Pfeiffer Vacuum A 100 L User manual

OPERATING INSTRUCTIONS EN
Translation of the original instructions
A 100 L - A 100 L ES
Multi-stage Roots pump, compact, for light duty applications

Table of contents
2
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1.1 Applicable documents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.1 Safety instructions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2.2 Pictographs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.3 Instructions/Abbreviations used . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
1.2.4 Labels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
2.2 Protective equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
2.3 Proper use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
2.4 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
3 Transport and storage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.1 Transport. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.2 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
4 Product description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.1.1 Scope of delivery. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.1.2 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
4.2 Man/machine interfaces . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
5.1 Set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
5.1.1 Pump stacking. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
5.1.2 Seismic bracket installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
5.2 Connection to the water circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
5.2.1 Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
5.3 Connection to the nitrogen circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
5.3.1 Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
5.4 Connection to the pumping line . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
5.4.1 Connection at pump inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
5.4.2 Connection at pump exhaust . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
5.5 Leak test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
5.6 Remote control 16 pin connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
5.6.1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
5.6.2 Input wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
5.6.3 Wiring of the digital outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.7 Remote control 19 pin connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.7.1 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.7.2 Input wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21
5.7.3 Wiring of the digital outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
5.8 Electrical connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
5.8.1 Customer electrical installation protection. . . . . . . . . . . . . . . . . . . 23
5.8.2 Connection to the mains power supply . . . . . . . . . . . . . . . . . . . . . 24
6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
6.1 Prerequisites to use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
6.2 Different control modes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.2.1 Selection of control mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.3 Specificities related to the functioning of the model A 100 L ES. . . . . . . . 27
6.4 Local mode operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
6.5 Remote mode operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
6.6 Operation monitoring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
7 Maintenance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
7.1 Safety and maintenance information . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
7.1.1 How to contact us . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31

Table of contents
3
7.2 Maintenance frequency. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
7.3 Maintenance on the customer’s site . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
7.4 Standard repair exchange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
7.4.1 Disconnecting the pump from the installation . . . . . . . . . . . . . . . . 32
7.4.2 Draining the water circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
7.4.3 Conditioning the pump for shipping. . . . . . . . . . . . . . . . . . . . . . . . 33
8 Decommissioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
8.1 Shutting down for longer periods . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
8.2 Re-starting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
8.3 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
9.1 What happens in the event of a defect . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
9.2 Pump does not start . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
9.2.1 No indicator light is lit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
9.3 Pump is running, a light indicator is lit up . . . . . . . . . . . . . . . . . . . . . . . . . 35
9.3.1 Green light indicator is lit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 35
9.3.2 Green and yellow light indicators are lit . . . . . . . . . . . . . . . . . . . . 35
9.4 Pump stops working . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
9.4.1 Red indicator light is lit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
10 Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
11 Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
12 Technical data and dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
12.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
12.2 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
12.3 Facilities characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
12.3.1 Environmental conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
12.3.2 Water characteristics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
12.3.3 Nitrogen characteristics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
12.3.4 Electrical characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
12.4 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
12.4.1 Stacked pumps dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
12.4.2 Dimensions with seismic brackets . . . . . . . . . . . . . . . . . . . . . . . . 44
13 Appendix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
13.1 RS-232/RS-485 serial link. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
13.1.1 Installation of the accessory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45
13.1.2 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
13.1.3 Setting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
13.1.4 Command list . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
13.1.5 Protocole de communication RS-485 . . . . . . . . . . . . . . . . . . . . . . 49
Declaration of incorporation of partly completed machinery . . . . . . . . . . . 52

4
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning
of the designated product and provides the most important information for safe use of
the unit. The description follows applicable EU guidelines. All information provided in this
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from
www.pfeiffer-vacuum.com.
This document is a translation of the original French instructions.
This manual covers products with the following part numbers :
1.1.1 Applicable documents
1.2 Conventions
1.2.1 Safety instructions
The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S2, ISO 3864 and DIN 4844. In this
document, the following hazard levels and information are considered:
Référence Description
A100L3XXXX and A100L4XXXX Model for load lock and transfer chamber pumping
A100L5XXXX Model for load lock and transfer chamber pumping
(model A 100 L ES)
A 100 L - A 100 L ES Operating instructions
Serial link operating instructions included in this manual
Declaration of incorporation of partly completed machinery included in this manual
DANGER
Imminent danger
Indicates an imminent hazardous situation that will result in death or serious injury.
WARNING
Possibly imminent danger
Indicates an imminent hazardous situation that can result in death or serious injury.
CAUTION
Possibly imminent danger
Indicates an imminent hazardous situation that can result in minor or moderate injury.
NOTICE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.

About this manual
5
1.2.2 Pictographs
1.2.3 Instructions/Abbreviations used
1.2.4 Labels
Prohibition of an action to avoid any risk of accidents, the disregarding
of which may result in serious accidents
Warning of a displayed source of danger in connection with operation of
the unit or equipment
Command to perform an action or task associated with a source of dan-
ger, the disregarding of which may result in serious accidents
Important information about the product or this document
or Work instruction : you must perform an operation here.
ON/OFF Pump Start/Stop
INLET Pump inlet connection
PUMP EXHAUST Pump exhaust connection
MAIN POWER Main power connector
SPI Remote control connector (for 16 pins connector)
WATER IN Water circuit connection: input
PRESSURE MAX
101 PSI (7 bars) Maximum pressure of water circuit and N2
WATER OUT Water circuit connection: output
Loc/Rem Control mode switch (local or remote)
N2 IN Nitrogen or CDA connection
Earth connection
This label warns the user against possible risk of injury due to any hand contact with
hot surfaces.
It states that protective gloves should be used before performing any intervention.
This label informs the user, that moving parts present inside the pump could cause per-
sonal injury, like crushing or cutting.
The user must keep all body parts away from moving parts.
This label indicates that due to its heavy weight, the product should not be handled
manually,
but always through appropriate handling devices.

6
About this manual
This label indicates that some of the internal parts are energized and could cause elec-
trical shocks in case of contact.
It advises to disconnect the pump before any intervention or to properly lock-out and
tag-out the equipment breaker before any intervention on the pump.
Quality: certifies that the product has been certified compliant with quality control upon
leaving the factory.
This label indicates that the line voltage must be in compliance with the voltage la-
belled on the product (value as an example) (see 12.2).
This label indicates the location of the holes for seismic bracket installation.
This label indicates the pump operating status via the indicator lights (see 6.6).
200-230 V Δ 50/60 Hz
THREE PHASES
FOUR WIRES
Full-Load current
12 Amp.
SEISMIC TIE DOWN
A 329 962 - 5
PUMP RUNNING
PUMP ALARM
TURN OFF POWER SWITCH
TO RESET ALARM/HAZARD
TEMP WARNING
1Presence of moving part label
2 Hazardous voltage label
3 Hot surface label
4 Heavy object label
5 Seismic down label
6 Pump operating status label
7 Electrical safety label
6
1
3
2
4
5
7
3
5
5

Safety
7
2Safety
2.1 Safety precautions
Obligation to inform
Any person responsible for installing, using or maintaining the product must first read
the security instructions in this operating manual and comply with them.
It is the operating customer’s responsibility to protect all operators against the dan-
gers associated with the product, with the media pumped and with the entire instal-
lation.
Installation and use of the accessories
The products can be fitted with special accessories. The installation, use and refurbish-
ment of the connected accessories are described in detail in the respective manuals.
Only use original accessories.
Accessory part numbers: see Accessories.
WARNING
Hazards associated with non-compliant electrical installation
Safe operation after installation is the operator’s responsibility.
Connect the product to an installation that is compliant with local safety standards.
Do no carry out any alterations or modifications to the product on your own initiative.
Check that the pump is correctly connected to the emergency stop system for the
equipment (or pumping installation).
For specific questions, contact your service centers.
WARNING
Electric shock hazard in case of contact
When the product's circuit breaker is set at O, some internal components still have an
electrical charge.
Make sure that the mains connection is always visible and accessible so that it can
be unplugged at any time.
Disconnect the power cable from all power sources before starting any work on the
product.
WARNING
Danger due to lack of lock out/tag out (LO/TO) electrical device.
In order to properly secure the pump for installation and/or maintenance, it is required
to lock out/tag out the pump properly in accordance with OSHA requirement
29 CFR.1910.147.
WARNING
Other localised hazardous energies
Electrical circuits and other pressurized circuits, such as nitrogen and water are poten-
tial hazards.
Always lock out these energy sources before working on the product.

8
Safety
The potential risks with a dry pump dedicated to load lock pumping involve electricity, hot
surfaces, pressurized nitrogen and water devices.
●Only qualified personnel trained in safety rules (EMC, electrical safety, chemical pol-
lution) may carry out the installation and maintenance described in this manual. Our
service centers can provide the necessary training.
●Do not remove the blanking plates sealing the inlet and exhaust ports if the product is
not connected to the pumping line.
●Do not operate the product unless the inlet and exhaust are connected to a vacuum
and exhaust pumping line.
●Do not expose any part of the human body to the vacuum.
●Comply with all safety and risk prevention instructions in accordance with local safety
standards.
●Regularly check compliance with all precautionary measures.
●Do not turn on the product if the covers are not in place.
●Do not move a pump when it is in operation.
2.2 Protective equipment
In some situations, personal protective equipment must be worn when handling the vac-
uum pump and its components. The owner must provide operators with the necessary
equipment. This equipment must be checked regularly and used in accordance with the
supplier's recommendations.
WARNING
Risk associated with process gases
The user and/or integrator of the product is/are fully responsible for the operational safe-
ty conditions of the equipment. The manufacturer has no control over the types of gases
this pump is exposed to. Frequently process gases are toxic, flammable, corrosive, ex-
plosive and/or otherwise reactive. It is the user and/or the integrator's responsibility to
follow the necessary safety requirements. Toxic gases can cause serious injury or
death. Operators and users must:
Take the appropriate safety recommendations to prevent injury. Consult the respon-
sible department for instructions and safety information.
Hazardous gases from the pump can cause serious injury or death. Regula-
tions require to connect the pump’s exhaust to a facility hazardous gas ex-
haust system which incorporates appropriate filters, scrubbers, etc. This system
must meet all air and water regulations.
Check that the pump is correctly connected to the equipment (see Installation).
Contact the service center for further information.
DANGER
Health risk due to contact with toxic materials
The vacuum pump, pumping line components, and operating media may be contami-
nated with toxic, corrosive, reactive, or radioactive materials, depending on the process.
Wear appropriate safety equipment when pump is disconnected for maintenance,
while it is being re-installed, and during filling and draining of operating media.
WARNING
Risk of injury due to hot surfaces
For the operator's safety, the products are designed to avoid thermal risk. However, spe-
cific operating conditions may exist that require extra caution from users due to the high
temperatures (external surfaces > 70°C on the exhaust pipe).
Let the part cool before working on the product.
If necessary wear protective gloves according to directive EN 420.

Safety
9
2.3 Proper use
●The vacuum pump may only be used to generate a vacuum while pumping gases.
●The product may be used in an industrial environment.
●The pump is dedicated for running on clean applications, non corrosive processes
mainly for load lock and transfer chamber or backing of turbopump.
2.4 Improper use
Improper use will cause all claims for liability and warranties to be forfeited. Improper use
is defined as usage for purposes deviating from those mentioned above, especially:
●pumping of gas except argon, helium, nitrogen and air
●pumping of corrosive or explosive media
●pumping of explosive media
●pumping of liquids
●pumping of condensing vapors
●pumping of dusts
●use of the vacuum pump to generate pressure
●operation in potentially explosive areas
●use of accessories or spare parts, which are not named in this manual
The product is not designed to carry people or loads and is not for use as a seat, step-
ladder or any other similar purpose.
kg
WARNING
Risk of injury due to falling objects
When transporting parts/components and during maintenance there is a danger of loads
slipping and falling down.
Carry small and medium-size parts/components with both hands.
Carry parts/components > 20 kg with a suitable lifting device.
Wear safety shoes with a steel toe in accordance with directive EN 347.
NOTICE
EC conformity
The manufacturer's declaration of conformity becomes invalid if the operator modifies
the original product or installs additional components.
Following installation into a plant and before commissioning, the operator must check
the entire system for compliance with the valid EU directives and reassess it accord-
ingly.

10
Transport and storage
3 Transport and storage
Upon delivery, check that the product has not been damaged during transport. If the
product is damaged, take the necessary measures with the carrier and notify the manu-
facturer. In all situations we recommend:
Keeping the product in its original packaging so it stays as clean as it was when dis-
patched by us. Only unpack the product once it has arrived at the location where it will
be used.
Keeping the packaging (recyclable materials) in case the product needs to be trans-
ported or stored.
Keeping the blanking plates in place on the inlet, exhaust and purge ports while the
product is not connected to the pumping line.
3.1 Transport
Handling the pump out of
its packaging To lift the product:
Use a lifting device suitable for the product's weight.
Use a 3 arm lifting sling with the following specifications:
Use the shackles (3) fixed to the lifting brackets (2).
Check the shackles right position into the lifting brackets.
Lift the pump using the three arms sling (1).
Screw in the leveling pads of the frame and lower the pump on the castors to move it
over short distances.
WARNING
Risk of injury associated with heavy loads
Given the weight of the product, it should be removed from its packaging only by per-
sonnel qualified and trained in handling heavy materials.
Use the spring hook rings and devices provided with the product.
The manufacturer cannot be held liable for the consequences of using lifting devices
other than those provided.
WARNING
Risk of tilting
Even though compliance with EEC safety rules is guaranteed, all necessary precautions
should be taken when moving, installing and operating the product.
Do not place the product on an inclined plane: its weight could cause the operator to
be dragged.
Only use castors to move it short distances.
Place it on a flat, hard floor.
Do not push the product sideways.
Adjust the levelling feet for operation to make sure that the pump is not supported by
the castors. (Refer to Technical data and dimensions in these operating instruc-
tions for location of the center of gravity.)
12c
2a
2b
– length of each arm: 1 m
– load per arm: lifting bracket (2a) : 261 N
lifting bracket (2b) : 236 N
lifting bracket (2c) : 570 N

Transport and storage
11
Move the pump The pump is equipped with a removable handle located under the frame.
Check the leveling pads are not in contact with the floor before moving the
pump.
Pull the handle (1) along the rail up to remove it from the frame.
Unlock the lock (2).
Install the handle in its support (3).
Check the handle is correctly locked before moving the pump.
Store the handle under the product when the pump is installed.
3.2 Storage
If the new pump is going to be put into storage:
Keep the pump wrapped in its protective film.
It is absolutely necessary to leave the inlet and exhaust blanking plates in place be-
cause the pump has been pressurized with dry nitrogen.
Store the pump according to storage temperatures (see 12.3.1).
If the inlet and exhaust blanking plates have been removed, there is a risk of internal part
corrosion. We advise you to pressurize the pump with nitrogen.
Provide a nitrogen supply with the required characteristics (see 12.3.3).
2
3
2
1
3
1
NOTICE
Duty to inform
In order to prevent moisture from entering the pump before installation, it has been pres-
surized before shipment with nitrogen and sealed with blanking plates.
Do not remove the blanking plates sealing the inlet and exhaust ports if the product
is not connected to the pumping line.
Do not operate the product unless the inlet and exhaust are connected to a vacuum
and exhaust pumping line.

12
Transport and storage
Seal the inlet port with inlet blanking plate delivered with the pump.
Connect the nitrogen to the gas connection located on the inlet blanking flange.
Pressurize the pump with dry nitrogen to a relative pressure of 200 hPa.
When the nitrogen flows out of the exhaust, seal it up with the provided accessories.
Disconnect the nitrogen purge connection.
Store the pump in a clean and dry area, at ambient temperature (see 12.3.1), for a
maximum period of 1 year.
For a storage period over 1 year, the pump must be revised before any start up. Contact
your service center.

Product description
13
4 Product description
4.1 Product identification
To correctly identify the product when communicating with Pfeiffer Vacuum, always have
the information from the rating plate available.
Fig. 1: Rating plate example
4.1.1 Scope of delivery
●1 vacuum pump
●2 water couplings
●1 power cable equipped with female connector
●1 mounting flange for electrical connector
●3 CHc M8x16 screws and 3 washers
●1 safety record for shackle use
●1 operating instructions
4.1.2 Function
The pump manufacturer has developed a pump dedicated for clean applications, non
corrosive processes as load lock and transfer chamber pumping in the semi-conductors
or on photovoltaic industry, or backing of turbopump.
The multistage Roots pump A100 L is a compact model, allowing easy on-tool integra-
tion, that does not require any on-site preventive maintenance and offers high reliability.
The model A100 L ES integrates an automatic ’Energy Saving’ module that reduces
power consumption by 50 %. This option ’Energy Saving’ is self-activated depending on
pumping operating conditions.
100 kg 200-230V 50/60 Hz
A100L31424 4 - 2016
XYZXYSYSS A100L
A100L31424
98 avenue de Brogny F-74000 ANNECY

14
Product description
4.2 Man/machine interfaces
The pump includes a monitoring system for automatic operation and sensor manage-
ment, temperature warning and alarm. It allows:
– the display of the pump status on the relevant light indicators,
– the display of the pump running time on the hour meter,
– the interface with the equipment via the remote control connector, or RS-232/RS-485
serial link (see chapter Serial link RS-232/RS-485).
1
2
3
RS
6
57
4
Fig. 2: Man/machine interface
Front panel Rearpanel
1Loc-Rem switch Inlet
2Hour meter Exhaust
3Operation indicator lights Power supply
4Lifting bracket Water inlet/outlet
5Handle support ON/OFF circuit breaker
6Removable handle Inlet CDA or N2 connection
7Remote control connector RS RS-232/RS-485 serial link connector
V

Installation
15
5 Installation
5.1 Set-up
The pump must be operated in the horizontal position in support on its feet.
Determine where the pump will be placed.
Use the handling devices to position the pump in the desired location, lift the pump
using safety shackles (see 3.1).
Lock the pump by adjusting the four leveling feet.
Use a spirit level to check that the frame is in horizontal position in both axis.
The pump can be secured in the equipement on which it is installed using (2) threated
holes provided for it.
Use M10x25 (8-8) quality class screw (customer supplied)
– maximum clamping torque: 40 N·m
5.1.1 Pump stacking
The product is equipped with brackets which allow two pump stacking.
Check that the brackets are correctly tightened:
– 3 lifting brackets (3) on the upper cover from A and B pumps.
– 3 brackets (1) under the frame of A pump.
Fig. 3: Operation in horizontal position
2 Inlet port in horizontal position
3 Threaded holes to secure the pump in a frame
1
2
CAUTION
Risk of tear-out or trips
Route and secure cables, hoses and pipework during installation to avoid any possi-
ble risk of tripping.
DANGER
Risk of break of lifting devices
The lifting brackets are not designed to lift two stacked pumps: they could be torn away
under the weight of both pumps.
No lifting of two stacked pumps using lifting brackets.

16
Installation
Adjust the leveling feet (5) of the lower B pump: they must be in contact with the
floor.
Use a spirit level to check that the frame is in horizontal position in both axis.
Adjust the leveling feet of the upper A pump: make sure that the castors are not in
contact with the floor.
Lift the upper A pump with a suitable lifting device (see 3.1).
Position the A pump on the lower B pump: the feet (4) must be properly installed in
the 4 notches located on the upper cover from B pump.
Lock the leveling feet (4) of the upper A pump: they must be properly locked.
Use a spirit level to check that the frame is in horizontal position in both axis.
Secure the pumps by screwing the upper brackets (1) with the lower brackets (3).
Tighten 3 CHc M8x16 (2) screws to secure the stacking.
– maximum clamping torque: 22 N·m
5.1.2 Seismic bracket installation
To install the pump in a seismic environment, it is necessary to anchor it to the floor with
seismic brackets (see 11). When the pump is at the right location (see 5.1) :
Install 4 brackets opposite the holes provided for it, marked by "Seismic tie down" la-
bels.
Use a spirit level to check that the frame is in horizontal position in both axis.
Install the seismic brackets and tighten them with delivered screws (1): maximum
clamping torque 40 N·m.
Fasten the brackets to the floor with attachment accessories (2) (customer supplied).
Choose the screws according to the foot distribution weight (see 12.4.2).
Fig. 4: Pump stacking
A Upper pump
B Lower pump
1 Lower bracket (A pump)
2Screw
3 Lifting bracket (B pump)
4 Leveling feet of the upper A pump
5 Leveling feet of the lower B pump
1
2
5
4
A
B
A
B
3
3
A
B

Installation
17
When two pumps are stacked, only the lower pump is anchored to the floor with seismic
brackets.
5.2 Connection to the water circuit
In order to limit corrosion and motor cooling circuit clogging, it is recommended to
use water with the required characteristics (see 12.3.2).
If the ”solid particle size“ and ”solid pollution” water characteristic values cannot be
reached, install a filter on the water input.
5.2.1 Procedure
Connect the water pipes to the coupling connections (delivered with the pump):
Water inlet = female connection,
Water outlet = male connection.
Connect the plugs on WATER IN and WATER OUT (see 4.1.2).
Check that there are no leaks in the pipes and connections of the water circuit.
1 Delivered attachment accessories location
2 Attachment accessories location (customer supplied)
1
2
SEISMIC TIE DOWN
NOTICE
The use of uncontrolled city water can lead to water circuit clogging due to lim-
escale deposition.
This may necessitate, in the worst case scenario, a complete cleaning and overhaul of
the cooling circuit.
The presence of micro-organisms like aquatic weeds and micro-biological sub-
stances like bacteria can lead to cooling problems in the pump.
An appropriate water treatment system must be used to prevent the growth of such
microorganisms.
NOTICE
Risk of water supply failure
If loss of cooling water creates a significant risk for the process:
Control the cooling circuit using an external system able to take over in case of fail-
ure.
WARNING
Pressurised circuit
In order to carry out operations on the product safely, the user must:
Fit a manual valve on the water circuit 3 m from the product allowing the cooling cir-
cuit to be locked.

18
Installation
Fig. 5: Water circuit connection
5.3 Connection to the nitrogen circuit
Pour le modèle A100L ES seulement.
A filtered dry nitrogen supply with the characteristics defined is required for opti-
mum performance (see 12.3.3).
5.3.1 Procedure
Connect the nitrogen pipe (tube 6 mm OD/4 mm ID supplied by customer) to the
gaugeable tube fitting marked N2IN(see 4.2).
Adjust the flowrate with a pressure regulator (supplied by the customer).
Fig. 6: Nitrogen circuit connection
WATER IN
WATER OUT
NOTICE
Risk of damage of internal parts
A sudden inrush of nitrogen into the pressurization circuit may result in damage to inter-
nal parts.
Install a pressure regulator at the gas line (customer supplied).
Check that the pressure regulator is closed before pressurizing the circuit.
NOTICE
Risk of nitrogen supply failure
If loss of purge flow creates a significant risk for the process:
Control the nitrogen supply using an external system able to take over in case of fail-
ure.
WARNING
Pressurised circuit
To work safely on the product, the operator must:
Install a manual valve on the nitrogen circuit at a distance of 3 m from the product, so
that the nitrogen supply can be locked.
4 mm 6 mm
1/8 NPT 1/8 NPT
N2 IN

Installation
19
5.4 Connection to the pumping line
The user and/or product OEM is ultimately responsible for the equipment and must apply
the specific safety guidelines, in accordance with local legislation.
Use accessories on the inlet and exhaust lines whose materials and sealing proper-
ties are compatible with gases being used.
Provide in the pumping line, accessories to isolate the pump from the vacuum and ex-
haust line, to make the maintenance easier (inlet and exhaust isolation valves, purg-
es,…).
Remove the blanking plates blocking the inlet and exhaust ports.
Keep the blanking plates, screws and washers for reuse when transporting the pump.
Ensure that no screws, washers or other objects are dropped into the pump inlet.
Fit flexible flanged bellows in the pumping line to reduce the transmission of vibra-
tions.
The O-rings located under the blanking plates are compatible with standard applications.
Other types of connection accessories are available in the product catalogue. The inlet
and exhaust connections must not cause stress that could lead to leaks in the pumping
line.
5.4.1 Connection at pump inlet
To improve pumping speed, the pumping line must be as short as possible and its inter-
nal diameter must not be less than the pump inlet flange.
5.4.2 Connection at pump exhaust
WARNING
Risk of crushing or cutting related to the rotating parts
Do not expose any part of the human body to the vacuum. The product is supplied with
the inlet and exhaust sealed.
Remove these blanking plates when you are ready to connect the product to your
vacuum system.
Do not operate the product unless the inlet and exhaust are connected to a vacuum
and exhaust pumping line.
NOTICE
Limit of operation
Make sure that the parts or chambers connected to the inlet of our products withstand
a negative pressure of 1·103hPa in relation to atmospheric pressure.
NOTICE
Limit of operation
Ensure that all components in the exhaust pipeline have maximum pressure rating
which is greater than the highest pressure that can be generated in your system.

20
Installation
5.5 Leak test
Pour davantage d’information concernant les tests d’étanchéité, contacter votre centre
de service.
5.6 Remote control 16 pin connector
5.6.1 Description
Connection made via remote connector (see 4.2) allows:
– remote control of pumping functions start, stop and variable rotation speed control.
– remote pump status through auxiliary dry contacts.
5.6.2 Input wiring
The wiring is at customer's responsibility.
Fig. 7: Wiring of 16 pin connector
Digital input
WARNING
Leak-tightness of the equipment
It is the user's responsibility to ensure this level of leak tightness is maintained, espe-
cially when dangerous gases are pumped. The operator must maintain this level of tight-
ness, particularly when pumping dangerous gases. Proceed as follows:
Perform a leak test on the entire pumping line after installation.
Carry out regular checks to ensure that there are no traces of the gases pumped in
the surrounding environment and that no air is entering the pumping line while the
pump is running.
NOTICE
Extra low voltage circuit
The remote control circuits are equipped with dry contact outputs (50 V - 1 A max.).
Any overvoltage or overcurrent can result in internal electrical damage. The installer
must:
Connect these outputs in accordance with the rules and protection of safety extra low
voltage (SELV) circuits,
Supply these contacts with voltage of less than 50 V and current of less than 1 A.
1
3
7
11
15
12345678910111213141516
+
-+-+- - - - -++++ -
+0 VDC +0 VDC
0-10 VDC
0/24 VDC
A2 S1
Contact Function
S1 (1-2) Pump start/stop When 24 VDC is applied, the pump is running.
When 0 VDC is applied, the pump stops.