MKS Cirrus2 User manual

Cirrus2
Hardware Manual
Cirrus2 Hardware Manual - SP101017.100
June 2011

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
2
As part of our continuous product improvement policy, we are always pleased to receive your comments and suggestions
about how we should develop our product range. We believe that the manual is an important part of the product and
would welcome your feedback, particularly relating to any omissions or inaccuracies you may discover.
You can send your comments to:-
MKS Instruments UK Ltd - Spectra Products
Cowley Way
Weston Road
Crewe
Cheshire
CW1 6AG
U.K.
[phone] Tel. International
[phone] Fax. International
Email: [email protected]
Conflat® is a registered trademark of Varian Associates.
Viton® is a registered trademark of E.I. DuPont de Nemours & Co., Inc.
Windows® is a trademark of the Microsoft Corporation.
All other brand or product names are trademarks or registered trademarks of their respective companies and as such are fully
recognised

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
3
Table of Contents
Overview 6
1. Specifications 7
Mechanical 7
Cirrus2 7
Analyser 7
Electrical 7
Power Inlet 7
Fuses 7
Environmental 7
Temperature range 7
Safety 8
Connectors 8
Warning labels 8
Ventilation 9
Additional Installation Maintenance and Operating Instructions 10
A) INSTALLATION 10
B) OPERATION 10
C) MAINTENANCE 10
2. Connections and Indicators 11
Front Panel 11
Power 11
Turbo at Speed 11
Capillary Heater 11
System Heater 11
Emission 12
Coms 12
Rear Panel 13
RGA Coms 13
Power 13
Analogue I/O Connector 14
Digital I/O Connector 15
Interfacing Notes 16
Exhaust Purge IN/OUT 17
Flushing the pump exhaust 17
Exhaust the pump only 17
3. Installation 18
Connecting to the Ethernet Port 18
Overview 18
Directly connecting to the Cirrus2 20
Assigning a static IP Address 23
4. Operation 26
Powering up 26
Starting the Quad 27
Baking 27
Temperature Settings 28
Capillary Heater 28
Shutting Down 28

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
4
5. Maintenance 29
Overview 29
Quadrupole Ion Source 29
Capillary Inlet 29
Orifice Disk 29
Pumping System 29
Removing the cover 30
Internal Components 31
Capillary Inlet 32
Replacing the Orifice Disk 33
Orifice Disk Tools 35
Tool Guide 35
Removal Tool 35
Insertion Tool 36
Fitting the Tool Guide 36
Removing the Orifice Disk 36
Fitting a new Orifice Disk 37
Reassembly 39
Analyser Maintenance 41
Ohmmeter analyser checks 41
Checking filaments 42
Removing the filaments 43
Fitting filaments 45
Ion Source cleaning 46
Cleaning while fitted to the analyser 46
Remove for cleaning 47
Refitting the ion source 49
6. Exploded Views 50
Analyser pin-outs 50
7. Spare Parts 51
Filaments 51
Ion source 51
Support Contact Numbers 52

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
5
MKS Instruments UK Ltd
3 – 4 Cowley Way
Crewe
Cheshire
CW16AG
United Kingdom
EC Declaration of Conformity
MKS Instruments UK Ltd declares that the:
Cirrus2 bench top RGA package
Is in accordance with the following directives:
I hereby declare that the equipment named above has been designed to comply with the relevant sections of the above
referenced specifications. The unit complies with all essential requirements of the Directives.
Signed:
J.M.Higgins
General Manager
7th June 2011
2004/108/EEC Electromagnetic Compatibility Directive
EN 61326-1:2006 Electrical equipment for measurement, control & laboratory use.
2006/95/EC Low Voltage Directive
EN 61010-1:2006 Safety requirements for electrical equipment for measurement, control & laboratory use.

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
6
Overview
The Cirrus2 is a purpose built bench top quadrupole mass spec for gas monitoring at atmospheric pressure.
Incorporating the latest Cirrus2 hardware, the Cirrus2 has been designed to meet all the traditional requirements for a
bench top RGA sensor, but offers data collection speeds in the milliseconds, even over the full dynamic range -
unachievable with previous technologies.
Analogue and digital interfaces are provided for integrated systems and future technologies.
The Cirrus2 is designed to be operated in several ways:
From a host computer – an IBM compatible PC or MAC running the MKS Process Eye Professional or EasyView
software package.
PC or MAC using a web browser such as Internet Explorer or Safari, or,
Integration into existing systems controlling through the use of the ASCII protocol command set.
This manual focuses on the Cirrus2hardware and should be used in conjunction with the relevant user interface manual
during installation.
Any required network communications cards should be installed and configured prior to installing the Cirrus2, or RGA
software if supplied.

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
7
1. Specifications
Mechanical
Cirrus2
Dimensions:
430mm wide x 670mm deep (plus 100mm for connections) x 420mm tall
Weight:
34.5 kg
Analyser
Triple mass filter, 1-6amu, 1-200amu or 1-300amu, Faraday and SEM detector
Electrical
Power Inlet
100 to 120 VAC rms 47- 63Hz @ 6.3A rms
200 to 240 VAC rms 47- 63Hz @ 3.15A rms
Installation category (over voltage category) II to IEC664
Insulation Class I to IEC536
Fuses
Located on rear panel
All fuses are 20mm x 5mm H.R.C ceramic, 250VAC, characteristic (T) and compliant with IEC127
Environmental
Temperature range
0 to 400C, 80%RH non-condensing, operating and storage
Pollution degree 2 to EN61010
Enclosure IP20 to EN60529

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
8
Safety
IP20 to EN60529
The protective earth conductor of the power cord must be connected to the power source protective earth terminal.
There are no operator replaceable parts within the Cirrus2 unit.
The Cirrus2 must be used only in the manner specified in this document.
Connectors
The connectors for external circuits are for use only with MKS equipment, or equipment which has no accessible
hazardous live parts.
The external circuits must comply with the requirements of EN61010-1 section 6.6.1.
Ports for connection of accessories do not carry hazardous potentials.
Do not position the Cirrus2 so that it is difficult to unplug the supply power cord.
Installation Category II comprises mains powered, local level appliances.
Warning labels
Risk of electric shock
Affixed to the rear panel refer to:
Hazardous internal voltages that are exposed when the cover is removed
Risk of danger or malfunction
Read all instructions carefully before use
The control unit and signal ports are designed for connection to MKS accessories via MKS supplied cables
There are no accessible hazardous voltages or currents on these ports, MKS must be consulted before any non-MKS
supplied cables or accessories are connected to these ports

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
9
Hot surface
Affixed internally refers to hot surfaces around the oven
Heavy object
This equipment weighs in excess of 18kg and should be lifted by at least two people.
To avoid muscle strain and or back injury, movers should employ lifting aids and the correct lifting techniques
Ventilation
Do not obstruct any of the outer cover ventilation openings.
Allow a minimum clearance of 50mm all round.
Do not exceed the maximum operating ambient temperature.

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
10
Additional Installation Maintenance and Operating Instructions
In order to comply with European regulations, the following procedures must be followed:
A) INSTALLATION
1. The installation procedures given in the operating and technical manuals must be followed in addition to these
instructions.
2. The mains power cable must conform to local regulations and must have a protective earth (PE) conductor securely
connected to the power plug protective earth contact.
3. Cables attached to all other ancillary signal and control ports must have a length of less than 3 meters. If greater
length is required, MKS Instruments Ltd. must be contacted for technical guidance on possible EMC and safety issues.
4. The vacuum system on which the analyser/RF head is mounted must be earthed, to a protective earth, preferably to
the same protective earth as the control unit.
B) OPERATION
1. The equipment is not authorised for use as a critical component in a life support or safety critical system without the
express written approval of MKS Instruments Ltd.
2. All instructions given in the operating manual must be followed.
3. Adjustments are strictly limited to those accessible from the control panel and computer keyboard and only when
running software supplied by MKS Instruments Ltd.
C) MAINTENANCE
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE
EQUIPMENT
1. Maintenance functions must only be carried out by competent persons.
2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra Products Ltd., unless
special arrangements are made.
3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and safety critical and
must not be substituted. Replacement parts are available from MKS Instruments UK Ltd.
4. Equipment enclosures embody certain special fastenings and bonding devices that affect EMC and safety
performance. These must be correctly re-fitted after servicing.

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
11
2. Connections and Indicators
Front Panel
Along with the capillary inlet, the front panel incorporates a bang of six status indicators to assist in the operation of the
Cirrus2.
Power
The indicator is green when power is supplied to the Cirrus2 unit.
Turbo at Speed
The indicator is amber while the turbo molecular pump accelerates, changing to green when it has reached normal
operating speed.
The filament protect trip is interlocked to this signal to prevent operation of the filament before a suitable chamber
pressure has been obtained.
Capillary Heater
The indicator is amber when the capillary heating element is on.
System Heater
The indicator is amber when the heater temperature is set to 80degC “Heat”, and red when at the 180degC setting
“Bake”.
2

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
12
Emission
The indicator is green when a filament is active and operating correctly.
Coms
This indicator blinks green when communications have been established with the Cirrus

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
13
Rear Panel
The rear panel incorporates all of the external connections required by the Cirrus2, as well as exhaust purge
connections.
A description of each of the connectors can be found below.
The signal and data ports must not be connected to ports that could become hazardous live.
RGA Coms
A standard RJ45 type 10/100 Base-T Ethernet connector used to connect the Cirrus2 to a host PC, hub, switch or
network.
Ensure you read through the network scenarios starting on Page 18 before connecting the unit to your network
Power
The mains power switch and fused IEC socket for connection to the local mains supply.

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
14
Analogue I/O Connector
A standard 15-way D-type socket used for interfacing with external equipment.
This may be already in use depending on the type of RGA system purchased.
This interface offers the following functionality:
Two analog outputs 0 to +10V 12bit
Four, quasi-differential analog inputs, -11 to +11V, with a maximum voltage on the return of ±0.5V
±15V power outputs both fused at 120mA, fuses are self resetting.
NOTE:
The 120mA maximum load for the power supply outputs is shared between the Digital and Analogue connectors.
* Analog input 1 and Analog input 1 return are reserved for use with the internal cold cathode gauge.
Pin Function Description
1 -15V -15V supply output, fused at 120mA
2 Analogue Input 4 Return
3 Analogue Input 3 Return
4 Analogue Input 2 Return
5 Analogue Input 1 ±11v
6 Composite Return Differential Output Return
7 Electrometer Differential Output Direct Electrometer output from 50Meg feedback
resistor
8 0V
9 +15V +15V supply output, fused at 120mA
10 Analogue Input 4 ±11v
11 Analogue Input 3 ±11v
12 Analogue Input 2 ±11v
13 Analogue Input 1 Return
14 Analogue Output 1 0 – 10v
15 Analogue Output 2 0 – 10v

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
15
Digital I/O Connector
See Interfacing Notes on Page 16 before making connections to this interface.
A standard 25-way D-type socket used for interfacing with external equipment. This may be already in use depending on
the type of RGA system purchased, otherwise it is used to connect accessories such as a Remote Vacuum Controller.
The Digital I/O connector can also be used to provide alarm output signals and process trip signals.
This interface offers the following functionality:
16 configurable I/O lines
+3.3V power output fused at 120mA, fuses are self resetting
±15V power output fused at 120mA, fuses are self resetting
+24V power output fused at 120mA, fuses are self resetting
Note: The total power consumption on each rail (+3.3V, ±15V & +24V) for both the Analog and Digital I/O ports must not
exceed 120mA.
Pin Function Description
1 Multiplier Trip Dedicated to Multiplier Trip
2PA1
3 PA3
4 PA5
5 PA7
6 PB1
7 PB3
8 PB5
9 PB7
10 0V Digital
11 0V Analogue
12 -15V -15V supply output, fused at 120mA
13 +15V +15V supply output, fused at 120mA
14 PA0
15 PA2
16 PA4
17 PA6
18 PB0
19 PB2
20 PB4
21 PB6
22 +3.3V fused +3.3V supply output, fused at 120mA
23 Not Connected
24 GND
25 +24V +24V supply output, fused at 120mA

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
16
Interfacing Notes
The 120mA maximum load for the power supply outputs is shared between the Digital and Analogue connectors.
When interfacing digital signals between units the preferred method is to:-
a) Have a pull-up resistor/current source on all inputs to the local power supply rail. Often this feature is provided by the
digital input chip itself.
b) Use an open collector/drain/contact closure to ground as the output drive signal.
c) Where appropriate, arrange the hardware/software configuration so that an input Hi state is a safe condition. This
ensures that if a connection should be unplugged the system will go into a fail-safe state.
d) In cases where the external equipment is some distance away and/or is likely to have a different ground potential the
fitting of opto-couplers on the interfacing should be implemented.
Using this approach allows for easily interfacing between different voltage levels and logic families.

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
17
Exhaust Purge IN/OUT
You may want to connect the Cirrus to a nitrogen purge system, or vent the exhaust gas to an extractor system. You may
have been advised whether we feel for your particular application nitrogen purging is necessary, desirable or absolutely
vital.
Optional: The Cirrus includes the facility to purge the turbo pump bearings and vent the vacuum chamber with nitrogen.
This feature is usually used when the unit is likely to be exposed to corrosive and/or toxic gases.
Flushing the pump exhaust
Connect a dry nitrogen supply at a pressure of 1 - 2 p.s.i. above atmospheric pressure to the IN port to improve detection
levels.
Connect a second pipe to the port labeled OUT to exhaust the dry nitrogen safely. The exhaust nitrogen may now
contain corrosive/toxic gases.
Exhaust the pump only
Even if you are not using nitrogen purge you MUST connect the Cirrus to an exhaust system.
Blank off the port marked IN and use only the OUT to exhaust the pump.
The standard configuration of Cirrus does not use rotary pumps, so there will be no hydrocarbon vapors emitted by the
vacuum pumping.
However, options are available that may use external rotary pumps. These should always be vented into an exhaust
system.
It is important that the pumps exhaust gases are ALWAYS vented safely. Even if they are not toxic or corrosive,
they may cause asphyxiation.
Never block, or obstruct any pump exhaust, as this may cause dangerous internal pressure buildup.

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
18
3. Installation
The Cirrus2 should be installed on a flat, level bench top with adequate ventilation as specified in Specifications section
of this manual. Periodic maintenance will be required during the lifetime of the unit, with this in mind some thought should
be given to the location.
All connections should be easily accessible, with the Cirrus2 positioned so that strain is not placed on any of the cables
or connectors.
Connecting to the Ethernet Port
Overview
Before connecting a cat5 patch lead to the socket marked “ETHERNET” please take the time to read through the
following sections.
If the Cirrus2is to be installed on your company network, then there are a number of different network configurations that
must be considered before you continue.
There are four main network technologies employed in the distribution of network addresses (IP addresses) to network
devices, the Cirrus2can be configured to use any of the following:
Auto-IP
A mechanism where in the absence of a DHCP or BOOTP server on the network, network entities can obtain their
unique IP addresses by a process of arbitration between devices. If a DHCP or BOOTP server is present on the network,
Auto-IP will obtain an IP address from the server.
DHCP
Short for Dynamic Host Configuration Protocol, a server running on the network is responsible for assigning dynamic IP
addresses to devices on a network.
BOOTP
Short for Bootstrap Protocol, an Internet protocol that enables a diskless workstation to discover its own IP address and
the IP address of a BOOTP server on the network.
Static
Each address is issued manually to each device by the network administrator.
By default the Cirrus2is configured for Auto-IP which is by far the simplest method if you are new to networking, or are
installing the Cirrus2into an existing Auto-IP or DHCP network.
If you intend to connect a Cirrus2 to an existing network, then you must consult your IT Specialist for advice on how the
network assigns IP addresses.

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
19
Do not continue until you are certain of your network configuration
The following sections describe the different network connection options available to the user when installing the Cirrus2.
The Cirrus2is to be connected to a network running Auto-IP or DHCP
Option - Use Auto-IP
If the Cirrus2is to be connected to a network where existing devices obtain their IP address automatically, then no further
configuration is required.
You can safely connect the Cirrus2to your network.
The Cirrus2is to be connected to a network running BOOTP
Option - Use Auto-IP
If the Cirrus2 is to be connected to a network running BOOTP, then your IT Specialist will need to perform certain tasks
on the BOOTP Server to complete the installation.
Do not connect the Cirrus2to your network without involving your IT specialist.
The Cirrus2 is to be connected to a network using Static IP addressing
See the Static IP Addressing section
For details on how to assign a static IP address to the Cirrus2, please see the guide on Page 23.
You will need to be allocated an IP address for use by your IT Specialist, or have them perform the installation for you.

MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
20
Directly connecting to the Cirrus2
If your PC or MAC is not part of a network, you may choose to connect the Cirrus2directly to the Ethernet port or a local
hub. The following section describes what is required to get your unit up and running.
As stated earlier, the Cirrus2is configured to use Auto-IP by default, all that is left to do is to ensure your PC or MAC is
configured the same way.
Connect the Cirrus2to your PC, MAC or hub with a standard Cat5 STP cable (there is no need to use a dedicated cross-
over cable) and power on the Cirrus2
Next you need to check if your PC or MAC is configured for Auto-IP; most are by default.
Windows PC
Start / Connect To / Show All Connections
Click once on the connection hosting the Cirrus2
Note the information displayed in the Task Pane
If the text “Automatic Private Address” is displayed, then the PC is ready to begin
communications with the Cirrus2unit.
If the text “Obtaining an IP address” is displayed, then please wait a few moments for
the sequence to complete.
If any other text is displayed, then you will need to make changes to the way your PC
obtains IP addresses.
MAC
Apple Menu / System Preferences / Network
Ethernet / Configure
The option “Using DHCP” or “Using Auto-IP” should be displayed.
If your PC or MAC is not configured for Auto-IP, you can make the following changes to enable the function. You will
need to have Administrative privileges.