Kurt J. Lesker R Series User manual

Kurt J. Lesker Company
6100220000 Rev. 1.03
1925 Worthington Ave
Clairton Pa, 15025
Telephone: [phone]
Fax: [phone]
R SERIES
RADIO FREQUENCY
POWER SUPPLY
OPERATOR’S MANUAL
Revision 1.03
Standard Configuration
Document Number 6100220000

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
i
Kurt J. Lesker Company
6100220000 Rev. 1.03
Introduction
Thank you for acquiring your new KJLC product. KJLC Radio Frequency Power Supplies are been
designed to provide the best value, ease of operation, and reliability for plasma processing systems.
This manual covers specifications, installation, and operation of the KJLC RX01 and LX01 Series
RF Power Supplies.
Information
To get answers for any questions you might have regarding your plasma or processing system, please
contact your system vendor first. Your system vendor knows the intimate details of how your
equipment interfaces and operates with the RF Power Supply and can efficiently resolve system
related problems.
For questions directly related to the RF Power Supply, you may call us, Monday through Friday,
8:00am to 8:00pm, United States Eastern Time, at:
1-800-245-1656
Service
For RF Power Supplies purchased with a processing system, or covered under a service contract from
your system vendor, please contact the system vendor to arrange for service.
For after-market or end user customers, a KJLC customer service representative will arrange for
service. Call us, Monday through Friday, 8:00am to 8:00pm, United States Eastern Time, at:
1-800-245-1656
Please note: Equipment returned to us without prior authorization or without a Return Materials
Authorization (RMA) number visible on the outside of the package will be refused.
How to Contact Us
Our address, telephone, and fax numbers are listed below.
Kurt J. Lesker Company
1925 Worthington Ave.
Clairton Pa, 15025
Telephone: [phone]
Fax: [phone]
Proprietary Information Notice
This document contains information proprietary to KJLC This document shall not be reproduced or
its contents disclosed without the written permission of KJLC This notice shall appear in all copies.

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TABLE OF CONTENTS
Safety Notes …………..………………………………………………………………... 1
RF Power Supply Model Features ..…….…..……………………………………..……. 3
Installation ..……………………………………..…………………………………….… 4
Mounting ………………………………………………………………...…………… 4
Supplied Accessories .………………………………..………………………………. 4
Ventilation .…………………………………………………………………..………. 4
Connection to a Water Cooling System ……...………………………………………. 5
Connecting to Water Inlet/Outlet Ports ……………………………………………. 5
Coolant Water Temperature and Flow Rate ……………………………………….. 6
Coolant Water Supply Lines ……………………………………………………….. 6
Solenoid Water Valve Installation …………………………………………………. 7
RF Output Connection ……………………………………………………………….. 7
Connection to AC Mains …………………………………………………………….. 8
System Interfacing …………………………………………………………………… 9
Front Panel Controls and Display..………………………..…………………………..… 10
Operation.…………………………………………..………………………………...…. 12
Front Panel Operation.……....……………………………...……………….…….….. 12
Analog Interface Operation..………………………………….…………………….... 16
Serial Interface Operation..…………………………..……………………………….. 18
Serial Command Reference …..………...………………………………………….. 20
Serial Command Details .………….………..…..………….………………………. 26
Configuring Programmable Parameters ..……………………………….……………. 41
Programmable Parameter Reference .……………………………………...……….. 41

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TABLE OF CONTENTS
Programmable Parameter Details…………………………………………..……….. 47
Rear Panel Controls and Connections…..…………………………………………..…… 62
R101, R101MKII, R301, R301MKII, L301, L301MKII Rear Panel ……………… 62
R601, L601, R1001, L1001 Rear Panel ...…………………………….……………. 62
R1001W Rear Panel ………………………………………………………………... 63
R2001, R2001H, R3001, L2001, L2001H, L3001 Rear Panel ….…………………. 64
R5001 Rear Panel …………………………..……….……………………………... 64
RF Output Connector ………………………………………………………………… 65
Power Inlet or Power Cord …………………………………………………………… 65
Mains Circuit Breaker ………………………………………………………………... 65
DCP Connector (R101, R101MKII, L101MKII, R301, R301MKII L301, L301MKII
Models only) …………………………………………………………………………. 66
CEX OUT Connector ………………………………………………………………… 66
CEX IN Connector …………………………………………………………………… 66
Fan Exhaust …………………………………………………………………………... 66
Analog Interface Connector…………………………...………………………...……. 67
Analog Interface Pin List ..………………….……………………………..…..…… 68
Typical Interface Circuits ………………………………………………………..… 74
Serial Interface Connector.……………………………………...……………………. 77
Serial Interface Connector Pin List ………………………………………………… 77
Serial Interface Wiring …………………………………………………………….. 78
Equipotential Bonding Terminal …………………………………………………….. 79
Valve Connector ……………………………………………………………………... 80
Valve Connector Pin List ………………………………………………………….. 80
Coolant Water IN Port ……………………………………………………………….. 81

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TABLE OF CONTENTS
Coolant Water OUT Port …………………………………………………………….. 81
Typical Interface Connections..………………………………………………..………... 82
Basic Analog Interfacing……………………………………………………..………. 82
External Feedback with Probe Inverter Option (Models R101, R101MKII, L101MKII,
R301, R301MKII, L301, L301MKII only) …………………………….. 83
Typical System Configuration ….……………………………………………….….…... 85
Maintenance..……………………………………………………………………..……... 86
Problem Solving..………………………………………………………………..………. 87
Technical Data …………...……………………………………………………...……… 90
RF Power Supply Identification ………………………………………………...……. 90
Specifications: R101……..………………………….…………………………...…… 91
Specifications: R101MKII ……………………………………………………...……. 97
Specifications: R301 …………………………………………………………….…… 100
Specifications: R301MKII……………………………………………………………. 103
Specifications: L301 …………………………………………………………………. 106
Specifications: L301MKII …………………………………………………………… 109
Specifications: R601 ………………………………….……………………………… 112
Specifications: L601 ……………………………………………….………………… 115
Specifications: R1001 ……………………………………………...………………… 118
Specifications: R1001W …………………………………...………………………… 121
Specifications: L1001 …………………………………………...…………………… 124
Specifications: R2001 …………………………………………………………..……. 127
Specifications: R2001H ……………………………………………………...………. 131
Specifications: L2001 ……………………………………………………..…………. 135
Specifications: L2001H ………………………………………………………………. 139
Specifications: R3001 ……………………………………………………...………… 143
Specifications: L3001 …………………………………………………...…………… 147
Specifications: R5001 …………………………………………..……………………. 151

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TABLE OF CONTENTS
Physical Dimensions: R101, R101MKII, R301, R301MKII, L301, L301MKII …….. 154
Physical Dimensions: R601, L601, R1001, R1001W, L1001 ……………………..… 156
Physical Dimensions: R2001, R2001H, L2001,L2001H, R3001, L3001 ……….…… 158
Physical Dimensions: R5001 ………………….....…………………………………... 160
Agency Compliance Information ..…………………………………………………… 162
Declaration Of Conformity (CE)
Models R101, R101MKII, L101, R301, R301MKII, L301, L301MKII, R601, L601,
R1001, L1001 ………………………………………….……………….……
162
Declaration Of Conformity (CE)
Models R2001, R2001H, L2001, L2001H, R3001, L3001 ………………………… 163
Semiconductor Equipment and Materials International (SEMI) …………...……… 164
KJLC 1 Year Limited Warranty..……………………………………………………... 165
Obtaining Service for your RF Power Supply……………………….…………..……… 165
Glossary of Terms..…………………………………………………………………..….. 166
Revision History...…………………………………………………………………….… 168

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
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Kurt J. Lesker Company
6100220000 Rev. 1.02
POINT
EQUIPOTENTIAL BONDING
!
GROUND
=PROTECTIVE
= CAUTION
=
HIGH
VOLTAGE
=RADIO FREQUENCY
ENERGY HAZARD
=
Safety Notes
KJLC RF Power Supplies have been designed and tested to meet strict safety requirements. These
include independent lab examination and approval, and compliance to established standards. Please
read the following instructions carefully before operating the RF Power Supply and refer to them as
needed to ensure the continued safe operation of the RF Power Supply.
Follow all warnings and instructions marked on or supplied with the product.
Symbology:
Unplug or disconnect this equipment from the power source before cleaning or re-configuring the
AC mains voltage.
Do not use this equipment near water, wet locations, or outdoors.
Do not place this equipment on an unstable cart, stand, or table. The RF Power Supply may fall,
causing personal injury or damage to the RF Power Supply .
This product is equipped with a power cord and grounding type plug. This is a safety feature. To
avoid electric shock, this unit must be connected to the power source in compliance with the National
Electrical Code ANSI C1 and/or any other codes applicable to the user. Improper installation may
result in a shock or fire hazard.
It is the responsibility of the installer to provide a proper protective ground from the RF Power
Supply to earth ground, in accordance with local and national electrical codes, and any other codes
applicable to the user.
The RF Power Supply should be operated from the type of power source indicated by the ratings
plate. If you are not sure of the type of power available, consult an electrician or your local power
company.
The power supply cord and plug is the disconnect device for this equipment. If the plug is
removed from the cord and the power cord is hard wired to the power source, it is the responsibility
of the installer to provide a disconnect device.
Do not allow anything to rest on the power cord or interconnecting cables. Do not locate the RF
Power Supply where persons will step on the power or interconnecting cables.
Slots and Openings in the equipment’s chassis are provided for ventilation. To ensure reliable
operation of the RF Power Supply, these openings must not be blocked, covered, or restricted.
Restricting the air inlets or exhaust will cause the unit to overheat. Sustained over temperature
conditions may degrade or damage the unit.
Never push objects of any kind into the slots and openings of the RF Power Supply’s enclosure.
They may touch dangerous voltage points or short out parts, which could result in a fire or electric
shock.
Never spill liquid of any kind on or into the RF Power Supply.

R SERIES RF POWER SUPPLY OPERATOR’S MANUAL
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6100220000 Rev. 1.02
Never remove covers or guards that require a tool for removal. There are no operator serviceable
areas within these covers. Refer servicing to qualified service personnel.
CAUTION!
ELECTRICAL SHOCK HAZARD PRESENT
INSIDE UNIT, AT THE RF OUTPUT CONNECTOR,
AND AT THE MAINS INPUT CONNECTOR.
DO NOT REMOVE COVERS.
REFER SERVICING TO QUALIFIED SERVICE
PERSONNEL.
!

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Kurt J. Lesker Company
6100220000 Rev. 1.02
Radio Frequency Power Supply Features
KJLC RF Power Supplies are intended for use with radio frequency plasma processing systems and
radio frequency processing applications.
The RX01 and LX01-Series RF Power Supplies provide a level-controlled radio frequency power
output. Available frequencies are 100-460KHz (LX01 Series), 1.7-2.1MHz, and 13.56MHz (RX01-
Series) at power levels up to 5000 Watts. The RX01 and LX01-Series RF Power Supplies feature
operator-accessible controls, a visual display of power supply status, and control interfaces to the
user’s processing system. Other RF Power Supply features are listed below:
•Packages: R/L101, R/L301, R/L101MKII, R/L301MKII: ½ Rack, 3U High Package
R/L601, R/L1001: ½ Rack, 4U High Package
R/L2001, R/L3001: 19” Rack, 4U High Package
R5001: 19: Rack, 5U High Package
•Flexible AC Mains voltage:
R101, R/L301: 90-140VAC or 190-264VAC, selectable via transformer taps
R/L101MKII: 90-140VAC or 190-264VAC, universal input, no taps to configure.
R/L301MKII: 90-140VAC or 190-264VAC, universal input, no taps to configure.
R/L601: 90-140VAC or 190-264VAC, universal input, no transformer taps to configure
R/L1001: 190-264VAC, no transformer taps to configure.
R/L2001, R/L3001, R5001: 190-264VAC, no transformer taps to configure.
•User programmable 100 to 460KHz synthesized internal frequency source (L-Series)
•User programmable 1.7MHz to 2.1MHz synthesized internal frequency source (R-Series)
•Crystal-Controlled fixed frequency (R-Series)
•Programmable Variable Frequency Tuning. (1.7-2.1MHz R-Series, L-Series Models)
•Bright, easy to read 4 Line Vacuum Fluorescent Display, capable of displaying Forward and
Reflected RF Power, Control Mode, Power Supply status, and RF or DC Probe Voltage.
•Front panel controls for RF On/Off, mode selection, and programming
•Front Panel, Analog, and Serial control interfaces
•Forward Power and Load (Net) Power Leveling
•Scaleable Forward and Reflected power metering
(requires interface connection to user’s system)
•Scalable RF and DC Probe Voltage display
•Remote control operation via analog system interface connector
•Computer Control via RS-232/422/485 serial interface
•Common Exciter input and output
•Voltage Probe Inverter option available (100 Watt and 300 Watt models)
•Air Cooling (100-1000 Watt models)
•Water Cooling (models over 1000 Watts)

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6100220000 Rev. 1.02
Installation:
Recommended mounting:
KJLC RF Power Supplies are designed for placement on a tabletop or on a shelf within an
equipment rack, in a clean environment. The table or equipment rack must be capable of
supporting the full weight of the unit.
The RF Power Supply is supplied with Rack Mounting Ears. The mounting ears are designed
for securing the RF Power Supply to the equipment rack rail. The rack mounting ears are not
designed to support the weight of the RF Power Supply. The user must provide a shelf within
the equipment rack to support the weight of RF Power Supply. The user is responsible for
providing mounting hardware. RF Power Supply weights are listed by model type in the
technical specifications section of this manual.
Mounting Options for ½ -Rack RF Power supplies:
One (1) ½-rack RF Power Supply may be mounted in a 19” equipment rack with the use of an
optional single rack mount kit. The user must provide a shelf within the equipment rack to
support the weight of unit.
Two (2) ½-rack RF Power Supplies may be mounted in a 19” equipment rack with the use of
an optional dual rack mount kit. The user must provide a shelf within the equipment rack to
support the weight of two (2) ½-rack units.
Supplied Accessories:
Supplied accessories vary by model type. Supplied accessories may include power cords, rack
ears, water valves, and other accessory items. Refer to the appropriate RF Power Supply
model’s page in the technical specifications section of this manual.
Ventilation:
All of the RX01/LX01 series RF Power Supplies require ventilation, including the water-
cooled model types. The forced-air cooling requirements vary by model type. Refer to the
appropriate RF Power Supply model’s page in the technical specifications section of this
manual for the model-specific forced air cooling requirements. If the unit is mounted in an
equipment rack or other suitable enclosure, ensure there is adequate fresh (cool) air intake and
an exhaust path for the rear panel fan.
!
Placing the RF Power Supply in an unventilated or sealed enclosure
will create an “oven” effect and force the unit to shut down. Continued
operation under conditions of poor ventilation may degrade or damage
the RF Power Supply.
Maximum air intake temperature is +40°C