Leybold vacuum PhoeniXL300 Release Note

GA10.218_1.02
PhoeniXL300
Leak detector
catalog-number
PhoeniXL
300
250000, 251000
PhoeniXL
300
dry 250001, 251001
PhoeniXL
300
Modul 250002
t
echnical handbook

Content
2 ⏐
GA10.218_1.02 - 11/2004
Table of Contents
1 General Information ........................................................................................7
1.1 Notes on the Use of this Handbook .................................................................... 7
1.1.1 Safety Symbols .................................................................................................. 7
1.1.2 Indications .......................................................................................................... 7
1.1.3 Symbols of Vacuum Technology ........................................................................ 7
1.1.4 Definiton of Terms .............................................................................................. 8
1.2 Support from LEYBOLD Service ......................................................................... 9
1.3 Introduction ...................................................................................................... 10
1.3.1 Purpose ........................................................................................................... 10
1.3.2 Technical Data ................................................................................................. 11
1.3.2.1Physical Data PhoeniXL300 ....................................................................11
1.3.2.2Electrical Data ........................................................................................11
1.3.2.3Other Data ..............................................................................................12
1.3.2.4Ambient Conditions ................................................................................12
1.3.2.5Physical Data PhoeniXL300 dry ..............................................................12
1.3.2.6Electrical Data ........................................................................................13
1.3.2.7Other Data ..............................................................................................13
1.3.2.8Ambient Conditions ................................................................................13
1.3.2.9Physical Data PhoeniXL300 Modul .........................................................14
1.3.2.10Electrical Data ......................................................................................14
1.3.2.11Other Data ............................................................................................14
1.3.2.12Ambient Conditions ..............................................................................15
1.4 Unpacking ........................................................................................................ 16
1.4.1 Supplied Equipment ......................................................................................... 16
1.4.2 Accessories and Options .................................................................................. 16
1.4.2.1Sniffer line SL300 ...................................................................................16
1.4.2.2Hand set ................................................................................................17
2 Installation ......................................................................................................19
2.1 Working Location ............................................................................................. 19
2.2 Electrical Connections ...................................................................................... 19
2.2.1 Mains Power .................................................................................................... 19
2.2.2 Connections for the Data Acquisition Systems ................................................. 20
2.2.2.1Option (Accessories) ...............................................................................20
2.2.2.2Digital Out ..............................................................................................21
2.2.2.3Digital In .................................................................................................22
2.2.2.4Recorder ................................................................................................23
2.2.2.5RS232 ....................................................................................................24
2.2.2.6Hand Set ................................................................................................24

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2.3 Vaccum Connections ....................................................................................... 24
2.3.1 Inlet Port ........................................................................................................... 24
2.3.2 Exhaust ............................................................................................................ 25
2.3.3 Vent ................................................................................................................. 25
2.3.4 Gas ballast connection ..................................................................................... 25
2.4 Default settings ................................................................................................ 26
3 First Operation Check ...................................................................................27
3.1 Needed Equipment .......................................................................................... 27
3.2 Description of the Initial Operation .................................................................... 27
3.2.1 Startup and Measure ........................................................................................ 27
3.2.2 Internal Calibration ............................................................................................ 29
3.2.3 Verification ........................................................................................................ 29
4 Description and Working Principle ..............................................................31
4.1 Introduction ...................................................................................................... 31
4.1.1 Vacuum System PhoeniXL300 ......................................................................... 31
4.1.1.1Vacuum System PhoeniXL300 dry ......................................................... 32
4.1.1.2Vacuum System PhoeniXL300 Modul .................................................... 33
4.1.2 Control Panel ................................................................................................... 35
4.1.2.1LC Display ............................................................................................. 35
4.1.2.2START Button ....................................................................................... 35
4.1.2.3STOP Button ......................................................................................... 35
4.1.2.4ZERO Button ......................................................................................... 36
4.1.2.5MENU Button ........................................................................................ 37
4.1.2.6Soft Keys ............................................................................................... 37
4.1.2.7Numerical Entries ................................................................................... 38
4.1.3 Vacuum Method ............................................................................................... 39
4.1.4 Partial Flow Method .......................................................................................... 39
4.1.5 Sniffer Mode ..................................................................................................... 40
4.1.6 Controls on the Hand Unit ................................................................................ 40
4.1.7 Displays on the Hand Unit ................................................................................ 42
5 Operation of the Phoenix ..............................................................................45
5.1 Display ............................................................................................................. 45
5.2 The Screen in Run-Up Mode ............................................................................ 45
5.3 Display in stand-by mode ................................................................................. 45
5.3.1 Gas Ballast ....................................................................................................... 46

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5.4 The Screen in Measurement Mode ................................................................... 46
5.4.1 Call for Calibration ............................................................................................ 46
5.4.2 Speaker Volume ............................................................................................... 46
5.4.3 Status Line in the Display ................................................................................. 47
5.4.4 Numerical Display Mode ................................................................................... 47
5.4.5 Trend Mode ..................................................................................................... 47
6 Description of the Menu ...............................................................................49
6.1 Main Menu ....................................................................................................... 51
6.2 View ................................................................................................................. 51
6.2.1 Scale linear/logarithmic ..................................................................................... 52
6.2.2 Display-range auto/manual ............................................................................... 53
6.2.3 Time axis .......................................................................................................... 53
6.2.4 Contrast ........................................................................................................... 54
6.2.5 Background in Stand-by .................................................................................. 54
6.2.6 Lower display limit ............................................................................................ 55
6.3 Mode ............................................................................................................... 55
6.4 Trigger & Alarms ............................................................................................... 56
6.4.1 Trigger Level 1 .................................................................................................. 56
6.4.2 Trigger Level 2 .................................................................................................. 57
6.4.3 Trigger Level 3 .................................................................................................. 57
6.4.4 Units ................................................................................................................ 57
6.4.5 Volume ............................................................................................................. 57
6.4.6 Alarm delay ...................................................................................................... 58
6.4.7 Audio alarm type .............................................................................................. 59
6.4.7.1Pinpoint ..................................................................................................59
6.4.7.2Leak rate prop. .......................................................................................59
6.4.7.3Setpoint ..................................................................................................60
6.4.7.4Trigger alarm ..........................................................................................60
6.5 Calibration ........................................................................................................ 60
6.6 Settings ............................................................................................................ 61
6.6.1 Vacuum settings ............................................................................................... 62
6.6.1.1Vent delay ..............................................................................................63
6.6.1.2Vacuum ranges ......................................................................................64
6.6.1.3Partial flow setup ....................................................................................65

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6.6.1.4Sniffer factor .......................................................................................... 66
6.6.1.5Machine factor ....................................................................................... 66
6.6.1.6Leak rate internal test leak ..................................................................... 67
6.6.2 Filter and background ...................................................................................... 67
6.6.2.1Calculate inlet area background ............................................................. 68
6.6.2.2Background suppression ....................................................................... 68
6.6.2.3Leak rate filter ........................................................................................ 68
6.6.3 Mass ................................................................................................................ 69
6.6.4 Interfaces ......................................................................................................... 69
6.6.4.1Location of Control ................................................................................ 69
6.6.4.2Define recorder output ........................................................................... 70
6.6.4.3RS232 Protocoll .................................................................................... 71
6.6.4.4Define PLC outputs ............................................................................... 71
6.6.4.5Define PLC inputs .................................................................................. 72
6.6.4.6Scaling Recorder Output ....................................................................... 73
6.6.5 Miscellaneous ................................................................................................... 74
6.6.5.1Time&Date ............................................................................................. 74
6.6.5.2Language .............................................................................................. 74
6.6.5.3Calibration request ................................................................................. 74
6.6.5.4Service interval fore pump ...................................................................... 75
6.6.5.5 Service interval oil filter .......................................................................... 75
6.6.5.6Service message oil filter ........................................................................ 75
6.6.6 Parameter save / load ...................................................................................... 76
6.6.6.1Load parameter set ............................................................................... 76
6.6.6.2Save parameter set 1 ............................................................................. 76
6.6.7 Monitoring functions ......................................................................................... 76
6.6.7.1Pressure limits for vacuum mode. .......................................................... 76
6.6.7.2Pressure limits for sniff mode ................................................................. 77
6.6.7.3Maximum evacuation time ..................................................................... 77
6.7 Information ....................................................................................................... 78
6.7.1 Service ............................................................................................................. 79
6.8 Access Control ................................................................................................. 80
6.8.1 Access to CAL function .................................................................................... 80
6.8.2 Change Menu-PIN ............................................................................................ 80
6.8.3 Zero ................................................................................................................. 81
7 Calibration ......................................................................................................83
7.1 Introduction ...................................................................................................... 83
7.2 The calibration routines .................................................................................... 83
7.2.1 Internal Calibration ............................................................................................ 83

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7.2.2 External Calibration .......................................................................................... 83
7.3 Factor of Calibration - Range of Values ............................................................. 85
8 Error And Warning Messages ......................................................................87
8.1 Hints ................................................................................................................ 87
8.2 List of Errors & Warnings .................................................................................. 87
9 Maintenance ..................................................................................................93
9.1 LEYBOLD Service ............................................................................................ 93
9.1.1 Maintenance Plan ............................................................................................. 93
9.1.2 Opening the Phoenix ........................................................................................ 93
9.1.3 Exchanging the filter mats ................................................................................ 94
9.1.4 Exchanging the oil ............................................................................................ 95
9.1.5 Cleaning ........................................................................................................... 95
9.1.6 Exchanging the fuses ....................................................................................... 95
9.1.7 Oil filter ............................................................................................................. 97
9.2 Turbo molecular pump ..................................................................................... 97
Appendix a

General Information
GA10.218_1.01 - 11/2004
⏐7
1 General Information
We recommend that you carefully read this technical handbook to ensure
optimum operating conditions right from the start.
This technical handbook contains important informations on the functions,
installation, start-up and operation of the PhoeniX.
All the informations in this handbook are based for the PhoeniXL
300
leak
detector. Changes in the use for the Models PhoeniXL
300
dry and
PhoeniXL
300
Modul are stated below the information for the PhoeniXL
300
.
We reserve the right to modify the design and the specified data. The illu-
strations are not binding.
1.1 Notes on the Use of this Hand-
book
1.1.1 Safety Symbols
Important remarks concerning operational safety and protection are
emphasised as follows:
AttentionInformation on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
CautionInformation on preventing any kind of physical injury.
1.1.2 Indications
The references to diagrams consists of the figure number and the item
number in this order. For example: Fig. 2/7 refers to item 7 in the figure 2.
1.1.3 Symbols of Vacuum Technology
Given in the following are some important vacuum symbols which are
used in this manual.
Vacuum pump in general
Turbomolecular pump
Measuring instrument
Valve

General Information
8 ⏐
GA10.218_1.01 - 11/2004
1.1.4 Definiton of Terms
Autoranging The range of the preamplifier and the vacuum ranges are selected auto-
matically.
The autoranging feature of the PhoeniX covers the entire range or leak
rates depending on the selected operating mode. Not only the leak rate
signal, but also the pressure in the test sample (inlet pressure P1) and the
forevacuum pressure (P2) are used for control purposes. Range switching
between the main ranges is performed via valves. Fine range switching
within the main ranges is implemented by switching over the gain factor of
the preamplifier.
Autotune
Mass alignment
This function automatically aligns the mass spectrometer so that a maxi-
mum leak rate is displayed. The control processor changes the voltage
which erates the ions in the selected mass range until a maximum ion cur-
rent is detected by the ion detector. During each calibration the mass ali-
gnment is run automatically.
Auto zero Determination and automatic adaptation of the helium background.
Through this function, the internal zero level of the instrument is determi-
ned which is then substracted from the current leak rate signal. This fuc-
tion is run during the calibration process or when operating the start
pushbutton, provided the PhoeniX has been running previously for at least
20 seconds in the stanby or vent mode. If the helium background pre-
viously suppressed should drop so that for the duration of the zero time
only the display limit will be displayed, the zero level is adapted automati-
cally.
Menu The menu allows the user to program the PhoeniX according to his requi-
rements. The menu has a tree architecture.
Default Status of the PhoeniX when supplied by the factory.
GROSS GROSS is a measurement mode which allows high inlet pressure (0.2 to
15 mbar). The smallest detectable leak rate is 1 x 10
-8
mbar l/s.
FINE FINE is a measurement mode with inlet pressure < 0.2 mbar. The smallest
detectable leak rate is ≤1x10
-10
mbar l/s
PRECISION Precision is a measurement mode for the PhoeniX dry only from an inlet
pressure < 0,01 mbar. In this mode the PhoeniX has the highest sensiti-
vity, the smallest detectable leak rate is ≤2x10
-11
mbar l/s
Foreline pressure Pressure in the foreline between Turbo pump and rotary vane pump.
Minimum detectable leak
rate
The smallest leak rate the PhoeniX is able to detect (≤5E-12 mbar l/s) in
vacuum mode.
Internal helium back-
ground
The existing helium partial pressure in the measurement system. The level
of the internal helium background is measured in the Stand-by mode and
subtracted from the measured signal.
Measure Measurement
mode
The PhoeniX measures the leak rate of the test sample.

General Information
GA10.218_1.01 - 11/2004
⏐9
1.2 Support from LEYBOLD Ser-
vice
If equipment is returned to LEYBOLD, indicate whether the equipment is
free of substances damaging to health or whether it is contaminated. If it is
contaminated also indicate the nature of the hazard. For this you must use
a form which has been prepared by us which we will provide upon request
or you can take from the technical documentation folder.
Please attach this form to the equipment or enclose it with the equipment.
This declaration of contamination is required to comply with legal require-
ments and to protect our personal. LEYBOLD must return any equipment
without a declaration of contamination to the sender’s adress.
Before shipping fit the yellow crew-on seals on to the connections
EXHAUST Fig 2/2 and GAS BALLAST Fig 2/3.
Fig. 1 Declaration of contamination from
S A M P L E
Declaration of Contamination of Vacuum Equipment and Components
The repair and/or service of vacuum equipment and components will only be carried out if a correctly completed declaration has
been submitted. Non-completion will result in delay. The manufacturer could refuse to accept any equipment without a declara-
tion.
This declaration can only be completed and signed by authorized and qualified staff.
1. Description of Vacuum Equipment and Com-
ponents
- Equipment type/model: _________________________________
- Code No.: _________________________________
- Serial No.: _________________________________
- Invoice No.: _________________________________
- Delivery date: __________________________
2. Reason for Return
____________________________________________
____________________________________________
____________________________________________
____________________________________________
____________________________________________
____________________________________________
3. Condition of the Vacuum Equipment and Com-
ponents
- Has the equipment been used?
yes ❒no ❒
- What type of pump oil/liquid was used? _________
- Is the equipment free from potentially
harmful substances?
yes ❒(go to Section 5)
no ❒(go to Section 4)
4. Process related Contamination of Vacuum
Equipment and Components:
- toxic yes ❒no ❒
- corrosive yes ❒no ❒
- explosive*) yes ❒no ❒
- biological hazard*) yes ❒no ❒
- radioactive*) yes ❒no ❒
- other harmful substances yes ❒no ❒
*) Vacuum equipment and components which have been contaminated by biological explosive or radioactive substances,
will not accepted without written evidence of decontamination!
Please list all substances, gases and by-products which may have come into contact with the equipment:
Trade name
Product name Chemical name Dangerous Measures First aid in case of
Manufacturer (or Symbol) material class if spillage human contact
1.
2.
3.
4.
5.
5. Legally Binding Declaration
I hereby declare that the information supplied on this form is complete and accurate. The despatch of the contaminated
vacuum equipment and components will be in accordance with the appropriate regulations covering Packaging, Transpor-
tation and Labelling of Dangerous Substances.
Name of organisation or company:_____________________________________________________________________
Address: _____________________________ Post code:______________________________________
Tel.: ______________________________________________________________________________
Fax: _____________________________ Telex: _________________________________________
Name: ______________________________________________________________________________
Job title: ______________________________________________________________________________
Date: _____________________________ Company stamp:
Legally binding signature:____________________________________________________________________________

General Information
10 ⏐
GA10.218_1.01 - 11/2004
1.3 Introduction
1.3.1 Purpose
The PhoeniX is a helium leak detector. This instrument may be used to
detect the location and the size of leaks on objects under test in two diffe-
rent ways:
• when the test sample has been evacuated first and is sprayed with
helium on the outside. It is required that a vacuum connection is provi-
ded between the PhoeniX and the test sample (vacuum mode).
or
• when a helium overpressure is provided in the test sample and the test
sample is searched from the outside with a sniffer probe which is atta-
ched to the inlet port (sniffer mode).
Caution The PhoeniX is to be used for leak detection only. It must not be
used as a pumping system (esp. pumping aggressive or humid
gases.)
Pumping condensable gases and steams: When pumping test sample
water vapour that is inside the test object can attain to the fore pump.
With the water vapor that is in the air - especially in humid areas or when
using humid or wet test samples - the acceptable compatibility of water
vapor or capacity of water vapor respectively can be exceeded.
The steam in the oil of the pump condeses when the water vapor rises
over the acceptable value. So the attribute of the oil changes and danger
of corrosion occures for the pump.
While using the leak detector with condensable gases and steams the oil
of the fore pump has to be controlled regularly. So you can recognize a
condensation of water vapor in the pump. Usually the oil is light and
lucent. When water vapor is inside it gets blear and milky at operating
state temperature.
When turning the pump off water vapor condensates and raises the part
of water in the oil.
Caution The leak detector must not directly be switched off after the pro-
cess, in which condensable gases or steams are pumped, is
finished. It must be running (at least 20 minutes) with opend gas
ballast valve (see Chapter 5.3.1) until the oil of the pump is freed
from detached steams.
When not taking care of this instruction there can be a corrosion
within the pump, which will not be covered by our warranty.
The heighth of the oil of the pump has to be controlled regularly.
The normal intervalls of changing the oil from the producer have
to be taken care of. See instructions of the rotary vane pump.
If the PhoeniX will be used in an application with toxic materials please
contact Leybold for appropriate decontamination rules. Should the unit
will be in contact with dangerous gases, the declaration of contamination
has to be filled in.