Omega FMA 1500 User manual

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User’s Guide
FMA 1400 and FMA 1500
Mass Flow Meters and Controllers
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TABLE OF CONTENTS
1. UNPACKING THE FMA 1400/1500 MASS FLOW METER................
1.1 Inspect Package for External Damage.........................................
1.2 Unpack the Mass Flow Meter/Controller.......................................
1.3 Returning Merchandise for Repair...............................................
2. INSTALLATION............................................................
2.1 Primary Gas Connections............................................................
2.2 Electrical Connections.................................................................
3. PRINCIPLE OF OPERATION..............................................
4. SPECIFICATIONS...........................................................
4.1 FMA 1500 Mass Flow Meters for ranges up to
and above 10 L/min......................................................................
4.2 FMA 1400 Mass Flow Controllers for ranges up to
and above 10 L/min......................................................................
4.3 CE Compliance............................................................................
5. OPERATING INSTRUCTIONS.............................................
5.1 Preparation and Warm Up...........................................................
5.2 Flow Signal Output Readings.......................................................
5.3 Swamping Condition...................................................................
5.4 Set Point Reference Signal (FMA 1400).........................................
5.5 TTL, Valve OFF Control (FMA 1400)...............................................
5.6 Valve Test/Purge (FMA 1400).........................................................
6. MAINTENANCE............................................................
6.1 Introduction.................................................................................
6.2 Flow Path Cleaning......................................................................
6.2.1 Restrictor Flow Element (RFE).................................................
6.2.2 FMA 1400/1500 Ranges up to 10 L/min................................
6.2.3 FMA 1400/1500 Ranges above 10 L/min................................
6.2.4 Valve Maintenance (FMA 1400)..............................................
7. CALIBRATION PROCEDURES..............................................
7.1 Flow Calibration..............................................................................
7.2 Calibration of FMA 1500 Mass Flow Meters...................................
7.2.1 Connections and Initial Warm Up..........................................
7.2.2 ZERO Adjustment.................................................................
7.2.3 SPAN Adjustment.................................................................
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7.3 Linearity Adjustment......................................................................
7.3.1 Connections and Initial Warm Up...........................................
7.3.2 ZERO Adjustment.................................................................
7.3.3 25% Flow Adjustment.............................................................
7.3.4 50% Flow Adjustment............................................................
7.3.5 75% Flow Adjustment.............................................................
7.3.6 100% Flow Adjustment.......................................................
7.4 Calibration of FMA 1400 Mass Flow Controllers............................
7.4.1 Disable Solenoid Valve.........................................................
7.4.2 Valve Adjustment..................................................................
7.4.3 Full Scale Flow Adjustment...................................................
7.4.4 25% Flow Adjustment...........................................................
7.4.5 50% Flow Adjustment...........................................................
7.4.6 75% Flow Adjustment.........................................................
7.4.7 100% Flow Adjustment..........................................................
8. TROUBLESHOOTING.........................................................
8.1 Common Conditions......................................................................
8.2 Troubleshooting Guide...................................................................
8.3 Technical Assistance...................................................................
9. CALIBRATION CONVERSIONS FROM REFERENCE GASES...........
APPENDIX 1 COMPONENT DIAGRAMS..................................................
APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS)...................................
APPENDIX 3 DIMENSIONAL DRAWINGS................................................
APPENDIX 4 WARRANTY.........................................................................
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TRADEMARKS
Buna7 is a registered trademark of DuPont Dow Elastometers.
Kalrez7 is a registered trademark of DuPont Dow Elastomers.
Neoprene7 is a registered trademark of DuPont.
Omega®-is a registered trademark of Omega Engineering, Inc.
VCR7 is a registered trademark of Crawford Fitting Co.
Viton7 is a registered trademark of Dupont Dow Elastometers L.L.C.

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1. UNPACKING THE FMA 1400/1500
MASS FLOW METER AND CONTROLLER
1.1 Inspect Package for External Damage
Remove the Packing List and verify that you have received all equipment. If you
have any questions about the shipment, please call the Omega7Customer
Service Department at 1-800-622-2378 or [phone].
Your FMA 1400/1500 Mass Flow Meter/Controller was carefully packed in a stur-
dy cardboard carton, with anti-static cushioning materials to withstand shipping
shock. Upon receipt, inspect the package for possible external damage. In case
of external damage to the package contact the shipping company immediately.
1.2 Unpack the Mass Flow Meter/Controller
Open the carton carefully from the top and inspect for any sign of concealed ship-
ping damage. In addition to contacting the shipping carrier please forward a copy
of any damage report to Omega7directly.
When unpacking the instrument please make sure that you have all the items indi-
cated on the Packing List. Please report any shortages promptly.
1.3 Returning Merchandise for Repair
Please contact an Omega customer service representative and request a Return
Authorization Number (AR).
It is mandatory that any equipment returned for servicing be purged and neutral-
ized of any dangerous contents including but not limited to toxic, bacterially infec-
tious, corrosive or radioactive substances. No work shall be performed on a
returned product unless the customer submits a fully executed, signed SAFETY
CERTIFICATE. Please request form from the Service Manager.
2. INSTALLATION
2.1 Primary Gas Connections
Please note that the FMA 1400/1500 Mass Flow Meter/Controller will not operate
with liquids. Only clean gases are allowed to be introduced into the instrument. If
gases are contaminated they must be filtered to prevent the introduction of imped-
iments into the sensor.
Attitude sensitivity of the Mass Flow Meter is +15F.This means that the gas flow path
of the Flow Meter/Controller must be horizontal within those stated limits. Should
there be need for a different orientation of the meter, re calibration may be necessary.
Caution: FMA 1400/1500 transducers should not be used for monitoring
OXYGEN gas unless specifically cleaned and prepared for such application.
For more information, contact Omega7.
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It is also preferable to install the FMA 1400/1500 transducer in a stable environment,
free of frequent and sudden temperature changes, high moisture, and drafts.
Prior to connecting gas lines inspect all parts of the piping system including fer-
rules and fittings for dust or other contaminants.
Be sure to observe the direction of gas flow as indicated by the arrow on the front
of the meter when connecting the gas system to be monitored.
Insert tubing into the compression fittings until the ends of the properly sized tub-
ings home flush against the shoulders of the fittings. Compression fittings are to
be tightened according to the manufacturer's instructions to one and one quarter
turns. Avoid over tightening which will seriously damage the Restrictor Flow
Elements (RFE's)!
FMA 1400/1500 transducers are supplied with standard 1/4 inch (FMA 1400/1500
for ranges up to and above 10 L/min) or 3/8 inch (FMA 1400/1500 for ranges
above 10 L/min), or optional 1/8 inch inlet and outlet compression fittings which
should not be removed unless the meter is being cleaned or calibrated for a new
flow range.
Using a Helium Leak Detector or other equivalent method perform a thorough
leak test of the entire system. (All FMA 1400/1500's are checked prior to shipment
for leakage within stated limits. See specifications in this manual.)
2.2 Electrical Connections
FMA 1400/1500 transducers require a +15VDC and -15VDC power supply to
operate. Additionally, a readout panel meter, digital multimeter, or other equiva-
lent device is required to observe the flow signal. A variable analog 0-5VDC ref-
erence input is required for FMA 1400 models. The Omega7FMA14PD Series
accessory Command Modules offer a convenient and compact means to fulfill
these needs.
FMA 1400/1500 transducers come with a 15 pin "D" connector. The pin diagram
is provided on figure 2-3.

FIGURE 2-1, WIRING DIAGRAM FOR FMA 1400/1500 TRANSDUCERS
FIGURE 2-3, FMA 1400/1500 15 PIN "D" CONNECTOR CONFIGURATION
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PIN FUNCTION
1Chassis Ground
2Common, Signal Ground For Pin 3
30-5 VDC Flow Signal
4+15 VDC Power Supply
5(-) 4-20 mA Flow Signal (optional)
6+7 VDC for Local Set Point
7(unassigned)
8TTL Valve Off Control (FMA 1400)
9Control Set Point Input 0 5 VDC (FMA 1400)
10 Common, Signal Ground for Pin 9
11 Common, Power Supply
12 Valve Test Point/Purge (FMA 1400)
13 (unassigned)
14 -15 VDC Power Supply
15 (+) 4-20 mA Flow Signal (optional)

Important notes:
In general, "D" Connector numbering patterns are standardized.There are, how-
ever, some connectors with nonconforming patterns and the numbering sequence
on your mating connector may or may not coincide with the numbering sequence
shown in our pin configuration table above. It is imperative that you match the
appropriate wires in accordance with the correct sequence regardless of the par-
ticular numbers displayed on your mating connector.
Make sure power is OFF when connecting or disconnecting any cables in the system.
The (+) and (-) power inputs are each protected by a 750mA M (medium time-lag)
resettable fuse. If a shorting condition or polarity reversal occurs, the fuse will cut
power to the flow transducer circuit. Disconnect the power to the unit, remove the
faulty condition, and reconnect the power. The fuse will reset once the faulty con-
dition has been removed.
Cable length may not exceed 9.5 feet (3 meters).
Use of the FMA 1400/1500 flow transducer in a manner other than that specified
in this manual or in writing from Omega7, may impair the protection provided by
the equipment.
3. PRINCIPLE OF OPERATION
The stream of gas entering the Mass Flow transducer is split by shunting a small
portion of the flow through a capillary stainless steel sensor tube. The remainder
of the gas flows through the primary flow conduit.The geometry of the primary con-
duit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics the flow rates of a gas in the two laminar
flow conduits are proportional to one another. Therefore, the flow rates measured
in the sensor tube are directly proportional to the total flow through the transducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sec-
tions of the sensor tube by means of precision wound heater-sensor coils.Heat is
transferred through the thin wall of the sensor tube to the gas flowing inside. As
gas flow takes place heat is carried by the gas stream from the upstream coil to
the downstream coil windings. The resultant temperature dependent resistance
differential is detected by the electronic control circuit.The measured gradient at
the sensor windings is linearly proportional to the instantaneous rate of flow tak-
ing place.
An output signal is generated that is a function of the amount of heat carried by
the gases to indicate mass-molecular based flow rates.
Additionally, FMA 1400 model Mass Flow Controllers incorporate a proportionat-
ing solenoid valve.The closed loop control circuit of the FMA 1400 continuously
compares the mass flow output with the selected flow rate.Deviations from the set
point are corrected by compensating valve adjustments, thus maintaining the
desired flow parameters.
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4. SPECIFICATIONS
FLOW MEDIUM: Please note that FMA 1400/1500 Mass Flow Meters and Controllers for
ranges up to and above 10 L/min are designed to work with clean gases only. Never try to
meter or control flow rates of liquids with any FMA 1500's or FMA 1400's.
CALIBRATIONS: Performed at standard conditions [14.7 psia (1.01 bars) and 70FF
(21.1FC)] unless otherwise requested or stated.
ENVIRONMENTAL (per IEC 664): Installation Level II; Pollution Degree II
4.1 FMA 1500 Mass Flow Meters
for ranges up to and above 10 L/min
ACCURACY: +1% of full scale, including linearity for gas temperatures ranging from
59FF to 77FF (15FC to 25FC) and pressures of 10 to 60 psia (0.7 to 4.1 bars).
REPEATABILITY: +0.2% of full scale.
TEMPERATURE COEFFICIENT: 0.1% of full scale/ FC.
PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME: 300ms time constant; approximately 1 second to within +2% of set
flow rate for 25% to 100% of full scale flow rate.
GAS PRESSURE: 500 psig (34.5 bars) maximum; optimum pressure is 20 psig (1.4 bars).
GAS AND AMBIENT TEMPERATURE: 41FF to 122FF (5FC to 50FC).
RELATIVE GAS HUMIDITY: Up to 70%.
LEAK INTEGRITY: 1 x 10-9 sccs He maximum to the outside environment.
ATTITUDE SENSITIVITY: 1% shift for a 90 degree rotation from horizontal to vertical;
standard calibration is in horizontal position.
OUTPUT SIGNALS: Linear 0-5 VDC (2000 Ωminimum load impedance); 4-20 mA
optional (50-500 Ωmaximum loop resistance); 20 mV peak to peak max noise.
TRANSDUCER INPUT POWER: +15 +5% VDC, 80 mA max, 1.2 watts; -15 +5% VDC, 10
mA max, 0.15 watts.
Power inputs are each protected by a 750mA M (medium time-lag) resettable fuse, and a
rectifier diode for polarity protection.
WETTED MATERIALS: 316 stainless steel, VITON7O-rings; BUNA-N7, NEOPRENE7or
KALREZ7O-rings are optional.
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