Lesker Company
6100220000 Rev. 1.02
To select a leveling mode, follow the directions below:
Forward (FWD) Power Leveling mode:
1. Press the “PGM” button (item 1).
2. Press the “DOWN” button (item 2) until line three of the display is “POWER
CONTROL” or “VOLTAGE CONTROL”
3. Press the “VALUE UP” button (item 5) or “VALUE DOWN” (item 6) until line 3 of the
display indicates the desired power leveling mode, “POWER CONTROL”.
The text on the left side of display line 2 should change to “PANEL PWR”
4. Press the “ENT” button (item 4) to save the mode selection.
5. Press the “DOWN” button (item 2) until line three reads “FWD POWER LEVELING” or
“LOAD POWER LEVELING”
6. Press the “VALUE UP” button (item 5) or “VALUE DOWN” (item 6) until line 3 of the
display indicates the desired power leveling mode, “FWD POWER LEVELING”.
7. Press the “ENT” button (item 4) to save the mode selection.
5. Press the “RUN” button (item 1) to exit the programming menu.
Voltage (VLT) Leveling mode:
1. Press the “PGM” button (item 1).
2. Press the “DOWN” button (item 2) until line 3 of the display is “POWER CONTROL” or
“VOLTAGE CONTROL”
3. Press the “VALUE UP” button (item 5) or “VALUE DOWN” (item 6) until line 3 of the
display indicates the desired power leveling mode, “VOLTAGE CONTROL”.
The text on the left side of display line 2 should change to “PANEL VLT”
4. Press the “ENT” button (item 4) to save the mode selection.
5. Press the “RUN” button (item 1) to exit the programming menu.
Load (LOAD) Power Leveling mode:
1. Press the “PGM” button (item 1).
2. Press the “DOWN” button (item 2) until line three of the display is “POWER
CONTROL” or “VOLTAGE CONTROL”
3. Press the “VALUE UP” button (item 5) or “VALUE DOWN” (item 6) until line 3 of the
display indicates the desired power leveling mode, “POWER CONTROL”.
The text on the left side of display line 2 should change to “PANEL PWR”
4. Press the “ENT” button (item 4) to save the mode selection.
5. Press the “DOWN” button (item 2) until line three reads “FWD POWER LEVELING” or
“LOAD POWER LEVELING”
6. Press the “VALUE UP” button (item 5) or “VALUE DOWN” (item 6) until line 3 of the
display indicates the desired power leveling mode, “LOAD POWER LEVELING”.
7. Press the “ENT” button (item 4) to save the mode selection.
8. Press the “RUN” button (item 1) to exit the programming menu.