Oerlikon ARS 16-25 User manual

Contents
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Page
Original installation and operating instructions.
0 Important Safety Information 4
0.1 Hazards caused by materials and substances 4
0.2 Risk of damaging the device 4
1 Description 5
1.1 Design and Function 5
1.2 Supplied Equipment 5
1.3 Technical Data 6
1.4 Ordering Data 6
2 Transport and Storing 7
3 Installation 7
4 Operation and Maintenance 9
4.1 Replacing the Filter Elements 9
4.2 Oerlikon Leybold Vacuum Service 11
5 Waste Disposal 12

Safety Information
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Obligation to Provide Information
Before installing and commissioning the equipment, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Oerlikon Leybold Vacuum Exhaust Filters with Lubricant Feedback
ARS have been designed for safe and efficient operation when used properly
and in accordance with these Operating Instructions. It is the responsibility of
the user to carefully read and strictly observe all safety precautions described
in this section and throughout the Operating Instructions. The equipment
must only be operated in the proper condition and under the conditions
described in the Operating Instructions. It must be operated and maintained
by trained personnel only. Consult local, state, and national agencies regar-
ding specific requirements and regulations. Address any further safety, opera-
tion and/or maintenance questions to our nearest office.
DANGER indicates an imminently hazardous situation which, if not avoided,
will result in death or serious injury.
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
Figures
The references to figures, e.g. (4/2) consist of the consecutive Fig. No. and
the Item No. in that order.
NOTICE
DANGER
WARNING
CAUTION
NOTICE

Safety Information
4 GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
0 Important Safety Information
0.1 Hazards caused by materials and substances
1 Hazardous substances may escape from the filter, condensate or the
oil. Take suitable precautions (e. g. gloves, goggles or gas mask).
Observe all safety regulations.
2 When toxic gases or vapors are pumped, an exhaust line must be
fitted in accordance with the safety regulations relating to protection
against poisonous vapors.
3 Contaminated parts can be detrimental to health and environment.
Before beginning with any work, first find out whether any parts are
contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts; For example wear gloves, face
protection or breathing protection.
If there exists a potential hazard, the filter or the separator must be
decontaminated before starting with any maintenance work.
The filter pot may be as hot as 90 °C.
There is the danger of receiving burns.
Wear suitable protective clothing.
For professional decontamination we recommend our service.
4 The equipment must be packed in such a way, that it will not be dam-
aged during shipping and so that any contaminants are not released
from the package.
5 When disposing of used oil and spent filter and filter elements, please
observe the relevant environmental protection regulations.
6 The ARS can be operated with perfluoropolyether (PFPE) as lubricant.
When handling PFPE you should observe the following:
During thermal decomposition at temperatures over 290 °C toxic and
corrosive gases are released. When handling PFPE keep it away from
open fires. Do not smoke with PFPE on your fingers.
Touch the inner sections of the pumps only while wearing clean gloves,
and use clean tools;
do the necessary work in clean and dry rooms;
after having removed the pump from its packaging, start it up as
quickly as possible;
as cleaning agents solvents based on hydrofluorether compounds may
be used..
0.2 Risk of damaging the device
1 The filter element should be changed regularly, depending on the oper-
ating conditions.
Clogged filters will increase the pump’s temperature.
2 Only original filter elements guarantee the function of the pressure relief
valve.
DANGER
NOTICE

Description
5GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
1 Description
1.1 Design and Function
The ARS is part of the TRIVAC SYSTEM. It is an exhaust filter with oil feed-
back controlled by a float-actuated valve. It is connected to the exhaust port
of a TRIVAC B/BCS pump.
Connection of the ARS does not affect the easy modification of the pump
inlet port (vertical or horizontal installation) or the functioning of the pump’s
anti-suckback valve.
Oil mist and aerosols are trapped by the filter element, while volatile and aro-
matic substances pass through.
The oil trapped in the ARS housing is allowed to collect. When it exceeds a
certain level, the built-in float valve opens and releases the inlet aperture.
The oil is drawn out of the collector of the ARS and returned to the lubricat-
ing circuit via the feedback pipe (2/12) and the adapter (2/6) beneath the inlet
port (2/9), because when the pump is running the pressure in the collector is
higher than that beneath the inlet port. The float then drops and closes the
exhaust aperture. The oil level now gradually rising again leads to the forego-
ing procedure being repeated.
Impurities and cracking products of the oil may clog the filter elements during
operation, thus causing an overpressure in the pump.
To prevent the pressure from exceeding a specific value (approx. 1.5 bar, 7
psig), a pressure relief valve is incorporated in each exhaust filter element.
If the filter becomes clogged, the built-in pressure relief valve opens and the
filter is bypassed, thus avoiding damage caused by overpressures.
The ARS has a differential pressure indicator (2/3) to allow easy checking of
the condition of the filter elements (green: filter OK; red: change filter) .
All ARS parts that come into contact with the pumped medium are surface-
protected.
1.2 Supplied Equipment
The ARS exhaust filter with oil feedback is supplied complete with a pump
inlet adapter, connection piping with banjo bolts and all required O-ring gas-
kets as well as long fastening screws for the pump inlet port.
The ARS is pre-cleaned so that it can be used with either mineral oil (e.g.
LVO 100) or perfluoropolyether (PFPE, e.g. LVO 400).
For shipping it is sealed airtight in foil, together with silica gel.

Description
6 GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
1.3 Technical Data
ARS 16-25 40-65
TRIVAC pump model S/D 16 B/BCS S/D 40 B/BCS
S/D 25 B/BCS S/D 65 B/BCS
Connecting flange DN 25 KF 40 KF
Weight kg (lbs) 4.7 (10.4) 8.5 (16.7)
Oil quantity needed to acctuate float
Mineral oil cm3(qt) 510 (0.54) 760 (0.80)
PFPE cm3(qt) 340 (0.36) 420 (0.44)
Remaining oil capacity
Mineral oil cm3(qt) 430 (0.45) 700 (0.74)
PFPE cm3(qt) 300 (0.31) 390 (0.41)
1.4 Ordering Data
ARS 16-25 40-65
Part No.
ARS 189 56 189 57
ARS, FPM sealed – 189 57V3
Replacement filter element 189 72 189 73 (2x)
Connection fittings (needed for connection other components) Part No.
Centering ring 183 27 183 28
Clamping ring 183 42 183 43
Fig. 1 Dimensional drawing of ARS mounted on a TRIVAC BCS
Type b b1h h1
ARS 16-25 mm ~360 176 282 264
in. ~14.2 6.93 11.1 10.4
ARS 40-65 mm ~468 234 381 356
in. ~18.4 9.21 15.0 14.0

Installation
7GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
2 Transport and Storing
The equipment must be packed in such a way, that it will not be damaged
during shipping and so that any contaminants are not released.
3 Installation
Before installing disconnect all electrical connections. You must reliably
prevent the pump from running up.
The ARS is freed of any oil and grease so that it can be used with either min-
eral oil or perfluoropolyether (PFPE). It is shipped in an airtight bag to prevent
corrosion.
Touch the interior of the ARS only with clean gloves or tools.
Work in rooms that are as clean and dry as possible.
Do not open the packaging of the ARS until immediately before use; after
opening, install the ARS as quickly as possible and start up the pump.
When using PFPE, employ only Freon®1)-113 or Frigen®2)-113 as cleaning
agent.
Since mineral oil and PFPE emulsify on coming into contact with one
another, the ARS has to be completely cleaned and equipped with new
gaskets and filter elements when changing the type of oil. It is recommend-
ed to let Leybold do this work.
Observe Safety Information 0.1.5.
If a CFS and ARS are both connected to a TRIVAC B pump, it is advisable to
replace the pump’s rubber feet with antivibration elements. The TRIVAC BCS
already has antivibration elements.
®1) Registered trademark of DuPont de Nemours
®2) Registered trademark of Farbwerke Hoechst AG
Tools needed
Allen key 6 mm, 8 mm open-jaw or ring wrench 13 mm, 19 mm
Remove the inlet port (2/9) of the TRIVAC B/BCS pump.
Check that the O-ring in the inlet port is in perfect condition; if not, replace it
by the new ring supplied.
In the inlet port of the TRIVAC 16/25 B/BCS there is a plate acting as sealing
surface for the anti-suckback valve. Remove this plate.
Clean the sealing surface of the pump and then install the adapter (2/6) with
a clean O-ring (2/5).
Mount the inlet port (2/9) with an O-ring (2/7) that is in perfect condition and
fasten it using the long screws supplied (2/8).
WARNING
CAUTION
NOTICE
WARNING
Transport and Storing / Installation

Installation
8 GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
Connect the ARS to the pump’s exhaust port using the centering and clamp-
ing ring (2/4).
Loosen the lock nut (2/2) on the support bolt of the filter housing and adjust
the bolt by hand so that it rests firmly against the pump housing, thus sup-
porting the housing of the exhaust filter. Tighten the lock nut.
The surfaces of the connecting flanges must be parallel to each other and
not at an angle!
Mount the feedback pipe (2/12) with two banjo bolts (2/11) each having two
O-rings (2/10). The feedback pipe with screwed elbow joints fits precisely
and has been checked for vacuum tightness.
The quality of the couplings can be checked by measuring the pump‘s ulti-
mate pressure. The latter must not be higher with installed feedback pipe
than without.
Also fill in at (3/10) the remaining amount of oil specified in the Technical
Data.
Even when connecting the ARS, an exhaust line in accordance with safety
regulations is indispensable if toxic or other hazardous gases or vapours
are pumped.
WARNING
Fig. 2 Installation of ARS 40-65 (ARS 16-25 similar)
1 Filter housing
2 Support bolt
3 Differential pressure indicator
4 Centering and clamping ring
5 O-ring
6 Adapter
7 O-ring
8 Screws for inlet port
9 Pump inlet port
10 O-ring
10a Distance sleeve
11 Banjo bolts
12 Feedback pipe
10a

Operation and Maintenance
9GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
4 Operation and Maintenance
By connecting the ARS, the pump‘s oil consumption becomes negligible.
This does not affect the service life of the oil. It thus remains necessary to
check the condition of the oil and change it.
PFPE does not have to be changed under normal operating conditions.
Since the ARS has a lower operating temperature than that of the pump,
condensate may gather in the ARS when pumping vapours.
Feedback of condensate (e.g. water) into the pump causes a deterioration in
the oil quality.
Please consult us in cases of doubt.
Whenever changing the pump‘s oil, change the oil in the ARS as well.
To do so, remove the oil drain plug (3/2) after the pump has been shut down
and drain the used oil into a suitable container.
Reinsert the oil-drain plug (check the gasket and replace it, if necessary).
Also fill the remaining amount of fresh oil specified in the Technical Data into
the pump at (3/10).
4.1 Replacing the Filter Elements
The filter element(s) (3/5) has/have to be replaced from time to time, depend-
ing on their conditions of use and the pump’s operating mode.
The dirtier the operating conditions and the hotter the pump gets, the more
often they have to be replaced.
The filter elements have to be replaced when the differential pressure indica-
tor (3/8) moves from green to red.
Under normal operating conditions, the filter becomes clogged by cracking
products of the oil (not PFPE). A clogged oil filter is thus a sign of a deteriora-
tion of oil quality. Whenever replacing the filter elements, the oil and any
chemical filters should also be changed.
(Description below for ARS 40-65; ARS 16-25 similar, but only one filter ele-
ment).
Tools needed
Allen key 6 mm, 8 mm open jaw or ring wrench 10 mm
Shut down the pump.

Operation and Maintenance
10 GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
Hazardous substances may escape from the filter and the oil. Take suitable
precautions (e.g. gloves, goggles or gas mask).
Observe all safety regulations.
Drain the oil (3/2) and reinsert the oil-drain plug.
Support the filter housing by placing, say, two wooden strips (3/1) under-
neath.
Remove the 4 screws (3/9) and put down the filter housing.
Loosen the small-flange connections to the pump’s exhaust port and exhaust
line and remove the lid (3/7).
Loosen 2 nuts (3/3) on the base (3/4) and remove the base.
Replace the used filter elements with new ones. Make sure that the vulcan-
ised on seal of the filter elements is seated in the centering groove in the
housing cover.
When disposing of used oil and spent filter elements, please observe the rel-
evant environmental protection regulations.
Fasten the base again with the aid of the nuts, making sure that the filter ele-
ments fit properly into the apertures in the base and the lid.
Fill oil into the filter housing (for quantity, see Technical Data).
DANGER
1 Wooden strips to support
filter housing
2 Oil-drain plug
3 Nut(s) for base
4 Base
5 Filter element(s)
6 Gasket
7 Filter housing lid
8 Differential pressure indicator
9 Screws for filter housing lid
10 Pump oil-fill plug
Fig. 3 Filter change on ARS 40-65 (ARS 16-25 similar)

Operation and Maintenance
11GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
Connect the filter housing lid (3/7) to the pump’s exhaust port and exhaust
line.
Mount the lid (3/7) with a gasket (3/6) that is in perfect condition.
Torque for the screws (3/9) is
5 ± 0.5 Nm for Part Nos. 18956 and 18957 and
12.5 Nm for Part No. 18957V3 (FPM sealed).
Change the pump’s oil and any chemical filters installed (see relevant operat-
ing instructions).
4.2 Oerlikon Leybold Vacuum Service
Whenever you send a pump to Oerlikon Leybold Vacuum, indicate whether
the pump is contaminated or is free of substances which could pose a health
hazard. If it is contaminated, specify exactly which substances are involved.
You must use the form we have prepared for this purpose; we will forward
the form on request.
A copy of the form is printed at the end of these operating instructions:
„Declaration of contamination of vacuum equipment and components“.
Another suitable form is available from www.oerlikon.com/leyboldvacuum
Documents Download Documents.
Connect the form at the device or lay it to the device.
This statement detailing the contamination is required to satisfy legal require-
ments and for the protection of our employees.
Pumps which are not accompanied by a contamination statement will be
returned to the sender.
Use secure shipping packaging
Package the equipment such that it will not suffer any damage when being
shipped and so that no oil or hazardous materials can escape from the
packaging.
CAUTION

Disposal
12 GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
5 Waste Disposal
The equipment may have been contaminated by the process or by environ-
mental influences. In this case the equipment must be decontaminated in
accordance with the relevant regulations. We offer this service at fixed prices.
Further details are available on request.
Risk of injury and environmental damage
Contaminated parts can be detrimental to health and environment. Before
beginning with any work, first find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts; For example wear gloves, face protec-
tion or breathing protection.
Separate clean components according to their materials, and dispose of
these accordingly. We offer this service. Further details are available on
request.
When sending us any equipment, observe the regulations given in Section
“Oerlikon Leybold Vacuum Service”.
Disposal of Waste Oil
Owners of waste oil are entirely self-responsible for proper disposal of this
waste.
Waste oil from vacuum pumps must not be mixed with other substances or
materials.
Waste oil from vacuum pumps (Oerlikon Leybold Vacuum oils which are
based on mineral oils) which are subject to normal wear and which are con-
taminated due to the influence of oxygen in the air, high temperatures or
mechanical wear must be disposed of through the locally available waste oil
disposal system.
Waste oil from vacuum pumps which is contaminated with other substances
must be marked and stored in such a way that the type of contamination is
apparent. This waste must be disposed of as special waste.
European, national and regional regulations concerning waste disposal need
to be observed. Waste must only be transported and disposed of by an
approved waste disposal vendor.
WARNING

13GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
17200001_002_A1 © Oerlikon Leybold Vacuum
Safety information
on contamination of compressors, vacuum pumps
and components.
Scope
Every employer (user) is held responsible for the health and safety of his employees. This also
applies to service personnel performing maintenance work either at the premises of the user or the
service company in charge.
By means of the declaration attached the contractor is to be informed about any possible
contamination of the compressor, vacuum pump or component sent in for servicing. Based on this
information the contractor will be able to take the necessary safety precautions.
Preparation before dispatch
Before shipping any parts, the user must complete the following declaration and add it to the
dispatch papers. All dispatch instructions laid down in the manual must be followed e.g.:
•Drain all service fluids
•Remove filter elements
•Seal all openings airtight
•Pack / handle appropriately
•Attach the declaration of contamination outside of the packaging

14 GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum

15GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
Notes

Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 0
Fax: +49-(0)221-347 1250
www.oerlikon.com/
leyboldvacuum
Germany
Oerlikon Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1234
Fax: +49-(0)221-347 1245
www.oerlikon.com/leyboldvacuum
Oerlikon Leybold Vacuum GmbH
Sales Area North
Branch Office Berlin
Industriestrasse 10b
D-12099 Berlin
Phone: +49-(0)30-435 609 0
Fax: +49-(0)30-435 609 10
Oerlikon Leybold Vacuum GmbH
Sales Office South
Branch Office Munich
Karl-Hammerschmidt-Strasse 34
D-85609 Aschheim-Dornach
Phone: +49-(0)89-357 33 9-10
Fax: +49-(0)89-357 33 9-33
Oerlikon Leybold Vacuum GmbH
Service Competence Center
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1538
Fax: +49-(0)221-347 1945
Oerlikon Leybold Vacuum GmbH
Mobil Customer Service
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 2001
Fax: +49-(0)221-347 1944
Oerlikon Leybold Vacuum
Dresden GmbH
Service Competence Center
Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
Phone: +49-(0)351-88 55 00
Fax: +49-(0)351-88 55 041
Europe
Belgium
Oerlikon Leybold Vacuum
Nederland B.V.
Belgisch bijkantoor
Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
Phone: +32-2-711 00 83
Fax: +32-2-720 83 38
Service:
Phone: +32-2-711 00 82
Fax: +32-2-720 83 38
France
Oerlikon Leybold Vacuum
France S.A.S.
7, Avenue du Québec
Z.A. de Courtaboeuf - B.P. 42
F-91140 Villebon-sur-yvette
Sales and Service:
Phone: +33-1-69 82 48 00
Fax: +33-1-69 07 57 38
Oerlikon Leybold Vacuum
France S.A.S.
Valence Factory
640, Rue A. Bergès
B.P. 107
F-26501 Bourg-lès-Valence Cedex
Phone: +33-4-75 82 33 00
Fax: +33-4-75 82 92 69
Great Britain
Oerlikon Leybold Vacuum
UK LTD.
Unit 9
Silverglade Business Park
Leatherhead Road
Chessington
Surrey (London)
KT9 2QL
Sales:
Phone: +44-13-7273 7300
Fax: +44-13-7273 7301
Service:
Phone: +44-13-7273 7320
Fax: +44-13-7273 7303
Italy
Oerlikon Leybold Vacuum
Italia S.r.l.
Via Trasimeno 8
I-20128 Mailand
Sales:
Phone: +39-02-27 22 31
Fax: +39-02-27 20 96 41
Service:
Phone: +39-02-27 22 31
Fax: +39-02-27 22 32 17
Netherlands
Oerlikon Leybold Vacuum
Nederland B.V.
Floridadreef 102
NL-3565 AM Utrecht
Sales and Service:
Phone: +31-(30) 242 63 30
Fax: +31-(30) 242 63 31
Switzerland
Oerlikon Leybold Vacuum
Schweiz AG, Pfäffikon
Churerstrasse 120
CH-8808 Pfäffikon
Warehouse and shipping address:
Riedthofstrasse 214
CH-8105 Regensdorf
Sales:
Phone: +41-44-308 40 50
Fax: +41-44-302 43 73
Service:
Phone: +41-44-308 40 62
Fax: +41-44-308 40 60
Spain
Oerlikon Leybold Vacuum
Spain, S.A.
C/. Huelva, 7
E-08940 Cornellà de Llobregat
(Barcelona)
Sales:
Phone: +34-93-666 43 11
Fax: +34-93-666 43 70
Service:
Phone: +34-93-666 46 11
Fax: +34-93-685 43 70
America
USA
Oerlikon Leybold Vacuum
USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Phone: +1-724-327-5700
Fax: +1-724-325-3577
Sales:
Phone: +1-724-327-5700
Fax: +1-724-333-1217
Service:
Phone: +1-724-327-5700
Fax: +1-724-325-3577
Brazil
Oerlikon Leybold Vacuum
Brasil
Rod. Vice-Prefeito Hermenegildo Tonolli,
nº. 4413 - 6B
Distrito Industrial
Jundiaí - SP
CEP 13.212-315
Sales and Service:
Phone: +55 11 2152 0499
Fax: +55 11 99467 5934
Asia
P. R. China
Oerlikon Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beichen Economic
Development Area (BEDA),
No. 8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
Fax: +86-22-2697 2017
India
Oerlikon Leybold Vacuum
India Pvt Ltd.
No. 82(P), 4th Phase
K.I.A.D.B. Plot
Bommasandra Industrial Area
Bangalore - 560 099
Indien
Sales and Service:
Phone: +91-80-2783 9925
Fax: +91-80-2783 9926
Japan
Oerlikon Leybold Vacuum
Japan Co., Ltd.
Headquarters
Shin-Yokohama A.K.Bldg., 4th floor
3-23-3, Shin-Yokohama
Kohoku-ku, Yokohama-shi
Kanawaga 222-0033
Japan
Sales:
Phone: +81-45-471-3330
Fax: +81-45-471-3323
Oerlikon Leybold Vacuum
Japan Co., Ltd.
Tsukuba Technical Service Center
1959, Kami-yokoba
Tsukuba-shi, Ibaraki-shi 305-0854
Japan
Service:
Phone: +81-29 839 5480
Fax: +81-29 839 5485
Malaysia
Oerlikon Leybold Malaysia
Oerlikon Leybold Vacuum
Singapore Pte Ltd.
No. 1 Jalan Hi-Tech 2/6
Kulim Hi-Tech Park
Kulim, Kedah Darul
Aman 09000
Malaysia
Sales and Service:
Phone: +604 4020 222
Fax: +604 4020 221
South Korea
Oerlikon Leybold Vacuum
Korea Ltd.
3F. Jellzone 2 Tower
Jeongja-dong 159-4
Bundang-gu Sungnam-si
Gyeonggi-do
Bundang 463-384, Korea
Sales:
Phone: +82-31 785 1367
Fax: +82-31 785 1359
Service:
623-7, Upsung-Dong
Cheonan-Si
Chungcheongnam-Do
Korea 330-290
Phone: +82-41 589 3035
Fax: +82-41 588 0166
Singapore
Oerlikon Leybold Vacuum
Singapore Pte Ltd.
8 Commonwealth Lane #01-01
Singapore 149555
Singapore
Sales and Service:
Phone: +65-6303 7030
Fax: +65-6773 0039
Taiwan
Oerlikon Leybold Vacuum
Taiwan Ltd.
No 416-1, Sec. 3
Chunghsin Rd., Chutung
Hsinchu County 310
Taiwan, R.O.C.
Sales and Service:
Phone: +886-3-500 1688
Fax: +886-3-583 3999
Sales and Service
LV_12852_2014 11.14
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