LEYBOLD PHOENIX L300i User manual

Leak detector
Operating Manual
GA10218_002_C0
PHOENIX L300i
Part numbers
250000V01
250001V01
250002V01
251000V01
251001V01
251100V01
251101V01

Content
2GA10218_002_C0 - 10/2016 - © Leybold GmbH
Important safety information 5
1 Description 9
1.1 Design and Function .................................................................... 9
1.1.1 Vacuum Diagram PHOENIX L300i .............................................. 10
1.1.2 Vacuum Diagram PHOENIX L300i DRY ...................................... 11
1.1.3 Vacuum Diagram PHOENIX L300i MODUL ................................ 12
1.1.4 Vacuum Method ........................................................................ 13
1.1.5 Partial Flow Method ................................................................... 14
1.1.6 Sniffer Mode .............................................................................. 14
1.2 Supplied Equipment ................................................................... 14
1.3 Technical Data ........................................................................... 15
1.3.1 Technical Data PHOENIX L300i ................................................. 15
1.3.2 Technical Data PHOENIX L300i DRY ......................................... 17
1.3.3 Technical Data PHOENIX L300i MODUL .................................... 19
1.3.4 Dimensional Drawings ................................................................ 21
1.4 Ordering Information .................................................................. 24
1.5 Accessories ............................................................................... 24
1.6 Default Settings .......................................................................... 26
2 Installation 27
2.1 Placement ................................................................................. 27
2.2 Conforming Utilisation ................................................................ 27
2.3 Ambient Conditions ................................................................... 27
2.4 Electrical Connections ................................................................ 27
2.4.1 Mains Power .............................................................................. 27
2.4.2 Connection for the Controller Signal and Accessories ................ 29
2.4.3 Vacuum Connections ................................................................. 32
3 Operation 34
3.1 Media Compatibility/Purge Gas .................................................. 34
3.2 Start-Up ..................................................................................... 34
3.2.1 Display ....................................................................................... 34
3.2.2 The Display in Run-Up Mode ..................................................... 35
3.2.3 The Display in Standby Mode ..................................................... 35
3.2.4 Gas Ballast/Purge ..................................................................... 35
3.2.5 The Display in Measurement Mode ............................................ 35
3.2.6 Call for Calibration ...................................................................... 36

Content
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3.2.7 Speaker Volume ........................................................................ 36
3.2.8 Status Line in the Display ........................................................... 36
3.2.9 Measurement Mode with Bargraph ............................................ 37
3.2.10 Measurement Mode with Trend Information ............................... 37
3.3 First Operation Check ................................................................ 37
3.4 Control Panel ............................................................................. 39
3.5 Interfaces ................................................................................... 44
3.6 Operation .................................................................................. 51
3.6.1 Main Menu ................................................................................ 52
3.6.2 View .......................................................................................... 54
3.6.3 Scale Linear/Logarithmic ........................................................... 54
3.6.4 Display-Range Auto/Manual ...................................................... 55
3.6.5 Time Axis ................................................................................... 56
3.6.6 Contrast .................................................................................... 56
3.6.7 Background in standby .............................................................. 57
3.6.8 Lower Display Limit .................................................................... 57
3.7 Mode ......................................................................................... 58
3.8 Trigger & Alarms ........................................................................ 59
3.8.1 Trigger Level 1 ........................................................................... 59
3.8.2 Trigger Level 2 ........................................................................... 60
3.8.3 Trigger Level 3 ........................................................................... 60
3.8.4 Units .......................................................................................... 60
3.8.5 Volume ...................................................................................... 61
3.8.6 Alarm Delay ............................................................................... 61
3.8.7 Audio Alarm Type ...................................................................... 62
3.9 Calibration ................................................................................. 63
3.10 Settings ..................................................................................... 64
3.10.1 Vacuum Settings ....................................................................... 65
3.10.2 Filter & Background ................................................................... 73
3.10.3 Mass ......................................................................................... 75
3.10.4 Miscellaneous (Language, Calibration request, Service interval...) 75
3.10.5 Parameter Save/Load ................................................................ 78
3.10.6 Monitoring Functions ................................................................. 78
3.11 Information ................................................................................ 82
3.11.1 Service ...................................................................................... 83

Content
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3.12 Access Control .......................................................................... 83
3.12.1 Zero ........................................................................................... 83
3.12.2 Access to CAL Function ............................................................ 84
3.12.3 Change Menu-PIN ..................................................................... 84
3.13 Calibration ................................................................................. 84
3.13.1 Introduction ............................................................................... 84
3.13.2 The calibration Routines ............................................................. 85
3.13.3 Internal Calibration ..................................................................... 85
3.13.4 External Calibration .................................................................... 86
3.14 Switching Off/Shutting Down ..................................................... 88
4 Maintenance 89
4.1 Safety Information ...................................................................... 89
4.2 Maintenance Intervals ................................................................ 89
4.3 Service at Leybold ..................................................................... 89
4.4 Maintenance Work ..................................................................... 90
4.4.1 Opening of the PHOENIX L300i ................................................. 90
4.4.2 Exchanging the Filter Mats ......................................................... 91
4.4.3 Exchanging the Oil ..................................................................... 92
4.4.4 Cleaning .................................................................................... 92
4.4.5 Exchanging the Fuses ................................................................ 92
4.4.6 Exhaust Oil Filter ........................................................................ 94
4.4.7 Turbo Molecular Pump ............................................................... 94
4.5 Calibrated Leak TL7 ................................................................... 95
4.5.1 Technical Data ........................................................................... 95
4.5.2 Factory Inspection ..................................................................... 95
5 Troubleshooting 96
5.1 Hints for Troubleshooting ........................................................... 96
5.2 List of Errors & Warnings ............................................................ 96
6 Waste Disposal 103
7 Certificates 105

Safety Information
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Important Safety Information
Indicates procedures that must be strictly observed to prevent hazards to persons.
Indicates procedures that must be strictly observed to prevent damage to, or des-
truction of the product.
Emphasizes additional application information and other useful information provi-
ded within these Operating Instructions.
The Leybold PHOENIX L300i leak detector has been designed for safe and
efficient operation when used properly and in accordance with these Operating
Instructions. It is the responsibility of the user to carefully read and strictly
observe all safety precautions described in this section and throughout the
Operating Instructions. The PHOENIX L300i must only be operated in the pro-
per condition and under the conditions described in the Operating Instructions.
It must be operated and maintained by trained personnel only. Consult local,
state, and national agencies regarding specific requirements and regulations.
Address any further safety, operation and/or maintenance questions to our nea-
rest office.
Failure to observe the following precautions could result in serious
personal injury!
Electrical hazards
During all maintenance and connection work, make sure that the mains cable have
been reliable disconnected and do not carry a mains voltage.The leak detector
must only be used in with the hoods closed. The electrical connections must only
be provided by a trained electrician as specified, for example, by the regulations EN
50110-1.
Avoid exposing any part of the human body to the vacuum. Only handle the leak
detector when the pump is vented.
After a mains power failure the leak detector can run up automatically once more.
Before changing oil or fuses, make sure that the mains cable have been discon-
nected.
The leak detector is not suited for operation in explosion hazard areas.
Warning
Caution
Note
Warning

Safety Information
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During operation the pump can become so hot that there is a danger of burns
(>70°C, 158°F).Provide protection against contact with the hot components.
Contaminated parts can be detrimental to health and environment. Before
beginning to work, find out whether any parts are contaminated. Adhere to the
relevant regulations and take the necessary precautions when handling
contaminated parts.
Failure to observe the following precautions could result in damage to
the pump!
Unauthorized opening or modifications of the mechanical or electrical components
of the leak detector void the warranty.
The leak detector must only be opened by such persons who have been autho-
rised by Leybold to do so.
The leak detector can be damaged when using the wrong voltage. The voltage
must be in the range 230V (+/- 5%), 115V (+/- 5%) e.g. 100V (+/- 5%) depending
on the leak detector version. Make sure that the mains voltage rating on the PHO-
ENIX L300i coincides with the locally available mains voltage.
When the PHOENIX L300i is running in closed rooms the exhaust has to be put out
of doors so that the oil vapor can not be breathed in.
Ensure a sufficient air cooling. The air inlet as well the air discharge openings must
never be obstructed. By using the optional iPad it is recommended to pull the fix-
ture of the iPad into a raised position to optimize the cooling.
The PHOENIX L300i is designed for indoor use only.
Operate the PHOENIX L300i only in the permitted temperature range between
+10°C and +40°C.
Only Leybonol-LVO-310 (cat. no. L31001) must be used in the TIVAC D2,5E.
Pumping condensable gases and steams: When pumping test sample water
vapour that is inside the test object can attain to the forepump. With the water
vapor that is in the air - especially in humid areas or when using humid or wet test
samples - the acceptable compatibility of water vapor or capacity of water vapor
respectively can be exceeded.
The steam in the oil of the pump condenses when the water vapor rises over the
acceptable value. So the attribute of the oil changes and danger of corrosion
occurs for the pump.
While using the leak detector with condensable gases and steams the oil of the
forepump has to be controlled regularly. So you can recognize a condensation of
water vapor in the pump. Usually the oil is light and lucent. When water vapor is
Caution

Safety Information
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inside it gets blear and milky at operating state temperature.
When turning the pump off water vapor condensates and raises the part of water in
the oil.
The leak detector must not directly be switched off after the process, in which
condensable gases or steams are pumped, is finished. It must be running (at least
20 minutes) with opened gas ballast valve until the oil of the pump is freed from
detached steam.
When not taking care of this instruction there can be a corrosion within the pump,
which will not be covered by our warranty.
The height of the oil of the pump has to be controlled regularly.
The normal intervals of changing the oil from the producer have to be taken care of.
See instructions of the rotary vane pump.
The references to diagrams, e.g. (1/2) consist of the Fig. no. and the item No. in
that order.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating instructions for further use.
Symbols of vacuum technology
Given in the following are some important symbols which are used in this Operating
Instructions.
Vacuum pump in general
Turbo molecular pump
Measuring instrument
Valve
Definition of Terms
The range of the preamplifier and the vacuum ranges are selected automatically.
The auto ranging feature of the PHOENIX L300i covers the entire range or leak
rates depending on the selected operating mode. Not only the leak rate signal, but
also the pressure in the test sample (inlet pressure P1) and the fore vacuum pres-
sure (P2) are used for control purposes. Range switching between the main ranges
is performed via valves. Fine range switching within the main ranges is implemen-
ted by switching over the gain factor of the preamplifier.
Figures
Auto ranging

Safety Information
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Mass alignment
This function automatically aligns the mass spectrometer so that a maximum leak
rate is displayed. The control processor changes the voltage which accelerates the
ions in the selected mass range until a maximum ion current is detected by the ion
detector. During each calibration the mass alignment is run automatically.
Determination and automatic adaptation of the internal background.
Through this function, the internal zero level of the instrument is determined which
is then subtracted from the current leak rate signal. This function is run during the
calibration process or when operating the start push button, provided the PHO-
ENIX L300i has been running previously for at least 20 seconds in the standby or
vent mode.
GROSS is a measurement mode which allows high inlet pressure (15 to 0,2 mbar).
The smallest detectable leak rate is 1 · 10-7 mbar l / s.
FINE is a measurement mode with inlet pressure < 0.2 mbar. The minimum
detectable leak rate is 5 · 10-12 mbar l / s.
Precision is a measurement mode for the PHOENIX L300i DRY only from an inlet
pressure < 0,01 mbar. In this mode the PHOENIX L300i DRY has the highest sen-
sitivity, the minimum detectable leak rate is  3 · 10-11 mbar l / s.
Pressure in the fore vacuum between turbo pump and rotary vane pump.
The existing helium partial pressure in the measurement system. The level of the
internal helium background is measured in the standby mode and subtracted from
the measured signal.
The smallest leak rate the PHOENIX L300i is able to detect (5·10-12 mbar l / s) in
vacuum mode.
The menu allows the user to program the PHOENIX L300i according to his requi-
rements. The menu has a tree architecture.
The PHOENIX L300i measures the leak rate of the test sample.
Status of the PHOENIX L300i when supplied by the factory.
Mass alignment
Auto Zero
GROSS
FINE
PRECISION
Fore-Vacuum Pressure
Internal helium background
Minimum detectable leak
rate
Menu
Measurement mode
Default

Description
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1 Description
The PHOENIX L300i is a leak detector for helium or hydrogen. This instrument may
be used to detect the location and the size of leaks on objects under test in two
different ways:
When the test sample has been evacuated first and is sprayed with helium on the
outside. It is required that a vacuum connection is provided between the PHOENIX
L300i and the test sample (vacuum mode).
or
when a helium overpressure is provided in the test sample and the test sample is
searched from the outside with a sniffer probe which is attached to the inlet port
(sniffer mode).
1.1 Design and Function
The PHOENIX L300i basically is a helium leak detector for vacuum applications, i.e.
the part under test is evacuated while the test is performed. The vacuum is achie-
ved with a pumping system that is part of the PHOENIX L300i. In addition the
vacuum can be generated by pumps which are set up in parallel to the PHOENIX
L300i.
The PHOENIX L300i MODUL needs a fore vacuum pump, dry or wet version, to be
connected because this unit has no internal roughing pump. The connection
(DN25 KF) is on the side or under the bottom of the PHOENIX L300i MODUL (Fig.
7).
Fig. 1 View of the PHOENIX L300i
1inlet flange 2control panel

Description
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Another operating mode of the PHOENIX L300i is the Sniffer mode which can only
be used when a sniffer line (See Chapter 1.1.6) is hooked up.
1.1.1 Vacuum Diagram PHOENIX L300i
The vacuum diagram below shows the major components inside the PHOENIX
L300i.
The mass spectrometer (MS) is mainly composed of the ion source with cathode,
the magnetic separator and the ion collector.
Gas molecules getting into the mass spectrometer are ionized by the ion source.
These positively charged particles are accelerated into the magnetic field following
a circular path, the radius of which depends on the mass-to-charge ratio of the
ions. When mass 4 is selected (Default setting) only helium ions can pass this filter
and reach the ion collector where the stream of the ions is measured as an
electrical current. When selected another mass than 4, only the corresponding ions
Fig. 2 Vacuum diagram PHOENIX L300i
Pos. Description
1MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2Turbo molecular pump (TMP, provides high vacuum conditions in the MS)
3Pirani gauge P2 (fore vacuum pressure)
4Fore pressure pump (provides the fore vacuum pressure for the TMP and
pumps down the parts under test)
5Inlet Port
6Pirani gauge P1 (inlet pressure)
V1 … V7: Electromagnetic Valves to control the gas flows
1
2
7
4
6
5
3

Description
GA10218_002_C0 - 10/2016 - © Leybold GmbH 11
can pass the filter.
For operation the mass spectrometer requires a vacuum level in the range of 1·10-
4mbar and lower. This pressure is provided by the turbo molecular pump which in
turn is backed up by a fore vacuum pump.
Besides maintaining the pressure in the mass spectrometer the pump system is
used to evacuate the test parts. It is made sure that the pressure in the mass
spectrometer is low enough under all circumstances. The valves V1, V2a, V2b, V4a
control the gas flows when measuring. Valves V3 and V5 are used to vent the sys-
tem and the Turbo pump, valve V6 controls the gas ballast function of the fore
vacuum pump. Valve V7 opens and closes the internal test leak during calibration.
With the pressure in the test part being lower than ambient pressure sprayed
helium (or Hydrogen as forming gas) can penetrate into the part in case of a
leakage. As soon as the pressure conditions allow it one of the valves to the TMP
opens. Now Helium can penetrate into the mass spectrometer contrary to the
pumping direction of the TMP.
1.1.2 Vacuum Diagram PHOENIX L300i DRY
The PHOENIX L300i DRY has a diaphragm pump as fore vacuum pump, making it
suitable for applications where oil sealed systems can not be used. Furthermore
the PHOENIX L300i DRY contains one more valve, the valve 4b. This valve opens
step by step to regulate the inlet pressure into the turbo pump.
Fig. 3 Vacuum diagram PHOENIX L300i DRY
MS
P
1
V1
V
2a
V
3
V
2b
P
2
V
V
4 a
4 b
V
6
V
5
V
7
1
2
3
6
5
4
Diaphragm pump

Description
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1.1.3 Vacuum Diagram PHOENIX L300i MODUL
The PHOENIX L300i MODUL has no roughing pump integrated as the other
models. Therefore it can be used with an external pump only. This pump can be oil
sealed or a dry version with a roughing capacity between 2.5 and 65 m3/h. This
pump has to be connected to the DN25 KF at the side or under the bottom of the
PHOENIX L300i MODUL.
Pos. Description
1MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2Turbo molecular pump (TMP, provides high vacuum conditions in
the MS)
3Pirani gauge P2 (fore vacuum pressure)
4Diaphragm pump (provides the fore vacuum pressure for the TMP
and pumps down the parts under test)
5Inlet Port
6Pirani gauge P1 (inlet pressure)
V1 … V7: Electromagnetic Valves to control the gas flows
Fig. 4 Vacuum diagram PHOENIX L300i MODUL
MS
P
1
V
1
V
2a
V3
V
2b
V
6
P
2
V
4a
external pump
V
5
V
7
1
2
4
5
3
6

Description
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1.1.4 Vacuum Method
For the purpose of leak detection on a test sample (vacuum method), the sample
has to be evacuated so that Helium or Hydrogen which is sprayed on to the out-
side, can enter through any leaks due to the pressure differential for detection by
the PHOENIX L300i.
The test sample is evacuated - START button (Fig 16./10) - by the backing pump
or the external pump. In the case of larger test samples an additional external par-
tial flow pump with a corresponding linking valve may be connected in parallel as
required.
Inlet valve V1 is opened so that the evacuation can take place. At the same time all
other valves are closed in order to prevent an unacceptable pressure increase in
the mass spectrometer.
In this context (valve V2a closed) the turbo molecular pump is operated without
being supported by the rotary vane pump. Since generally no gas is pumped out of
the mass spectrometer, p2remains constant or increases only slowly.
The condition for the evacuation process described here is maintained until the
inlet pressure p1 has dropped <15 mbar. Now the valves V2a and V2b are opened
additionally. Possibly present Helium or Hydrogen may now flow upstream against
the pumping direction of the turbo molecular pump into the mass spectrometer
where it is detected. This measurement mode is called GROSS. In this mode, leak
rates down to 10-8 mbar l/s can be detected.
Since the rotary vane vacuum pump continues to evacuate the test sample via val-
ves V2a, V2b and V1 the inlet pressure p1will continue to drop. When the pressure
drops below p1< 0.2 mbar, the PHOENIX L300i will switch to the FINE mode, i.e.
valve V1and V2b closes and valve V4a opens so that the gas flow enters the turbo
molecular pump at the side. This offer two advantages:
In the FINE mode the full sensitivity of the PHOENIX L300i is reached.
Because of the higher base pressure of the diaphragm pump the switching from
GROSS to FINE mode of the PHOENIX L300i DRY is done by the valve V4b. When
the pressure drops below 3,5 mbar the valves V1 and V2b will be close and V4b
Pos. Description
1MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)
2Turbo molecular pump (TMP, provides high vacuum conditions in
the MS)
3Pirani gauge P2 (fore vacuum pressure)
4Fore pressure pump (provides the fore vacuum pressure for the
TMP and pumps down the parts under test)
5Inlet Port
6Pirani gauge P1 (inlet pressure)
V1 … V7: Electromagnetic Valves to control the gas flows
a) A part of the high pumping speed of the turbo molecular pump
remains available for further evacuation of the test sample. The res-
ponse time is inversely proportional to pumping speed.).
b) The advantages offered by the counter flow principle can still be utili-
zed

Description
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opens step by step. When valve V4b is open completely, pressure < 0,1 mbar, V4a
will open also to get the maximum pumping speed. In PRECISION mode the PHO-
ENIX L300i DRY opens the valve V4b only, with the disadvantage of low pumping
speed but with the highest sensitivity.
When the leak detection process is stopped – STOP-button – all valves except
valve V2a are closed.
Valve V3 is opened during venting of the inlet or test sample.
1.1.5 Partial Flow Method
In the partial flow mode the test sample is additionally evacuated by an auxiliary
pump. Using the optional partial flow pump set offers to the user the following
advantages (PHOENIX L300i and PHOENIX L300i MODUL:
- faster response time
- entry into the measure mode already at an inlet pressure of 1000 mbar
- faster venting of large test objects
Alternatively to a partial flow pump set an external auxiliary pump may also be con-
nected via a tee, this option is possible for the PHOENIX L300i dry and PHOENIX
L300i MODUL also. However, in such a case the PHOENIX L300i will not be able to
make measurements already at an inlet pressure of 1000 mbar.
1.1.6 Sniffer Mode
The PHOENIX L300i may simply be converted into a sniffer leak detector via the
rugged sniffer line (Cat. No. 252003)
For this the KF flange of the sniffer line is connected to the inlet flange (Fig. 1/1) and
the sniffer mode is selected through menu mode. After pressing START, the inlet
valve V1 (Fig. 2) opens. The sniffer lines have been designed in such a way that the
PHOENIX L300i is operated in the FINE mode. If the fore vacuum pressure P2 inc-
reases over 0,2 mbar respectively 0,1 mbar a warning sign and audio alarm comes
up in the display
In the measurement mode the helium present in the ambient air is now indicated as
the leak rate (about 2 · 10-6 mbar l/s). Smaller leaks may be detected by pressing
the ZERO-button. In sniffer mode the smallest detectable leak rate is < 1· 10-7
mbarl/s.
1.2 Supplied Equipment
The PHOENIX L300i will be shipped in a special cardboard packed separately in a
plastic foil as protection against dust.
Supplied equipment includes:
Leak Detector PHOENIX L300i
Set of fuses
Power cord
Folder with documents (Operating instructions, Spare part list)
2 L-type screwed connections (hose connections)
1 hose nozzle
Blank flange DN 25 KF
Clamping ring DN 25 KF
Centering ring DN 25 KF

Description
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1.3 Technical Data
1.3.1 Technical Data PHOENIX L300i
Physical data
To get down to the minimum detected leak rate range some conditions must be
fulfilled:
PHOENIX L300i has to run at least 20 minutes
Ambient conditions must be stable (temperature, no vibration/accelerations.)
The part under test has been evacuated long enough without using the zero func-
tion (background is no longer decreasing)
ZERO must be active
Max. inlet pressure 15 mbar
Minimum detectable Helium leak rates
- in vacuum mode <5·10-12 mbar l / s
- in sniffer mode <1·10-7 mbar l / s
Minimum detectable Hydrogen leak rates
- in vacuum mode <1·10-8 mbar l / s
- in sniffer mode <1·10-7 mbar l / s
Maximum Helium leak rate which can be displayed 0.1 mbar l / s
Measurement range 12 decades
Time constant of the leak rate signal (blanked off, 
63% of the final value)
<1 s
Pumping speed (Helium) at the inlet
- GROSS mode 0.4 l/s
- FINE mode > 2.5 l/s
Detectable masses 2, 3 and 4
Mass spectrometer 180° magnetic sector
field
Ion source 2 filaments; 
Iridium/Yttrium-oxide
Inlet port DN 25 KF
Run-up time (after starting) < 2 min
Physical data

Description
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Electrical data
Other data
Ambient conditions
Power supply Cat.-No.250000V01
Cat.-No.251000V01
Cat.-No.251100V01
230 V, +/- 5%, 50/60 Hz
115 V, +/- 5%, 60 Hz
100 V, +/- 5%, 50/60 Hz
Power consumption 420 VA
Type of protection IP40
Valves solenoid
Dimensions (L × W × H) in mm 495 x 456 x 314
Weight in kg 40.0
Noise level dB (A) < 54
max. Audio alarm dB (A) 90
Contamination level (to IEC 60664-1) 2
Overvoltage category (to IEC 60664-1) II
For use within buildings
Permissible ambient temperature (during operation) +10 °C … +40 °C
Permissible storage temperature -10 °C … +60 °C
Maximum relative humidity 80% (up to 31°C)
linear decreasing to
50% at 40°C
Max. permissible height above sea level 
(during operation)
2000 m
Electrical data
Other data
Ambient conditions

Description
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1.3.2 Technical Data PHOENIX L300i DRY
Physical data
To get down to the minimum detected leak rate range some conditions must be
fulfilled:
PHOENIX L300i has to run at least 20 minutes
Ambient conditions must be stable (temperature, no vibration/accelerations.)
The part under test has been evacuated long enough without using the zero func-
tion (background is no longer decreasing)
ZERO must be active
Max. inlet pressure 15 mbar
Minimum detectable Helium leak rates
- in vacuum mode < 3·10-11 mbar l / s
- in sniffer mode < 1·10-7 mbar l / s
Minimum detectable Hydrogen leak rates
- in vacuum mode < 1·10-8 mbar l / s
- in sniffer mode < 1·10-7 mbar l / s
Maximum Helium leak rate which can be displayed 0.1 mbar l / s
Measurement range 11 decades
Time constant of the leak rate signal (blanked off, 
63% of the final value)
<1 s
Pumping speed (Helium) at the inlet
GROSS mode 0.02 l / s
PRECISION mode 0,4 l / s
FINE mode > 2.5 l / s
Detectable masses 2, 3 and 4
Mass spectrometer 180° magnetic sector
field
Ion source 2 filaments; 
Iridium/Yttrium-oxide
Inlet port DN 25 KF
Run-up time (after starting) < 2 min
Physical data

Description
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Electrical data
Other data
Ambient conditions
Power supply Cat.-No.250001V01
Cat.-No.251001V01
Cat.-No.251101V01
230 V, 50 Hz
115 V, 60 Hz
100 V, 50/60 Hz
Power consumption 350 VA
Type of protection IP40
Valves solenoid
Dimensions (L × W × H) in mm 495 x 456 x 314
Weight in kg 35.5
Noise level dB (A) < 54
max. Audio alarm dB (A) 90
Contamination level (to IEC 60664-1) 2
Overvoltage category (to IEC 60664-1) II
For use within buildings
Permissible ambient temperature (during operation) +10 °C … +40 °C
Permissible storage temperature -10 °C … +60 °C
Maximum relative humidity 80% (up to 31°C)
linear decreasing to
50% at 40°C
Maximum permissible height above sea level 
(during operation)
2000 m
Electrical data
Other data
Ambient conditions

Description
GA10218_002_C0 - 10/2016 - © Leybold GmbH 19
1.3.3 Technical Data PHOENIX L300i MODUL
Physical data
To get down to the minimum detected leak rate range some conditions must be
fulfilled:
PHOENIX L300i has to run at least 20 minutes
Ambient conditions must be stable (temperature, no vibration/accelerations.)
The part under test has been evacuated long enough without using the zero func-
tion (background is no longer decreasing)
ZERO must be active
Max. inlet pressure 15 mbar
Minimum detectable Helium leak rates
in vacuum mode
- with Scroll pump < 8·10-12 mbar l / s
- with oil sealed pump < 5·10-12 mbar l / s
in sniffer mode <1·10-7 mbar l / s
Minimum detectable Hydrogen leak rates
- in vacuum mode < 1·10-8 mbar l / s
- in sniffer mode < 1·10-7 mbar l / s
Maximum Helium leak rate which can be displayed 0.1 mbar l / s
Measurement range 12 decades
Time constant of the leak rate signal (blanked off, 
63% of the final value)
< 1 s
Pumping speed (Helium) at the inlet
GROSS mode 1,0 l / s
FINE mode > 2.5 l / s
Detectable masses 2, 3 and 4
Mass spectrometer 180° magnetic sector
field
Ion source 2 filaments; 
Iridium/Yttrium-oxide
Inlet port DN 25 KF
Run-up time (after starting) < 2 min
Physical data

Description
20 GA10218_002_C0 - 10/2016 - © Leybold GmbH
Electrical data
Other data
Ambient conditions
Power supply Cat. No. 250002V01 100 - 240 V
50/60 Hz
Power consumption 200 VA
Type of protection IP40
Power cords (EU, USA, UK) 2.5 m
Valves solenoid
Dimensions (L × W × H) in mm 495 x 456 x 314
Weight in kg 35.5
Noise level dB (A) < 54
max. Audio alarm dB (A) 90
Contamination level (to IEC 60664-1) 2
Overvoltage category (to IEC 60664-1) II
For use within buildings
Permissible ambient temperature (during operation) +10 °C … +40 °C
Permissible storage temperature -10 °C … +60 °C
Maximum relative humidity 80% (up to 31°C)
linear decreasing to
50% at 40°C
Maximum permissible height above sea level 
(during operation)
2000 m
Electrical data
Other data
Ambient conditions