Micronix PPS-20 Series User manual

S e r i e s
Reference Manual
Precision Linear Motor / Stepper Motor Stage
(Open and Closed Loop Versions)
PPS-20

PPS-20
Linear/Stepper Motor
Positioner Stage
Reference Manual
Rev 3.08
MICRONIX USA, LLC
Tel: [phone]
Fax: [phone]
Email: [email protected]
http://micronixusa.com

PPS-20 LMSM Precision Stepper Stage
1
Rev: 3.07
MICRONIX USA,LLC
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Reference Manual
Contents
1. Introduction
3
1.1 Product Description 3
1.2 Stepper Motor –(SM-007) 3
1.3 Linear Motor –(LM-003) 3
1.4 Recommended Controllers 4
1.5 Technical Data 4
1.6 Load Characteristics 4
2. Model Configurations
5
2.1 PPS-20 SM Order Numbers 5
2.2 PPS-20 LM Order Numbers 6
3. Preparing to Install the PPS-20 LMSM Stage
7
3.1 Installation Preparation 7
3.2 Package Contents 7
4. Installing the PPS-20 LMSM Stage
8
4.1 PPS-20 LMSM Installation 8
4.1.1 General Mounting 8
4.1.2 X-Y Mounting 9
5. Connecting the PPS-20 LMSM Stage
10
5.1 Atmospheric Environments 10
5.1.1 Open Loop Installation & Wiring Diagram 10
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram 11
5.2 Vacuum Environments 13
5.2.1 Handling and Preparation 13
5.2.2 Open loop Installation & Wiring Diagram 13
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram 14
6. Technical Specifications
15
6.1 Dimensions 15
6.1.1 PPS-20 Stepper Motor Analog Encoder 15
15
6.1.2 PPS-20 Stepper Motor MII 6000 Digital Encoder 16
6.1.3 PPS-20 Linear Motor Analog Encoder 17

PPS-20 LMSM Precision Stepper Stage
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Reference Manual
6.1.4 PPS-20 Linear Motor MII 6000 Digital Encoder 18
7. Stacking Configurations
19
7.1 Configuration Examples 19
8. Supplementary Information
20
8.1 Maintenance 20
8.2 Units and Conventions 20
8.3 Accessories 20
A. Appendix
21
A.1 Stepper Motor 21
A.1.1 Standard Atmospheric DB-9 Male Motor Connector 21
A.1.2 Stepper Motor Specifications 21
A.2 Linear Voice-Coil Motor 22
A.2.1 Standard Atmospheric DB-9 Male Motor Connector 22
A.2.2 Linear Motor Specifications 22
A.3 Magnetic (Hall Effect) Limit Switches 24
A.4 Open Loop Vacuum Wiring Diagram 25
A.4.1 Straight Through 9-Pin Feed Through 25
A.5 Using an Analog Encoder 26
A.5.1 Analog Encoder Overview 26
A.5.2 Encoder Pin-Out 26
A.5.3 Operating and Electrical Specifications 26
A.5.4 Analog Output (Pins 1,2,6 and 7) 26
A.5.5 Index Window (Pins 3) 27
A.5.6 Resolution 27
A.5.7 Analog Encoder Wiring Diagram 27
A.6 Using the Digital Encoder Module 28
A.6.1 Encoder Module Pin-out 28
A.6.2 Operating and Electrical Specifications 29
A.6.3 Output Signals & Signal Termination for A quad B, Index and limits 29
A.6.4 Resolution 29
A.6.5 MII 6000 Digital Encoder Wiring Diagram 31
A.6.6 Straight Through 25-Pin Feed Through 32

PPS-20 LMSM Precision Stepper Stage
3
Rev: 3.07
MICRONIX USA,LLC
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Reference Manual
1. Introduction
1.1 Product Description
The PPS-20 is a low profile, high-precision linear stage outfitted with a linear or
stepper motor. Miniature cross-roller bearings assure high stiffness and guiding
accuracy for loads up to 20 N (Stepper motor) (horizontal orientation) and 2 N
(Linear motor). The PPS-20 LMSM is available in travel lengths of up to 51 mm, and
an optional linear encoder provides submicron repeatability. High Vacuum (10-6
mbar) compatible versions are available.
Features:
▪Stepper Motor travel ranges of 10 mm, 18 mm, 26 mm, and 51 mm
▪Linear Motor travel ranges of 11 mm, 18 mm, and 25 mm
▪Load capacity up to 20 N (horizontal)
▪Optional 2 nm resolution external digital encoder or 10 nm Analog encoder
1.2 Stepper Motor –(SM-007)
1.3 Linear Motor –(LM-003)
PPS-20 20 mm Open Loop
(Shown in center position)
PPS-20 20 mm Closed Loop
with analog encoder
(Shown in center position)
PPS-20 20 mm Closed Loop
with digital encoder
(Shown in center position)
PPS-20 20 mm Closed Loop
with 10 nm analog encoder
(Shown in center position)
PPS-20 20 mm Closed Loop
with 2 nm digital encoder
(Shown in center position)

PPS-20 LMSM Precision Stepper Stage
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1.4 Recommended Controllers
The following controllers are available from MICRONIX USA:
▪MMC-200 [Stepper Motor Versions]
▪MMC-300 [Linear Motor Versions]
1.5 Technical Data
1.6 Load Characteristics
Load Characteristics
Fx(N)
Fy(N)
Fz(N)
Mx(Nm)
My(Nm)
Mz(Nm)
kax[µrad/Nm]
kay[µrad/Nm]
SM-007
5
20
20
0.7
0.7
0.7
-
-
LM-003
1 Peak
2
2
0.7
0.7
0.7
-
-
Motor option
SM-007
LM-003
Speed, max.
[mm/sec]
5
100
Encoder option
Open
Loop
Analog
(1 Vpp)
Digital
(RS-
422)
Digital Low
Cost
Analog
(1 Vpp)
Digital
(RS-
422)
Digital Low Cost
(RS-422)
Resolution, typical
[μm]
0.1
0.05
0.05
0.5
0.01
0.01
0.5
Repeatability,
bi-directional [µm]
± 4
± 0.2
± 0.2
±1
± 0.1
± 0.1
±1
Repeatability,
uni-directional
[µm]
0.5
0.2
0.2
1
0.1
0.1
1

PPS-20 LMSM Precision Stepper Stage
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Rev: 3.07
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Reference Manual
2. Model Configurations
2.1 PPS-20 SM Order Numbers
Contact MICRONIX USA for custom applications and stacking configurations.
Order No. PPS-20
2
1
Stepper Motor SM-007 2
10mm Travel 1
18mm Travel 2
26mm Travel 3
51mm Travel 5
None 0
Analog (1Vpp)2
Digital (RS-422) 3
Digital Low Cost 4
Magnetic 1
Atmospheric 0
High Vacuum, 10-6 mbar 6

PPS-20 LMSM Precision Stepper Stage
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Rev: 3.07
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Reference Manual
2.2 PPS-20 LM Order Numbers
Contact MICRONIX USA for custom applications and stacking configurations.
Order No. PPS-20
3
Linear Motor LM-003 3
11mm Travel 1
18mm Travel 2
25mm Travel 3
Analog (1Vpp)2
Digital (RS-422) 3
Digital Low Cost 4
None 0
Magnetic 1
Atmospheric 0

PPS-20 LMSM Precision Stepper Stage
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Rev: 3.07
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Reference Manual
3. Preparing to Install the PPS-20 LMSM Stage
3.1 Installation Preparation
When mounting the stage, it is important to consider the flatness of the mounting
surface, as the stage will conform to the shape of that surface. A surface that is
not flat can adversely affect the performance and structural integrity of the stage.
The stage is calibrated and guaranteed to be within specification at 20°C ±5°C,
unless otherwise specified. Be sure to use the stage under the following conditions:
▪Mount to a clean and flat surface which is free of debris, burrs or dings
▪An indoor atmosphere free of corrosive gases, excessive dust, and
condensation
▪Temperature range of 0-40°C
▪Relative humidity between 20-80%
▪Locate away from water, heat, and electrical noise
3.2 Package Contents
If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
▪PPS-20 Linear Stage
▪Reference Manual
▪Any other previously agreed upon components such as a controller

PPS-20 LMSM Precision Stepper Stage
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Rev: 3.07
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4. Installing the PPS-20 LMSM Stage
Mounting patterns require M2 screws for mounting and M1.5 x 5mm dowel pins for
precision alignment. Additional brackets and screws may be required for custom
applications.
4.1 PPS-20 LMSM Installation
4.1.1 General Mounting
For general mounting configurations, mount the base to the mounting surface
using the thru holes. Move the carriage to access base mounting pattern. (Please
note, it is possible to move the carriage of the linear motor configurations manually
without damaging the stage, however, for *stepper versions the motor must be
driven by a controller to reposition the carriage.)
Requires:
2x M1.5 x 5mm Dowel Pins
2x M2 Socket Head Cap Screws
1. Move carriage via controller*, if
necessary, to access mounting
hole. Insert Pins and M2 SHCS as
shown.
Direction
of Travel
Clearance Hole
Customer Supplied
Base Plate or
Mounting Surface
2. Move carriage via controller*, if
necessary, to access remaining
mounting hole. Install M2 SHCS as
shown.

PPS-20 LMSM Precision Stepper Stage
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Rev: 3.07
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4.1.2 X-Y Mounting
For X-Y mounting, follow the instructions for mounting the X-axis stage, outlined in
section 4.1.1 General Mounting, then proceed to mount the Y-axis stage, as shown
below. X-Y mounting of longer travel length stages may require them to be
mounted base to base (note shown). Please note, it is possible to move the
carriage of the linear motor configurations manually without damaging the stage,
however, for *stepper versions the motor must be driven by a controller to
reposition the carriage
Stepper Motor
Linear Motor
Travel
A
B
Travel
A
B
10mm
20
16
11mm
20
16
18mm
30
16
18mm
30
16
26mm
40
36
25mm
40
36
51mm
80
50
Requires:
2x M1.5 x 5 mm Dowel Pins
4x M2 Socket Head Cap Screws
(For stacking screws, use M2 x 5 mm SHCS)
Direction
of Travel
1. Move Y-Axis Stage carriage via
controller*, if necessary, to access
mounting hole. Install M2 SHCS as
shown.
2. Move carriage via controller*, if
necessary, to access remaining
mounting hole. Install M2 SHCS as
shown.
Y-Axis Stage
Top View
Stage Mounting Pattern

PPS-20 LMSM Precision Stepper Stage
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Rev: 3.07
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5. Connecting the PPS-20 LMSM Stage
5.1 Atmospheric Environments
For controller information refer to the appropriate MMC controller manual.
5.1.1 Open Loop Installation & Wiring Diagram
Connecting the PPS-20 LMSM stage in an open loop configuration only requires
that the D-sub 9 Pin male Motor Cable be connected to a compatible controller.
No other cables or components are required. Note: Open loop configurations are
not available for linear motor versions.
Stepper Motor Version

PPS-20 LMSM Precision Stepper Stage
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5.1.2 Closed Loop/Encoder Installation & Wiring Diagram
Using the PPS-20 LMSM stage with an encoder requires a closed loop compatible
controller that recognizes encoder feedback. Connect the stage as shown below.
5.1.2.1 Analog Encoder Wiring Diagram
Stepper Motor Version
Linear Motor Version

PPS-20 LMSM Precision Stepper Stage
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Rev: 3.07
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5.1.2.2 MII 6000 Digital Encoder Wiring Diagram
Stepper Motor Version
Linear Motor Version

PPS-20 LMSM Precision Stepper Stage
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Rev: 3.07
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5.2 Vacuum Environments
5.2.1 Handling and Preparation
When preparing the stage for vacuum environments, take the necessary
precautions (such as wearing gloves, clean room, clothing, etc.) when handling
the stage as to avoid any contaminants. Maximum Bake-out temperature is 100°C.
MICRONIX USA can supply the stage with vacuum compatible connectors: 9-pin
female PEEK connector for open loop, 15-Pin female PEEK connector for closed
loop with analog encoder, 25-pin female PEEK connector for closed loop with MII
6000 digital encoder.
5.2.2 Open loop Installation & Wiring Diagram
Connecting an open loop PPS-20 LMSM stage in a vacuum chamber requires the
use of a feed through connector at the vacuum chamber wall. The vacuum
compatible PPS-20 LMSM will be supplied with wiring for a straight through feed
through, not a cross over gender changer. MICRONIX USA supplies test connectors
that simulate the vacuum feed through to allow for functionality testing prior to
installation in a vacuum chamber. For details regarding the pin-out and feed
through specifications see the Appendix A.4. Note: Linear motor versions are not
available for vacuum environments.
Stepper Motor Version
Temporary test
connectors are
standard. Requires
customer supplied
feed through
connector

PPS-20 LMSM Precision Stepper Stage
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5.2.3 Closed Loop/Encoder Installation & Wiring Diagram
Closed loop installation of the PPS-20 LMSM stage in vacuum environments
requires an intermediate feed through connector at the vacuum chamber wall
that can accommodate both the motor cable, and the encoder cable.
The vacuum compatible PPS-20 LMSM stage will be supplied with wiring for a
straight through feed through, not a cross over gender bender. MICRONIX USA
supplies test connectors that simulate the vacuum feed through to allow for
functionality testing prior to installation in a vacuum chamber. For details
regarding the pin-out and feed through specifications see the Appendix A.5.7,
A.6.5.
5.2.3.1 Analog Encoder Wiring Diagram
5.2.3.2 MII 6000 Digital Encoder Wiring Diagram
Stepper Motor Version
Stepper Motor Version
Temporary test
connectors are
standard. Requires
customer supplied
feed through
connector
Temporary test
connectors are
standard. Requires
customer supplied
feed through
connector

PPS-20 LMSM Precision Stepper Stage
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6. Technical Specifications
6.1 Dimensions
6.1.1 PPS-20 Stepper Motor Analog Encoder
TRAVEL
A
B
C
D
12
20
16
41.3
61.3
18
30
16
41.3
72.1
26
40
36
35.7
75.8
51
80
50
32.1
110.7
* Grey parts for external closed loop
only

PPS-20 LMSM Precision Stepper Stage
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6.1.2 PPS-20 Stepper Motor MII 6000 Digital Encoder
TRAVEL
A
B
C
D
10
20
16
41.3
61.3
18
30
16
41.3
72.1
26
40
36
35.7
75.8
51
80
50
32.1
110.7
* Grey parts for external closed loop
only

PPS-20 LMSM Precision Stepper Stage
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Rev: 3.07
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Reference Manual
6.1.3 PPS-20 Linear Motor Analog Encoder
L
TRAVEL
A
B
C
D
E
F
20
11
6
1
2
15
16
40
30
18
6
1
2
25
16
54.5
40
25
10
3
6
35
36
66.8
* Grey parts for external closed loop
only

PPS-20 LMSM Precision Stepper Stage
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Rev: 3.07
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Reference Manual
6.1.4 PPS-20 Linear Motor MII 6000 Digital Encoder
L
TRAVEL
A
B
C
D
E
F
20
11
6
1
2
15
16
40
30
18
6
1
2
25
16
54.5
40
25
10
3
6
35
36
66.8
* Grey parts for external closed loop
only