Contents
1. Introduction 3
1.1 Product Description 3
1.2 Linear Motor –(LM-001) 3
1.3 Stepper Motor –(SM-007) 4
1.4 Recommended Controllers 5
1.5 Technical Data 5
1.6 Load Characteristics 5
2. Model Configurations 6
2.1 PPS-28 SM Order Numbers 6
3. Preparing to Install the PPS-28 8
3.1 Installation Preparation 8
3.2 Package Contents 8
4. Installing the PPS-28 9
4.1 PPS-28 Installation 9
4.1.1 General Mounting 9
4.1.2 X-Y Mounting 10
5. Connecting the PPS-28 LMSM Stage 11
5.1 Atmospheric Environments 11
5.1.1 Open Loop Installation & Wiring Diagram 11
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram 12
5.2 Vacuum Environments 14
5.2.1 Handling and Preparation 14
5.2.2 Open loop Installation & Wiring Diagram 14
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram 15
6. Dimensions 16
6.1.1 PPS-28 Stepper Motor Analog Encoder 16
6.1.2 PPS-28 Stepper Motor MII 6000 Digital Encoder 17
6.1.3 PPS-28 Linear Motor Analog Encoder 18
6.1.4 PPS-28 Linear Motor MII 6000 Digital Encoder 19
7. Stacking Configurations 20
7.1 Configuration Examples 20
8. Supplementary Information 21
8.1 Units and Conventions 21
8.2 Personal Safety 21