Mks Elite 300 User manual

OPERATIONMANUAL

Revision Level: 00A MATCHWORK®is a registered trademark of MKS Instruments, Inc.



eliteTM

RFPlasmaGenerator

elite300/600/750



WARNING:POTENTIALLYLETHALVOLTAGESAREUSEDBYANDPRODUCEDBY

THISUNIT.Athoroughunderstandingofthismanualisrequiredbefore

attemptingtoinstallthisunitintoasystem.



CFC's



DONOTUSEANYCFC(CHLOROFLUOROCARBON)SOLVENTINTHEMAINTENANCEOFTHIS

PRODUCT.Inrecognitionofourresponsibilitytoprotecttheenvironment,thisproducthas

beenmanufacturedwithouttheuseofCFCs.Theno‐cleanfluxnowusedinallsoldering

operationsmayleaveasmallinertresiduethatwillnotaffecttheperformanceofthe

product.TheuseofCFCsforcleaningormaintenancemayresultinpartialliquificationofthe

no‐cleanfluxresidue,whichwilldamagetheunitandvoidthewarranty.



ISO 9001

QUALITY

SYSTEM



ThisproductismanufacturedatanMKSInstruments’ISO‐9001‐Quality‐System‐compliant

facility.

Notice

Thematerialcontainedinthismanualissubjecttochangewithoutnotice.Nopartofthismanualmaybereproduced

orutilizedinanyformorbyanymeans,electronicormechanical,includingphotocopyingorelectronictransmissionor

othermeansofreproductionordistributionwithoutpriorwrittenconsentofMKS,ENIProducts.Thedrawings,

specificationsandothertechnicalinformationcontainedinthismanualarethepropertyofMKS,ENIProductsandshall

notbecopied,reproducedorusedinanyway,inwholeorinpart,asthebasisofmanufactureorsaleofsimilaritems

withoutthepriorwrittenconsentofMKS,ENIProducts.



Warranty

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MKS,ENIProductswarrantstotheoriginalpurchaserforaperiodofoneyearfromthedateofdelivery,each

instrumenttobefreefromdefectsinmaterialsandworkmanship.Foraperiodofoneyear,MKS,ENIProducts

will,atitsoption,adjust,repair,orreplacedefectiveparts,withoutchargetotheoriginalpurchaser,sothat

theinstrumentperformsaccordingtoitsspecifications.

Whenwarrantyserviceisrequired,theinstrumentmustbereturned,transportationprepaid,tothe

factoryortooneofMKS,ENIProducts'designatedservicecenters.If,inouropinion,theinstrumenthasbeen

damagedbyaccident,unreasonableuse,buyer‐suppliedsoftwareorinterfacing,impropersitepreparationor

maintenance,orabnormalconditionsofoperation,repairswillbebilledatstandardrates.Inthiscase,an

estimatewillbesubmittedbeforetheworkisstarted.

THISLIMITEDWARRANTYISEXCLUSIVEANDMKS,ENIPRODUCTSMAKESNOOTHERWARRANTIES,

EXPRESSORIMPLIED,ANDALLOTHEREXPRESSORALORWRITTENWARRANTIESANDALLWARRANTIES

IMPLIEDBYLAW,INCLUDINGANYWARRANTIESOFMERCHANTABILITYORFITNESSFORAPARTICULAR

PURPOSEOROTHERWARRANTYOFQUALITYAREEXCLUDEDANDDISCLAIMED.INNOEVENTSHALLMKS,ENI

PRODUCTSBELIABLEFORSPECIAL,INDIRECT,INCIDENTALORCONSEQUENTIALDAMAGESRESULTINGFROM

BREACHOFANYWARRANTY,WHETHEREXPRESSORIMPLIED,INCLUDINGANYIMPLIEDWARRANTYOF

MERCHANTABILITYORFITNESSFORAPARTICULARPURPOSE,ORFROMANYCAUSEWHATSOEVER,

INCLUDINGNEGLIGENCE.Buyer'ssoleandexclusiveremedyunderthiswarrantyshallberepairor

replacementassetforthabove,orifMKS,ENIProductsisunabletorepairorreplacethedefectivepartwithin

areasonabletime,arefundofthepriceofthepartorgoodsthatgiverisetothewarrantyclaim.

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ServiceAndTechnicalAssistance

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ForServiceorRepaircontacttheclosestCustomerServiceDepartmentwiththefollowinginformation:

•Modelandserialnumber

•Purchaseordernumber

•Detaileddescriptionofmalfunction

•Yourcompany's"BillTo"and"ShipTo"address

YouwillreceiveaRMA(ReturnMaterialsAuthorization)number,thewarrantystatusoftheunittobe

returnedandestimatedrepaircharge,ifany.TheRMAnumberisyourauthorizationnumber.Pleasetypethis

numberonyourpurchaseorderandshippinglabel.AfterMKS,ENIProductsreceivestheunit,afirmquote

andestimateddateofcompletionwillbegiven.



ForTechnicalAssistanceforyourparticularapplication,contactthenearestMKS,ENIProductsSalesand

ServiceCenter.Thefollowinginformationwillhelpusprovideyouwithpromptandefficientservice:

•Alloftheinformationcontainedontheunit'snameplate.

•Namesandtelephonenumbersofimportantcontacts.

•Detaileddescription(i.e.,physicaldamageand/orperformanceanomalies,quantitativeand/or

qualitativedeviationfromspecifications),includingmiscellaneoussymptoms,datesandtimes.

•Theenvironmentandcircumstancesunderwhichtheissuedeveloped.

•Supportingtestdataand/orrecordsthatcanbeprovided.

•Anyprevious,relatedconversationsand/orcorrespondencewithMKS,ENIProducts.

Sales&ServiceLocations



ROCHESTER,NYMKSInstruments,Inc.

100HighpowerRoad

Rochester,NY14623



TollFreeUSASalesHotline:

TollFreeUSATechnicalSupport

Hotline:

Tel:

Fax:

(585)427‐8300

(585)427‐7839



1‐800‐267‐5362



1‐877‐464‐2789

SANJOSE,CAMKSInstruments,Inc.

70RioRobles

SanJose,CA95134

Tel:

Fax:

(408)750‐0300

(408)428‐0390

AUSTIN,TXMKSInstruments,Inc.

1321RutherfordLane

Suite200

Austin,TX78753

Tel:

Fax:

(512)719‐8000

(512)719‐8095

ENGLAND1AnchorageCourt

CaspianRoad

Altrincham,Cheshire

WA145HH,England

Tel:

Fax:

44‐161‐929‐5500

44‐161‐929‐5511

GERMANYSielmingerStr.63

D‐70771Leinfelden‐

Echterdingen(Stetten)

Stuttgart,Germany

Tel:

Fax:

49‐711‐947700

49‐711‐9477025

JAPAN1‐21‐15AoyagiKunitachi

Tokyo186‐0013

Japan

Tel:

Fax:

81‐425‐229‐011

81‐425‐222‐636

KOREA1STFloor,DKPlaza‐I

375‐1,Geumgok‐dongCity

Bundangogu,Seongnam

Kyonggi‐do,Korea463‐805

Tel:

Fax:

82‐31‐717‐9244

SINGAPOREBlk4010Techplace1

#01‐07/08/09

AngMoKoAve10

Singapore569626

Tel:

Fax:

65‐6451‐1062

65‐6451‐0172

TAIWAN2F,No.47,Ln.2,Sect.2

KuangFuRd.

Hsinchu300

Taiwan,ROC

Tel:

Fax:

886‐3‐575‐3040

886‐3‐575‐3048

P.R.ofCHINAWestendof2ndfloor,

No.3building(T20‐3)

No.258JinzangRd.,ShanghaiJin

QiaoExportProcessingZone

Pudong,Shanghai201206

P.R.ofChina

Tel:

Fax:

86‐21‐5834‐7934or

86‐21‐5834‐7914

86‐21‐5834‐7794



ProductandApplicationsinformationalsoavailableontheInternetat:



http://www.mksinst.com



Thispageintentionallyleftblank.

Contents

eliteTM i

TABLEOFCONTENTS

Chapter1‐Introduction............................................................................5

1.1AboutThisManual...................................................................................... 6

1.1.1FindingYourWayAround ............................................................... 7

1.1.2DocumentationConventions .......................................................... 8

Commands .......................................................................... 8

Definitions........................................................................... 8

1.2SafetyConsiderations ................................................................................. 9

1.2.1ExclamationPointWithinaTriangle............................................... 9

1.2.2LightningBoltWithinaTriangle.................................................... 10

1.2.3ServiceWarning ............................................................................ 10

1.2.4Non‐ionizingElectromagneticRadiationWarningTriangle ......... 11

1.2.5TechnicalSupport ......................................................................... 11

1.2.6Earth(Ground) .............................................................................. 12

1.2.7ProtectiveEarth(Ground)............................................................. 12

1.2.8FrameorChassis ........................................................................... 12

1.3Nameplate................................................................................................. 13

1.4GettingStartedQuickly............................................................................. 14

Chapter2‐SystemInstallation................................................................16

2.1Unpacking/Inspection ............................................................................... 16

2.1.1 MechanicalInspection .................................................................. 16

2.1.2ClaimforDamage.......................................................................... 16

2.1.3PackagingforReshipment ............................................................ 16

2.1.4AccessoriesAvailable .................................................................... 17

2.1.5InstructionsforLiftingandCarrying ............................................. 17

Contents 

iieliteTM

2.2InstallationRequirements......................................................................... 18

2.2.1eliteTMAirflowRequirements ....................................................... 18

2.2.2PowerRequirements .................................................................... 18

UpstreamDisconnectDevice............................................ 18

2.3RackInstallation ............................................................................................ 19

2.4SystemInterconnect ..................................................................................... 19

2.5RemoteDigitalInterface ............................................................................... 20

2.5.1CommunicationConfiguration...................................................... 20

2.6RFPowerConnections................................................................................... 21

2.7SafetyInterlocks ............................................................................................ 21

2.8PanelsandControls....................................................................................... 22

2.8.1FrontPanel.................................................................................... 23

  Keypadcontrols: ........................................................................ 26

2.8.2RearPanel ..................................................................................... 27

Connectionsandindicators ....................................................... 27

StatusLEDs................................................................................. 29

2.9PowerRequirements..................................................................................... 31

2.9.1ACMainsConnection.................................................................... 31

2.11Maintenance&Cleaning ............................................................................... 32

2.12SystemCheck................................................................................................. 33

Chater3‐eliteTMOperation .................................................................... 34

3.1BasicOperationthroughtheRS‐232Interface ............................................. 34

3.1.1RequiredItems.............................................................................. 34

3.1.2CommandPrompt......................................................................... 35

3.1.3StartupMessage ........................................................................... 35

3.1.4GeneralCommandSyntaxofOneLetterCommands(OLC)......... 35

3.1.5OptionalArgumentDataEntry ..................................................... 36

SupportedOLCCommands(UserLevel)........................... 37

3.1.7ExampleOperationoftheSystemviaOLC ................................... 40

3.2OperationthroughOptionalInterfaces ........................................................ 41

3.2.125‐pinAnalogInterface ................................................................ 41

3.2.2CEX(CommonEXciter)IN/OUT................................................... 43

3.3 PulsedOperation........................................................................................... 43

Contents

eliteTM iii

Chapter4‐Troubleshooting....................................................................44

4.1HardwareFaults ............................................................................................ 44

AppendixA‐eliteTMSpecifications ..........................................................45

AppendixB‐GlossaryofTerms ...............................................................48



Contents 

iveliteTM



Thispageintentionallyleftblank.



Introduction

eliteTM 5

Chapter1



Introduction

TheeliteTMPlasmaGeneratorisaruggedRFpowersourceforplasmaetching,

CVDandsputteringapplications.Featuringprecisepowercontrolanddigital

interfacing,thiseliteTMgeneratorprovidestheexceptionalreliabilityand

repeatabilityrequiredfortoday’sdemandingplasmaprocesses.

Operatingatthefrequencyof13.56MHz,theeliteTMplatformconsistsof

productsthatwillproduce300W,600Wor750Wintoa50load.The

digital‐basedcontrolmoduleautomaticallymeasuresforwardRFpowerand

reflectedRFpower,maintainingconstantpoweroutputwithin±2%ofset

pointoveraDynamicPowerRangeof1to300,600or750watts.TheRF

outputcanbepulsedatupto1kHzwithdutycyclesfrom1to99%.

PrecisepowercalibrationistraceabletoNIST(NationalInstituteofStandards

andTechnology)throughtheENIPowerStandard.Lowharmonicdistortion

andspurious‐freeperformancecomplementtheunit’sRFpoweroutput

controlandunconditionalRFstability.

AruggedRFpowersectionensuressubstantialpowerdeliveryintofixed

matchsystems.Thedigital‐basedcontrolconstantlymonitorsinternal

subsystemstatustomaximizesystemavailability.

A9‐pindigitalinterfaceaswellasastandard25‐pinanaloginterfaceprovide

remotecontrol,monitoringanddiagnosticcapability.Optionalcustom

interfacecardsarealsoavailable.



Introduction

6eliteTM



Ifthisequipmentisusedinamannernotspecifiedbythe

manufacturer,thentheprotectionprovidedbytheequipment

maybeimpaired.



ThisequipmentcontainsNOUSERSERVICEABLEPARTS.Intheevent

thatequipmentservicingisrequired,pleasecontactanauthorized

MKS,ENIProductsservicecenter.



1.1 AboutThisManual

Thismanualprovidesalloftheinformationrequiredtosafelyinstall,setup

andoperateyourgenerator.Whileeveryattempthasbeenmadetoprovide

aconcisesetofinstallationandoperatingproceduresintheGettingStarted

Quicklysection,detailedinstructionsarealsogiveninChapters2and3.

Itisessentialthatyoubecomethoroughlyfamiliarwiththecontentsofthis

manualpriortousingyourgenerator.Ifusedproperly,theinformation

containedinthismanualwillnotonlypromotereliablegenerator

performancebutwillalsoencourageasafeoperatingorserviceenvironment

forallindividuals.

ThismanualusestheoutputpowerleveloftheeliteTM750asadefault

(750W).Howeverwhereapplicable,the750Woutputcouldbereplaced

with300Wor600Wfortheelite300andelite600,respectively.Also,

certainspecificationsormodesofoperationmaybedifferentthanthe

typicaloperationbycustomerrequest.Refertoanyapplicableaddendumor

specificationsforyourspecificgeneratorwhenorderingotherthanthe

standardeliteTMunit.

This manual suits for next models

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