Newport ONE-XY Series User manual

Integrated XY
Linear Motor Stages
ONE-XY Series
USER’SMANUAL
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EDH0351En1012 — 10/18 ii
ONE-XY Series Integrated XY Linear Motor Stages
Warranty
Newpor Corpora ion warran s his produc o be free from defec s in
ma erial and workmanship for a period of 1 year from he da e of
shipmen . If found o be defec ive during he warran y period, he produc
will ei her be repaired or replaced a Newpor ’s discre ion.
To exercise his warran y, wri e or call your local Newpor represen a ive,
or con ac Newpor headquar ers in Irvine, California. You will be given
promp assis ance and re urn ins ruc ions. Send he ins rumen ,
ranspor a ion prepaid, o he indica ed service facili y. Repairs will be
made and he ins rumen re urned, ranspor a ion prepaid. Repaired
produc s are warran ed for he balance of he original warran y period, or
a leas 90 days.
Limitation of Warranty
This warran y does no apply o defec s resul ing from modifica ion or
misuse of any produc or par .
This warrant is in lieu of all other warranties, expressed or implied,
including an implied warrant of merchantabilit or fitness for a
particular use. Newport Corporation shall not be liable for an indirect,
special, or consequential damages.
b Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document ma be reproduced or copied without the prior
written approval of Newport Corporation. This document is provided for
information onl , and product specifications are subject to change without
notice. An change will be reflected in future publishings.
CAUTION
Warran y does no apply o damages resul ing from:
• Incorrec usage:
– Load on he s age grea er han maximum specified load.
– Carriage speed higher han specified speed.
–Improper grounding.
¬ Connec ors mus be properly secured.
¬ When he load on he s age represen s an elec rical risk, i mus
be connec ed o ground.
– Excessive or improper can ilever loads.
• Modifica ion of he s age or any par hereof.
CAUTION
Please ret rn eq ipment in
the original (or eq ivalent)
packing.
Yo will be responsible for
damage inc rred from
inadeq ate packaging if the
original packaging is not
sed.
© 2018

iii EDH0351En1012 — 10/18
ONE-XY Series Integrated XY Linear Motor Stages
Table of Contents
Warranty .................................................................................................................ii
EC Declaration of Conformity...............................................................................v
Definitions and Symbols.......................................................................................vi
Warnings ...............................................................................................................vii
Caution ...................................................................................................................ix
1.0 — Introduction.................................................................................1
2.0 — Description ...................................................................................2
2.1 Design Details ............................................................................................2
3.0 — Characteristics............................................................................3
3.1 Definitions..................................................................................................3
3.2 Mechanical Specifications .......................................................................4
3.3 Hard Stop ...................................................................................................4
3.4 Load Characteristics and Stiffness .........................................................4
4.0 — Drive and Motor.........................................................................5
4.1 Motor characteristics (Direct Drive Brushless Motor)........................5
4.2 Command Signals......................................................................................5
4.3 Sensor Positions........................................................................................5
4.4 Position Feedback Signals........................................................................6
4.5 Pinouts........................................................................................................6
Motor (SUB-D9M Connector)...................................................................6
Encoder and End-of- uns (SUB-D15M Connector) ...............................7
4.6 ONE-XY Cable Wiring................................................................................7
5.0 — Stage Installation.......................................................................8
5.1 Unpacking ..................................................................................................8
5.2 Mounting Conditions ................................................................................9
6.0 — Connection to Newport Controllers..............................10
6.1 Warnings on Controllers ........................................................................10
6.2 Connection...............................................................................................11
6.3 Cables .......................................................................................................11
7.0 — Connection to Non-Newport Controllers ....................12
8.0 — Dimensions.................................................................................13

EDH0351En1012 — 10/18 iv
ONE-XY Series Integrated XY Linear Motor Stages
9.0 — Maintenance ..............................................................................14
9.1 Maintenance ............................................................................................14
9.2 epair .......................................................................................................14
9.3 Calibration ...............................................................................................14
Service Form .........................................................................................................15

v EDH0351En1012 — 10/18
ONE-XY Series Integrated XY Linear Motor Stages
ONE-XY
Year markaffixed:2015
EU Declaration of Conformity
The manufacturer:
Newport Corp.
1791 Deere Avenue
Irvine, CA 92606 - USA
Hereby declares that the product:
Description: " ONE-XY "
Function: Integrated XY Linear Motor Stage
Type of equipment: Special Purpose Laboratory Equipment Consisting of 2 Devices,
an X & Y Axis Linear Motorized Stage and a CE Compliant Programmable Controller
with Interconnect Cable
– complies with all the relevant provisions of the Directive 2014/30/EU relating to electro-
magnetic compatibility (EMC).
– complies with all the relevant provisions of the Directive 2006/95/EC relating to electrical
equipment designed for use within certain voltage limits (Low Voltage).
– complies by exemption granted to test, Measurement and Control equipment with all the
relevant provisions of the Directive 2011/65/EU relating to the restriction of the use of certain
hazardous substances in electrical and electronic equipment (RoHS2).
– was designed and built in accordance with the following harmonised standards:
EN 61326-1:2013 « Electrical equipment for measurement, control and laboratory
use – EMC requirements – Part 1: General requirements »
EN 61010-1:2010 « Safety requirements for electrical equipment for measurement,
control and laboratory use – Part 1: General requirements »
EN 55011:2009 Classe A
– was designed and built in accordance with the following other standards:
EN 61000-3-2
EN 61000-3-3
EN 61000-4-2
EN 61000-4-3
EN 61000-4-4
EN 61000-4-5
EN 61000-4-6
EN 61000-4-8
EN 61000-4-11
EN 62311
Date : 22/07/2015
Dominique DEVIDAL
Quality Director
MICRO-CONTROLE Spectra-Physics
Zone Industrielle
F-45340 Beaune La Rolande, France
DC2-EN rev:A
EC Declaration of Conformity

EDH0351En1012 — 10/18 vi
ONE-XY Series Integrated XY Linear Motor Stages
Definitions and Symbols
The following erms and symbols are used in his documen a ion and also
appear on he produc where safe y-rela ed issues occur.
General Warning or Caution
The exclama ion symbol may appear in warning and cau ion ables in his
documen . This symbol designa es an area where personal injury or
damage o he equipmen is possible.
The following are defini ions of he Warnings, Cau ions and No es ha may
be used in his manual o call a en ion o impor an informa ion regarding
personal safe y, safe y and preserva ion of he equipmen , or impor an
ips.
WA R N I N G
Warning indicate a potentially dangerou ituation which can re ult in
bodily harm or death.
CAUTION
Caution indicate a potentially hazardou ituation which can re ult in
damage to product or equipment.
NOTE
Note indicate additional information that mu t be con idered by the
u er or operator.
European Union CE Mark
The presence of he CE Mark on Newpor Corpora ion equipmen means
ha i has been designed, es ed and cer ified as complying wi h all
applicable European Union (CE) regula ions and recommenda ions.
Warning and Caution
ATTENTION
Thi tage i a Cla A device. In a re idential environment, thi device
can cau e electromagnetic interference. In thi ca e, uitable mea ure
mu t be taken by the u er.

vii EDH0351En1012 — 10/18
ONE-XY Series Integrated XY Linear Motor Stages
WARNING
When the ONE-XY stage is installed or combined with other instruments
in a machine, additional testing to directive 2006/42/EC may be
required. It is the responsibility of the end-user or integrator to perform
a risk-analysis and the necessary tests to conform to the EC directives.
Newport is not liable for damages caused by not executing this
responsibility.
Warnings
WAR N IN G
The motion of objects of all types carries potential risks for operators.
Ensure the protection of operators by prohibiting access to the dangerous
area and by informing the personnel of the potential risks involved.
WAR N IN G
The magnetic channel included in this device has the potential to disrupt
pacemakers. Consequentl , it is recommended that individuals maintain a
distance of 1 meter or more from the stage as a precautionar measure.
WAR N IN G
D n t use this stage when its m t r is emitting sm ke r is unusually
h t t the t uch r is emitting any unusual d r r n ise r is in any
ther abn rmal state.
St p using the stage immediately, switch ff the m t r p wer and then
disc nnect the electr nics p wer supply.
After checking that sm ke is n l nger being emitted c ntact y ur
Newp rt service facility and request repairs. Never attempt t repair the
stage y urself as this can be danger us.
WAR N IN G
Make sure that this stage is n t exp sed t m isture and that liquid d es
n t get int the stage.
Nevertheless, if any liquid has entered the stage, switch ff the m t r
p wer and then disc nnect the electr nics fr m p wer supply.
C ntact y ur Newp rt service facility and request repairs.
W

EDH0351En1012 — 10/18 viii
ONE-XY Series Integrated XY Linear Motor Stages
WARNING
Do not exceed speed and load limitations as specified in this manual.
WAR N IN G
D n t insert r dr p bjects int this stage, this may cause an electric
sh ck, r l ck the drive.
D n t use this stage if any f reign bjects have entered the stage.
Switch ff the m t r p wer and then disc nnect the electr nics p wer
supply.
C ntact y ur Newp rt service facility f r repairs.
WAR N IN G
D n t place this stage in unstable l cati ns such as n a w bbly table r
sl ping surface, where it may fall r tip ver and cause injury.
If this stage has been dr pped r the case has been damaged, switch ff
the m t r p wer and then disc nnect the electr nics p wer supply.
C ntact y ur Newp rt service facility and request repairs.
WAR N IN G
D n t attempt t m dify this stage; this may cause an electric sh ck r
d wngrade its perf rmance.
WAR N IN G
D n t exceed the usable depth indicated n the m unting h les (see
secti n “Dimensi ns”). L nger screws can damage the mechanics r
cause a sh rt-circuit.

ix EDH0351En1012 — 10/18
ONE-XY Series Integrated XY Linear Motor Stages
Caution
CAUTION
Do not pl ce this st ge in hostile environment such s X-R ys, h rd
UV,… or in ny v cuum environment.
CAUTION
Do not pl ce this st ge in loc tion ffected by dust, oil fumes, ste m or
high humidity. This m y c use n electric shock.
CAUTION
Do not le ve this st ge in pl ces subject to extremely high temper tures
or low temper tures. This m y c use n electric shock.
• Oper ting temper ture: 0 to +50 °C
• Stor ge/Oper ting ltitude: 1000 m
• Stor ge/Oper ting humidity: 10 to 80% non-condensing
• Stor ge temper ture: -10 to +40 °C (in its origin l p ck ging)
CAUTION
Do not move this st ge if its motor power is on.
M ke sure th t the c ble to the electronics is disconnected before
moving the st ge. F ilure to do so m y d m ge the c ble nd c use n
electric l shock.
CAUTION
Prior to tr nsporting the st ge, secure the xis by re-inst lling the
shipping screws th t lock the xis together.
CAUTION
Be c reful th t the st ge is not bumped when it is being c rried. This
m y c use it to m lfunction.
CAUTION
When h ndling this st ge, lw ys unplug the equipment from the power
source for s fety.
CAUTION
When the c rri ge is in its end-of-run position, it is strongly recommended
not to go beyond this point s this m y d m ge the st ge mech nism.
CAUTION
Cont ct your Newport service f cility to request cle ning nd
specific tion control every ye r.

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ONE-XY Series Integrated XY Linear Motor Stages

1 EDH0351En1012 — 10/18
ONE-XY Series Integrated XY Linear Motor Stages
Integrated XY Linear Motor Stages
ONE-XY Series
1.0 —Introduction
This manual provides operating instructions for the ONE-XY stage.
Inside this manual you will find useful information and technical
references. It is recommended that the user download all support
documentation from the ONE-XY page of the Newport website to have as
reference.
ONE-XY350 Stage.
RECOMMENDATION
We recommend you carefully read the chapter “Connection to
electronics” before using the ONE-XY stage.

EDH0351En1012 — 10/18 2
ONE-XY Series Integrated XY Linear Motor Stages
2.0 —Description
The ONE-XY series of integrated XY linear motor stages are designed to
eliminate the integration of individual X and Y stages and increase system
stiffness for dynamic applications. The available travel ranges from 60 mm
to 400 mm, with precise orthogonality alignment between the X and Y
axes.
The stages feature robust components and deliver high performance,
making them ideal solutions for precision industrial applications such as
semiconductor wafer inspection, microelectronics test and assembly,
metrology, laser microprocessing.
The ONE-XY has a monolithic, aluminum middle plate that is stiffer than
the conventional interface between two individual linear stages. The linear
motor drive is an iron-less design that is suited for high precision
positioning, but at the same time offers high dynamic performance. Cross-
roller bearings provide high load capacity as well as straight trajectories.
Precision position feedback is supplied by a highly repeatable linear scale
mounted inside the stage. The encoder signals are interpolated by
Newport’s XPS motion controller with 50 nm MIM for outstanding
Minimum Incremental Motion, repeatability, and stability. Absolute home
position and limit signals are incorporated to improve repeatability and
reliability, while simplifying the design with less electronics and
mechanical parts.
2.1 Design Details
Base aterial Aluminum
Bearings High precision crossed roller bearings
Drive System 3-phase synchronous ironless core linear motor
otor Initialization Done by controller
Feedback Non-contact optical encoder
Limit & Home Switches Integrated home and end of travel limits
Cable High Flex, 10 cycle, 3 m length
TBF 20,000 hours

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ONE-XY Series Integrated XY Linear Motor Stages
3.0 —Characteristics
3.1 Definitions
Specificatio s of our products are established i refere ce to ISO 230
sta dard part II “Determi atio of accuracy a d repeatability of
positio i g umerically co trolled axes”.
This sta dard gives the defi itio of positio u certai ty which depe ds
o the 3 followi g parameters:
Absolute Accuracy
Differe ce betwee ideal positio a d real positio .
Accuracy
Differe ce betwee ideal positio a d real positio after the compe satio
of li ear errors.
Li ear errors i clude: cosi e errors, i accuracy of screw or li ear scale
pitch, a gular deviatio at the measuri g poi t (Abbe error) a d thermal
expa sio effects. All Newport motio electro ics ca compe sate for
li ear errors.
The relatio betwee absolute accuracy a d o -axis accuracy is as follows:
Absolute Accuracy = Accuracy + Correction Factor xTravel
Repeatability
Ability of a system to achieve a comma ded positio over ma y attempts.
Reversal Value (Hysteresis)
Differe ce betwee actual positio values obtai ed for a give target
positio whe approached from opposite directio s.
Minimum Incremental Motion (MIM or Sensitivity)
The smallest i creme t of motio a device is capable of deliveri g
co siste tly a d reliably.
Resolution
The smallest i creme t that a motio device ca theoretically move
a d/or detect. Resolutio is ot achievable, whereas MIM, is the real
output of a motio system.
Yaw, Pitch
Rotation of carriage around the Z axis (Yaw) or Y axis (Pitch), when it
moves.
The testing of accuracy, repeatability, and reversal error are made
systematically with test e uipment in controlled environment (20 ±1 °C).
A linear cycle with 21 data points on the travel and 4 cycles in each
direction gives a total of 168 points.
Guaranteed and Typical Specifications
Guaranteed maximum performance values are verified per Newport's A167
metrology test procedure. For more information, please consult the
metrology tutorial section in the Newport catalog or at www.newport.com

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ONE-XY Series Integrated XY Linear Motor Stages
3.2 Mechanical Specifications
NOTE
The following specifications are controller/drive dependent. Refer to the
ONE-XY Series page on www.newport.com for specifications achievable
with specific Newport controller/drive combination.
• MIM
• Accuracy
• Repeatability
• Max Speed
• Max Acceleration
CAUTION
To reach stated specifications, the stages must be fixed on a plane
surface with a flatness of 5 µm.
3.3 Hard Stop
Hard stops are supplied, only for emergency use.
3.4 oad Characteristics and Stiffness
Normal oad Capacity (Cz)
Maximum load a stage can move while maintaining specifications.
NOTE
For other than centered loads, please contact Newport technical
support.
ONE-XY60 ONE-XY60HA ONE-XY100 ONE-XY100HA ONE-XY200 ONE-XY200HA ONE-XY300 ONE-XY300HA
Travel Range (mm) 50 x 50 90 x 90 190 x 190 290 x 290
inimum Incremental otion (µm) 0.05 0.05 0.05 0.05 0.05 0.05 0.05 0.05
Accuracy, Typical (Guaranteed) (µm) ±0.4 (±1.5) n/a (±0.3) ±0.5 (±2.0) n/a (±0.3) n/a (±2.5) n/a (±0.4) n/a (±3.0) n/a (±0.5)
Bi-directional Repeatability,
Typical (Guaranteed) (µm) ±0.040 (±0.070) ±0.040 (±0.080) n/a (±0.090) n/a (±0.100)
Straightness, Typical (5) (µm) ±0.5 ±1.0 ±2.0 ±3.0
Flatness, Typical (2) (µm) ±0.5 ±1.0 ±2.0 ±3.0
Pitch, Typical (Guaranteed) (3)(5) (µrad) ±20 (±65) n/a (±65) n/a (±75) n/a (±75) n/a (±90) n/a (±90) ±15 (±55) n/a (±55)
Yaw, Typical (Guaranteed) (3)(5) (µrad) ±20 (±65) n/a (±65) n/a (±75) n/a (±75) n/a (±90) n/a (±90) ±15 (±55) n/a (±55)
Roll (3) (µrad) 58 58 72 48
Orthogonality (3) (µrad) 96 96 96 96
ax. Speed (3) (m/s) 0.3 0.4 0.5 0.3
ax. Acceleration (3) (G) 0.3 0.3 0.2 0.2
ax. Load Capacity (N) 100 120 150 350
Weight [lb (kg)] 6.4 (2.9) 12.8 (5.8) 26.4 (12) 165 (75)
1) Specifications measured on stage centerline, 50 mm above mounting surface. Newport provides NIST traceable, test results.
2) Flatness specifications dependent on system base. Contact Newport for more information.
3) Stage performance values at no load. Does not account for drive or resolution effects.
4) To obtain arcsec units, divide mrad value by 4.8.
5) Over 80% of travel range.
Notes: HA versions are error mapped in X .
Speed and acceleration can be higher with other driver options.
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ONE-XY Series Integrated XY Linear Motor Stages
4.0 —Drive and Motor
4.1 Motor characteristics (Direct Drive Brushless Motor)
CAUTION
High RMS current will generate motor heating which will degrade
characteristics of the stage, such as repeatability, accuracy, etc...
4.2 Command Signals
NOTE
The values above indicate voltage induced by energized coil of one
phase on next phase coil. A positive value for U-V would indicate a
higher voltage on U relative to V.
4.3 Sensor Positions
ONE-XY50 ONE-XY100 ONE-XY200 ONE-XY300 ONE-XY400
agnet Pitch [N-N] (mm) 30.48 30.48 30.48 30.48 30.48
ax. Voltage [Line to Line] (1) (V) 500 500 500 500 500
Electrical Time Constant (ms) 0.19 0.19 0.20 0.20 0.20
ax. otor Temperature (°C) 130 130 130 130 130
otor Connection DELTA DELTA DELTA DELTA DELTA
otor Constant (N2/W)
Force Constant (N/Apk) 8.1 16.3 28.7 43.0 57.4
Phase Resistance [@ 25 °C] (2) (Ω) 5.8 11.6 11.7 17.6 23.5
Phase Resistance [@ 130 °C] (2) (Ω) 8.2 16.4 16.6 24.9 33.2
Thermal Resistance (°C/W)
Inductance (mH) 1.1 2.1 2.3 3.5 4.7
Continuous Force (3) (N) 23 47 93 140 186
Continuous Current (3) (Apk) 2.9 2.9 3.2 3.2 3.2
Peak Force (4) (N) 75 151 295 442 589
Peak Current (4) (NApk) 9.2 9.2 10.3 10.3 10.3
Back E F Constant (V/m/s) 8.1 16.3 28.7 43.0 57.4
1) Back EMF plus IR drop must not exceed maximum line to line bus voltage.
2)Resistance values do not include cable resistance. Cable resistance adds 0.146 ohm/m for Delta connection and 0.44 ohm/m for Wye
Connection.
3) Continuous operating limits are based on continuous operation at maximum temperature with aluminum heat sink (300mm x 12.5mm
x motor length).
4) Maximum on time at peak operating limits is 10 seconds.
U-V
-2
0
-0.5
-1
-1.5
0.5
1
1.5
2
Amplitude
U-WV-W
Induced Voltages Coil Moving
Motion Direction +
RT(Ω)
2500
2000
1500
1000
500
050
TA(°C)
100
EHA07248
-50 0 150
Positive Temperature Coefficient
Thermistor, resistance as a function
of temperature. Motor heating is
typically restricted to 20 °C with
Newport Controllers.
Direction +
Direction +

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ONE-XY Series Integrated XY Linear Motor Stages
4.4 Position Feedback Signals
4.5 Pinouts
The pinout diagrams for the ONE-XY stage connectors are shown below.
4.5.1 Motor (SUB-D9M Connector)
• Max. voltage: 96 V
• Max. rms Current: 3.1 A
– End-of-Run Limit
+ End-of-Run Limit
Index Pulse
Index Pulse
Sensor Positions
Motion Direction +Direction –
1.97
(50)
.08 (2).08 (2)
Negative
Software Limit
Stage Travel Range
Positive
Software Limit
Home Position
(Origin)
Dimensions in inches
(and millimeters)
Signal description / Voltage / wiring Renishaw standard 1 Vpp
Reference mark position see drawing "Sensor Positions"
Resolution Scale pitch 20 µm
aximum speed 10 m/s
Direction +
Direction +
Low
High
Low
High
Low
High
Low
High
Encoder
Phase A
Encoder
Phase A
Encoder
Phase B
Encoder
Phase B
1234
Encoder Feedback Signal Position
Motion Direction +Direction –
1U otor
2U otor
3V otor
4V otor
5Thermistor 1
6W otor
7W otor
8Shield Ground
9Thermistor 2
5
96
1

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ONE-XY Series Integrated XY Linear Motor Stages
WARNING
GROUNDING: The stage's protective ground is located on pin #8 of the
motor power connector.
If you are using grounds other than those provided by Newport, you
must connect pin #8 to a ground connection.
4.5.2 Encoder and End-of-Runs (SUB-D15M Connector)
4.6 ONE-XY Cable Wiring
All ONE-XY stages are delivered with the three cables required for
operation. The wiring diagrams and connectors for these cables are
provided in the following diagrams. When operating the non-Newport
controllers, it is recommended to adhere to the wiring conventions
presented here and to use cabling with similar characteristics.
NOTE
This is the wiring of the cables that provided with the connection to
Newport Controllers, for third party controllers, we recommend using a
cable with similar characteristics.
8
159
1
1Encoder Phase B
2Shield Ground
3Encoder Phase A
4+5 V Encoder
5N.C.
6– End-of-Run
7Index Pulse /I
8+ End-of-Run
9Encoder Phase /B
10 Shield Ground
11 Encoder Phase /A
12 +5 V
13 N.C.
14 Index Pulse I
15 N.C.
MotorEncoder &
End-of-Runs
SUB-D9M
Connector
1
2
3
4
6
7
8
Connector
Cap
ONE-XY
Stage
Phase U Motor
Phase U Motor
Phase V Motor
Phase V Motor
Phase W Motor
Phase W Motor
Ground
Connector
Cap
Sub-D15F
Connector
Encoder Phase A
Encoder Phase /A
Encoder Phase B
Encoder Phase /B
Index Pulse I
Index Pulse /I
+ End-of-Run
- End-of-Run
+5 V Encoder
+5 V
N.C.
N.C.
N.C.
Shield Ground
Connector
Cap
SUB-D15M
Connector
3
11
1
9
14
7
8
6
4
12
5
13
15
2-10
Connector
Cap

EDH0351En1012 — 10/18 8
ONE-XY Series Integrated XY Linear Motor Stages
5.0 —Stage Installation
5.1 Unpacking
The ONE-XY stage will be delivered to your site in packaging designed for
safe transport. Larger ONE-XY stages will be delivered in Pelican cases. All
accessories will be included in this case.
Attached to the body of the stage are handles for safe removal from
packaging. It is recommended to carefully lift the stage from packaging
using these handles.
CAUTION
The largest stages are quite heavy, and we recommd a two person job
or by some cherry picker.
CAUTION
Before operating the stage, remove the screws that hold the stages
during shipment.

9 EDH0351En1012 — 10/18
ONE-XY Series Integrated XY Linear Motor Stages
NOTE
Put away shipping screws, in case the unit needs to be returned to the
factory.
The stage will come delivered with a control report that indicates
performance of your stage within guaranteed specification. These
measurements were taken in a controlled environment under flat mounting
conditions.
5.2 Mounting Conditions
ONE-XY stages require the following mounting conditions for best
performance.
Mounting holes to a table, whether a granite or flat steel table can be
accessed by moving the stage manually
Installation Considerations
ounting surface flatness 5 µm
ounting screw torque 7 Nm

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ONE-XY Series Integrated XY Linear Motor Stages
6.0 —Connection to Newport Controllers
NOTE
Visit www.newport.com for compatible Newport controllers.
6.1 Warnings on Controllers
Controllers are intended for use by qualified personnel who recognize
shock hazards and are familiar with safety precautions required to avoid
possible injury. ead the controller user’s manual carefully before
operating the instrument and pay attention to all written warnings and
cautions.
Specifications listed in this guide are based on operation with Newport
Control and Drive Electronics. The XPS Controller is delivered with a
configuration file that has been developed at the factory for operation in a
no-load condition for immediate plug-and-play operation.
Newport has developed technical notes which guide the configuration
process for operation of ONE-XY stages with a non-zero, application
specific payload.
For operation under such conditions the Scaling Acceleration, Acceleration
Limit and PID tuning parameters may need to be adjusted. Please download
our tech notes on Scaling Acceleration, Tuning and configuring direct drive
stages on the ONE-XY page of the Newport website.
For additional information about controllers, visit www.newport.com.
WARNING
Disconnect the power plug under the following circumstances:
• If the power cord or any attached cables are frayed or damaged in
any way.
• If the power plug is damaged in any way.
• If the unit is exposed to rain, excessive moisture, or liquids are spilled
on the unit.
• If the unit has been dropped or the case is damaged.
• If you suspect service or repair is required.
• Whenever you clean the electronics unit.
CAUTION
To protect the unit from damage, be sure to:
• Keep all air vents free of dirt and dust.
• Keep all liquids away from the unit.
• Do not expose the unit to excessive moisture (85% humidity).
• Read this manual before using the unit for the first time.
WARNING
All attachment plug receptacles in the vicinity of this unit are to be of
the grounding type and properly polarized.
Contact your electrician to check your receptacles.