Pfeiffer Vacuum Adixen A100L Series User manual

Operating instructions
Operating instructions
Original
Original
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A100L
Dry Pumps
EN
EN

GB 03612 - Edition 03 - Dec 11
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A100L dry pump
Welcome
Applications
Load-locks.
Transfer chambers.
SEM.
PVD.
Preclean chambers.
Benefits
Small footprint for easy integration.
High throughput.
High reliability.
Cleanroom compatible.
Low cost of ownership.
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Dear Customer,
You have just purchased an
adixen Vacuum Products dry
pump.
We thank you and are proud
to include you as one of our
customers.
This product has benefited
from adixen Technology’s
many years of experience
in semiconductor processes
and dry pumping.
For optimum performance
andtoobtain fullsatisfaction
from this equipment, we
recommend that you study
this manual before any
intervention on your pump,
in particular, the chapter on
installation and start up.
This pumping component is designed to gererate vacuum by
pumping on gases, but no liquids neither solids. It is dedicated for
running in industrial environments.
The integrator of the A100L pump must provide all operator safety
measures to comply with the provisions of the 2006/42/EC safety
machinery directive.
The pumps must not be operated in an area with risk of explosion.
Consult the nearest support service to study a solution.
Features
Compact design.
ES (Energy Saving) option
Low noise level.
Low vibration level.
Clean vacuum.
Robust and established technology.
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adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

2/2
A100L dry pump
GB 03612- Edition 03 - Dec. 11
This product complies with the requirements of European Directives,
listed in the Declaration of Conformity contained in G100 of this
operating instruction.
Copyright/Intellectual property:
The use of adixen Vacuum products are subject to copyright and
intellectual property rights in force in any jurisdiction.
All rights reserved, including copying this document in whole or
any part without prior written authorization from adixen Vacuum
Products.
Specifications and information are subject to change without notice
by adixen Vacuum Products.
Symbol / Label Description
Warning: high temperature hazard
Warning: electrical shock hazard
Danger: refer to the operating instructions
Power ON switch
Power OFF switch
MAIN POWER Main power connector
SPI ®Remote control connector
INLET Inlet of the pump
PUMP EXHAUST Exhaust of the pump
WATER IN
MAX Pr.7 bar/101 psi
Water cooling circuit connection
Max. cooling water pressure
WATER OUT Water cooling draining connection
N2 IN
MAX Pr.7 bar/101 psi
Inlet CDA or N2 connection (ES option)
Max. purge pressure
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

GB 04376 - Edition 03 - Dec.11
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MANUAL P/N: 119404
EDITION : 03 - December 2011 General contents
A100L Operating instructions
English original version
Chapter A INTRODUCTION
A 10 Operating principle
A 20 Description
A 30 Monitoring system
A 40 Technical characteristics
A 50 Accessories
Chapter B START UP
B 00 Safety instructions
B 10 Unpacking / Handling / Storage
B 20 Positioning the pump in the pumping installation
B 30 Connection to the cooling circuit
B 35 Inlet CDA or Nitrogen connection
B 40 Electrical connection
B 50 Connection to the pumping circuit
B 60 Remote control plug connection (dry contacts / 16 pin plug)
B 61 Remote control plug connection (dry contacts / 19 pin plug)
B 70 Anti earthquake square installation (accessory)
Chapter C OPERATION
C 10 Operating modes
C 20 Starting mode definition «Autostart»
C 21 Starting mode definition «Remote control (dry contacts / 16 or 19 pin plug)»
C 30 Monitoring system parameters
C 40 Semiconductor process compatibilities
Chapter D TROUBLESHOOTING
D 00 Safety instruction related to maintenance
D 10 Pump operating status information
D 20 Diagnosis and troubleshooting
Chapter E MAINTENANCE INSTRUCTIONS
E 10 Standard exchange repair
E 12 Draining of the water cooling circuit
E 14 Disconnecting the pump from the installation
E 15 Shipping procedure
Chapter F MAINTENANCE COMPONENTS
F 00 Spare parts - Instruction of use
F 10 First level of spare parts
Chapter G APPENDIX
G 100 Declaration of conformity
G 120 Electrical schematic
G 200 Safety questionnaire
RS 232 / RS 485 Network interface
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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General contents
A100L Operating instructions
GB 04376 - Edition 03 - Dec.11
MANUAL P/N: 119404
EDITION : 03 - December 2011
English original version
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Indicates an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

GB 03613 - Edition 03 - Dec 11
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Introduction
A100L Operating instructions
Detailed contents
A
A 10 Operating principle
- Multistage pump with roots technology
- Tightness with environment
- The pump in a pumping installation
A 20 Description
- Description
- Interfaces
- Internal equipment of the A100L pumps
A 30 Monitoring system
- Description
- Characteristics
- Main functions
A 40 Technical characteristics
- A100L dimensions and interfacing
- Gravity center and weight distribution
- A100L stacking dimensions and interfacing
- Stacking gravity center and weight distribution
- Anti earthquake fixation dimensions for A100L pumps
A 50 Accessories
- Anti earthquake square
- Emergency stop
- Silencer kit
- N2 pressurization kit
- «Anti-noise» device
- RS232 interface
- Remote control plug (dry contacts / 19 pins plug)

GB 02096 - Edition 04 - Dec 11
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A 10
Alcatel Vacuum Technology France - ATH 200 User’s Manual
Operating principle
Multi-stage pump with
roots technology
A100L pump consists of 5 Roots type stages.
The two rotors rotate without touching each other.
Exhaus
t
Inlet
High pressure
stage
(exhaust stage)
Stage 4
Transfer stage
Stage 3
Transfer stage
Stage 2
Transfer stage
Stage 1
Low pressure
stage
(inlet stage)
Stage 5
Load Lock
A100L
Primary vacuum Atmospheric pressure
Transfer
Chamber
Exhaust
The pump in a pumping
installation
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

GB 04350 - Edition 02 - Dec 11
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A 20
Alcatel Vacuum Technology France - ATH 200 User’s Manual
Description
Description The A100L pump includes a monitoring system.
This pump is fully integrated in a compact and enclosed frame which
includes:
The control panel located on the front panel.
An operating time meter showing the running time of the pump.
3 light indicators showing the pump status.
A main switch allows to start and stop the pump.
A local-remote switch.
The facility interface located on the rear panel.
Water inlet and outlet quick connect.
Inlet CDA or Nitrogen connection (Energy Saving option).
Exhaust and inlet flanges to connect the pump to the pumping
circuit.
The control interface located at the rear panel.
A remote control connector (dry contacts / 16 or 19 pin plug) to
control the pump and communicate with the process tool.
A main power connector to connect the pump to the electrical
circuit.
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Interfaces
Front panel
Rear panel
Main power supply Water IN
Water OUT
Exhaust
Remote control connector
Light indicators
Operating time meter
Main switch
Front panel
Facility interface
Control interface
Control panel
Rear panel
‘Loc-Rem’ switch
Inlet CDA or N2 connection
(ES option)
Inlet
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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A 20
Alcatel Vacuum Technology France - ATH 200 User’s Manual
Description
GB 04350 - Edition 02 - Dec 11
Internal equipment of
the A100L pumps
The A100L pumps include a cooling circuit (water circuit).
The A100L are designed for clean applications such as load lock
pumping, cryopump regeneration and backing of turbopumps on non-
corrosive processes.
Cooling circuit (principle
schematic)
Water inlet
Water outlet
Anti-suckback valve
Inlet
Exhaust
Electrical cabinet
Motor
Functional
block
Frequency
converter
Energy saving option The A100L includes an optional Energy Saving system, featuring up to
50% power consumption reduction.
Fully integrated into the pump, the Energy Saving option is automatically
self-activated, providing the maximum Energy Saving depending on
pump operating conditions, without any external control required.
0
Power consumption
at ultimate pressure
Time
Without ES option
With ES option
50 %
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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A 30
Alcatel Vacuum Technology France - ATH 200 User’s Manual
Monitoring system
Motor sensors
Operating time meter
Light indicators
Frequency converter sensor
Main switch Main power syppl
y
Local/remote switch
Electrical cabinet
Description
Electrical cabinet The electrical cabinet is located at the top of the machine.
It is linked to the main power supply, pump motor and electronic cabinet
G 120 .
Electronic cabinet The electronic cabinet is located at the top of the machine.
It ensures the pump automatic operation and controls all sensors.
It is linked to the light indicators, operating time meter, electrical cabinet
and motor G 120 .
It can be interfaced with the main production equipment.
Front panel
Hazard - Red light
Warning - Yellow light
ON - Green light
Operating time meter
Local-Remote switch
Characteristics The monitoring system can be interfaced with the process tool via:
The remote control connector (dry contacts / 16 or 19 pin plug),
B 60 or B 61.
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Main functions Fault management.
Run time.
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Each pump includes a monitoring system.
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions