MKS Newport IMS-LM-S Series User manual

High-Performance Long-Travel
Linear Motor Stage
IMS-LM-S Serie
USER’SMANUAL
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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
Warranty
Newpor Corpora ion warran s his produc o be free from defec s in
ma erial and workmanship for a period of 1 year from he da e of
shipmen . If found o be defec ive during he warran y period, he produc
will ei her be repaired or replaced a Newpor ’s discre ion.
To exercise his warran y, wri e or call your local Newpor represen a ive,
or con ac Newpor headquar ers in Irvine, California. You will be given
promp assis ance and re urn ins ruc ions. Send he ins rumen ,
ranspor a ion prepaid, o he indica ed service facili y. Repairs will be
made and he ins rumen re urned, ranspor a ion prepaid. Repaired
produc s are warran ed for he balance of he original warran y period, or
a leas 90 days.
Limitation of Warranty
This warran y does no apply o defec s resul ing from modifica ion or
misuse of any produc or par .
This warrant is in lieu of all other warranties, expressed or implied,
including an implied warrant of merchantabilit or fitness for a
particular use. Newport Corporation shall not be liable for an indirect,
special, or consequential damages.
b Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document ma be reproduced or copied without the prior
written approval of Newport Corporation. This document is provided for
information onl , and product specifications are subject to change without
notice. An change will be reflected in future publishings.
CAUTION
Warran y does no apply o damages resul ing from:
• Incorrec usage:
– Load on he s age grea er han maximum specified load.
– Carriage speed higher han specified speed.
–Improper grounding.
¬ Connec ors mus be properly secured.
¬ When he load on he s age represen s an elec rical risk, i mus
be connec ed o ground.
– Excessive or improper can ilever loads.
• Modifica ion of he s age or any par hereof.
CAUTION
Please ret rn eq ipment in
the original (or eq ivalent)
packing.
Yo will be responsible for
damage inc rred from
inadeq ate packaging if the
original packaging is not
sed.
© 2018

iii EDH0398En1011 — 09/18
IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
Table of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution ...................................................................................................................ix
1.0 — Introduction.................................................................................1
2.0 — Description ...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics............................................................................3
3.1 Definitions..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Hard Stop: Speed Limitation Versus Load .............................................5
3.4 Load Characteristics and Stiffness .........................................................5
3.5 Stage Weights ............................................................................................5
4.0 — Drive and otor.........................................................................6
4.1 Motor characteristics...............................................................................6
4.2 Command Signals......................................................................................6
4.3 Sensor ositions........................................................................................7
4.4 osition Feedback Signals........................................................................7
4.5 inouts........................................................................................................8
Motor Connector ( 1) ..............................................................................8
Encoder Connector ( 2) ..........................................................................8
End-of-Runs & Thermistor Connector ( 3)............................................9
4.6 Cables .........................................................................................................9
5.0 — Stage Installation.....................................................................10
5.1 Unpacking ................................................................................................10
5.2 Mounting Conditions ..............................................................................10
6.0 — Connection to Newport Controllers..............................11
6.1 Operating with Newport Controllers/Drives .......................................11
6.2 Warnings on Controllers ........................................................................11
6.3 Connection...............................................................................................12
6.4 Wiring .......................................................................................................12

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
7.0 — Connection to Non-Newport Controllers ....................13
7.1 Connections.............................................................................................13
8.0 — Dimensions.................................................................................14
8.1 (M-)IMS-LM-S Stages ...............................................................................14
8.2 Top late Interfaces................................................................................15
IMS-LM-S Stages Top late Interface.....................................................15
M-IMS-LM-S Stages Top late Interface ................................................15
8.3 Cable Chains ............................................................................................16
9.0 — aintenance ..............................................................................17
9.1 Maintenance ............................................................................................17
9.2 Repair .......................................................................................................17
9.3 Calibration ...............................................................................................17
Service Form .........................................................................................................19

v EDH0398En1011 — 09/18
IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
IMS-LM-S
Series
EU Declaration of Conformity
following Annex II-1A
of Directive 2006/42/EC on machinery
The manufacturer:
MICRO-CONTROLE Spectra-Physics,
9, rue du bois sauvage
F-91055 Evry FRANCE
Hereby declares that the machinery:
Description: " IMS-LM-S "
Function: High performance linear stage
Models: M-/IMS300/400/500/600/LM-S
– the technical file of which was compiled by:
Mr Hervé LE COINTE , Quality Director,
MICRO-CONTROLE Spectra-Physics, Zone Industrielle - B.P.29
F-45340 Beaune La Rolande France
– complies with all the relevant provisions of the Directive 2006/42/EC on machinery.
– complies with all the relevant provisions of the Directive 2014/30/EU relating to electro-
magnetic compatibility.
– complies with all the relevant provisions of the Directive 2011/65/EU relating to RoHS2.
– was designed and built in accordance with the following harmonised standards:
NF EN 61326-1:2013 « Electrical equipment for measurement, control and
laboratory use – EMC requirements – Part 1: General requirements »
NF EN 55011:2010/A1:2011 Class A
EN ISO 60204-1 « Safety of machinery – Electrical equipment of machines – Part 1
General requirements »
– was designed and built in accordance with the following other standards:
NF EN 61000-4-2
NF EN 61000-4-3
NF EN 61000-4-4
NF EN 61000-4-6

NF EN 61000
-
4
-
8
ORIGINAL DECLARATION
Done in Beaune La Rolande on 16 May 2017
Hervé LE COINTE
Quality Director
DC1-EN rev:A
EC Declaration of Conformity

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
Definitions and Symbols
The following erms and symbols are used in his documen a ion and also
appear on he produc where safe y-rela ed issues occur.
General Warning or Caution
The exclama ion symbol may appear in warning and cau ion ables in his
documen . This symbol designa es an area where personal injury or
damage o he equipmen is possible.
The following are defini ions of he Warnings, Cau ions and No es ha may
be used in his manual o call a en ion o impor an informa ion regarding
personal safe y, safe y and preserva ion of he equipmen , or impor an
ips.
WAR N IN G
Warning indicate a potentially dangerou ituation which can re ult in
bodily harm or death.
CAUTION
Caution indicate a potentially hazardou ituation which can re ult in
damage to product or equipment.
NOTE
Note indicate additional information that mu t be con idered by the
u er or operator.
European Union CE Mark
The presence of he CE Mark on Newpor Corpora ion equipmen means
ha i has been designed, es ed and cer ified as complying wi h all
applicable European Union (CE) regula ions and recommenda ions.
Warning and Caution
ATTENTION
Thi tage i a Cla A device. In a re idential environment, thi device
can cau e electromagnetic interference. In thi ca e, uitable mea ure
mu t be taken by the u er.

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
WARNING
When the I S-L -S stage is installed or combined with other instruments
in a machine, additional testing to directive 2006/42/EC may be
required. It is the responsibility of the end-user or integrator to perform
a risk-analysis and the necessary tests to conform to the EC directives.
Newport is not liable for damages caused by not executing this
responsibility.
Warnings
WAR N IN G
The motion of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.
WAR N IN G
The magnetic channel included in this device has the potential to disrupt
pacemakers. Consequentl , it is recommended that individuals maintain a
distance of 1 meter or more from the stage as a precautionar measure.
WAR N IN G
D n t use this stage when its m t r is emitting sm ke r is unusually
h t t the t uch r is emitting any unusual d r r n ise r is in any
ther abn rmal state.
St p using the stage immediately, switch ff the m t r p wer and then
disc nnect the electr nics p wer supply.
After checking that sm ke is n l nger being emitted c ntact y ur
Newp rt service facility and request repairs. Never attempt t repair the
stage y urself as this can be danger us.
WAR N IN G
Make sure that this stage is n t exp sed t m isture and that liquid d es
n t get int the stage.
Nevertheless, if any liquid has entered the stage, switch ff the m t r
p wer and then disc nnect the electr nics fr m p wer supply.
C ntact y ur Newp rt service facility and request repairs.
W

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
WARNING
Do not exceed speed and load limitations as specified in this manual.
WAR N IN G
D n t insert r dr p bjects int this stage, this may cause an electric
sh ck, r l ck the drive.
D n t use this stage if any f reign bjects have entered the stage.
Switch ff the m t r p wer and then disc nnect the electr nics p wer
supply.
C ntact y ur Newp rt service facility f r repairs.
WAR N IN G
D n t place this stage in unstable l cati ns such as n a w bbly table r
sl ping surface, where it may fall r tip ver and cause injury.
If this stage has been dr pped r the case has been damaged, switch ff
the m t r p wer and then disc nnect the electr nics p wer supply.
C ntact y ur Newp rt service facility and request repairs.
WAR N IN G
D n t attempt t m dify this stage; this may cause an electric sh ck r
d wngrade its perf rmance.
WAR N IN G
D n t exceed the usable depth indicated n the m unting h les (see
secti n “Dimensi ns”). L nger screws can damage the mechanics r
cause a sh rt-circuit.

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
Caution
CAUTION
Do not pl ce this st ge in hostile environment such s X-R ys, h rd
UV,… or in ny v cuum environment.
CAUTION
Do not pl ce this st ge in loc tion ffected by dust, oil fumes, ste m or
high humidity. This m y c use n electric shock.
CAUTION
Do not le ve this st ge in pl ces subject to extremely high temper tures
or low temper tures. This m y c use n electric shock.
• Oper ting temper ture: +10 to +35 °C
• Stor ge/Oper ting ltitude: 1000 m
• Stor ge/Oper ting humidity: 85%
• Stor ge temper ture: -10 to +40 °C (in its origin l p ck ging)
CAUTION
Do not move this st ge if its motor power is on.
M ke sure th t the c ble to the electronics is disconnected before
moving the st ge. F ilure to do so m y d m ge the c ble nd c use n
electric l shock.
CAUTION
Be c reful th t the st ge is not bumped when it is being c rried. This
m y c use it to m lfunction.
CAUTION
When h ndling this st ge, lw ys unplug the equipment from the power
source for s fety.
CAUTION
When the c rri ge is in its end-of-run position, it is strongly recommended
not to go beyond this point s this m y d m ge the st ge mech nism.
CAUTION
Cont ct your Newport service f cility to request cle ning nd
specific tion control every ye r.

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
High-Performance Long-Travel
Linear Motor Stage
IMS-LM-S Serie
1.0 —Introduction
This manual provides operating instructions for the IMS-LM-S stage that
you have purchased.
Inside this manual you will find useful information and technical
references. It is recommended the user download all support
documentation from the IMS-LM-S page of the Newport website to have as
reference.
IMS600LM-S & IMS300LM-S Stages.
RECO ENDATION
We recommend you read carefully the chapters 4.0 and 6.0 for the
connection to an electronics, before using an I S-L -S stage.

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
2.0 —Description
The IMS-LM-S series of linear motor stages are designed for self-supporting
applications with travel ranges from 300 mm to 1200 mm. The stages
feature a robust design with high performance at low cost, making them
cost-effective solutions for precision industrial applications such as
semiconductor wafer inspection, microelectronics test and assembly, pick
and place, DNA sequencing, or laser machining. The IMS-LM-S-SA version
with, 4-point mounting, is ideal for delay lines and other applications with
non-flat mounting surfaces.
The IMS-LM-S series utilizes an FEM optimized extruded aluminum body
that is extremely stiff and minimizes bending caused by different thermal
expansion coefficients of the aluminum body and steel rails.
Unlike-screw driven stages, the IMS-LM-S employs a center-driven linear
motor. This linear motor is absolutely noise-free and has the advantage of
higher speed, acceleration and system responsiveness without wear on
motor brushes or drive screws. Due to the fully integrated linear motor,
the IMS-LM-S is more than 100 mm shorter in length than a comparable
screw driven stage. Thus, the IMS-LM-S is the optimum solution for space
constrained applications that require high-throughput, high reliability, and
ultra-quiet operation.
The IMS-LM-S uses a high efficiency 3-phase synchronous ironcore linear
motor. While ironcore linear motors are often criticized for their cogging
and high attractive forces, their efficiency is almost twice the efficiency of
ironless linear motors. This results in higher acceleration capability and
significantly less heat generation, which often limits performance of rapid
point-to-point positioning.
Recirculating ball bearing slides with caged balls provide excellent
payload capacity and long life. The ball separators in the recirculating
elements ensure superior smooth movement, lower noise, and longer
service life compared to uncaged ball bearing slides.
recision position feedback is supplied by a highly repeatable linear scale
mounted inside the stage. The encoder signals are interpolated by
Newport’s motion controllers with outstanding 20 nm Minimum
Incremental Motion, repeatability, and stability. Absolute home position
and limit signals are incorporated to improve repeatability and reliability,
while simplifying the design with less electronics and mechanical parts.
2.1 Design Details
Base Material Extruded Aluminum
Bearings Recirculating bearings with caged balls
Drive System 3-phase synchronous ironcore linear motor (no all effect sensors)
Motor Initialization as to be done by the controller (without using all effect sensors)
Feedback Linear steel scale, 20 µm signal period, 1 Vpp
Limit Switches Optical
ome Switch Optical, on encoder’s fiducial track, located at center of travel
ESP Compatibility Yes
MTBF 20,000 hours

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
3.0 —Characteristics
3.1 Definitions
Specificatio s of our products are established i refere ce to ISO 230
sta dard part II “Determi atio of accuracy a d repeatability of
positio i g umerically co trolled axes”.
This sta dard gives the defi itio of positio u certai ty which depe ds
o the 3 followi g parameters:
Absolute Accuracy
Differe ce betwee ideal positio a d real positio .
Accuracy
Differe ce betwee ideal positio a d real positio after the compe satio
of li ear errors.
Li ear errors i clude: cosi e errors, i accuracy of screw or li ear scale
pitch, a gular deviatio at the measuri g poi t (Abbe error) a d thermal
expa sio effects. All Newport motio electro ics ca compe sate for
li ear errors.
The relatio betwee absolute accuracy a d o -axis accuracy is as follows:
Absolute Accuracy = Accuracy + Correction Factor xTravel
Repeatability
Ability of a system to achieve a comma ded positio over ma y attempts.
Reversal Value (Hysteresis)
Differe ce betwee actual positio values obtai ed for a give target
positio whe approached from opposite directio s.
Minimum Incremental Motion (MIM or Sensitivity)
The smallest i creme t of motio a device is capable of deliveri g
co siste tly a d reliably.
Resolution
The smallest i creme t that a motio device ca theoretically move
a d/or detect. Resolutio is ot achievable, whereas MIM, is the real
output of a motio system.
Yaw, Pitch
Rotation of carriage around the Z axis (Yaw) or Y axis (Pitch), when it
moves.
The testing of accuracy, repeatability, and reversal error are made
systematically with test e uipment in controlled environment (20 ±1 °C).
A linear cycle with 21 data points on the travel and 4 cycles in each
direction gives a total of 168 points.
Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport's A167
metrology test procedure. For more information, please consult the
metrology tutorial section in the Newport catalog or at www.newport.com

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
3.2 echanical Specifications
NOTE
The following specifications are controller/driver dependent:
• inimum Incremental otion ( I )
• aximum Speed
• aximum Acceleration
Refer to the I S-L -S Series page on www.newport.com for
specifications achievable with specific Newport controller/driver
combination.
CAUTION
To reach stated specifications, the stages must be fixed on a plane
surface with a flatness of 5 µm.
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Travel Range (mm) IMS-LM-S IMS-LM-SA-S
Travel Range (mm) 300, 400, 500, 600, 800, 1000 and 1200
800, 1000 and 1200
Minimum Incremental Motion (nm) 20
Bidirectional Repeatability, 300 & 400-: ±0.08 (±0.25) –
Typical (Guaranteed) (1) (µm) 500 & 600: ±0.09 (±0.25) –
800: ±0.10 (± 0.50) ±0.10 (± 0.50)
1000: ±0.12 (± 0.50) ±0.12 (± 0.50)
1200: ±0.13 (± 0.50) ±0.13 (± 0.50)
Accuracy, Typical (Guaranteed) (1) (µm) 300: ±1.7 (±4.5) –
400: ±2.0 (±4.5) –
500: ±2.5 (±5.5) –
600: ±3.0 (±7.5) –
800 & 1000: ±4.0 (±9.0) ±4.0 (±9.0)
1200: ±5.0 (±9.0) ±5.0 (±15)
Maximum Speed (No Load) (2) (mm/s) 1000 (refer to chart below)
Maximum Acceleration (No Load) (2) (m/s2) 40
Moving mass (kg) Carriage: 3.5 + Interface:1 = 4.5
Drag force (torque) Approx. 15 N
Pitch, Typical (Guaranteed) (1) (3) (µrad) 300 to 500: ±37 (±75) –
600: ±50 (±125) –
800: ±100 (±200) ±100 (±200)
1000: ±112 (±225) ±112 (±225)
1200: ±125 (±250) ±125 (±250)
Yaw, Typical (Guaranteed) (1) (3) (µrad) 300: ±25 (±50) –
400 & 500: ±25 (±75) –
600: ±30 (±75) –
800 to 1200: ±40 (±150) ±40 (±150)
1)For he defini ion of Typical and Guaran eed specifica ions see “Mo ion Basics Terminology & S andards” Tu orial
a www.newpor .com
2) Speed depends on he driver.
3) To ob ain arcsec uni s, divide µrad value by 4.8.

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
3.3 Hard Stop: Speed Limitation Versus Load
IMS-LM-S stage uses electrical end-of-run and elastomer hard stops to stop
the carriage as smoothly as possible past the end-of-runs. The overtravel
allowed by the hard stops is 8 mm.
When the stage is used with Newport controllers, the factory settings of
the "software limits" prohibit any commanded motion beyond this travel
range.
Nevertheless, for safety reasons, follow the recommendations
above to minimize risk of mechanical damage, in case of failure
or incorrect adjustment of parameters.
The maximum speed of the stage must be limited so that the
hard stops will always stop the carriage in 8 mm or less, to
avoid any shock between the carriage and stage body.
The graph at left, provides stage speed as a function of applied
load. This curve defines allowed operating conditions to stop
within the 8 mm over-travel allowed by the hard stops. To stop
within this distance, the user must maintain speed and load
within this tolerance. This graph assumes correct wiring of the
electrical end of runs will cut motor power before contact with
the hard stop.
3.4 Load Characteristics and Stiffness
Normal Load Capacity (Cz)
Maximum load a stage can move while maintaining specifications.
3.5 Stage Weights
The stage weights indicated below do not include the cables.
Load on Carriage (kg)
Maximum Speed for Hard Stoppers
200
280
360
440
520
600
680
760
840
920
1000
051015202530354045505560
Speed (mm/s)
IMS-LM-S IMS-LM-SA-S
Cz, Normal center load capacity on bearings 600 N 100 N
kax, Angular stiffness (Roll) 1 µrad/Nm 2 µrad/Nm
kay, Angular stiffness (Pitch) 0.2 µrad/Nm 2 µrad/Nm
kaz, Angular stiffness (Yaw) 1 µrad/Nm 1 µrad/Nm
Q, Off-center load Q ≤ Cz/(1 + D/90)
D, Cantilever distance in mm
Z
Y
QH
D
Cz
X
Weight [lb (kg)]
-LM -LM-SA
IMS300-S 37.5 (17) –
IMS400-S 41.9 (19) –
IMS500-S 46.3 (21) –
IMS600-S 50.7 (23) –
IMS800-S 52.9 (24) 52.9 (24)
IMS1000-S 61.7 (28) 61.7 (28)
IMS1200-S 70.5 (32) 70.5 (32)

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
4.0 —Drive and otor
4.1 otor characteristics
IMS-LM-S stages are equipped with a 3-phase synchronous ironcore linear
motor and a linear steel scale.
CAUTION
High R S current will generate motor heating which will degrade
characteristics of the stage, such as repeatability, accuracy, etc…
4.2 Command Signals
NOTE
The values above indicate induced voltages between coils. A positive
value for L- would indicate a higher voltage on L relative to .
Magnet Pitch (Commutation period) 24 mm
Motor constant 180 N2/W
Force sensitivity 38.9 N/Arms
Back-emf constant 31.7 V/m/s
Motor resistance 5.6 Ω
Motor inductance 36 m
Thermal resistance 0.7 °C/W
Max. speed @ Max. voltage 8 m/s @ 560 V
Peak current 6 Arms
Peak force 210 N
Max. rms current 3.1 Arms
Max. rms force 120 N
Temperature Sensor PTC, 1 kΩ
L-M
-2
0
-0.5
-1
-1.5
0.5
1
1.5
2
Amplitude
L-NM-N
Induced Voltages Coil Moving
Direction – MOTION Direction +
RT(Ω)
2500
2000
1500
1000
500
050
TA(°C)
100
EHA07248
-50 0 150
Positive Temperature Coefficient
Thermistor, resistance as a function
of temperature. Motor heating is
typically restricted to 20 °C with
Newport Controllers.
Direction +

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
4.3 Sensor Positions
4.4 Position Feedback Signals
Direction +
X
P2P3
P1
X Values – Har – En -of-Run Mech. Home + En -of-Run + Har
(mm) Limit Limit Zero Position Limit Limit
IMS300LM-S 126.5 0
-8 128 ±0.5 279 ±0.25 279.5 ±0.25 431 ±0.5 732.5 +8 0
IMS400LM-S 126.5 0
-8 128 ±0.5 329 ±0.25 329.5 ±0.25 481 ±0.5 732.5 +8 0
IMS500LM-S 126.5 0
-8 128 ±0.5 379 ±0.25 379.5 ±0.25 531 ±0.5 732.5 +8 0
IMS600LM-S 126.5 0
-8 128 ±0.5 429 ±0.25 429.5 ±0.25 581 ±0.5 732.5 +8 0
IMS800LM(-SA)-S 144.5 0
-8 160 ±0.5 564.5 ±0.25 565 ±0.25 970 ±0.5 980.5 +8 0
IMS1000LM(-SA)-S 144.5 0
-8 160 ±0.5 664.5 ±0.25 665 ±0.25 1170 ±0.5 1180.5 +8 0
IMS1200LM(-SA)-S 144.5 0
-8 160 ±0.5 764.5 ±0.25 765 ±0.25 1370 ±0.5 1380.5 +8 0
– End-of-Run Limit
+End-of-Run Limit
Index Pulse
Index Pulse
Mechanical Zero
.02 (.5)
1.97
(50)
.06 (1.5) for IMS300 to 600LM-S
.197 (5) for IMS800 to 1200 LM(SA)-S
.06 (1.5) for IMS300 to 600LM-S
.197 (5) for IMS800 to 1200 LM(SA)-S
Negative
Software Limit
Stage Travel Range
Positive
Software Limit
Home Position
(Origin)
Dimensions in inches
(and millimeters)
Direction – MOTION Direction +
Signal description / Voltage / wiring eidenhain standard 1 Vpp
Reference mark position see drawing "Sensor Positions"
Resolution Scale pitch 20 µm
Maximum speed 8 m/s
Direction +
Low
High
Low
High
Low
High
Low
High
Encoder
Phase A
Encoder
Phase A
Encoder
Phase B
Encoder
Phase B
1234
Direction – MOTION Direction +

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IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
4.5 Pinouts
The pinout diagrams for IMS-LM-S stage connectors are shown below.
4.5.1 otor Connector (P1)
• Max. voltage: 96 V
• Max. rms Current: 3.1 A
WARNING
GROUNDING: The stage's protective ground is located on pin #8 of the
motor power connector.
If you are using grounds other than those provided by Newport, you
must connect pin #8 to a ground connection.
4.5.2 Encoder Connector (P2)
5
9
6
1
SUB-D9M
1Phase L Motor
2Phase L Motor
3Phase M Motor
4Phase M Motor
5Thermistor 1
6Phase N Motor
7Phase N Motor
8Ground
9Thermistor 2
SUB-D15M
1Encoder Phase B
2Ground
3Encoder Phase A
4+5 V
5N.C.
6N.C.
7Index Pulse /I
8N.C.
9Encoder Phase /B
10 N.C.
11 Encoder Phase /A
12 N.C.
13 N.C.
14 Index Pulse I
15 N.C.
8
159
1

9 EDH0398En1011 — 09/18
IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
4.5.3 End-of-Runs & Thermistor Connector (P3)
4.6 Cables
The IMS-LM-S stages are supplied without cables.
The appropriate cable kit must be ordered separately, in accordance with
the X S controller configuration used. lease refer to our website for
ordering information.
WARNING
The I S-L -S Series stages operate only with 5-meter max. cables.
WARNING
Cables of the kits are shielded correctly. For a correct operation, make
sure to lock connectors (ground continuity provided by the cable).
WARNING
Keep these cables at a safe distance from other electrical cables in your
environment to avoid potential cross talk.
SUB-D9F
1+ End-of-Run
2– End-of-Run
3Mechanical Zero
4N.C.
5+5 V
6Thermistor 1
7Ground
8Thermistor 2
9Ground
5
9
6
1

EDH0398En1011 — 09/18 10
IMS-LM-S Serie High-Performance Long-Travel Linear Motor Stage
5.0 —Stage Installation
5.1 Unpacking
The IMS-LM-S stage will be delivered to your site in packaging designed for
safe transport. Attached to the body of the stage are handles for safe
removal from packaging. It is recommended to carefully lift the stage from
packaging using these handles.
The stage will come delivered with a control report that indicates
performance of your stage within guaranteed specification. These
measurements were taken in a controlled environment under flat mounting
conditions.
5.2 ounting Conditions
IMS-LM-S-SA stages feature a four-point mounting which is ideal for
operation on non-flat surfaces. However it is recommended for all IMS-LM-
S and IMS-LM-S-SA stages that the following mounting conditions be
adhered to for best performance.
Installation Consi erations
Mounting surface flatness 5 µm
Payload surface flatness 10 µm
Mounting Screw torque 7 Nm