Micronix PR-32 Series User manual

S e r i e s
Reference Manual
Piezo Rotation Stage
(Open and Closed Loop Versions)
PR-32

MICRONIX USA, LLC
Tel: [phone]
Fax: [phone]
Email: [email protected]
http://micronixusa.com
PR-32
Piezo Rotation Stage
Reference Manual
Rev 3.06

PR-32 Piezo Rotation Stage
1
MICRONIX USA,LLC
www.micronixusa.com
Rev: 3.06
Reference Manual
Contents
1. Introduction ...............................................................................................................................................3
1.1 Product Description ...............................................................................................................................3
1.2 Recommended Controllers ..................................................................................................................4
1.3 Technical Data .......................................................................................................................................4
1.4 Load Characteristics..............................................................................................................................4
2. Model Configurations ...............................................................................................................................5
2.1 PR-32 Order Numbers.............................................................................................................................5
3. Preparing to Install the PR-32 ...................................................................................................................6
3.1 Installation Preparation..........................................................................................................................6
3.2 Package Contents .................................................................................................................................6
4. Installing the PR-32....................................................................................................................................6
4.1 PR-32 Installation.....................................................................................................................................7
4.1.1 General Mounting...........................................................................................................................7
5. Connecting the PR-32...............................................................................................................................8
5.1 Atmospheric Environments ...................................................................................................................8
5.1.1 Open Loop Installation & Wiring Diagram...................................................................................8
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram ................................................................8
5.1.3 Wiring Diagram for Atmospheric System with Analog Encoder ...............................................8
5.2 Vacuum Environments...........................................................................................................................9
5.2.1 Handling and Preparation .............................................................................................................9
5.2.2 Open loop Installation & Wiring Diagram....................................................................................9
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram ................................................................9
6. Technical Specifications ........................................................................................................................10
6.1 Dimensions.............................................................................................................................................10
7. Stacking Configurations .........................................................................................................................11
7.1 Configuration Examples (Additional configurations available upon request)............................11
8. Supplementary Information ...................................................................................................................11
8.1 Units and Conventions.........................................................................................................................11
8.2 Maintenance ........................................................................................................................................11
A. Appendix.................................................................................................................................................12
A.1 Electrical Connections.........................................................................................................................12
A.1.1 DB-9 Male Motor Connector .......................................................................................................12
A.1.2 Encoder Pinout ..............................................................................................................................12
A.2 Phase Piezo Motor Wiring Diagram....................................................................................................12
A.3 Open Loop Vacuum Wiring Diagram ...............................................................................................13
A.3.1 Straight Through 9-Pin Feed Through..........................................................................................13

PR-32 Piezo Rotation Stage
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Rev: 3.06
Reference Manual
A.4 Using an Analog Encoder ...................................................................................................................14
A.4.1 Analog Encoder Overview ..........................................................................................................14
A.4.2 Operating and Electrical Specifications....................................................................................14
A.4.3 Analog Output (Pins 1,2,6, and 7)...............................................................................................14
A.4.4 Index Window (Pins 3)...................................................................................................................14
A.4.5 Resolution .......................................................................................................................................15
A.4.6 Analog Encoder Wiring Diagram................................................................................................15
A.4.7 Straight Through 15-Pin Feed Through........................................................................................15

PR-32 Piezo Rotation Stage
3
MICRONIX USA,LLC
www.micronixusa.com
Rev: 3.06
Reference Manual
1. Introduction
1.1 Product Description
The PR-32 is a compact rotation stage with unlimited travel. The use of two mutually
pre-loaded steel ball bearings guarantees smooth motion and high stability. It
utilizes our patent-pending multi-phase piezo motor resulting in high speed (> 30
°/s) and high blocking torque. The PR-32 can be combined with the linear PPX-32
or with the PPS-series stages. Vacuum and Ultra High Vacuum (10-9 mbar)
compatible versions are available.
Features:
▪360° continuous
▪Load capacity up to 1kg
▪10 µ°encoder resolution
▪.5” Clear aperture (open loop)
Carriage
.5” Aperture

PR-32 Piezo Rotation Stage
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Rev: 3.06
Reference Manual
1.2 Recommended Controllers
The following controllers are available from MICRONIX USA:
▪MMC-100
▪MMC-110
1.3 Technical Data
Motor
PM-002R
Speed Max. (°/sec)
6 (MMC-100), 30 (MMC-110)
Resolution Typical (µ°)
3.6 (open loop), 50 (Analog Encoder), 10
(Digital Encoder)
Bi-directional Repeatability (µ°)
N/A (open loop), ± 200 (Analog
Encoder), 200 (Digital Encoder)
Uni-directional Repeatability (µ°)
N/A (open loop), 200(Analog Encoder),
200 (Digital Encoder)
1.4 Load Characteristics
Load Characteristics
Fr(N)
FZ(N)
Mr(Nm)
MZ(Nm)
kar(µrad/Nm)
PM-002R
10
10
0.5
0.025
-

PR-32 Piezo Rotation Stage
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MICRONIX USA,LLC
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Rev: 3.06
Reference Manual
2. Model Configurations
2.1 PR-32 Order Numbers
Contact MICRONIX USA for custom versions and stacking configurations.
Order No. PR-32-
1
1
Piezo Motor, PM-002R 1
360° Continuous 1
None 0
Analog (1Vpp) 2
Digital (RS-422) 3
None 0
Magnetic 1
Atmospheric 0
High Vacuum, 10-6 mbar 6
Ultra-High Vacuum, 10-9 mbar 9

PR-32 Piezo Rotation Stage
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Rev: 3.06
Reference Manual
3. Preparing to Install the PR-32
3.1 Installation Preparation
When mounting the stage, it is important to consider the flatness of the mounting
surface, as the stage will conform to the shape of that mounting surface. A surface
that is not flat can adversely affect the performance and structural integrity of the
stage.
The stage is calibrated and guaranteed to be within specification at 20°C ±5°C.
Be sure to use the stage under the following conditions:
▪Mount to a clean and flat surface which is free of debris, burrs or dings
▪An indoor atmosphere free of corrosive gasses, and condensation
▪Temperature range of 0-40°C
▪Relative humidity between 20-80%
▪Locate away from water, heat, and electrical noise
3.2 Package Contents
If the product is damaged or there are missing components, contact MICRONIX
USA immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
▪PR-32 Rotary Stage
▪Reference Manual
▪Any other previously agreed upon components such as a controller
4. Installing the PR-32
All mounting patterns require M2 screws for mounting and M1.5 x 5mm dowel pins
for precision alignment. Additional brackets and screws may be needed for
custom applications.
Top View
Stage Mounting Pattern

PR-32 Piezo Rotation Stage
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MICRONIX USA,LLC
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Rev: 3.06
Reference Manual
4.1 PR-32 Installation
4.1.1 General Mounting
For general mounting configurations, mount the base to the mounting surface.
Closed Loop System Requires:
2x M1.5 x 5mm Dowel Pins
4x M2 x 25mm Cheese Head Cap Screws
1. Install Dowel Pins and M2
Socket Head Cap Screws
Customer Supplied
Base Plate or
Mounting Surface
Clearance Hole x4
Open Loop System Requires:
2x M1.5 x 5mm Dowel Pins
4x M2 x 12mm Cheese Head Cap Screws
1. Install Dowel Pins and M2
Socket Head Cap Screw
2. Tighten 4x Mounting Screws
2. Tighten 4x Mounting Screws

PR-32 Piezo Rotation Stage
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MICRONIX USA,LLC
www.micronixusa.com
Rev: 3.06
Reference Manual
5. Connecting the PR-32
5.1 Atmospheric Environments
For controller information refer to the appropriate MMC controller manual.
5.1.1 Open Loop Installation & Wiring Diagram
Connecting the PR-32 in an open loop configuration only requires that the D-sub
9 Pin Motor Cable be connected to a compatible controller. No other cables or
components are needed.
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram
Using the PR-32 stage with an encoder requires a closed loop compatible
controller that recognizes encoder feedback.
5.1.3 Wiring Diagram for Atmospheric System with Analog Encoder