MKS elite 300 User manual
OPERATIONMANUAL
Manual Order Number: 1036315 Copyright © 2009 MKS Instruments, Inc. All rights reserved.
Revision Level: 00A MATCHWORK®is a registered trademark of MKS Instruments, Inc.
eliteTM
RFPlasmaGenerator
elite300/600/750
WARNING:POTENTIALLYLETHALVOLTAGESAREUSEDBYANDPRODUCEDBY
THISUNIT.Athoroughunderstandingofthismanualisrequiredbefore
attemptingtoinstallthisunitintoasystem.
CFC's
DONOTUSEANYCFC(CHLOROFLUOROCARBON)SOLVENTINTHEMAINTENANCEOFTHIS
PRODUCT.Inrecognitionofourresponsibilitytoprotecttheenvironment,thisproducthas
beenmanufacturedwithouttheuseofCFCs.Theno‐cleanfluxnowusedinallsoldering
operationsmayleaveasmallinertresiduethatwillnotaffecttheperformanceofthe
product.TheuseofCFCsforcleaningormaintenancemayresultinpartialliquificationofthe
no‐cleanfluxresidue,whichwilldamagetheunitandvoidthewarranty.
ISO 9001
QUALITY
SYSTEM
ThisproductismanufacturedatanMKSInstruments’ISO‐9001‐Quality‐System‐compliant
facility.
Notice
Thematerialcontainedinthismanualissubjecttochangewithoutnotice.Nopartofthismanualmaybereproduced
orutilizedinanyformorbyanymeans,electronicormechanical,includingphotocopyingorelectronictransmissionor
othermeansofreproductionordistributionwithoutpriorwrittenconsentofMKS,ENIProducts.Thedrawings,
specificationsandothertechnicalinformationcontainedinthismanualarethepropertyofMKS,ENIProductsandshall
notbecopied,reproducedorusedinanyway,inwholeorinpart,asthebasisofmanufactureorsaleofsimilaritems
withoutthepriorwrittenconsentofMKS,ENIProducts.
Warranty
MKS,ENIProductswarrantstotheoriginalpurchaserforaperiodofoneyearfromthedateofdelivery,each
instrumenttobefreefromdefectsinmaterialsandworkmanship.Foraperiodofoneyear,MKS,ENIProducts
will,atitsoption,adjust,repair,orreplacedefectiveparts,withoutchargetotheoriginalpurchaser,sothat
theinstrumentperformsaccordingtoitsspecifications.
Whenwarrantyserviceisrequired,theinstrumentmustbereturned,transportationprepaid,tothe
factoryortooneofMKS,ENIProducts'designatedservicecenters.If,inouropinion,theinstrumenthasbeen
damagedbyaccident,unreasonableuse,buyer‐suppliedsoftwareorinterfacing,impropersitepreparationor
maintenance,orabnormalconditionsofoperation,repairswillbebilledatstandardrates.Inthiscase,an
estimatewillbesubmittedbeforetheworkisstarted.
THISLIMITEDWARRANTYISEXCLUSIVEANDMKS,ENIPRODUCTSMAKESNOOTHERWARRANTIES,
EXPRESSORIMPLIED,ANDALLOTHEREXPRESSORALORWRITTENWARRANTIESANDALLWARRANTIES
IMPLIEDBYLAW,INCLUDINGANYWARRANTIESOFMERCHANTABILITYORFITNESSFORAPARTICULAR
PURPOSEOROTHERWARRANTYOFQUALITYAREEXCLUDEDANDDISCLAIMED.INNOEVENTSHALLMKS,ENI
PRODUCTSBELIABLEFORSPECIAL,INDIRECT,INCIDENTALORCONSEQUENTIALDAMAGESRESULTINGFROM
BREACHOFANYWARRANTY,WHETHEREXPRESSORIMPLIED,INCLUDINGANYIMPLIEDWARRANTYOF
MERCHANTABILITYORFITNESSFORAPARTICULARPURPOSE,ORFROMANYCAUSEWHATSOEVER,
INCLUDINGNEGLIGENCE.Buyer'ssoleandexclusiveremedyunderthiswarrantyshallberepairor
replacementassetforthabove,orifMKS,ENIProductsisunabletorepairorreplacethedefectivepartwithin
areasonabletime,arefundofthepriceofthepartorgoodsthatgiverisetothewarrantyclaim.
ServiceAndTechnicalAssistance
ForServiceorRepaircontacttheclosestCustomerServiceDepartmentwiththefollowinginformation:
•Modelandserialnumber
•Purchaseordernumber
•Detaileddescriptionofmalfunction
•Yourcompany's"BillTo"and"ShipTo"address
YouwillreceiveaRMA(ReturnMaterialsAuthorization)number,thewarrantystatusoftheunittobe
returnedandestimatedrepaircharge,ifany.TheRMAnumberisyourauthorizationnumber.Pleasetypethis
numberonyourpurchaseorderandshippinglabel.AfterMKS,ENIProductsreceivestheunit,afirmquote
andestimateddateofcompletionwillbegiven.
ForTechnicalAssistanceforyourparticularapplication,contactthenearestMKS,ENIProductsSalesand
ServiceCenter.Thefollowinginformationwillhelpusprovideyouwithpromptandefficientservice:
•Alloftheinformationcontainedontheunit'snameplate.
•Namesandtelephonenumbersofimportantcontacts.
•Detaileddescription(i.e.,physicaldamageand/orperformanceanomalies,quantitativeand/or
qualitativedeviationfromspecifications),includingmiscellaneoussymptoms,datesandtimes.
•Theenvironmentandcircumstancesunderwhichtheissuedeveloped.
•Supportingtestdataand/orrecordsthatcanbeprovided.
•Anyprevious,relatedconversationsand/orcorrespondencewithMKS,ENIProducts.
Sales&ServiceLocations
ROCHESTER,NYMKSInstruments,Inc.
100HighpowerRoad
Rochester,NY14623
TollFreeUSASalesHotline:
TollFreeUSATechnicalSupport
Hotline:
Tel:
Fax:
(585)427‐8300
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1‐800‐267‐5362
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SanJose,CA95134
Tel:
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(408)750‐0300
(408)428‐0390
AUSTIN,TXMKSInstruments,Inc.
1321RutherfordLane
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(512)719‐8000
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SINGAPOREBlk4010Techplace1
#01‐07/08/09
AngMoKoAve10
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65‐6451‐1062
65‐6451‐0172
TAIWAN2F,No.47,Ln.2,Sect.2
KuangFuRd.
Hsinchu300
Taiwan,ROC
Tel:
Fax:
886‐3‐575‐3040
886‐3‐575‐3048
P.R.ofCHINAWestendof2ndfloor,
No.3building(T20‐3)
No.258JinzangRd.,ShanghaiJin
QiaoExportProcessingZone
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Tel:
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ProductandApplicationsinformationalsoavailableontheInternetat:
http://www.mksinst.com
Thispageintentionallyleftblank.
Contents
eliteTM i
TABLEOFCONTENTS
Chapter1‐Introduction............................................................................5
1.1AboutThisManual...................................................................................... 6
1.1.1FindingYourWayAround ............................................................... 7
1.1.2DocumentationConventions .......................................................... 8
Commands .......................................................................... 8
Definitions........................................................................... 8
1.2SafetyConsiderations ................................................................................. 9
1.2.1ExclamationPointWithinaTriangle............................................... 9
1.2.2LightningBoltWithinaTriangle.................................................... 10
1.2.3ServiceWarning ............................................................................ 10
1.2.4Non‐ionizingElectromagneticRadiationWarningTriangle ......... 11
1.2.5TechnicalSupport ......................................................................... 11
1.2.6Earth(Ground) .............................................................................. 12
1.2.7ProtectiveEarth(Ground)............................................................. 12
1.2.8FrameorChassis ........................................................................... 12
1.3Nameplate................................................................................................. 13
1.4GettingStartedQuickly............................................................................. 14
Chapter2‐SystemInstallation................................................................16
2.1Unpacking/Inspection ............................................................................... 16
2.1.1 MechanicalInspection .................................................................. 16
2.1.2ClaimforDamage.......................................................................... 16
2.1.3PackagingforReshipment ............................................................ 16
2.1.4AccessoriesAvailable .................................................................... 17
2.1.5InstructionsforLiftingandCarrying ............................................. 17
Contents
iieliteTM
2.2InstallationRequirements......................................................................... 18
2.2.1eliteTMAirflowRequirements ....................................................... 18
2.2.2PowerRequirements .................................................................... 18
UpstreamDisconnectDevice............................................ 18
2.3RackInstallation ............................................................................................ 19
2.4SystemInterconnect ..................................................................................... 19
2.5RemoteDigitalInterface ............................................................................... 20
2.5.1CommunicationConfiguration...................................................... 20
2.6RFPowerConnections................................................................................... 21
2.7SafetyInterlocks ............................................................................................ 21
2.8PanelsandControls....................................................................................... 22
2.8.1FrontPanel.................................................................................... 23
Keypadcontrols: ........................................................................ 26
2.8.2RearPanel ..................................................................................... 27
Connectionsandindicators ....................................................... 27
StatusLEDs................................................................................. 29
2.9PowerRequirements..................................................................................... 31
2.9.1ACMainsConnection.................................................................... 31
2.11Maintenance&Cleaning ............................................................................... 32
2.12SystemCheck................................................................................................. 33
Chater3‐eliteTMOperation .................................................................... 34
3.1BasicOperationthroughtheRS‐232Interface ............................................. 34
3.1.1RequiredItems.............................................................................. 34
3.1.2CommandPrompt......................................................................... 35
3.1.3StartupMessage ........................................................................... 35
3.1.4GeneralCommandSyntaxofOneLetterCommands(OLC)......... 35
3.1.5OptionalArgumentDataEntry ..................................................... 36
SupportedOLCCommands(UserLevel)........................... 37
3.1.7ExampleOperationoftheSystemviaOLC ................................... 40
3.2OperationthroughOptionalInterfaces ........................................................ 41
3.2.125‐pinAnalogInterface ................................................................ 41
3.2.2CEX(CommonEXciter)IN/OUT................................................... 43
3.3 PulsedOperation........................................................................................... 43
Contents
eliteTM iii
Chapter4‐Troubleshooting....................................................................44
4.1HardwareFaults ............................................................................................ 44
AppendixA‐eliteTMSpecifications ..........................................................45
AppendixB‐GlossaryofTerms ...............................................................48
Contents
iveliteTM
Thispageintentionallyleftblank.
Introduction
eliteTM 5
Chapter1
Introduction
TheeliteTMPlasmaGeneratorisaruggedRFpowersourceforplasmaetching,
CVDandsputteringapplications.Featuringprecisepowercontrolanddigital
interfacing,thiseliteTMgeneratorprovidestheexceptionalreliabilityand
repeatabilityrequiredfortoday’sdemandingplasmaprocesses.
Operatingatthefrequencyof13.56MHz,theeliteTMplatformconsistsof
productsthatwillproduce300W,600Wor750Wintoa50load.The
digital‐basedcontrolmoduleautomaticallymeasuresforwardRFpowerand
reflectedRFpower,maintainingconstantpoweroutputwithin±2%ofset
pointoveraDynamicPowerRangeof1to300,600or750watts.TheRF
outputcanbepulsedatupto1kHzwithdutycyclesfrom1to99%.
PrecisepowercalibrationistraceabletoNIST(NationalInstituteofStandards
andTechnology)throughtheENIPowerStandard.Lowharmonicdistortion
andspurious‐freeperformancecomplementtheunit’sRFpoweroutput
controlandunconditionalRFstability.
AruggedRFpowersectionensuressubstantialpowerdeliveryintofixed
matchsystems.Thedigital‐basedcontrolconstantlymonitorsinternal
subsystemstatustomaximizesystemavailability.
A9‐pindigitalinterfaceaswellasastandard25‐pinanaloginterfaceprovide
remotecontrol,monitoringanddiagnosticcapability.Optionalcustom
interfacecardsarealsoavailable.
Introduction
6eliteTM
Ifthisequipmentisusedinamannernotspecifiedbythe
manufacturer,thentheprotectionprovidedbytheequipment
maybeimpaired.
ThisequipmentcontainsNOUSERSERVICEABLEPARTS.Intheevent
thatequipmentservicingisrequired,pleasecontactanauthorized
MKS,ENIProductsservicecenter.
1.1 AboutThisManual
Thismanualprovidesalloftheinformationrequiredtosafelyinstall,setup
andoperateyourgenerator.Whileeveryattempthasbeenmadetoprovide
aconcisesetofinstallationandoperatingproceduresintheGettingStarted
Quicklysection,detailedinstructionsarealsogiveninChapters2and3.
Itisessentialthatyoubecomethoroughlyfamiliarwiththecontentsofthis
manualpriortousingyourgenerator.Ifusedproperly,theinformation
containedinthismanualwillnotonlypromotereliablegenerator
performancebutwillalsoencourageasafeoperatingorserviceenvironment
forallindividuals.
ThismanualusestheoutputpowerleveloftheeliteTM750asadefault
(750W).Howeverwhereapplicable,the750Woutputcouldbereplaced
with300Wor600Wfortheelite300andelite600,respectively.Also,
certainspecificationsormodesofoperationmaybedifferentthanthe
typicaloperationbycustomerrequest.Refertoanyapplicableaddendumor
specificationsforyourspecificgeneratorwhenorderingotherthanthe
standardeliteTMunit.
Introduction
eliteTM 7
1.1.1 FindingYourWayAround
Thismanualisdividedintofourchaptersandtwoappendices.Themain
TableofContentswillhelpyoutoquicklylocatethechapterthatcontains
theinformationthatyoumaybeseeking.Thefollowingisabriefdescription
ofeachchapter.
Chapter1Thechapteryouarereading.Thischapterprovidesinformationonthe
contentofthemanual,thedocumentationconventionsused,safety
considerationsthatneedtobeobservedandaconciseGettingStarted
Quicklysection.
Chapter2ThischapteracquaintstheuserwiththeeliteTMPlasmaGenerator.It
coversmajorfeaturesandfrontandrearpaneldescriptions.This
chaptercoverseverythingneededtoinstallandsetupyourgenerator
fromUnpackingandInspectiontoInitialPowerUp.
Chapter3Thischaptercoversinmoredetailhowtooperateyourgeneratorand
takeadvantageofallofitsfeatures.
Chapter4Thischapterdetailscommontroubleshootingsituationsyoumay
encounterwhenusingyourgenerator,alongwiththeirsolutions.
AppendixAThisappendixprovidescompletephysicalandelectricalcharacteristics
ofyourgenerator.
AppendixBThisappendixprovidesaglossaryoftermsthathavebeenused
throughoutthismanual.
Introduction
8eliteTM
1.1.2 DocumentationConventions
Tocallattentiontoimportantinformationinthismanual,themethodsof
formattingdescribedbelowhavebeenused.
Commands
Manypartsofthismanualrefertocomputercommandsanddata.Itis
importanttorecognizetheconventionsusedinthismanualinorderto
understandthemeaningofthesecommands.
AngleBrackets<>Thesebracketsareshownforcommandparameters.They
arenotpartofthecommandandshouldnotbeentered.
RoundedBrackets()Thesebracketscontainhexequivalentnumbersforprintable
ornon‐printablecharacters.Thelower‐caseh(h)standsfor
hexadecimal.
CurlyBrackets{}Thesebracketsindicateasymbolnameforspecialcontrol
codesornon‐printablecharacters.Examplesofcommonly
usedcontrolcodesarelistedbelow.
{LF}LineFeed(0Ah)
{CR}CarriageReturn(0Dh)
{ESC}Escape(1Bh)
Definitions
AppendixBprovidesacompletelistofallthenewtermsusedinthismanual.
Introduction
eliteTM 9
1.2 SafetyConsiderations
Certainsafety‐relatedconsiderationsmustbeobservedbeforeinstalling,
operating,orservicingthisequipment.Symbolicand/ortextuallabelsand
markingsareusedinand/orontheequipment,aswellasinthisproduct
manual,toconveyand/oridentifysuchimportantinformation.Pleaselook
fortheselabelsandmarkings,andfollowtheirdirection.
ThetermCAUTIONisusedtoindicateapotentialhazardthatcouldresultin
minorinjuryorequipmentdamage,andtowarnagainstunsafepractices.
ThetermWARNINGisusedtoindicateapotentialhazardthatcouldresultin
injuryordeathifnotavoided.
ThetermDANGERisusedtoindicateanimminenthazardofseriousinjuryor
deathifnotavoided.
1.2.1 ExclamationPointWithinaTriangle
SymbolDefinition:Caution,refertoaccompanyingdocuments
The“exclamationpointwithinatriangle”symbol(referenceISOPublication
3864,No.B.3.1)isusedinand/orontheequipmenttoalerttheinstaller,
operator,orservicepersonneltothepresenceofimportantrelated
installation,operation,and/orserviceinstructionsandtodirectsuch
personneltotheproductmanualforthatinformation.Thissymbolisalso
usedwithintheproductmanualitselftoidentifyimportantinstructions.
Introduction
10eliteTM
1.2.2 LightningBoltWithinaTriangle
SymbolDefinition:Caution,riskofelectricshock
The“lightningboltwithinatriangle”symbol(referenceIECPublication417,
SymbolNo.5036,andISOPublication3864,No.B.3.6)isusedinand/oron
theequipmenttoalerttheuser,operatororservicepersonneltothe
presenceofuninsulatedvoltagewithintheenclosureofsufficientmagnitude
toconstituteariskofelectricshock.Onlyauthorizedservicepersonnelwitha
schematicdiagramandathoroughknowledgeofthevoltagesexistingwithin
theequipmentshallremovecoversorpanelsbearingthissymbol.This
symbolisalsousedwithintheproductmanualitselftoidentifyimportant
operatingand/ormaintenanceinstructions,which,ifnotfollowedcarefully,
couldresultinpersonalinjuryorevendeath.
1.2.3 ServiceWarning
ServiceWarningMarking
Figure1.2.3
Introduction
eliteTM 11
MKS,ENIProductsisresponsibleforsafety,reliability,and
performanceoftheequipmentonlyif:
•Assemblyoperations,extensions,readjustments,modifications,o
r
repairsarecarriedoutbyauthorizedpersonnel.
•Theelectricalinstallationismadeinaccordancewiththe
installationinstructionsprovidedandtheroominwhichthe
equipmentisinstalledcomplieswiththeenvironmental
requirements.
•Theequipmentisusedinaccordancewiththeinstructionsfor
use.
1.2.4 Non‐ionizingElectromagneticRadiationWarningTriangle
SymbolDefinition:Caution,non‐ionizingelectromagneticradiation
The“non‐ionizingelectromagneticradiationwarningtriangle”symbol
(referenceIECPublication417,SymbolNo.5140,andISOPublication3864)is
usedontheequipmenttoalerttheinstaller,operator,orservicepersonnel
thattheequipmentiscapableofproducingelevated,potentiallydangerous,
levelsofnon‐ionizingelectromagneticradiation,particularlyRFradiation.
1.2.5 TechnicalSupport
Onthebackofthegeneratorisalabelwithatoll‐freenumberforMKS,ENI
ProductsTechnicalSupport.Shouldyouhaveanydifficultieswithyour
generatorandhaveexhaustedallpossibilitiesintheTroubleshooting
Chapter,pleasefeelfreetocallus.
TechnicalSupportLabel
Figure1.2.5
Introduction
12eliteTM
1.2.6 Earth(Ground)
SymbolDefinition:Earth(ground)
The“earth(ground)”symbol(referenceIECPublication417,SymbolNo.
5017)isusedtoidentifyequipmentearth(ground)terminal(s)incaseswhere
the“noiseless(clean)earth(ground)”symbol(referenceIECPublication417,
SymbolNo.5018)andthe“protectiveearth(ground)”symbol(referenceIEC
Publication417,SymbolNo.5019)arenotexplicitlyrequired.
1.2.7 ProtectiveEarth(Ground)
SymbolDefinition:Protectiveearth(ground)
The“protectiveearth(ground)”symbol(referenceIECPublication417,
SymbolNo.5019)isusedtoidentifyequipmentterminal(s)whichare
intendedforconnectiontoanexternalprotectiveconductorforprotection
againstelectricshockincaseofafaultortoidentifytheterminalofa
protectiveearth(ground)electrode.
1.2.8 FrameorChassis
SymbolDefinition:Frameorchassis
The“frameorchassis”symbol(referenceIECPublication417,SymbolNo.
5020)isusedtoidentifyequipmentframeorchassisterminal(s).
Introduction
eliteTM 13
1.3 Nameplate
TheeliteTMPlasmaGeneratorcanbeidentifiedbyanameplateatthebackof
theunitthatcontainsthefollowinginformation.
ENI MODEL NO: ELITE
PART NO: ELITE 750FP-01
SERIAL NO: XXX DATE: MM/DD/YY
ENI REV: XXX
OUTPUT: 750W WEIGHT: 16 kg / 25 lbs
A
B
C
D
E
TypicaleliteTMSerialTagLabel
Figure1.3
A.ENIMODELNUMBER:
Thenumberthatuniquelyidentifiesthe
unit.
D.ENIREV:
Therevisionletteridentifyingproduct
configuration(RevisionAistheinitial
revisionlevel).
B.PARTNO:
Theassemblynumberthatuniquely
identifiesproductconfiguration.
E.OUTPUT&WEIGHT:
Theoutputoftheunitinwattsandits
weightinkilogramsandpounds.
C.SERIALNO:
Anumberthatissequentiallyassignedas
theproductismanufactured.
DATE:
ThedateofmanufactureinMM/DD/YY
format.
Introduction
14eliteTM
1.4 GettingStartedQuickly
Thissectionisintendedtoprovideyouwithasetofinstructionstoenable
youtoquicklysetupandstartrunningyourgenerator.Referencestomore
detailedinformationisprovidedattheendofeachstep.
ToquicklysetupyoureliteTMgenerator,followtheprocedurebelow:
1. Ifequipped,makesurethegenerator’spowerswitchisintheOFF
position.
Note:Onsomebasicmodels,ACpowercontrolisaccomplished
throughtheremovaloftheAClinecord.Inthiscase,ensuretheAC
linecordisdisconnectedfromtherearofthegenerator
2. AttachtheACMainslinecordtoa100–264V,single‐phase,15A
outlet.
(Seesection2.9formoreinformationonACPowerRequirements.)
3. Ifapplicable,connectthe9‐pinmaleserialdigitalinterfacetothe
femaleserialinterfaceconnectorontherearpanel.
Seesection3.1forinstructionstosetupyourcomputer.
SeeTable2.5.1forpinouts.
4. Ifapplicable,connectthe25‐pinmaleanaloginterfacecabletothe
femaleconnectoeontherearofthegenerator.Iftheanaloginterface
willnotbeused,connectP/N1019388‐001interfacejumpertodefeat
theanaloginterfaceinterlockcircuit.
SeeTable2.5.1forpinouts.
5. ConnecttheRFcablefromtheplasmachambertotheRFoutput
connection.Thiswillvarydependingupontheapplicationyouare
using.
Introduction
eliteTM 15
6. MakesurethattheRFoutputcoverisinplace.Thiscoverisdesigned
topreventremovaloftheRFoutputcablewithouttheneedforatool.
Itisnotdesignedtoremovepowerfromthegeneratorifremoved.
ObserveallprecautionswhenRFpowerisactive.
7. IfthegeneratorisequippedwithanON/OFFswitch,movetheswitch
totheONposition.IftheswitchhasnoON/OFFswitch,simplyplugin
theIEClinecordtotherearoftheunittoactivepower.Whentheunit
isreadytooperate,theLEDsontherearpanelwillbeactive.
8. Fromtheterminal,youshouldseethefollowingmessage:
----------------------------
ENI MONITOR
MKS Instruments ENI Products
----------------------------
9. Thegeneratorisnowreadytooperate.
SystemInstallation
16eliteTM
Chapter2
SystemInstallation
2.1Unpacking/Inspection
2.1.1 MechanicalInspection
Ifdamagetotheshippingcartonisevident,requestthecarrier’sagentbe
presentwhentheunitisunpacked.Checkforequipmentdamageandinspect
thecabinetandpanelsfordentsandscratches.
2.1.2ClaimforDamage
PleasenotifyMKS,ENIProductsdirectlyoryourauthorizedMKS,ENI
Productsrepresentativeiftheproductismechanicallydamagedorfailsto
meetspecificationsuponreceipt.Retainourshippingcartonandpacking
materialforthecarrier'sinspection,aswellasforsubsequentusetoreturn
theunitshouldthisbecomenecessary.
2.1.3PackagingforReshipment
Wheneverpossible,theoriginalshippingcartonandpackingmaterialshould
beusedforreshipment.Iftheoriginalpackingmaterialisnotavailable,wrap
theinstrumentinheavypaperorplastic.Useastrongshippingcontainer.Ifa
cardboardcartonisused,itshouldbeatleast200‐lb.testmaterial.
Useshock‐absorbingmaterialaroundallsidesoftheinstrumenttoprovidea
firmcushionandtopreventmovementinsidethecontainerwalloneach
side.Protectthefrontpanelbymeansofcardboardspacersinserted
betweenthefrontpanelandtheshippingcarton.Makesurethatthe
instrumentcannotmoveinthecontainerduringshipping.Sealthecarton
withagoodgradeofshippingtapeandmarkthecontainer:
FRAGILE!ELECTRONICINSTRUMENT
This manual suits for next models
2
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