Nanonics Imaging MultiView 4000 User manual

MultiView 4000™
User Guide
For the Hybrid Controller with NWS software
March 2013
Version 6

MultiView 4000™User Guide
1.
Trademarks & Copyright
Trademarks
MultiView and FlatScanner are trademarks of Nanonics Imaging Ltd.
Olympus is a trademark of Olympus Corporation.
All other trademarks mentioned in this manual are the sole property of their respective
manufacturers.
Copyright
Nanonics Imaging Ltd., Manhat Technology Park, Malcha, Jerusalem, Israel.
www.nanonics.co.il • in[email protected]
Support: [email protected]o.il • Tel: [phone]
© 2010 Nanonics Imaging Ltd. All rights reserved.
Published 2010
Notice
Information in this document is subject to change without notice. Nanonics Imaging Ltd.
assumes no responsibility for any errors that may appear in this manual. Companies, names
and data used in examples herein are fictitious unless otherwise noted. No part of this
document may be copied or reproduced in any form, or by any means, electronic or
mechanical, for any purpose, without the express written permission of Nanonics Imaging
Ltd. Nanonics Imaging Ltd. makes no warranties with respect to this documentation and
disclaims any implied warranties of merchantability or fitness for a particular purpose.
Note on Printing
This manual is designed to be printed in color, single-sided on A4 paper.

MultiView 4000™ User Guide Laser Safety
3
Table of Contents
1Laser Safety.................................................................................................................... 6
1.1 General .............................................................................................................. 6
1.2 Restricted Access .............................................................................................. 6
1.3 Eye Protection ................................................................................................... 7
1.4 Working with Lasers ......................................................................................... 7
2Introduction.................................................................................................................... 8
2.1 Optical & Other Complementary Integration.................................................... 9
2.2 Normal Force Tuning Fork Feedback ............................................................... 9
2.3 Scanner Solutions.............................................................................................. 9
2.4 Probe Solutions................................................................................................ 10
3The MultiView 4000 System ....................................................................................... 11
3.1 The Standard Hardware Set-up ....................................................................... 11
3.2 Additional Hardware for NSOM Measurements............................................. 14
3.3 The Two-Tower Set-up ................................................................................... 15
3.4 A Closer Look ................................................................................................. 16
3.5 The MultiView 4000 Tip-Mount Assembly.................................................... 19
3.6 Probe Parameters............................................................................................. 20
4The Integra Controller System ..................................................................................... 22
4.1 SPMH Controller............................................................................................. 22
4.2 High-Voltage Piezo Driver.............................................................................. 25
4.3 Low Voltage Adaptor...................................................................................... 30
4.4 DT Interface .................................................................................................... 30
4.5 System Power Supply...................................................................................... 32
4.6 Stepper Motor Driver ...................................................................................... 34
4.7 Counter & Power Supply................................................................................. 36
5MultiView 4000 Connectors ........................................................................................ 40
5.1 Sample Stage................................................................................................... 41
5.2 Tip/Sample Scanning Tower Schema.............................................................. 42
5.3 Tip Scanning Tower Schema........................................................................... 43
5.4 Two Towers Connection Schema.................................................................... 44
6Scanning Modes........................................................................................................... 45
6.1 Single Tower ................................................................................................... 45
2.6 Two Towers..................................................................................................... 45
7The Dual Microscope................................................................................................... 46
7.1 Opening and Closing the Dual Microscope..................................................... 47
7.2 Aligning the Two Objectives........................................................................... 47
7.3 Focusing the Microscopes............................................................................... 49

MultiView 4000™ User Guide Laser Safety
4
7.4 Adjusting the Height of the Upper Microscope............................................... 49
8Preparing the Sample & Tips ....................................................................................... 51
8.1 Preparing the Sample....................................................................................... 51
8.2 Placing the Sample.......................................................................................... 51
8.3 Mounting the Tip............................................................................................. 51
8.4 Mounting Two Probes..................................................................................... 54
8.5 Aligning Two Probes....................................................................................... 54
9Powering Up the System.............................................................................................. 56
10 Phase Feedback Settings .............................................................................................. 58
10.1 Hardware Settings ........................................................................................... 58
10.2 Software Settings –The Lock-in Controller.................................................... 58
11 Amplitude Feedback Settings....................................................................................... 69
11.1 Hardware Settings ........................................................................................... 69
11.2 Software Settings –The Lock-in Controller.................................................... 69
12 Carrying Out an AFM Scan ......................................................................................... 77
12.1 Setting the Dividers......................................................................................... 77
12.2 Setting the Feedback Gains ............................................................................. 78
12.3 Approaching the Sample Surface .................................................................... 81
12.4 Verifying that the Probe has Engaged the Surface .......................................... 81
12.5 Setting the Scan Parameters ............................................................................ 83
12.6 Starting the Scan.............................................................................................. 85
12.7 Adjusting the Tilt............................................................................................. 87
12.8 Saving a Scanned Image.................................................................................. 88
12.9 Retracting the Probe........................................................................................ 89
13 Feedback Gains............................................................................................................ 91
13.1 The Function and Importance of PID Gains in the AFM Feedback Loop....... 91
13.2 The PID Gains in Detail .................................................................................... 91
14 Summary: An AFM Checklist...................................................................................... 93
15 NSOM Scanning .......................................................................................................... 94
15.1 Connecting a Detector..................................................................................... 94
15.2 Mounting an NSOM Probe.............................................................................. 95
15.3 Preparing the NSOM Probe............................................................................. 96
15.4 Positioning the Tip .......................................................................................... 98
15.5 Aligning the Detector ...................................................................................... 98
15.6 Carrying Out an NSOM Scan.......................................................................... 99
16 Appendix: The Vibration Isolation Table (Minus K Table)...................................... 101
16.1 Overview....................................................................................................... 101
16.2 Pre-Installation .............................................................................................. 101

MultiView 4000™ User Guide Laser Safety
5
16.3 Installation..................................................................................................... 102

MultiView 4000™ User Guide Laser Safety
6
1Laser Safety
HEALTH & SAFETY ADVISORY:
1. It is mandatory to read this section before operating Nanonics MultiView™ products.
2. Always wear the appropriate laser safety goggles as designated by the wavelength or
wavelengths being used.
Due to its special properties, laser light poses safety hazards not associated with light from
conventional sources. The safe use of lasers requires that the laser users are aware of the
dangers involved and that they are familiar with the MultiView head, and the Nd-YAG laser
if relevant.
The greatest concern when using a laser is eye safety. In addition to the main beam, there are
often many smaller beams present at various angles near the laser system. These beams
cause specular and other reflections of the main beam as a result of interaction with polished
surfaces such as lenses, beam splitters and/or other surfaces. While weaker than the main
beam, such beams may still be sufficiently intense to cause eye damage.
Laser beams can be powerful enough to burn skin, clothing or paint. They can ignite volatile
substances such as alcohol, gasoline, ether and other solvents, and can damage light-
sensitive elements in video cameras, photomultipliers and photodiodes. The laser beam can
ignite substances in its path, even at some distance. The beam may also cause damage if it
bounces off reflective surfaces. For these reasons the user is advised to follow the
precautions below.
1.1 General
Observe all the safety precautions that appear in this manual.
Advise all personnel working in the vicinity of the laser of the precautions listed in
this section.
1.2 Restricted Access
1. It is good practice to operate the laser in a room with controlled and restricted
access.
2. Limit access to the laser to qualified users who are familiar with laser safety
practices and who are aware of the dangers involved.
3. Use the laser in an enclosed room. Laser light will remain collimated over long
distances and therefore presents a potential hazard if not confined.
4. Post warning signs in the area of the laser beam to alert all laser users and
everyone else near the laser system of the hazards specific to the class of laser
present.
5. Affix a laser warning light at all entrances to the area where the laser is used.

MultiView 4000™ User Guide Laser Safety
7
1.3 Eye Protection
1. If the eye is exposed to laser beams the damage may not be immediately noticed.
In addition, damage to the eye can be cumulative as a result of repeated exposure.
2. As a precaution against accidental exposure to the output beam or its reflection,
wear the appropriate laser safety goggles as designated by the wavelength or
wavelengths being used.
3. Never look directly into the laser light source or at scattered laser light from any
reflective surface.
4. Ensure that you are wearing the appropriate laser safety goggles when viewing
the laser through the optical microscope.
5. Maintain experimental setups at low heights to prevent inadvertent beam-eye
encounter at eye level.
1.4 Working with Lasers
1. Never leave the laser unattended when it is in operation.
2. Avoid direct exposure to the laser light. The intensity of the beam can easily
cause flesh burns or ignite clothing.
3. Before energizing a laser, verify that the prescribed safety devices for the unit are
correctly employed. These may include opaque shielding, non-reflecting and/or fire
resistant surfaces, goggles and/or face shields, door interlocks, and ventilation for
toxic material.
4. Remove your watch or any jewelry to avoid inadvertent reflections.
5. Remove all unnecessary mirror-like surfaces from the vicinity of the laser beam
path. Do not use reflective objects, such as credit cards, to check beam alignment.
6. Exercise extreme caution when using solvents in the area of the laser.

MultiView 4000™ User Guide Introduction
8
2Introduction
The MultiView 4000 is a multi-probe AFM, NSOM and SPM system, consisting of up to
four probes. It has an open architecture which allows for flexible integrations with different
analytical tools.
The modular design of the MultiView 4000 allows for the following combinations:
Single-Probe SPM station which can be upgraded to include up to four
Probe SPM platforms.
Single-Probe SPM station with two Piezo Nanoaligners for side
positioning and manipulations while maintaining space for future
upgrades.
Dual-Probe SPM station with two piezo nanoaligners.
Figure 1: MultiView 4000 with four SPM probes
The MultiView 4000 head enables many unique applications, including the following:
Independent scanning with up to four probes for atomic force and near-
field optical scanning. All known probes types may be used for other
imaging modes as well.
Unique probes for multiple probe resistance measurements with two-,
three- and four-point probe geometries.
Unique thermal probes for multiple probe measurements.
Multiple probe near-field optical measurements (NSOM or SNOM).
Multiple probe nanochemical writing on a variety of structures with a
variety of gaseous, liquid or solid inks using Fountain Pen
Nanochemistry.

MultiView 4000™ User Guide Introduction
9
Multiple probe nanoindentation with on-line, ultra-high resolution
atomic force imaging of the indented structure.
Multiple probe optical or thermal desorption with tandem collection for
mass spectral analysis.
2.1 Optical & Other Complementary Integration
The MultiView 4000 system has a number of advantages in the area of optical microscopy
and it can also be integrated with other equipment, as described below:
Full integration with upright, inverted or dual (4 Pi) optical
microscopes.
Full integration with non-linear and multi-photon microscopes (e.g.
second generation harmonic microscopes).
Completely free optical axes both above and below the sample.
Open system architecture providing transmission, reflection and
collection modes.
Online Raman.
Online Scanning Electron Microscopy (SEM).
Online Focused Ion Beam (FIB).
Online Dual Focused Ion Beam (FIB) with Scanning Electron
Microscope (SEM).
2.2 Normal Force Tuning Fork Feedback
The MultiView 4000 uses normal force tuning fork technology with a high Q factor and
Phase Feedback to allow control of the probe/sample separation. Tuning forks in normal
force mode with Phase or Amplitude Feedback permit high performance and ease of
operation for AFM imaging.
2.3 Scanner Solutions
3D FlatScanner™ Technology: Unlike standard piezo scanners that keep probes separated,
the 3D FlatScanner is an excellent solution for multiprobe scanning. The design of the 3D
FlatScanner is a novel planar folded-piezo, flexure scan design which provides very good
AFM resolution (e.g. atomic steps in highly oriented pyrolytic graphite (HOPG)). The large
vertical (axial) displacement of up to –100 µm for sample scanning and up to 30 µm for tip
scanning allows for the use of multiple probes as well as the tracking of structures with very
large topographical features, and simultaneous lateral scanning over large areas. The ultra-
thin architecture of the 3D FlatScanner provides the flexibility that is critical in developing a
variety of different geometries of multiprobe systems.

MultiView 4000™ User Guide Introduction
10
The 3D FlatScanner can also be incorporated into systems where conventional scan stages
are too bulky and geometrically limiting. Its minimal height of 7 mm allows for easy access
with high powered microscope objectives from either above or below the scanning stage.
2.4 Probe Solutions
Nanonics glass-based probes are spatially and optically friendly, which allows for the tips to
be approached very close together –a critical feature of multiprobe imaging systems. In
addition, they keep the Z optical axis free for both upright and inverted microscope views. In
a multi-probe scan, the probes can be very close to each other (nanometric separation), while
each probe scans the sample independently.
2.4.1 Environmental Control
The MultiView 4000 can be placed inside an environmental chamber (shown below).
This allows SPM scanning to be performed in conjunction with confocal microscopy under
controlled conditions. The chamber allows you to have precise control over humidity,
temperature, gas inflow and chemical nanolithography via a nanopipette amongst other
variables, while performing SPM imaging with completely free optical axes from above and
below for all NSOM modes.
Figure 2: Environmental chamber hosting the MultiView 4000TM inside with free optical
axis for upright and inverted optical microscopes.

MultiView 4000™ User Guide The MultiView 4000 System
11
3The MultiView 4000 System
3.1 The Standard Hardware Set-up
A typical two-tower MultiView 4000 System is comprised of the following equipment:
MultiView 4000 Tower (2 units)
Dual Microscope
SPMH Controller* (2)
High Voltage Piezo Driver* (3)
Low Voltage Adaptor* (1)
Hybrid DT Interface* (2)
System Power Supply* (2)
Stepper Motor Driver (1)
Computer (2)
Hybrid Computer (1)
*These hardware devices form the Integra Controller system for integrated microscopy.
They are fully interoperable and compatible with other MultiView systems.
MultiView 4000 Head p. 16 and p. 40
The MultiView 4000 head is the heart of the
system and it contains the sample scanner,
towers and upper scanners, probes and
stepper motors.

MultiView 4000™ User Guide The MultiView 4000 System
12
Host Optical Microscope p. 46
The microscope shown is the Nanonics Dual
Microscope which is based on two Olympus
BX51 microscopes. Other host microscopes
are also compatible with the system. The
microscopes are installed on the Nanonics
dual frame stand and the MultiView 4000 is
placed on a custom-made interface plate.
Dimensions: 50 x 50 x 80 cm
SPMH Controller p. 22
Controls the scan and feedback mechanism;
controls the preamp and Z stepper motor
position; contains the lock-in card for signal
control.
High Voltage Piezo Driver p. 25
Generates high voltage signals applied to the
X, Y and Z axes of the scanner.
Low Voltage Adaptor p. 30
Selects the scanners that are used in the XY
and Z axes.
Hybrid DT Interface p. 30
Interfaces between the DT (data translation)
cards installed in the computer and the
system hardware ADC/DAC.
System Power Supply p. 32
Provides low-voltage and high-voltage
power to the SPM Controller, DT Interface
and High Voltage Piezo Driver.

MultiView 4000™ User Guide The MultiView 4000 System
13
Stepper Motor Driver p. 34
Provides signals for the lateral stepper
motors. It is controlled by the SMC software
and interfaces with the NI card installed on
the computer.
Computer
Nanonics supplies a desktop computer with two DT cards, an NI card and the NWS
software. NWS allows you to define and control the scan parameters –see the “NWS User
Guide” for more information.
Hybrid Computer contains Innovative FPGA card for digital feedback control

MultiView 4000™ User Guide The MultiView 4000 System
14
3.2 Additional Hardware for NSOM
Measurements
The following equipment is required for carrying out NSOM measurements. NSOM
scanning is described on page 94.
Counter & Power Supply p. 36
The APD (Avalanche Photo Diode) Counter &
Power Supply receives TTL input signals from the
Detector and converts them to analog signals. The
power supply provides 5 V of power to the
Detector.
Detector
The Detector can be an APD, PMT or CCD.
Fiber Coupler p. 97
The Fiber Coupler introduces the laser light into
NSOM probes. It is used for NSOM, confocal and
fluorescent scanning as well as other optical
applications.
Laser and Power Supply
For general NSOM imaging, a 532 nm Nd-YAG
laser is used. The laser is provided with its own
power supply.

MultiView 4000™ User Guide The MultiView 4000 System
15
3.3 The Two-Tower Set-up
The two-tower MultiView 4000 system on a dual microscope is shown below.
Figure 3: The MultiView 4000 System with two probes and integrated Dual Microscope
A complete two-tower MultiView 4000 system scheme appears below:
Figure 4: MultiView 4000 - Scheme for a Two- probe System

MultiView 4000™ User Guide The MultiView 4000 System
16
3.4 A Closer Look
3.4.1 The MultiView 4000 Head
A schema of the MultiView 4000 head in a two tower configuration appears below:
Figure 5: MultiView 4000 Head Assembly
Each tower contains a tip-scanning stage, a tip mount, a pre-amplifier, a Z stepper motor,
XY stepper motors and electrical connectors.
The sample is placed on the lower scanner which performs sample scanning.
Each probe’s height is individually controlled by a Z stepper motor unit, located inside the
tower.
A fastening screw is used to affix the tower to the interface stage after tip-mounting.
Each tower includes two XY lateral stepper motors, used for rough positioning of the tip.
The towers and the lower scanner stage are placed on an interface plate, which sits on the
XY stage of the optical microscope. Each tower can be rotated around its base for
probe/sample mounting. (In previous versions, the tower slides manually in and out of the
interface plate on dovetail rails).
>> To manually move the towers or sample stage
1. Loosen the fastening screw.
2. Using the rotational holder, rotate the tower. (For previous versions, move the tower
or sample stage out along the dovetail rail).

MultiView 4000™ User Guide The MultiView 4000 System
17
3.4.2 MultiView 4000 Table
3.4.3 MultiView 4000 Tower
The parts of the MultiView 4000 tower are shown in the diagrams below.
Figure 6: MV4000 Tower Assembly

MultiView 4000™ User Guide The MultiView 4000 System
18
3.4.4 Upper Scanner
Each tower houses an upper flat-scanner, as shown below.
Figure 7: MV4000 Upper Scanner
3.4.5 Electroblock Unit
Figure 8: MV4000 Electroblock Unit
The electroblock unit includes:
Tip Mount (see next)
Preamp (used to amplify signal received from tuning fork)
Electrical connection to tower (internal thin wire connection)
Piezo Excitation Elements (two piezo elements, used to provide high-frequency
excitation to tuning fork.
Fastening Screws (for attaching electroblock Unit to Upper Scanner)
Caution –fasten these screws with care to avoid damaging the scanner)

MultiView 4000™ User Guide The MultiView 4000 System
19
3.4.6 Tip Mount
The MultiView 4000 tip mount is shown below.
Figure 9: MV4000 Tip Mount
3.5 The MultiView 4000 Tip-Mount Assembly
As shown above, the tip-mount attaches to the electroblock via an electrode panel at its
back, and tapers at its front, where a tuning fork is mounted, to which the AFM probe is
attached. This structure can be seen in detail in the figures below.
Figure 10: The Tuning Fork Portion of a Tip-
Mount
Figure 11: A Probe, extending beyond the
end of the Tuning Fork, and showing
both Cantilever and Tip

MultiView 4000™ User Guide The MultiView 4000 System
20
The two tines of the tuning fork are connected via wires, indicated by red arrows in Figure
10, to the two outer electrodes on the tip-mount electrode pad. These electrodes transmit the
signals generated by the tuning fork response. These signals are amplified at the electroblock
preamp and are sent from there to the SPM Controller for generation of the error signal.
The two inner electrodes on the tip-mount electrode pad are used only with electric or
thermal probes. Nevertheless, they are standard on all tip-mounts.
The fiberglass probe is bonded lengthwise along the lower surface of the bottom tine of the
tuning fork, and protrudes beyond it at different cantilever lengths, depending upon the type
of probe employed (see Figure 11 above). .
The part of the probe protruding beyond the tuning fork consists of a cantilever and the tip
proper. The length of each element is customized according to the demands of each
application. Longer cantilevers are required, for example, for NSOM and TERS
measurements, while longer tips are needed for deep-trench AFM imaging.
On most probes, the upper tine of the tuning fork is recessed. This is done to give an
improved top view when using upright optical microscopes.
3.6 Probe Parameters
When you receive a probe with a tuning fork from Nanonics, the box contains information
about the probe(s) inside. This information will be important in configuring the system so as
to get good results with the probe.
Figure 12: Tip-mount Box - Back View, with Tip Parameters
Tip Size (
 ): This is the tip diameter. For NSOM probes this value refers to the open
aperture diameter of the probe.
Frequency (f): This is the resonance frequency of the tuning fork with the given tip
mounted. The resonance frequency of the tuning fork before mounting the tip is 32.678 kHz.