Micronix PPS-28 series User manual

S e r i e s
Reference Manual
Precision Linear / Stepper Motor Stage
(Open and Closed Loop Versions)
PPS-28

PPS-28
Linear/Stepper Motor
Positioner Stage
Reference Manual
Rev 3.2
MICRONIX USA, LLC
Tel: [phone]
Fax: [phone]
Email: [email protected]
http://micronixusa.com

PPS-28 Linear/Stepper Motor Positioner Stage
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Contents
1. Introduction 3
1.1 Product Description 3
1.2 Linear Motor –(LM-001) 3
1.3 Stepper Motor –(SM-007) 4
1.4 Recommended Controllers 5
1.5 Technical Data 5
1.6 Load Characteristics 5
2. Model Configurations 6
2.1 PPS-28 SM Order Numbers 6
3. Preparing to Install the PPS-28 8
3.1 Installation Preparation 8
3.2 Package Contents 8
4. Installing the PPS-28 9
4.1 PPS-28 Installation 9
4.1.1 General Mounting 9
4.1.2 X-Y Mounting 10
5. Connecting the PPS-28 LMSM Stage 11
5.1 Atmospheric Environments 11
5.1.1 Open Loop Installation & Wiring Diagram 11
5.1.2 Closed Loop/Encoder Installation & Wiring Diagram 12
5.2 Vacuum Environments 14
5.2.1 Handling and Preparation 14
5.2.2 Open loop Installation & Wiring Diagram 14
5.2.3 Closed Loop/Encoder Installation & Wiring Diagram 15
6. Dimensions 16
6.1.1 PPS-28 Stepper Motor Analog Encoder 16
6.1.2 PPS-28 Stepper Motor MII 6000 Digital Encoder 17
6.1.3 PPS-28 Linear Motor Analog Encoder 18
6.1.4 PPS-28 Linear Motor MII 6000 Digital Encoder 19
7. Stacking Configurations 20
7.1 Configuration Examples 20
8. Supplementary Information 21
8.1 Units and Conventions 21
8.2 Personal Safety 21

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8.3 Maintenance 21
A. Appendix 22
A.1 Stepper Motor 22
A.1.1 Standard Atmospheric DB-9 Male Motor Connector 22
A.1.2 Stepper Motor Specifications 22
A.2 Linear Motor 23
A.2.1 Standard Atmospheric DB-9 Male Motor Connector 23
A.2.2 Linear Motor Specifications 23
A.3 Encoder Pinout 23
A.4 Magnetic (Hall Effect) Limit Switches 24
A.4.1 Hall Effect Limit Switches 24
A.4.2 Limit Switch Schematic 24
A.5 Open Loop Vacuum Wiring Diagram 25
A.5.1 Straight Through 9-Pin Feed Through 25
A.6 Using an Analog Encoder 26
A.6.1 Analog Encoder Overview 26
A.6.2 Operating and Electrical Specifications 26
A.6.3 Analog Output (Pins 1,2,6 and 7) 26
A.6.4 Index Window (Pins 3) 26
A.6.5 Resolution 26
A.6.6 Analog Encoder Wiring Diagram 27
A.7 Using the Digital Encoder Module 28
A.7.1 Encoder Module Pin-out 28
A.7.2 Operating and Electrical Specifications 29
A.7.3 Output Signals & Signal Termination for A quad B, Index and limits 29
A.7.4 Resolution 29
A.7.5 MII 6000 Digital Encoder Wiring Diagram 30
A.7.6 Straight Through 25-Pin Feed Through 30

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PPS-28 26mm MII 6000 Digital Encoder
(Shown in center position)
Base
PPS-28 26mm Analog Encoder
(Shown in center position)
1. Introduction
1.1 Product Description
The PPS-28 is a low profile, high-precision linear stage outfitted with a linear or
stepper motor. Miniature cross-roller bearings assure high stiffness and guiding
accuracy for loads up to 50N (horizontal orientation). The PPS-28 SMLM is
available in travel lengths of up to 102mm, and an optional linear encoder
provides submicron repeatability. High Vacuum (10-6 mbar) compatible versions
are available.
Features:
▪Stepper Motor travel ranges of 26mm, 51mm, 76mm, and 102mm
▪Linear Motor travel ranges of 26mm, 51mm, and 102mm
▪Load capacity up to 5 kg (Stepper Motor)
1.2 Linear Motor –(LM-001)
Carriage
Bearings
Encoder Head
Encoder Scale
Encoder Bracket
Scale Bracket

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PPS-28 26mm Open Loop
(Shown in center position)
PPS-28 26mm MII 6000 Digital Encoder
(Shown in center position)
PPS-28 26mm Analog Encoder
(Shown in center position)
1.3 Stepper Motor –(SM-007)

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1.4 Recommended Controllers
The following controllers are available from MICRONIX USA:
▪MMC-200 [Stepper Motor Versions]
▪MMC-300 [Linear Motor Versions]
1.5 Technical Data
1.6 Load Characteristics
Load Characteristics
Fx(N)
Fy(N)
Fz(N)
Mx(Nm)
My(Nm)
Mz(Nm)
kax[µrad/Nm]
kax[µrad/Nm]
LM-001
2 peak
10
10
1
1
1
-
-
SM-007
5
50
50
1
1
1
-
-
Motor option
LM-001
SM-007
Speed, max.
[mm/sec]
100
5
Encoder option
Analog
(1 Vpp)
Digital
(RS-
422)
Digital Low Cost
Open
Loop
Analog
(1 Vpp)
Digital
(RS-
422)
Digital Low
Cost
Resolution, typical
[μm]
0.01
0.01
0.5
0.1
0.05
0.05
0.5
Repeatability,
bi-directional [µm]
± 0.05
± 0.1
±1
± 4
± 0.2
± 0.2
±1
Repeatability,
uni-directional [µm]
0.05
0.1
1
0.5
0.2
0.2
1

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2. Model Configurations
2.1 PPS-28 SM Order Numbers
Contact MICRONIX USA for custom applications and stacking configurations.
Order No. PPS-28-
2
1
Stepper Motor, SM-007 2
26mm Travel 1
51mm Travel 3
76mm Travel 4
102mm Travel 5
Open Loop 0
Analog (1 Vpp) 2
Digital (RS-422) 3
Digital Low Cost 4
Magnetic 1
Atmospheric 0
High vacuum, 10-6 mbar 6

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Contact MICRONIX USA for custom applications and stacking configurations.
Order No. PPS-28
3
Linear Motor, LM-001 3
26mm Travel 1
51mm Travel 3
102mm Travel 5
Analog (1Vpp) 2
Digital (RS-422) 3
Digital Low Cost 4
None 0
Magnetic 1
Atmospheric 0
High vacuum, 10-6 mbar 6

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3. Preparing to Install the PPS-28
3.1 Installation Preparation
When mounting the stage, it is important to consider the flatness of the mounting
surface, as the stage will conform to the shape of that surface. A surface that is
not flat can adversely affect the performance and structural integrity of the
stage.
The stage is calibrated and guaranteed to be within specification at 20°C ± 5°C.
Be sure to use the stage under the following conditions:
▪Mount to a clean and flat surface which is free of debris, burrs or dings
▪An indoor atmosphere free of corrosive gases, excessive dust, and
condensation
▪Temperature range of 0-40°C
▪Relative humidity between 20-80%
▪Locate away from water, heat, and electrical noise
3.2 Package Contents
If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.
Package Should Contain:
▪PPS-28 Linear Stage
▪Reference Manual
▪Any other previously agreed upon components such as a controller

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4. Installing the PPS-28
Mounting patterns require M3 or M2.5 screws for mounting and M1.5 x 5mm
dowel pins for precision alignment. Additional brackets and screws may be
needed for custom applications.
4.1 PPS-28 Installation
4.1.1 General Mounting
For general mounting configurations, mount the base to the mounting surface.
Move the carriage to access base mounting pattern. (Please note, it is possible
to move the carriage of the linear motor configurations manually without
damaging the stage, however, for *stepper versions the motor must be driven by
a controller to reposition the carriage.)
Stepper Motor
Linear Motor
Travel
L
A
Travel
L
A
26mm
45
40
26mm
60
50
51mm
90
50
51mm
90
50
76mm
120
80
102mm
150
80
102mm
150
80
Requires:
2x M1.5 x 5mm Dowel Pins
2x M3 x 5mm Socket Head Cap Screws
1. Move carriage via controller*, if
necessary, to access mounting
hole. Insert Pins and M3 SHCS as
shown.
2. Move carriage via controller*, if
necessary, to access remaining
mounting hole. Install M3 SHCS as
shown.
Customer Supplied
Base Plate or
Mounting Surface
Clearance
Hole
Direction
of Travel
Top View
Stage Mounting Pattern

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4.1.2 X-Y Mounting
For X-Y mounting, follow the instructions outlined below (Please note, it is possible
to move the carriage of the linear motor configurations manually without
damaging the stage, however, for *stepper versions the motor must be driven by
a controller to reposition the carriage.):
Stepper Motor
Linear Motor
Travel
L
A
Travel
L
A
26mm
45
37
26mm
60
52
51mm
90
82
51mm
90
82
76mm
120
112
102mm
150
142
102mm
150
142
Direction
of Travel
Requires:
4x M1.5 x 4mm Dowel Pins
6x M2.5 x 6mm Socket Head Cap Screws
2. Move carriage via controller*, if
necessary, to access remaining
mounting holes. Install M2.5 SHCS
as shown.
1. Move Y-Axis Stage carriage via
controller*, if necessary, to access
mounting holes. Install M2.5 SHCS
and dowel pins as shown.
3. Move carriage via controller*, if
necessary, to access ear mount
holes. Install M2.5 SHCS and
dowel pins as shown.
Top View
Stage Mounting Pattern

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5. Connecting the PPS-28 LMSM Stage
5.1 Atmospheric Environments
For controller information refer to the appropriate MMC controller manual.
5.1.1 Open Loop Installation & Wiring Diagram
Connecting the PPS-28 LMSM stage in an open loop configuration only requires
that the D-sub 9 Pin male Motor Cable be connected to a compatible controller.
No other cables or components are required. Note: Open loop configurations
are not available for linear motor versions.
Stepper Motor Version

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5.1.2 Closed Loop/Encoder Installation & Wiring Diagram
Using the PPS-28 LMSM stage with an encoder requires a closed loop compatible
controller that recognizes encoder feedback. Connect the stage as shown
below.
5.1.2.1 Analog Encoder Wiring Diagram
5.1.2.2 MII 6000 Digital Encoder Wiring Diagram
Stepper Motor Version
Stepper Motor Version
Linear Motor Version

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Linear Motor Version

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5.2 Vacuum Environments
5.2.1 Handling and Preparation
When preparing the stage for vacuum environments, take the necessary
precautions (such as wearing gloves, clean room, clothing, etc.) when handling
the stage as to avoid any contaminants. Maximum Bake-out temperature is
100°C. MICRONIX USA can supply the stage with vacuum compatible
connectors: 9-pin female PEEK connector for open loop, 15-Pin female PEEK
connector for closed loop with analog encoder, 25-pin female PEEK connector
for closed loop with MII 6000 digital encoder.
5.2.2 Open loop Installation & Wiring Diagram
Connecting an open loop PPS-28 LMSM stage in a vacuum chamber requires
the use of a feed through connector at the vacuum chamber wall. The vacuum
compatible PPS-28 LMSM will be supplied with wiring for a straight through feed
through, not a cross over gender changer. MICRONIX USA supplies test
connectors that simulate the vacuum feed through to allow for functionality
testing prior to installation in a vacuum chamber. For details regarding the pin-
out and feed through specifications see the Appendix A.4. Note: Linear motor
versions are not available for vacuum environments.
Temporary test
connectors are
standard. Requires
customer supplied
feed through
connector
Stepper Motor Version

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5.2.3 Closed Loop/Encoder Installation & Wiring Diagram
Closed loop installation of the PPS-28 LMSM stage in vacuum environments
requires an intermediate feed through connector at the vacuum chamber wall
that can accommodate both the motor cable, and the encoder cable.
The vacuum compatible PPS-28 LMSM stage will be supplied with wiring for a
straight through feed through, not a cross over gender bender. MICRONIX USA
supplies test connectors that simulate the vacuum feed through to allow for
functionality testing prior to installation in a vacuum chamber. For details
regarding the pin-out and feed through specifications see the Appendix A.5.7,
A.6.5.
5.2.3.1 Analog Encoder Wiring Diagram
5.2.3.2 MII 6000 Digital Encoder Wiring Diagram
Stepper Motor Version
Temporary test
connectors are
standard. Requires
customer supplied
feed through
connector
Stepper Motor Version
Temporary test
connectors are
standard. Requires
customer supplied
feed through
connector

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6. Dimensions
6.1.1 PPS-28 Stepper Motor Analog Encoder
* Grey parts for external closed loop
only

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6.1.2 PPS-28 Stepper Motor MII 6000 Digital Encoder
* Grey parts for external closed loop
only

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6.1.3 PPS-28 Linear Motor Analog Encoder
* Grey parts for external closed loop
only