Pfeiffer Vacuum Adixen A100L Series User manual

Operating instructions
Operating instructions
Original
Original
BetriebB
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A100L
Dry Pumps
EN
EN

GB 03612 - Edition 03 - Dec 11
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A100L dry pump
Welcome
Applications
Load-locks.
Transfer chambers.
SEM.
PVD.
Preclean chambers.
Benefits
Small footprint for easy integration.
High throughput.
High reliability.
Cleanroom compatible.
Low cost of ownership.
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Dear Customer,
You have just purchased an
adixen Vacuum Products dry
pump.
We thank you and are proud
to include you as one of our
customers.
This product has benefited
from adixen Technology’s
many years of experience
in semiconductor processes
and dry pumping.
For optimum performance
andtoobtain fullsatisfaction
from this equipment, we
recommend that you study
this manual before any
intervention on your pump,
in particular, the chapter on
installation and start up.
This pumping component is designed to gererate vacuum by
pumping on gases, but no liquids neither solids. It is dedicated for
running in industrial environments.
The integrator of the A100L pump must provide all operator safety
measures to comply with the provisions of the 2006/42/EC safety
machinery directive.
The pumps must not be operated in an area with risk of explosion.
Consult the nearest support service to study a solution.
Features
Compact design.
ES (Energy Saving) option
Low noise level.
Low vibration level.
Clean vacuum.
Robust and established technology.
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adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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A100L dry pump
GB 03612- Edition 03 - Dec. 11
This product complies with the requirements of European Directives,
listed in the Declaration of Conformity contained in G100 of this
operating instruction.
Copyright/Intellectual property:
The use of adixen Vacuum products are subject to copyright and
intellectual property rights in force in any jurisdiction.
All rights reserved, including copying this document in whole or
any part without prior written authorization from adixen Vacuum
Products.
Specifications and information are subject to change without notice
by adixen Vacuum Products.
Symbol / Label Description
Warning: high temperature hazard
Warning: electrical shock hazard
Danger: refer to the operating instructions
Power ON switch
Power OFF switch
MAIN POWER Main power connector
SPI ®Remote control connector
INLET Inlet of the pump
PUMP EXHAUST Exhaust of the pump
WATER IN
MAX Pr.7 bar/101 psi
Water cooling circuit connection
Max. cooling water pressure
WATER OUT Water cooling draining connection
N2 IN
MAX Pr.7 bar/101 psi
Inlet CDA or N2 connection (ES option)
Max. purge pressure
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

GB 04376 - Edition 03 - Dec.11
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MANUAL P/N: 119404
EDITION : 03 - December 2011 General contents
A100L Operating instructions
English original version
Chapter A INTRODUCTION
A 10 Operating principle
A 20 Description
A 30 Monitoring system
A 40 Technical characteristics
A 50 Accessories
Chapter B START UP
B 00 Safety instructions
B 10 Unpacking / Handling / Storage
B 20 Positioning the pump in the pumping installation
B 30 Connection to the cooling circuit
B 35 Inlet CDA or Nitrogen connection
B 40 Electrical connection
B 50 Connection to the pumping circuit
B 60 Remote control plug connection (dry contacts / 16 pin plug)
B 61 Remote control plug connection (dry contacts / 19 pin plug)
B 70 Anti earthquake square installation (accessory)
Chapter C OPERATION
C 10 Operating modes
C 20 Starting mode definition «Autostart»
C 21 Starting mode definition «Remote control (dry contacts / 16 or 19 pin plug)»
C 30 Monitoring system parameters
C 40 Semiconductor process compatibilities
Chapter D TROUBLESHOOTING
D 00 Safety instruction related to maintenance
D 10 Pump operating status information
D 20 Diagnosis and troubleshooting
Chapter E MAINTENANCE INSTRUCTIONS
E 10 Standard exchange repair
E 12 Draining of the water cooling circuit
E 14 Disconnecting the pump from the installation
E 15 Shipping procedure
Chapter F MAINTENANCE COMPONENTS
F 00 Spare parts - Instruction of use
F 10 First level of spare parts
Chapter G APPENDIX
G 100 Declaration of conformity
G 120 Electrical schematic
G 200 Safety questionnaire
RS 232 / RS 485 Network interface
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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General contents
A100L Operating instructions
GB 04376 - Edition 03 - Dec.11
MANUAL P/N: 119404
EDITION : 03 - December 2011
English original version
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Indicates an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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Introduction
A100L Operating instructions
Detailed contents
A
A 10 Operating principle
- Multistage pump with roots technology
- Tightness with environment
- The pump in a pumping installation
A 20 Description
- Description
- Interfaces
- Internal equipment of the A100L pumps
A 30 Monitoring system
- Description
- Characteristics
- Main functions
A 40 Technical characteristics
- A100L dimensions and interfacing
- Gravity center and weight distribution
- A100L stacking dimensions and interfacing
- Stacking gravity center and weight distribution
- Anti earthquake fixation dimensions for A100L pumps
A 50 Accessories
- Anti earthquake square
- Emergency stop
- Silencer kit
- N2 pressurization kit
- «Anti-noise» device
- RS232 interface
- Remote control plug (dry contacts / 19 pins plug)

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Alcatel Vacuum Technology France - ATH 200 User’s Manual
Operating principle
Multi-stage pump with
roots technology
A100L pump consists of 5 Roots type stages.
The two rotors rotate without touching each other.
Exhaus
t
Inlet
High pressure
stage
(exhaust stage)
Stage 4
Transfer stage
Stage 3
Transfer stage
Stage 2
Transfer stage
Stage 1
Low pressure
stage
(inlet stage)
Stage 5
Load Lock
A100L
Primary vacuum Atmospheric pressure
Transfer
Chamber
Exhaust
The pump in a pumping
installation
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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Description
Description The A100L pump includes a monitoring system.
This pump is fully integrated in a compact and enclosed frame which
includes:
The control panel located on the front panel.
An operating time meter showing the running time of the pump.
3 light indicators showing the pump status.
A main switch allows to start and stop the pump.
A local-remote switch.
The facility interface located on the rear panel.
Water inlet and outlet quick connect.
Inlet CDA or Nitrogen connection (Energy Saving option).
Exhaust and inlet flanges to connect the pump to the pumping
circuit.
The control interface located at the rear panel.
A remote control connector (dry contacts / 16 or 19 pin plug) to
control the pump and communicate with the process tool.
A main power connector to connect the pump to the electrical
circuit.
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Interfaces
Front panel
Rear panel
Main power supply Water IN
Water OUT
Exhaust
Remote control connector
Light indicators
Operating time meter
Main switch
Front panel
Facility interface
Control interface
Control panel
Rear panel
‘Loc-Rem’ switch
Inlet CDA or N2 connection
(ES option)
Inlet
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Description
GB 04350 - Edition 02 - Dec 11
Internal equipment of
the A100L pumps
The A100L pumps include a cooling circuit (water circuit).
The A100L are designed for clean applications such as load lock
pumping, cryopump regeneration and backing of turbopumps on non-
corrosive processes.
Cooling circuit (principle
schematic)
Water inlet
Water outlet
Anti-suckback valve
Inlet
Exhaust
Electrical cabinet
Motor
Functional
block
Frequency
converter
Energy saving option The A100L includes an optional Energy Saving system, featuring up to
50% power consumption reduction.
Fully integrated into the pump, the Energy Saving option is automatically
self-activated, providing the maximum Energy Saving depending on
pump operating conditions, without any external control required.
0
Power consumption
at ultimate pressure
Time
Without ES option
With ES option
50 %
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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Alcatel Vacuum Technology France - ATH 200 User’s Manual
Monitoring system
Motor sensors
Operating time meter
Light indicators
Frequency converter sensor
Main switch Main power syppl
y
Local/remote switch
Electrical cabinet
Description
Electrical cabinet The electrical cabinet is located at the top of the machine.
It is linked to the main power supply, pump motor and electronic cabinet
G 120 .
Electronic cabinet The electronic cabinet is located at the top of the machine.
It ensures the pump automatic operation and controls all sensors.
It is linked to the light indicators, operating time meter, electrical cabinet
and motor G 120 .
It can be interfaced with the main production equipment.
Front panel
Hazard - Red light
Warning - Yellow light
ON - Green light
Operating time meter
Local-Remote switch
Characteristics The monitoring system can be interfaced with the process tool via:
The remote control connector (dry contacts / 16 or 19 pin plug),
B 60 or B 61.
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Main functions Fault management.
Run time.
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Each pump includes a monitoring system.
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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Technical characteristics
Characteristics Units A100L A100L ES «Eco Saving»
Rotation speed (1) Hz
rpm
100
6000
Peak Pumping speed
m3/h
l/mn
cfm
100
1667
59
Typical ultimate pressure
Max. ultimate pressure


mbar/
Torr/
Pa
6.6 10-3 / 5 10-3 / 6.6 10-1
1.2 10-2 / 9 10-3 / 1.2
7 10-4 / 5 10-4 / 7 10-2 *
3 10-3 / 2 10-3 / 3 10-1 *
Max. volume **
Max. cycling frequency **
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m3
sec
1
25 l every 40 sec.
Max. continuous inlet flowslm 20
Supply voltage 3PH (3) V
200/208V - 3 phases - 50/60Hz
380/460 V - 3 phases -
50/60Hz NA
Power consumption at ultimate pressurekW 1.6 < 0.8*
Average sound level at ultimate pressure
Guaranted sound level at ultimate
pressure


dbA
dbA
55
58
52*
55*
Typical vibration level at inlet flange
[10 -1000 Hz)
G/
mm.s -1
/μm.
0.10 / 1/ 1.5
Water flowl/h min. 100
Water temperature°C min. 10 / max. 25
Gear box fluid capacity (2) cm3150
WeightKg / Lb 100 / 220.4
Inlet flangeISO-KF DN 50
Exhaust flangeISO-KF DN 25
Environmental conditions
Use of the product:
Altitude:
Maximum relative humidity:
Ambient operating temperature:
Transient overvoltage:
Pollution degree:
clean room
up to 2000 m
80% for temp. >31°C (87°F)
decreasing linearly to 50% at 40°C (104°F)
5 to 30° C (41 to 87°F)
category II
rate 2
(1) Variable speed control, min. 20 Hz / max. 100 Hz.
(2) Oil charge is filled at factory. Do not modify the oil level.
(3) According to CE regulations, A100L can withstand a supply voltage variation of ±10%.
* Only when ES module activated.
** In case of larger volume and/or more frequent pumping cycles, contact us.
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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Technical characteristics
GB 04352 - Edition 03- Nov. 11
Bottom view
Front view Left view
Right view
Bottom view
Front view Left view
Right view
(NW50)
2xM10
2xM10
2
Main Power
SPI Interface
Inlet Water
Connection
Outlet Water
Connection
Exhaust NW25
Inlet NW50
2xM10
(Wheel)
Inlet C.D.A. or N Connection (ES option)
14
65
190.5
2xM10
230 25
420
4 x 32
85
605
50
(NW25)
21
39
65
14
24
280
208.5
73.5
300
53
30
14
70
140
53
136
32
98
50
26.5
46
190.5
30
14
/ 0.5
/ 2.6
/ 7.5
/ 9 0.98
/ 16.5
/ 1.3
/ 3.3
/ 25.6
/ 2
/ 0.9
/ 1.5
/ 2.6
/ 0.5
/ 0.9
/ 11
/ 8.2
/ 2.9
/ 11.8
/ 2.1
/ 1.2
/ 0.5
/ 2.7
/ 5.5
/ 2.1
/ 5.3
/ 1.2
/ 3.8
/ 2
/ 1
/ 1.8
/ 7.5
0.5
/ 1.2
A100L dimensions and
interfacing
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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Technical characteristics
Gravity center and
weight distribution
WEIGHT
Kg/
Lb
CG X
mm/
inch
CG Y CG Z
FOOT DISTRIBUTION WEIGHT (Kg/ Lb)
1 2 3 4
103 /
227
135/
5.31
325/
12.79
152/
5.98
22/
48.5 24/ 52.91 29/ 63.93 28/ 61.73
A100L CG and Weight Distribution
mm/
inch mm/ inch
Right view Front view
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Technical characteristics
GB 04352 - Edition 03- Nov. 11
A100L stackIing
dimensions and
interfacing
/ 23.2
/ 2
/ 11
/ 23.7
/ 2.9
/ 11
/ 20.1
/ 14.8
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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Alcatel Vacuum Technology France - ATH 200 User’s Manual
Technical characteristics
A100L Stacking Center of Gravity and Weight Distribution
WEIGHT
Kg/
Lb
CG X
mm/
inch
CG Y CG Z
FOOT DISTRIBUTION WEIGHT (Kg/ Lb)
1 2 3 4
206/
454
135/
5.3
325/
12.8
302/
11.9
44/
97 48/ 105.8 58/ 127.9 56/ 123.4
mm/
inch mm/ inch
Stacking gravity
center and weight
distribution
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Technical characteristics
GB 04352 - Edition 03- Nov. 11
Anti earthquake
fixation dimensions
for A100L pumps
302
590
8
600 23
140
70
280
73
23
348
426
34
11
24 23
/ 11.9
/ 23.2
/ 0.31
/ 23.6
/ 5.5
/ 2.7
/ 11
/ 2.9
/ 0.9
/ 13.7
/ 16.8
/ 1.3
/ 0.4
/ 0.9/ 0.9
MAXIMUM LOADS ON
GROUND & SEISMIC FIXATIONS
(SEMI S2-0200 Section 19)
(Newton)
1 23 4
1 x A100
X
69 33 27 -129
Y
-272 -183 -237 -258
Z
-580 155 19 -454
2 x A100 Stacked
X
334 -300 364 -398
Y
-356 -642 -391 -511
Z
-1845 1008 498 -1381
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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Accessories
Anti earthquake
square
These anti earthquake squares allow to bolt down the pump to the
floor.
Description P/N
Anti earthquake square kit 109790
Anti earthquake square installation (accessory) B 70
Emergency stop This device is intented to switch off the pump power. It also has one
relay contact (1 normally open) for external use.
Description P/N
Emergency stop 107849
32
L1
L2
L3
43
31
T1
T2
T3
44
1234 1234
206430.1 AMP 206061.1 AMP
LINE A100L
It is mandatory to install an emergency stop device when the pump is not
integrated into an equipment. Otherwise, the product will not comply with
the relevant provisions of the safety machinery directive. This device is
available as an accessory.
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

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Alcatel Vacuum Technology France - ATH 200 User’s Manual
Accessories
GB 04353 - Edition 02 - Dec. 11
N2 pressurization kit Allows user to close and pressurize the pump for return to a service
center.
Description P/N Qty
N2 pressurization kit including connecting
accessories F 10 107956S 1
Injector 106859 1
“Anti-noise” device This accessory allows to reduce vibrations transmitted to the exhaust
line in case of cycle pumping at atmospheric pressure.
Description P/N
Anti-noise device DN25 110868
RS232 / RS485 /
Network interface
This interface can be used to control the pump and communicate with
the process tool using the serial link protocol.
Description P/N
RS 232 / RS 485 / Network interface 111923
See the operating instruction manual
RS 232 / RS 485 / Network interface , in the end of this
document.
Silencer kit Allows user to reduce exhaust sound level if there is no exhaust pipe
connected to the pump.
Description P/N
Silencer kit 066849
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions

GB 03618 - Edition 03 - Dec 11
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Start up
A100L Operating instructions
Detailed contents
B
B 00 Safety instructions
- Pump installation
- General
- Decontamination / product dismantling
- Manufacturer contact in case of emergency
- Pump labels
B 01 Hook-up requirements
B 10 Unpacking / Handling / Storage
- Precautions
- Packaging dimensions
- Unpacking
- Handling
- Storage
B 20 Positioning the pump in the pumping installation
- Positioning the pump
B 30 Connection to the cooling circuit
- Water characteristics
- Water cooling quick connection
B 35 Inlet CDA or Nitrogen connection (ES option)
B 40 Electrical connection
- Protective earth connection
- Process tool electrical protection
- High voltage electrical connection
B 50 Connection to the pumping circuit
- Preliminary precautions for inlet and exhaust connections
- At the pump exhaust
- At the pump inlet
B 60 Remote control plug connection (dry contacts / 16 pin plug)
- Functions
- Remote control connector location
- Remote control plug contact (inputs and outputs)
- Pump working conditions (with main power on)
B 61 Remote control plug connection (dry contacts / 19 pin plug)
- Functions
- Remote control connector location
- Remote control plug contact (inputs and outputs)
- Pump working conditions (with main power on)
B 70 Anti earthquake square installation (accessory)
- Pump anchorage

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B 00
Vacuum Technology France - ATH 200 User’s Manual
Safety instructions
Indicates a potentially hazardous situation which, if not avoided, could result
in moderate or minor injury. It may also be used to alert against unsafe
practices.
Indicates a potentially hazardous situation which, if not avoided, could result
in death or severe injury.
Indicates an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
Indicates a potentially hazardous situation which, if not avoided, could result
in property damage.
Pump installation The installation of the pump can only be performed by trained
staff.
•
General
The product’s EMC rating is obtained on the understanding that it is installed
in compliance with EMC rules.
Of special note: in environments that are prone to emit interference,
use shielded cables and connections on interfaces.
Ensure that the product is connected to an electrical installation:
- in compliance with the local and national safety requirements,
- equipped with electrical protection (fuses, circuit breaker, …)
which has a suitable earth (ground) point, properly connected.
The performance and operational safety of this product are guaranteed
provided it is used normally in the operating conditions defined in this
manual.
It is the customer’s task to:
- train operators to use the product if they do not speak the language the
manual is written in,
- ensure operators know the safe practices to apply when using the
product.
Our products are designed to comply with current EEC regulations.
Users making their own modifications to the product are liable to break
its compliance with these regulations, degrade its EMC (electromagnetic
compatibility) rating, and make it unsafe to use. The manufacturer declines
all liability for the consequences of such operations.
adixen Vacuum Products - A100L - Dry Pump - Operating Instructions