MKS 230E User manual

118989-P1
Rev A, 8/96
Instruction Manual
MKS Type 230E
Pressure Transmitter
Six Shattuck Road
Andover, MA 01810-2449
[phone] or [phone]
Fax: [phone]
E-mail: [e-mail]
Web site: http://www.mksinst.com

WARRANTY
Type 230E Equipment
MKS Instruments, Inc. (MKS) warrants that the equipment described above (the
“equipment”) manufactured by MKS shall be free from defects in materials and
workmanship for a period of one year from date of shipment and will for a period of two
years from the date of shipment, correctly perform all date-related operations, including
without limitation accepting data entry, sequencing, sorting, comparing, and reporting,
regardless of the date the operation is performed or the date involved in the operation,
provided that, if the equipment exchanges data or is otherwise used with equipment,
software, or other products of others, such products of others themselves correctly
perform all date-related operations and store and transmit dates and date-related data
in a format compatible with MKS equipment. THIS WARRANTY IS MKS’ SOLE
WARRANTY CONCERNING DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending one
year later in the case of defects in materials and workmanship, but two years later in the
case of failure to comply with the date-related operations warranty, MKS will, at its
option, either repair or replace any part which is defective in materials or workmanship
or with respect to the date-related operations warranty without charge to the purchaser.
The foregoing shall constitute the exclusive and sole remedy of the purchaser for any
breach by MKS of this warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrangements
with respect to the responsibility for shipping the equipment and handling any other
incidental charges with the MKS sales representative or distributor from which the
equipment was purchased or, in the case of a direct purchase from MKS, with the MKS
home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and used
in accordance with the specifications recommended by MKS for the proper and normal
use of the equipment. MKS shall not be liable under any circumstances for indirect,
special, consequential, or incidental damages in connection with, or arising out of, the
sale, performance, or use of the equipment covered by this warranty.
MKS recommends that all MKS pressure and flow products be calibrated periodically
(typically every 6 to 12 months) to ensure accurate readings. When a product is
returned to MKS for this periodic re-calibration it is considered normal preventative
maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.
11-98 118989-P1

118989P1
Rev A, 8/96
MKS Type 230E
Pressure Transmitter

Copyright © 1996 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Baratronis a registered trademark of MKS Instruments, Inc., Andover, MA

Table of Contents
iii
Table of Contents
Safety Procedures and Precautions.......................................................................................... 1
Chapter One: General Information......................................................................................... 3
Introduction............................................................................................................... 3
How This Manual is Organized.................................................................................. 4
Customer Support...................................................................................................... 4
Chapter Two: Installation......................................................................................................5
How To Unpack the Type 230 Unit ........................................................................... 5
Unpacking Checklist ..................................................................................... 5
Product Location and Requirements........................................................................... 5
Dimensions................................................................................................................ 6
Setup ......................................................................................................................... 7
Mounting Instructions ................................................................................... 7
Electrical Connections................................................................................... 8
Cables........................................................................................................... 9
Operation................................................................................................................... 11
Chapter Three: Maintenance.................................................................................................. 13
General Information................................................................................................... 13
Maintenance .............................................................................................................. 13
Appendix A: Product Specifications...................................................................................... 15
Appendix B: Model Code Explanation.................................................................................. 17
Index...................................................................................................................................... 19

Table of Contents
iv

List of Fi
g
ures
List of Tables
v
List of Figures
Figure 1: Dimensions of the Type 230 Pressure Transmitter.................................................. 6
Figure 2: Electrical Connections............................................................................................ 8
Figure 3: Preferred Method for Shielding Cables with Flying Leads...................................... 10
Figure 4: Alternate Method for Shielding Cables with Flying Leads...................................... 10
List of Tables
Table 1: Terminal Block Pinout..................................................................................................8
Table 2: Required Pressure for Zero Adjustment ......................................................................11

List of Figures
List of Tables
vi

Safety Procedures and Precautions
1
Safety Procedures and Precautions
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument.
Return the instrument to an MKS Calibration and Service Center for service and repair to ensure
that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal
adjustments must be made by qualified service personnel only.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety
precautions, completely purge the instrument when necessary, and ensure that the material used
is compatible with sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before its removal from a system, be sure to purge the unit completely
with a clean dry gas to eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn to protect
personnel.
DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES
To avoid explosion, do not operate this product in an explosive atmosphere unless it has been
specifically certified for such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the
intended use of the instrument. Assemble and tighten fittings according to manufacturer's
directions.
CHECK FOR LEAK-TIGHT FITTINGS
Before proceeding to instrument setup, carefully check all plumbing connections to the
instrument to ensure leak-tight installation.

Safet
y
Procedures and Precautions
2
OPERATE AT SAFE INLET PRESSURES
This unit should never be operated at pressures higher than the rated maximum pressure (refer to
the product specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, a suitable burst disc should be installed in the
vacuum system to prevent system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants of any kind to enter the unit before or during use. Contamination
such as dust, dirt, lint, glass chips, and metal chips may permanently damage the unit.
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard. It calls attention to a
procedure, practice, condition, or the like, which, if not
correctly performed or adhered to, could result in injury to
personnel.
Caution The CAUTION sign denotes a hazard. It calls attention to an
operating procedure, practice, or the like, which, if not correctly
performed or adhered to, could result in damage to or destruction of
all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.

Chapter One: General Information Introduction
3
Chapter One: General Information
Introduction
The MKS Type 230E Pressure Transmitter is an absolute transmitter of the capacitance
manometer type. The electrical output signal is a 4 to 20mA current which is linear with
pressure over the full scale range. An absolute pressure at the PXport will cause the output
current to increase from 4 mA toward the 20 mA full scale value.
The 230 unit is operated on a two-wire, loop-powered system. The external power supply can
range from 24 to 32 VDC. The selection of this voltage depends on your requirements and is
generally dictated by total line resistance including sampling resistance, plus the minimum
working potential of the device. Two specifications for accuracy are available, selectable when
you order the unit.
The unit is composed of an Inconel®sensor, printed circuit boards, and a cover. The sensor is
made of three parts:
•A taut metal diaphragm
•A dimensionally stable ceramic electrode which senses the diaphragm’s
deflection
•A reference cover through which a glass-to-metal feedthrough terminal
passes an electronic signal to the printed circuit boards

How This Manual is Organized Cha
p
ter One: General Information
4
How This Manual is Organized
This manual is designed to provide instructions on how to set up, install, and operate a Type 230
unit.
Before installing your Type 230 unit in a system and/or operating it, carefully read and
familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all WARNING and
CAUTION notes provided throughout the manual.
Chapter One, General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two, Installation and Operation, explains the environmental requirements, how to
mount the instrument in your system, and how to use the instrument.
Chapter Three, Maintenance, describes how to troubleshoot a problem should the 230 instrument
malfunction.
Appendix A, Product Specifications, lists the specifications of the instrument.
Appendix B, Model Code Explanation, describes the instrument’s model code and how to order
the unit.
Customer Support
Standard maintenance and repair services are available at all of our regional MKS Calibration
and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your Type
230 instrument, or to obtain information about companion products MKS offers, contact any
authorized MKS Calibration and Service Center. If it is necessary to return the instrument to
MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Calibration and Service Center before shipping. The ERA Number expedites handling and
ensures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.
Warning All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials.

Chapter Two: Installation and Operation How To Un
p
ack the T
yp
e 230 Unit
5
Chapter Two: Installation and Operation
How To Unpack the Type 230 Unit
MKS has carefully packed the Type 230 unit so that it will reach you in perfect operating order.
Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc.,
to be certain that damage has not occurred during shipment.
Note Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the
unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a
list of MKS Calibration and Service Centers.
Unpacking Checklist
Standard Equipment:
•Type 230 Unit
•Type 230 Instruction Manual (this book)
Optional Equipment:
•Electrical Connector Accessories Kit:
230E-K1 (includes a mate for the I/O connector)
Note Metal braided, shielded cables are required to meet CE Mark
specifications.
Product Location and Requirements
•Power Input: 24 to 32 VDC
•Ambient operating temperature range: 0°to 100°C (32°to 212°F)
•Storage temperature range: -20°to 80°C (-68°to 176°F)

Dimensions Cha
p
ter Two: Installation and O
p
eration
6
Dimensions
Note All dimensions are listed in inches with millimeters referenced in
parentheses.
8-VCR Couplin
g
Hi
g
h Ran
g
e (5000 throu
g
h 25000 Torr)
1.12
(28.4) 1.99
(50.5)
0.50
(12.7) DIA
2.96
(75.2)
TYP
3.00
(76.2) DIA
TYP
Low Ran
g
e (Up to 1000 Torr)
1.71
(43.4)
0.26
(6.6)
TYP
Figure 1: Dimensions of the Type 230 Pressure Transmitter

Chapter Two: Installation and Operation Setu
p
7
Setup
Mounting Instructions
Although the 230 unit may be mounted in any attitude, it is recommended that it be placed in a
system with the PX(inlet) port facing down, as this allows contamination to fall away from the
pressure sensing diaphragm. Any standard vacuum fitting may be used (such as Cajon, VCR,
Ultra-Torr, or KF flange). Also, the sensor port is more than able to carry the weight of the
transmitter.
The electrical connections to the 230 transmitter are shown in Figure 2, page 8. Any ordinary,
unshielded twisted pair transmission line is recommended. It should be understood that the total
external line resistance including sampling resistor not exceed a given value determined by:
R =(Power Supply Volts - 13) x 10 (ohms)
24
LN
3
For a 24 Volt supply, RLN should not exceed 450 ohms.

Setup Cha
p
ter Two: Installation and O
p
eration
8
Electrical Connections
Twisted Pair
Transmission Line
Resistance
RT
+
24 - 32 V
DC
Power
Supply
--
+
Read
Out
4 - 20 mA
Samplin
g
Resistor
(RS)
RT + RS = RLN
Figure 2: Electrical Connections
Terminal Block Pinout
Pin Assignment
+ Positive input from power supply
- Negative input from power supply
N/C No Connection
(Ground) Connection to sensor case and enclosure
Table 1: Terminal Block Pinout
Note The “No Connection”pin assignment refer to a pin with no internal
connection.

Chapter Two: Installation and Operation Setu
p
9
Cables
Note Metal braided, shielded cables are required to meet CE Mark
specifications.
Generic Shielded Cables
MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your
own cables, follow the guidelines listed below:
1. The cable must have a braided shield, covering all wires. Neither aluminum foil nor
spiral shielding will be as effective; using either may nullify regulatory compliance.
2. The connectors must have a metal case which has direct contact to the cable’s shield on
the whole circumference of the cable. The inductance of a flying lead or wire from the
shield to the connector will seriously degrade the shield’s effectiveness. The shield
should be grounded to the connector before its internal wires exit.
3. With very few exceptions, the connector(s) must make good contact to the device’s case
(ground). “Good contact”is about 0.01 ohms; and the ground should surround all wires.
Contact to ground at just one point probably will not suffice.
4. For shielded cables with flying leads at one or both ends; it is important at each such end,
to ground the shield before the wires exit. Make this ground with absolute minimum
length. Refer to Figures 3 and 4, page 10. (A ¼inch piece of #22 wire may be
intolerably long since it has about 5 nH of inductance, worth 31 ohms at 1000 MHz).
After picking up the braid’s ground, try to keep wires and braid flat against the case.
With very few exceptions, grounded metal covers are not required over terminal strips. If
one is required, it will be stated in the Declaration of Conformity or in this instruction
manual.
5. In selecting the appropriate type and wire size for cables, consider:
A. The voltage ratings;
B. The cumulative I2R heating of all the conductors; keep them safely cool;
C. The IR drop of the conductors, so that adequate power or signal voltage gets to the
device;
D. The capacitance and inductance of cables which are handling fast signals, (such as
data lines or stepper motor drive cables); and
E. That some cables may need internal shielding from specific wires to others.

Setup Cha
p
ter Two: Installation and O
p
eration
10
Example 1: Preferred Method to Connect Cable
(shown on a transducer)
Transducer
Overall Insulation
(if present)
Bare Metal Cable Clamp
Making Firm Contact To Braid
Braid Here Is Desirable
(but not usually necessary)
Keep Wires and Braid
Flat Against Case
Metal Cable Clamp
Screw
Split Lock Washer
External Tooth Lock Washer
Transducer Housing
Optional Plastic or Metal Cable
Clamp (For Physical Strain Relief)
Figure 3: Preferred Method for Shielding Cables with Flying Leads
Example 2: Alternate Method to Connect Cable
(shown on a transducer)
Transducer
Overall Insulation
(if present)
Braid Strands Twisted
Under Washer
Keep Wires Flat
Against Case
Optional Plastic or Metal Cable
Clamp (For Physical Strain Relief)
Screw
Split Lock Washer
Flat Washers
External Tooth Lock Washer
Transducer Housing
Figure 4: Alternate Method for Shielding Cables with Flying Leads
(use when cable clamp is not available)

Chapter Two: Installation and Operation O
p
eration
11
Operation
The sensor case (which is at the same potential as the metal enclosure) is brought out to the
input/output connector and is marked with the “ground”symbol ( ). This sensor connection
gives the user the option of insulating the mounting of the device from a particular ground, and
then selecting another ground by connecting it to this terminal.
The maximum voltage between ground (sensor case) and the (-) terminal should not exceed 35
Volts RMS. Two adjustments are available to the user: the zero (4 mA) and span (20 mA)
controls (refer to Figure 2, page 8).
Note Since the zero and s
p
an ad
j
ustments interact, a few calibration c
y
cles ma
y
be needed to accurately complete the adjustment, if the instrument is far
out of calibration.
Adjust the zero control when you are assured that the instrument is below its usable resolution.
Required Pressure for Zero Adjustment
Sensor Range
mmHg (Torr) Pressure mmHg (Torr)
10 <0.005
100 < 0.05
1000 < 0.50
Table 2: Required Pressure for Zero Adjustment

Operation Cha
p
ter Two: Installation and O
p
eration
12
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