Newport mks IDL165-200LM User manual

Long T avel
Indust ial Linea Stages
IDL165-LM Se ies
USER’SMANUAL
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
Table of Contents
Warranty .................................................................................................................ii
Declaration of Incorporation ................................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution ...................................................................................................................ix
1.0 — Introduction.................................................................................1
2.0 — Description ...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics............................................................................3
3.1 Definitions..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Hard Stop: Speed Limitation Versus Load .............................................4
3.4 Load Characteristics and Stiffness .........................................................5
3.5 Stage Weight ..............................................................................................5
4.0 — Drive and Motor.........................................................................6
4.1 Motor characteristics (Direct Drive Brushless Motor)........................6
4.2 Command Signals......................................................................................6
4.3 Sensor Positions........................................................................................7
4.4 Position Feedback Signals........................................................................7
4.5 General Wiring...........................................................................................8
4.6 Pinouts........................................................................................................8
Hall Effect Sensor (SUB-D15F Connector) ..............................................8
Encoder (SUB-D15M Connector).............................................................8
Encoder (SUB-D26HDM Connector on E5820A Adapter) .....................9
Motor (DB9W4M Connector)...................................................................9
4.7 IDL165-LM Cable Wirings .........................................................................9
4.8 Air Tube....................................................................................................10
5.0 — Stage Installation.....................................................................11
5.1 Unpacking ................................................................................................11
5.2 Setting Up.................................................................................................11
5.3 Mounting Conditions ..............................................................................13
5.4 Air Blowing...............................................................................................13

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IDL165-LM Se ies Long T avel Indust ial Linea Stages
6.0 — Connection to ewport Controllers..............................14
6.1 Warnings on Controllers ........................................................................14
6.2 Connection...............................................................................................15
6.3 Cables .......................................................................................................15
6.4 Adapter for the XPS-D ewport Controller..........................................15
7.0 — Connection to on- ewport Controllers ....................16
8.0 — Dimensions.................................................................................17
9.0 — Maintenance ..............................................................................17
9.1 Maintenance ............................................................................................17
9.2 Repair .......................................................................................................18
9.3 Calibration ...............................................................................................18
Service Form .........................................................................................................19
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
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Declaration of Incorporation
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
Definitions and Symbols
The following erms and symbols are used in his documen a ion and also
appear on he produc where safe y-rela ed issues occur.
General Warning or Caution
The exclama ion symbol may appear in warning and cau ion ables in his
documen . This symbol designa es an area where personal injury or
damage o he equipmen is possible.
The following are defini ions of he Warnings, Cau ions and No es ha may
be used in his manual o call a en ion o impor an informa ion regarding
personal safe y, safe y and preserva ion of he equipmen , or impor an
ips.
WAR N IN G
Warning indicate a potentially dangerou ituation which can re ult in
bodily harm or death.
CAUTION
Caution indicate a potentially hazardou ituation which can re ult in
damage to product or equipment.
NOTE
Note indicate additional information that mu t be con idered by the
u er or operator.
E
Warning and Caution
ATTENTION
Thi tage i a Cla A device. In a re idential environment, thi device
can cau e electromagnetic interference. In thi ca e, uitable mea ure
mu t be taken by the u er.
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
WAR I G
When the IDL165-LM stage is installed or combined with other instruments
in a machine, additional testing to directive 2006/42/EC may be required.
It is the responsibility of the end-user or integrator to perform a risk-
analysis and the necessary tests to conform to the EC directives.
ewport is not liable for damages caused by not executing this
responsibility.
Warnings
Improper use of an IDL165-LM can cause material damage, shock, injury,
or death. Read and understand this User's Manual before operating an
IDL165-LM stage.
If the IDL165-LM is used in a condition not specified by ewport, the
safety features provided by the stage can be impaired.
WAR I G
Very fast moving parts of the stage or any attachments can cause
crushing or shearing injuries. All personnel must remain clear of any
moving parts.
WAR I G
The connection of electrical devices must meet safety and electrical
standards. Grounding methods indicated in this manual must be
applied.
WAR I G
Due to the nature of this stage, the installation, use and maintenance of
this stage must be performed by trained personnel who are familiar
with safety regulations that are applicable to this product.
WAR N IN G
The motion of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
WAR I G
Do not exceed speed and load limitations as specified in this manual.
WAR N IN G
D n t use this stage when its m t r is emitting sm ke r is unusually
h t t the t uch r is emitting any unusual d r r n ise r is in any
ther abn rmal state.
St p using the stage immediately, switch ff the m t r p wer and then
disc nnect the electr nics p wer supply.
After checking that sm ke is n l nger being emitted c ntact y ur
Newp rt service facility and request repairs. Never attempt t repair the
stage y urself as this can be danger us.
WAR N IN G
Make sure that this stage is n t exp sed t m isture and that liquid d es
n t get int the stage.
Nevertheless, if any liquid has entered the stage, switch ff the m t r
p wer and then disc nnect the electr nics fr m p wer supply.
C ntact y ur Newp rt service facility and request repairs.
WAR N IN G
D n t insert r dr p bjects int this stage, this may cause an electric
sh ck, r l ck the drive.
D n t use this stage if any f reign bjects have entered the stage.
Switch ff the m t r p wer and then disc nnect the electr nics p wer
supply.
C ntact y ur Newp rt service facility f r repairs.
WAR N IN G
D n t place this stage in unstable l cati ns such as n a w bbly table r
sl ping surface, where it may fall r tip ver and cause injury.
If this stage has been dr pped r the case has been damaged, switch ff
the m t r p wer and then disc nnect the electr nics p wer supply.
C ntact y ur Newp rt service facility and request repairs.
WAR N IN G
D n t attempt t m dify this stage; this may cause an electric sh ck r
d wngrade its perf rmance.
WAR N IN G
D n t exceed the usable depth indicated n the m unting h les (see
secti n “Dimensi ns”). L nger screws can damage the mechanics r
cause a sh rt-circuit.
WARNING
The magnetic channel included in this device has the potential to disrupt
pacemakers. Consequentl , it is recommended that individuals maintain a
distance of 1 meter or more from the stage as a precautionar measure.
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
Caution
CAUTION
Do not pl ce this st ge in hostile environment such s X-R ys, h rd
UV,… or in ny v cuum environment.
CAUTION
Do not pl ce this st ge in loc tion ffected by dust, oil fumes, ste m or
high humidity. This m y c use n electric shock.
CAUTION
Do not le ve this st ge in pl ces subject to extremely high temper tures
or low temper tures. This m y c use n electric shock.
• Oper ting temper ture: +10 to +35 °C
• Stor ge/Oper ting ltitude: 1000 m
• Stor ge/Oper ting humidity: 85%
• Stor ge temper ture: -10 to +40 °C (in its origin l p ck ging)
CAUTION
Do not move this st ge if its motor power is on.
M ke sure th t the c ble to the electronics is disconnected before
moving the st ge. F ilure to do so m y d m ge the c ble nd c use n
electric l shock.
CAUTION
Be c reful th t the st ge is not bumped when it is being c rried. This
m y c use it to m lfunction.
CAUTION
When h ndling this st ge, lw ys unplug the equipment from the power
source for s fety.
CAUTION
When the c rri ge is in its end-of-run position, it is strongly recommended
not to go beyond this point s this m y d m ge the st ge mech nism.
CAUTION
Cont ct your Newport service f cility to request cle ning nd
specific tion control every ye r.
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
Long T avel Indust ial Linea Stages
IDL165-LM Se ies
1.0 —Introduction
This manual provides operating instructions for the IDL165-LM stage that
you have purchased.
RECOMME DATIO
Read and understand this user's manual before operating an IDL165-LM
stage.
Inside this manual you will find useful information and technical
references. It is recommended the user download all support
documentation from the IDL165-LM page of the ewport website for
reference.
IDL165-200LM Stage.
RECOMME DATIO
We recommend you carefully read the chapter “Connection to
electronics” before using the IDL165-LM stage.
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
2.0 —Description
The IDL165-LM Series of Industrial-grade linear stages is another robust
family of high quality ewport products, designed for higher throughput
and reliability. This series is designed specifically for laser micro-
machining applications that require high precision, down to 250 nm.
Additional features for use in industrial environments include a hard top
cover, flexible side bands and air purge.
Starting with an FEA-optimized body, recirculating bearings, high
efficiency linear motor and a direct read linear encoder, all components
were selected to enable the high precision and dynamic performance
expected of high throughput and demanding applications. Other features
include positive and negative end of runs to prevent overtravel, energy
absorbers for unintended scenarios and an origin switch that can be used
as a reference for absolute positioning.
Four sizes are offered to address a wide range of loads and travel.
2.1 Design Details
Base Material Aluminum
Bearings Recirculating caged ball bearings
Drive Mechanism Ironless linear motor
Feedback inear steel scale with 20 µm pitch
imit Switches Positive and Negative End-Of-Run -5 V
Origin Optical at center of travel
Cable 4.5 m Connectorized, optional cable management
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
3.0 —Characteristics
3.1 Definitions
Specificatio s of our products are established i refere ce to ISO 230
sta dard part II “Determi atio of accuracy a d repeatability of
positio i g umerically co trolled axes”.
This sta dard gives the defi itio of positio u certai ty which depe ds
o the 3 followi g parameters:
Absolute Accuracy
Differe ce betwee ideal positio a d real positio .
Accuracy
Differe ce betwee ideal positio a d real positio after the compe satio
of li ear errors.
Li ear errors i clude: cosi e errors, i accuracy of screw or li ear scale
pitch, a gular deviatio at the measuri g poi t (Abbe error) a d thermal
expa sio effects. All Newport motio electro ics ca compe sate for
li ear errors.
The relatio betwee absolute accuracy a d o -axis accuracy is as follows:
Absolute Accuracy = Accuracy + Correction Factor xTravel
Repeatability
Ability of a system to achieve a comma ded positio over ma y attempts.
Reversal Value (Hysteresis)
Differe ce betwee actual positio values obtai ed for a give target
positio whe approached from opposite directio s.
Minimum Incremental Motion (MIM or Sensitivity)
The smallest i creme t of motio a device is capable of deliveri g
co siste tly a d reliably.
Resolution
The smallest i creme t that a motio device ca theoretically move
a d/or detect. Resolutio is ot achievable, whereas MIM, is the real
output of a motio system.
Yaw, Pitch
Rotation of carriage around the Z axis (Yaw) or Y axis (Pitch), when it
moves.
The testing of accuracy, repeatability, and reversal error are made
systematically with test e uipment in controlled environment (20 ±1 °C).
A linear cycle with 21 data points on the travel and 4 cycles in each
direction gives a total of 168 points.
Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport's A167
metrology test procedure. For more information, please consult the
metrology tutorial section in the Newport catalog or at www.newport.com
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
3.2 Mechanical Specifications
OTE
The following specifications are controller/drive dependent. Refer to the
IDL165-LM Series page on www.newport.com for specifications
achievable with specific ewport controller/drive combination.
• MIM
• Accuracy
• Repeatability
• Max Speed
• Max Acceleration
3.3 Hard Stop: Speed Limitation Versus Load
IDL165-LM stages use electrical end-of-run and elastomer hard stops to
stop the carriage as smoothly as possible past the end-of-runs. The
overtravel allowed by the hard stops is 0.23 in. (5.8 mm).
When the stage is used with a controller supplied by ewport, the factory
settings of the "software limits" prohibit any commanded motion beyond
this travel range.
evertheless, for safety reasons, follow the recommendations
above to minimize risk of mechanical damage, in case of failure
or incorrect adjustment of parameters.
The maximum speed of the stage must be limited so that the
hard stops will always stop the carriage in 0.23 in. (5.8 mm) or
less, to avoid any shock between the carriage and stage body.
The graph at left, provides stage speed as a function of applied
load. This curve defines allowed operating conditions to stop
within the 0.23 in. (5.8 mm) over-travel allowed by the hard
stops. To stop within this distance, the user must maintain
speed and load within this tolerance. This graph assumes
correct wiring of the electrical end of runs will cut motor power
before contact with the hard stop.
G
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IDL165-200LM
Travel Range (mm) 200
Minimum Incremental Motion (2) (µm) 0.050
Bi-directional Repeatability (1) (µm)
Typical (Guaranteed) ±0.10 (±0.25)
Accuracy (1) (µm)
Typical (Guaranteed) 0.8 (±2.0)
Origin Repeatability (µm) ±0.1
Maximum Speed (mm/s) 2,000
Max. Acceleration (m/s2) 30
Moving Mass (kg) 2.25
Pitch (3), Guaranteed (µrad) (±20)
Yaw (3), Guaranteed (µrad) (±20)
Straightness/Flatness (µm) ±4.5/±4.5
Normal oad Capacity [Cz] (N) 450
Axial oad, Continuous, [±Cx] (N) 57
1) For the definition of Typical and Guaranteed pecification ee “Motion Ba ic Terminology & Standard ”
Tutorial at www.newport.com
2) Driver dependent.
3) To obtain arc ec unit , divide µrad value by 4.8.
Load on Carriage (kg)
Maximum Speed for Hard Stoppers
600
2000
1800
1600
1400
1200
1000
800
0 5010 20 30 40
Speed (mm/s)
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
3.4 Load Characteristics and Stiffness
ormal Load Capacity (Cz)
Maximum load a stage can move while maintaining specifications.
Max. values for the normal center load (Cz) and the off-center load (Q) are
given in the graphs below.
3.5 Stage Weight
The stage weight indicated below does not include the cables.
Z
Y
Q
D
Cz
X
kαy
kαz
kαx
Cx
Cz, Normal center load capacity on bearings 450 N
±Cx, Axial oad, Continuous 57 N
kax, Angular stiffness (Roll) 0.3 µrad/Nm
kay, Angular stiffness (Pitch) 0.4 µrad/Nm
kaz, Angular stiffness (Yaw) 0.4 µrad/Nm
Off-Center Load (N)
0
Off-Center Load Along X or Z Axis
Off-Center Load Along Y Axis
50 100 150 200 250 300 350 400 450
Cantilever Distance “D” (mm)
0
140
120
100
80
60
40
20
160
Weight [lb (kg)]
ID 165-200 M 22.0 (10)
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
4.0 —Drive and Motor
4.1 Motor characteristics (Direct Drive Brushless Motor)
CAUTIO
High RMS current will generate motor heating which will degrade
characteristics of the stage, such as repeatability, accuracy, etc…
4.2 Command Signals
OTE
The values above indicate voltage induced by energized coil of one
phase on next phase coil. A positive value for U-V would indicate a
higher voltage on U relative to V.
Continuous force, coil @ 100 °C 57 N
Continuous force, 3-bar Air Cooling, coil @ 100 °C 68 N
Peak force 289 N
Motor constant 69 N2/W
Continuous power 49.7 W
Peak power 796 W
Electrical cycle 60 mm
Max. bus voltage 330 V
Max. coil temperature 125 °C
Thermal dissipation constant 1.0 W/°C
Continuous current 3.6 Arms
Continuous current, AC 4.3 Arms
Peak current 18.4 Arms
Force constant 15.7 N/Arms
Back-emf constant 12.8 V/m/s
Inductance 1.57 mH
Thermal resistance @ 25 °C 2.35 Ω
Electrical time constant 0.67 ms
U-V
-2
0
Ha
Hb
Hc
-0.5
-1
-1.5
0.5
1
1.5
2
Amplitude
U-WV-W
Induced Voltages Coil Moving
Motion Direction +
Direction +
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IDL165-LM Se ies Long T avel Indust ial Linea Stages
4.3 Sensor Positions
4.4 Position Feedback Signals
– End-of-Run Limit
+ End-of-Run Limit
Index Pulse
Index Pulse
Motion Direction +Direction –
1.97
(50)
.04 (1).04 (1)
Negative
Software Limit
Stage Travel Range
Positive
Software Limit
Home Position
(Origin)
Dimensions in inches
(and millimeters)
Direction +
X
X Values – Hard – End- f-Run H me + End- f-Run + Hard
[in. (mm)] St p Limit P siti n Limit St p
ID 165-200 M 4.45 0
-0.23 4.49 ±0.02 8.46 ±0.04 12.44 ±0.02 12.48 +0.23 0
(113 0
-5.8) (114 ±0.5) (215 ±1) (316 ±0.5) (317 +5.8) 0
Signal description/Voltage/Wiring Heidenhain standard 1 Vpp
Reference mark position see drawing "Sensor Positions"
Resolution Scale pitch 20 µm
Maximum speed 8 m/s
Low
High
Low
High
Low
High
Low
High
Encoder
Phase A
Encoder
Phase A
Encoder
Phase B
Encoder
Phase B
1234
Encoder Feedback Signal Position
Motion Direction +Direction –
Direction +
A1043E0 - EDH0360En1030 — 02/20

8
IDL165-LM Se ies Long T avel Indust ial Linea Stages
4.5 General Wiring
4.6 Pinouts
The pinout diagrams for IDL165-LM stage connectors are shown below.
4.6.1 Hall Effect Sensor (SUB-D15F Connector)
4.6.2 Encoder (SUB-D15M Connector)
Motor
Encoder
IDL-LM Controller
A
/A
B
/B
I
/I
5 V
0 V
U
V
W
Gnd
T+
T-
Ha
Hb
Hc
U
V
W
Gnd
T+
T-
A
/A
B
/B
I
/I
5 V
0 V
Ha
Hb
Hc
i2c Data
i2c Clock
ZM
FC+
FC-
Fault
Inhibit
U command
Gnd
V command
Gnd
Driver Gnd
V command
Gnd
U command
Inhibit
Fault
FC-
FC+
ZM
i2c Clock
i2c Data
8
159
1
1+5 V
2N.C.
3N.C.
4N.C.
5N.C.
6Ground
7Ha
8Hb
9N.C.
10 N.C.
11 N.C.
12 N.C.
13 N.C.
14 Hc
15 N.C.
8
159
1
1Encoder Phase B
2Ground
3Encoder Phase A
4+5 V Encoder
5N.C.
6– End-of-Run
7Index Pulse /I
8+ End-of-Run
9Encoder Phase /B
10 Ground
11 Encoder Phase /A
12
13 N.C.
14 Index Pulse I
15 N.C.
A1043E0 - EDH0360En1030 — 02/20
N.C.

9
IDL165-LM Se ies Long T avel Indust ial Linea Stages
4.6.3 Encoder (SUB-D26HDM Connector on E5820A Adapter)
The E5820A adapter allows to connect the encoder cable with our XPS-D
controller.
4.6.4 Motor (DB9W4M Connector)
4.7 IDL165-LM Cable Wirings
IDL165-LM stages are delivered equipped with the three cables required
for operation. The wiring diagrams and connectors for these cables are
provided below. When operating with non- ewport controllers, it is
recommended to adhere to the wiring conventions presented here.
Hall Effect Sensor Cable
• Cable: Ø 3.3 mm
• Min. dynamic bending radius: 33 mm
Encoder Cable
• Cable: Ø 4.25 mm
• Min. dynamic bending radius: 20 mm
9
10 18
2619
1
1+5 V
2N.C.
3N.C.
4Encoder Phase B
5– End-of-Run
6Encoder Phase A
7Ground
8Index Pulse I
9N.C.
10 N.C.
11 N.C.
12 N.C.
13 Encoder Phase /B
14 + End-of-Run
15 Encoder Phase /A
16 N.C.
17 Index Pulse /I
18
19 N.C.
20 Ground
21 N.C.
22 N.C.
23 N.C.
24 N.C.
26 N.C.
26 N.C.
A1 Phase U Motor
A2 Phase V Motor
A3 Phase W Motor
A4 Ground + Shield
1T+
2T-
3N.C.
4N.C.
5N.C.
A4 A3 A2 A1
5
1
SUB-D15F
Connector
7
8
14
1
6
Connector
Cap
IDL-LM
Ha
Hb
Hc
+5 V
Ground
Hall Effect
Sensor
SUB-D15M
Connector
3
11
1
9
14
7
4
6
8
2
12
10
Connector
Cap
IDL-LM
Encoder Phase A
Encoder Phase /A
Encoder Phase B
Encoder Phase /B
Index Pulse I
Index Pulse /I
+5 V
Limit-
Limit+
Ground
+5 V
Ground
Encoder
N.C.
A1043E0 - EDH0360En1030 — 02/20

10
IDL165-LM Se ies Long T avel Indust ial Linea Stages
Motor Cable
• Cable: Ø 6 mm
• Min. dynamic bending radius: 60 mm
OTE
A filter is supplied with each IDL165-LM stage. It can be
used with an electronics other than the ewport XS-EDBL
controller if the level of the noise is considered too high.
4.8 Air Tube
• Tube: ø.24 in. (6 mm) with Legris connector ref. 3606.06.00
• Min. dynamic bending radius: 27 mm
DB9W4M
Connector
A1
A2
A3
A4
1
2
Connector
Cap
IDL-LM
Phase U Motor
Phase V Motor
Phase W Motor
Ground + Shield
T-
T+
Motor
A1
A2
A3
A4
1
2
Phase U Motor
Phase V Motor
Phase W Motor
Ground + Shield
T-
T+
Self
Customer
Electronics Yellow
Grey
Orange
Blue Green
Red
M1
M2
M3
PE
AIR BLOWING TUBE
LEGRIS 3606.06.00 CONNECTOR
MOTOR CABLE
DB9W4M CONNECTOR
ENCODER CABLE
SUB-D15M CONNECTOR
HALL EFFECT SENSOR CABLE
SUB-D15F CONNECTOR
A1043E0 - EDH0360En1030 — 02/20