Pfeiffer Vacuum TPU 2101 P User manual

Turbomolecular Pumps
With Electronic Drive Units TC 750
PT 0041 BE/N (0703)
TPH 2101 P / PC
TPU 2101 P / PC
Betriebsanleitung • Operating Instructions

2
Index
Page Page
1. Safety Instructions.......................... 3
1.1. For Your Orientation ......................................... 3
1.2. Pictogram Definitions ....................................... 3
2. Understanding The Pumps ............ 4
2.1. Main Features................................................... 4
Proper Use........................................................ 4
Improper Use.................................................... 5
2.2. Differences Between The Pump Types............ 5
2.3. Scope Of Delivery............................................. 5
3. Installation....................................... 6
3.1. Preparations For Installation ............................. 6
3.2. Connecting The High Vacuum Side .................. 6
3.3. Connecting The Fore-Vacuum Side .................. 8
3.4. Connecting The Cooling Unit ............................ 9
3.5. Connecting The Casing Heating Unit................ 9
3.6. Connecting The Electronic Drive Unit TC 750 10
3.7. Installing The Power Unit................................ 10
3.8. Installing The Cover Plate For The TC 750...... 11
3.9. Connecting The Venting Valve........................ 12
3.10. Connecting The Sealing Gas Valve ................. 12
3.11. Connecting The Remote Control Unit............. 13
3.12. Connecting The Serial Interface RS 485 ......... 14
Connection...................................................... 14
Connecting The RS 485 .................................. 14
3.13. Connections Diagram ..................................... 15
4. Operations..................................... 16
4.1. Filling In The Lubricant.................................... 16
4.2. Before Switching ON...................................... 16
4.3. Switching ON.................................................. 17
4.4. Gas Type Dependent Operations ................... 17
4.5. Circulatory Lubrication .................................... 18
4.6. Switching OFF And Venting............................ 18
4.7. Shutting Down For Longer Periods ................ 18
4.8. Operations With The DCU 001/DCU 600
or HPU 001 ..................................................... 18
4.9. Operations With The Remote Control Unit..... 19
Venting Release (Optional) ............................. 19
Motor, Turbopump ......................................... 19
Pumping Station ............................................ 19
Heating/Reset ................................................ 19
Standby........................................................... 19
Rotation Speed Setting Operations
Via Input PWM ............................................... 19
Switching Outputs .......................................... 19
5. Monitoring Operations................. 20
5.1. Operations Display Via LED ............................ 20
5.2. Turbopump Temperature Monitoring ............. 20
6. What To Do In Case
Of Breakdowns?............................ 21
7. Service ........................................... 22
8. Maintenance/Replacement.......... 23
8.1. Replacing The Lubricant ................................. 23
8.2. Cleaning The Lubricating Pump ...................... 24
8.3. Replacing The Lubricating Pump .................... 24
8.4. Replacing The Electronic Drive Unit TC 750 ... 24
9. Technical Data ............................... 25
9.1. Dimensions Diagram ...................................... 26
10. Spare Parts .................................... 27
11. Accessories ................................... 28
11.1. Lubricant ......................................................... 28
Declaration of Contamination ............ 29
Manufacturer´s Declaration .. (last page)
Please note: Current operating instructions are available via
www.pfeiffer-vacuum.net.

3
Warning, danger of burns from touching hot
parts.
Warning, danger of personal injury.
Caution, danger of damage to the pump or to
the system.
Warning, danger of injury from rotating parts.
Please note, attention to particulary important
information on the product, handling the
product or to a particular part of the documen-
tation.
☞
PLEASE NOTE
WARNING
CAUTION
WARNING
WARNING
☞Read and follow all instructions in this manual.
☞Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can be caused by your system.
– Hazards which can be caused by the media being
pumped.
☞Avoid exposing any part of the body to vacuum.
☞Observe the safety and accident prevention regulations.
☞Regularly check that all accident prevention measures are
being complied with.
☞Do not operate the turbopump with open high vacuum
flange.
☞Do not carry out any unauthorised conversions or alterati-
ons to the turbopump with TC 750.
☞When returning the turbopump observe the shipping
instructions.
☞The turbopump must be anchored in accordance with the
installation instructions (please refer to.
☞Do not disconnect the plug between the TC 750 and acces-
sory components during operations.
☞Disconnect the voltage supply to the TC 750 before
opening the turbopump.
☞When working on the turbopump, the high vacuum flange
should only be opened once the rotor is at rest.
☞When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.
☞If a heater is in use temperatures of up to 120 °C can arise
in the area of the high vacuum flange. Take care to avoid
burns!
☞During operations temperatures of up to 65 °C can arise in
the lower part of the turbopump. Take care to avoid burns!
☞Keep leads and cables well away from hot surfaces
(> 70 °C).
☞Operate the turbopump with TC 750 only in conjunction
with the relevant power supply (accessory).
☞The unit has been accredited protection class IP 30. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken. When the turbopump is water cooled the enclosed
cover plate for the TC 750 must be installed by an electrical
specialist, in order to attain protection class IP 54.
☞The mains connection must be subject to a safe
connection to the PE (protection class 1).
☞If the turbopump and the TC 750 are operated separately
(only permissible with the agreement of the manufacturer)
the turbopump must be connected to the PE.
☞The turbopump and the TC 750 must only be disconnected
from each other when the turbopump is completely at rest
and the TC 750 has been disconnected from the power
supply.
☞The cause of any operating voltage leakage to earth (red
LED flashes) must be eliminated to avoid the danger of an
electric shock.
☞The housing screws do not loosen, pull tight, remove or
replace, since otherwise the guarantee for the security of
the turbopump expires.
Modifications reserved.
1. Safety Instructions
1.1. For Your Orientation
Instruction in the text
➡Working instruction: here, you have to do something.
Symbols used
The following symbols are used throughout in illustrations:
High vacuum flange
Fore-vacuum flange
Venting connection
Cooling water connection
Electric connection
Sealing gas connection
Abbreviations used
DCU = Display and operating unit
HPU = Display and operating unit
TC = Electronic drive unit, turbopump
TPS = Power unit
Position numbers
The same pump and accessory parts have the same position
numbers in all illustrations.
1.2. Pictogram Definitions

4
2.1. Main Features
Turbopumps TPH/TPU 2101 P/P C with the TC 750 form a
complete unit. Voltage is supplied by power supply (see
Section 11. Accessories).
On delivery, the pumps have been set up for
operations in remote mode. Remote plug 8d
(please refer to Section 3.6.) should therefore
be disconnected from the TC 750 if operations
with the DCU 001/DCU 600 or HPU 001 are
required.
CAUTION
Cooling
Standard: Water cooling
Integrated protective measures against excess temperatures:
The Electronic Drive Unit TC 750 reduces
the rotor rotation speed.
Bearings
High vacuum side: Wear free permanent magnetic bearing.
Fore-vacuum side: Oil circulatory lubricated ball bearing
with ceramic balls.
2. Understanding The Pumps
The turbopumps must not be transported when
filled with lubricant.
When being fitted into or dismantled from a
system, turbopumps may only be positioned as
shown in Section 3.2. Other positions can
cause the pumps to be contaminated with
lubricant.
Proper Use
– The Turbomolecular Pumps may only be used for the
purpose of generating vacuum.
– The Turbomolecular Pumps TPH/TPU 2101 P C (please see
the rating plate) are designed to pump corrosive gases
and vapours. Where corrosive gas processes are involved,
gas bonding and particles which can damage the surfaces
of the pump can be produced. The motor and bearing
compartments have to be protected with sealing gas.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– If the pump is to be operated with more than 50% of the
permissible gas load then sealing gas should be used to
ensure rotor cooling.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3..
– Only Pfeiffer Vacuum power supplies may be used to
operate the TC 750. The use of other power supplies requi-
res the prior agreement of the manufacturer and equalisa-
tion with the valid specification.
– Without the cover plate for the TC 750 the pumps may only
be operated providing the ambient conditions in complian-
ce with Protection Type IP 30 are observed.
CAUTION
4
2
8
3
72
71
73
1
Turbomolecular Pump TPH/TPU 2101 P / P C
1 High vacuum flange
2 Fore-vacuum flange
3 Cooling water connection
4 Venting screw
8 Electronic Drive Unit TC 750
71 Lubricant filler srew
72 Lubricant drain screw
73 Sight glass

5
Improper Use
The following is regarded, inter alia, as improper:
– The pumping of explosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– Operating the pumps in areas where there is a danger of
radioactivity.
– The pumping of gases and vapours which attack the
materials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with impermissibly high fore-vacuum pressure.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 9. Technical Data).
– Venting with rates higher than in Section 4.6. stated.
– Operating the pump without the cover plate for the TC 750
in environments which require a protection class superior
to IP 30.
– Installation of the pumps in systems where the turbomole-
cular pumps are subjected to impact-like stress and vibra-
tions or the effect of periodically occurring forces.
– The use of other power supplies or accessories which are
not named in this manual or which have not been agreed
by the manufacturer.
– The connection to power supplies with earthing of a direct
voltage pole.
The turbomolecular pumps and flange connections must not
be used to tread on when climbing onto the system.
Improper use will cause all claims for liability and guarantees
to be forfeited.
Feature TPH/ 2101 P/P C TPU 2101 P/P C
High vacuum flange ISO-K CF-F
High vacuum seal Elastomer seal Metal
Attainable final < 1 · 10-7 mbar < 5 · 10-10 mbar
pressure
Abbreviations on the rating plate of the pump
TPH/TPU 2101
Suffix ”P“: Purge gas connection for the prevention of
the ingress of aggressive gases into the
motor and bearing area
Suffix”C“: Surface protection for passive protection
of the pump
2.3. Scope Of Delivery
The turbopump scope of delivery includes:
– Lubricant F3 (40 ml) with filling syringe,
– cover plate for the TC 750 to fulfilled the conditions for
protection class IP 54 (please see Section 3.8.),
– protective covering for the high vacuum flange and the
fore-vacuum flange.
The fastening parts at the high vacuum flange
are not sufficient for the attachment of the
turbopump at a recipient (please refer to
Section. 3. Installation).
CAUTION
2.2. Differences Between The Pump Types
TPH/TPU 2101 P Standard version
TPH/TPU 2101 P C Corrosive gas processes version

6
3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump.
In case the rotor blocks suddenly, torque levels
up to 1166000000NNmmcan occur which need to be
absorbed by the system and the high vacuum
flange.
The turbopumps must not be transported when
filled with lubricant.
– Pumps must be filled with lubricant befor being operated
(see Section 4.1.).
– If the turbopump is to be operated with the DCU 001 or
HPU 001, the remote plug 8d on the TC 750 (please see
Section 3.5.) should be disconnected and then proceed in
accordance with the corresponding operating instructions.
– The maximum permissible rotor temperature of the pump is
120 °C. If the vacuum chamber or parts in the vacuum
chamber are heated, the values stated in the technical
data relating to the level of heat which may be radiated
into the pump must not be exceeded. If necessary, suitable
shielding must be fitted in the vacuum chamber before the
turbopump (constructional suggestions available on
request).
– The temperature of the high vacuum flange must not
exceed 120 °C.
– Only remove the blank flange from the high and fore-vacu-
um side immediately before connection.
– Where magnetic fields of > 7 mT are involved suitable
shielding must be provided (available on request).
– If the pump is baked out, the heating sleeve and the body
of the pump must be insulated to prevent burns from
accidental contact.
– Floor mounting of the turbomolecular pump is admissible
after consulting the manufacturer.
The person responsible for commissioning
must ensure that the installation is carried out
in accordance with the legal regulations and
the pertinent industrial standards.
☞
PLEASE NOTE
CAUTION
WARNING
WARNING
3.2. Connecting The High Vacuum Side
The utmost cleanliness must be observed
when fitting all high vacuum parts. Unclean
components prolong the pumping time.
All installations units for the flange must be
with installation grease-free, dust free and
drying.
To reliably prevent the pump from twisting if
the rotor suddenly blocks, it is absolutely
prohibited to secure a pump with an ISO-K
flange on a vacuum chamber with an ISO-F
flange or vice versa. Both flanges mmuussttbbeeof
the same type.
Installation with different flange types is
carried out at the user's own risk. Pfeiffer
Vacuum shall assume no liability whatsoever
for any damage or injuries resulting from this
kind of attachment.
Use a Pfeiffer Vacuum splinter shield or protective mesh
The use of a Pfeiffer Vacuum splinter shield or protective
mesh in the high vacuum flange protects the turbopump
against foreign bodies coming from the vacuum chamber but
does reduce the volume flow rate as followed:
WARNING
☞
PLEASE NOTE
Reduced volume flow rate [[%%]]
N2He H2
splinter shield DN 200 25 13 10
DN 250 23 10 7
Protective mesh DN 200 7 4 2
DN 250 6 3 2
Connecting via a Pfeiffer Vacuum vibration compensator
The high vacuum side can be flanged onto the vacuum cham-
ber either directly or via a Pfeiffer Vacuum vibration compen-
sator (see Section 11. Accessories).
When using a Pfeiffer vacuum vibration compensator,
suitable securing needs to be introduced capable of
absorbing the energy of the rotor should it suddenly block,
since the vibration compensator itself alone cannot absorb
the occurring forces. Please consult the manufacturer.
The maximum permissible temperature at the
vibration compensator is 100 °C.
The CF-F flange (TPU 2101) can only be fitted if
the screws are insert from the direction of the
counter-flange or with stud bolts.
☞
HINWEIS
CAUTION

7
A
D or E B
C
Bracket crew
A ISO-K flange
B Bracket screw
C Centering ring, coated
D Splinter shield
E Protective mesh
CCoonnnneeccttiioonnnnoommiinnaall--DDeessiiggnnaattiioonnOOrrddeerr--nnuummbbeerr
ddiiaammeetteerr
DN 200 ISO-K bracket screws PF 300 110 -T
(2244pieces must be used)
Centering ring (coated) PM 016 220 AU
Centering ring (coated) PM 016 221 AU
with splinter shield
Centering ring (coated) PM 016 222 AU
with protective mesh
DN 250 ISO-K bracket screws PF 300 110 -T
(2222pieces must be used)
Centering ring (coated) PM 016 225 AU
Centering ring (coated) PM 016 226 AU
with splinter shield
Centering ring (coated) PM 016 227 AU
with protective mesh
Installing the high vacuum flange
– In case the rotor blocks suddenly, torque levels up to
1166000000NNmmcan occur which need to be absorbed by the
system and the high vacuum flange.
– For installing the turbomolecular pumps to the high
vacuum flange, the components listed in the following
mmuussttbe used exclusively. Otherwise the turbomolecular
pump may twist or tear off. The clamps, bolts, nuts and
centering rings are special designs from Pfeiffer Vacuum
– The minimum strength of 170 N/mm2of the flange material
needs to be observed.
Installation is done as follows:
ISO-K flange
For installing an ISO-K to an ISO-K flange the following
components are available.
➡The clamps need to be tightened crosswise in three steps.
Tightening torque: 5 Nm, 15 Nm, 25 ±2 Nm.
CF-F-Flansch
Applications for installing an CF-F to an CF-F flange:
Stud screw with blind hole
2244pieces of stud screws (M8) with washers and nuts must be
used. The stud screws need to be tightened revolving with a
tightening torque of 22 ±2 Nm.
B
A
C
52
Hexagon screw and clearance hole
2244pieces of hexagon screws (M8) with washers and nuts
must be used.
The hexagon screws need to be tightened revolving with a
tightening torque of 22 ±2 Nm.
B
A
C
55
Stud screw with blind hole
A CF-F flange
B Stud screw with
washer and nut
C Copper seal
Hexagon screw and clearance hole
A CF-F-flange
B Hexagon screw
with washer and nut
C Copper seal
CCoonnnneeccttiioonnnnoommiinnaall--DDeessiiggnnaattiioonnOOrrddeerr--nnuummbbeerr
ddiiaammeetteerr
DN 250 CF-F Hexagon screw M8 with PF 505 004 -T
washer and nut
(25 pieces1))
Stud screw M8 with PF 507 004 -T
washer and nut
(34 pieces1))
Copper seal (5 pieces1)) PF 501 425 -T
or
copper seal silvered PF 501 525 -T
(5 pieces1))
Splinter shield2) PM 016 324 AX
Protective mesh3) PM 016 345 -R
The components for installing to an CF-F flange are to be
ordered under the following numbers:
1) Lieferstückzahl
2) Insert the splinter shield and the protective mesh in the vacuum flange with the
clamping lugs downward.

8
Directly Flanging The Pump
The turbopump can be flanged onto the vacuum chamber
vertically (0°) up to an angle of 90° maximum.
The fore-vacuum flange must always point
downwards.
CAUTION
11
0-90°
Permissible installation positions for the turbopump
11 Vacuum chamber
11
The maximum loading capacity of the high vacu-
um flange is 2000 N (equivalent to 200 kg).
Asymmetric loading on the high vacuum flange
must be avoided.
Horizontal installation position of the turbopump
The fore-vacuum flange of the turbopump must be aligned
vertical downwards, otherwise the turbopump could become
dirty and the lubricating pump not properly function. The
deviation of the fore-vacuum flange from the perpendicular
must not exceed the following values (view onto the fore-
vacuum side):
Clockwise: 8° max.
Counter-clockwise: 15° max.
CAUTION
No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored.
Suspend or support all pipes to the turbopump.
3.3. Connecting The Fore-Vacuum Side
Backing pump: Fore-vacuum pressure please see
Section 9. Technical Data
Recommendation: Dry backing pumps or rotary vane
vacuum pumps from the Pfeiffer Vacuum
range.
Connecting the backing pump
All connections of the fore-vacuum line: With the usual small
flange components or screwed hoses.
Be sure to conduct away the exhaust gases
from the backing pump. Do not reduce the free
cross section of the fore-vacuum flange with
following components.
The exhausted process gases and vapours can
represent a health hazard and can also be envi-
ronmentally damaging.
Comply with all the gas manufacturer's safety
instructions.
Check the seal of the fore-vacuum line before
commissioning.
➡With rigid pipe connections: Fit a bellows in the
connecting line to reduce vibration.
➡The fore-vacuum lines should be designed so that they will
not breake in the event of rotation of the pump at the high
vacuum flange.
➡The electrical connection of the backing pump is made via
a relay box (see Section 11. Accessories) whose control
line is connected to ”FV PUMP” on the TC 750.
Please refer to Operating Instructions PT 0030 BN for details
on the relay box, backing pump and its installation.
WARNING
CAUTION
CAUTION
8˚ max. 15˚ max
H
VV VV VV
Horizontal installation position of the turbopump
11 Vacuum chamber
11

9
3.4. Connecting The Cooling Unit
The Turbopumps TPH/TPU 2101 P / P C have been designed to
be water cooled as standard.
(cooling water connection please refer to Section
9.1. Dimensions Diagram)
When the turbopump is water cooled the
enclosed cover plate for the TC 750 must be
installed by an electrical specialist, in order to
attain protection class IP 54 (please see
Section 3.8.).
Water Cooling
The cooling water can be drawn either
– from the cooling water mains, or
– from Recycled Water Cooling Unit TZK in closed circuit.
Cooling from the cooling water mains
To prevent deposits collecting in the pump the cooling water
must be filtered.
Minimum cooling water requirements:
Mechanically clean, optically clear, no turbidity, no sediment,
chemically neutral, temperature > dew point.
CAUTION
Oxygen content: max. 4 mg/kg
Chloride content: max. 100 mg/kg
Carbonate hardness: max. 10 ° dH
Consumption of potassium
permanganate: max. 10 mg/kg
Carbon dioxide: Undetectable
Ammonia: Undetectable
pH-value: 7 – 9
Max. fore-line over pressure: max. 6 bar
Minimum flow rate at gas load max.: 100 l/h at 15 °C
Connection to the cooling water mains
➡Fit the dirt trap (Accessory) in the supply line.
➡Connect the supply line with hose clips onto one of the two
cooling water connections.
➡Connect the return line to the other cooling water connec-
tion of the turbopump.
➡Tighten cooling water connection to a torque of 10 Nm.
➡Tighten all hose clips and check for firm seating of the
hoses.
3
33
31
32
Cooling from the cooling water mains
3 Cooling water connection
31 Supply line
32 Return line
33 Dirt trap
Cooling with the Recycled Water Cooling Unit TZK
(Accessory)
Connection to the TZK
Dirt traps are not permissible in the lines.
All other steps as for connecting to the cooling water mains.
35
TZK
3
31
32
Cooling with Recycled Water Cooling Unit TZK
3 Cooling water connection
31 Supply line
32 Return line
35 Recycled Water Cooling Unit TZK
3.5. Connecting The Casing Heating Unit
In order to accelerate attainment of final pressures,
turbopumps and vacuum chambers can be heated.
Baking out is only practical on pumps with stainless steel
casings (TPU pumps). On account of their aluminium casings,
the temperatures attainable on TPH pumps are not high
enough.
Heating duration is dependent on the level of contamination
and the required final pressure but should be at least four
hours.
High temperatures are generated when
turbopumps are heated.
There is a danger of injury from coming into
contact with hot parts even after the casing
heating has been switched off.
Heating sleeve and the pump casing should be
thermally insulated during the installation. During
the heating phase be careful not to come into
contact with the heating sleeve or the pump
casing.
For details regarding the casing heating and its installation
please refer to Operating Instructions PM 0542 BN and
Section 3.13. Connections Diagram.
WARNING

10
3.6. Connecting The Electronic
Drive Unit TC 750
The turbopump and the Electronic Drive Unit
TC 750 are connected and together form a
single unit.
The connecting cable 8a has to be ordered
separately in the required length (see Section
11. Accessories).
➡Unscrew screw with tooth lock 8c from the TC 750 (above
the connection X4)1).
➡Plug the plug X4 on connecting cable 8a into the
connection X4 on the TC 750 and screw in screw 8b.
➡Secure plug X4 on the TC 750 with a screw and
tooth lock 8c1).
➡Connect plug X2 on connecting cable 8a with power
supply TPS 600/DCU 600 (see Section 11. Accessories) on
connection X2.
➡Using screws and toothlock 8c (two pieces, included with
the cable consigment) secure plug X2 to power
supply 1051).
Once operations voltage has been supplied, the
TC 750 performs a self test on the supply voltage.
The supply voltage for the turbomolecularpumps
is 140 VDC ± 5% in accordance with EN 60 742.
If the turbopump is to be operated with the Display and
Operating Unit DCU 001/DCU 600 or HPU 001, the remote plug
8d on the TC 750 should be disconnected and then proceed in
accordance with the respective operating instructions.
1) Only with cable PM 051 843 -T (please see Section 11.)
CAUTION
☞
PLEASE NOTE
X4
X4
8a
X2
8c
8b
8c
8d
105
S1
X1
X2
8
Connecting the TC 750 with Power Supply TPS 600/DCU 600
X1 Mains connection
X2 Connection, Power Supply TPS 600
X4 Connection TC 750
S1 ON/OFF switch
8 Electronic Drive Unit TC 750
8a Connecting cable, TC 750 – TPS/DCU
8b Screw
8c Screw with tooth lock (3 Pieces)
8d Remote plug
105 Power Supply TPS 600
3.7. Installing The Power Supply
Voltage may only be supplied with the Pfeiffer
Vacuum power supplies (please see Section 11.
Accessories).
The use of other power supplies requires the
prior agreement of the manufacturer and
equalization with the valid specification (power
supply specifications available on request).
Operations with TPS 600/DCU 600 only possible
in the connection voltage range 185-265 VAC.
For operations in the connected voltage range
90 - 132 VAC please refer to Operating Instruc-
tions ”Pumping Operations With The DCU”,
PM 0547 BN.
Please refer to Operating Instructions PM 0521 BN for details
on Power Supply TPS 600.
☞
PLEASE NOTE
CAUTION

11
3.8. Installing The Cover Plate For The TC
750
The turbomolecular pump with integrated Electronic Drive
Unit TC 750 has an IP 30 protection class rating.
When the turbopump is water cooled the enclosed cover
plate for the TC 750 mmuussttbe installed by an electrical specia-
list, in order to attain protection class IP 54
Before installing the cover plate, the Electronic
Drive Unit TC 750 must be disconnected from
the power supply. The speed of the
turbomolecular pump must be 0 Hz.
Before beginning with any installation work
involving the cover plate for the Electronic
Drive Unit TC 750, the remote plug 8d (see
Section 3.6.) must be removed.
When using the remote plug, the cover of the
remote plug must be unscrewed from the
remote plug.
➡First the cable clamp must be removed from the TC 750.
➡Thereafter unscrew the 3 cylinder head screws with slot
(M3) from the TC 750.
➡Stick on the enclosed sealing to the bottom section 107a.
➡Bolt the bottom section 107a to the TC 750 with the
hexagon socket screws 107b (3 pieces). The sealing
surface must rest against the TC 750.
➡Insert the O-ring 107c into the bottom section.
☞
PLEASE NOTE
WARNING
TC 750
8
Dichtung/
Sealing 107a
107b
107c
➡First pull the corresponding cables through the inserts with
screwed cable glands and the cover 107d and insert the
cables at the TC 750.
In case the pump is operated using the remote control, the
remote control unit must be connected in accordance with
Section 3.11. and the connections diagram (Section 3.13).
Installing the bottom section
8 Electronic Drive Unit TC 750
107a Bottom section
107b Hexagon socket screw (3 pieces)
107c O-ring
The cable arrangement is as follows:
– Accessories (venting valve, backing pump) in PG 16 with
flat cable (single or dual)
– Interface cable RS 485 in PG 16; for cable dia. 6
– Connecting cable for remote control etc. in insert E 153/8
or E 153/11.
➡Thereafter screw the cover 107d to the bottom section
107a with the screws 107e (6 pieces).
Particularly ensure that the O-ring 107c is properly seated!
PG 16; for
cable Ø6
Blank
disc
Screw
fitting
PG 16 for
flat cable, single
PG 16 for
flat cable, dual
(scope of delivery
2 pieces)
Insert
(scope of delivery
1 piece E 153/8
1 piece E 153/11)
Inserts and Screw fittings
➡Firmly tighten the screwed cable glands at the cover 107d.
If a cable feedthrough remains unoccupied, a
blank disc must be inserted instead of the
cable.
After installing the cover plate, the requirements of protection
class IP 54 are fulfilled. The turbomolecular pump may then
be operated once more.
☞
PLEASE NOTE
TC 750
8107a 107d 107e
107c
Installing the cover
8 Electronic Drive Unit TC 750
107a Bottom section
107c O-ring
107d Cover
107e Screw (6 pieces)

12
3.10. Connecting The Sealing Gas Valve
For protection pruposes the turbopumpe should be operated
with sealing gas, particularly where corrosive and dusty
processes are involved. Even in non-corrosive processes,
from 50% of the maximum gas load sealing gas should be
used to ensure rotor cooling.
Connection is made via the sealing gas valve (please see
Section 11. Accessories).
3.9. Connecting The Venting Valve
The venting valve (see Section 11. Accessories) provides
automatic venting in the event of a power failure and
switching off.
Fitting the venting valve
➡Unscrew the venting screw 4 (see Section 2.1.) from the
venting connection of the turbopump.
➡Screw in venting valve 42 with seal (USIT ring) on hexago-
nal SW 14.
Electrical connection
➡Plug control lead 42a into the connection ”VENT“ of the
TC 750 (8) on the turbopump.
Release for venting is executed via remote plug pin 2 (pre-set
on delivery, please see Section 4.9.)
The venting mode of the venting valve is selected via the DCU
or Serial Interface RS 485.
The maximum pressure at the venting valve is
1.5 bar absolute.
Please refer to Operating Instructions PM 0507 BN for details
on Venting Valve TVF 005.
CAUTION
42
42b
8
42a
VENT
TC 750
8
42a
8d
Connecting the venting valve
8 Electronic Drive Unit TC 750
8d Remote plug
42 Venting valve
42a Connector plug venting valve/TC 750
42b Plug
9
66
66a
15
Connecting the sealing gas valve
9 Locking screw sealing gas connection
15 Seal
66 Sealing gas valve
66a Seal
Please refer to Operating Instructions PM 0229 BN for details
on installing the sealing gas valve and adjusting the sealing
gas flow.

13
3.11. Connecting The Remote Control
Unit
Remote control options for various functions are provided with the
connection "REMOTE" on the TC 750 via the 15-pole D-Sub- Connec-
tor. Shielded cable must be used. Shielding is on the plug side of
the TC 750 connected to the TC 750 casing.
The inputs 2-6 are activated by connecting them to the + 24 V on
pin 1 (active high) (please see Section 3.13. Connections
Diagram”).
Pin occupancy and remote plug functions
(please see following table).
When connecting supply voltage, the turbopump is
started.
On delivery:
Pin 1, Pin 2, Pin 3 and Pin 4 are bridged in the
mating plug.
CAUTION
1
8
9
15
Pin occupancy and remote plug functions
Pin nr. Input open (low) Input closed (high) on + 24V (pin 1)
1 +24 V
2 venting blocked (see Section 3.9.) venting released (see Section 3.9.)
3 motor, turbopump off motor, turbopump on:
the turbopump is driven, current flows through the motor coils
4 pumping station off pumping station on:
the turbopump is driven, backing pump is started via the relay box
5 heating off heating on:
the heating is switched on once the rotation speed switchpoint is attained and off
when the rotation speed switchpoint is unattained
optional: sealing gas valve off1) optional: sealing gas valve on1)
5 reset:
by supplying a pulse (T < 2s) with an amplitude of 24V a malfunction
acknowledgement can be processed
6 standby off standby on:
pump is accelerated to 66% of its nominal rotation speed
7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin or
via Serial Interface RS 485 (see Section 4.9. ”Rotation Speed Setting Mode”)
8Output (low) Output (high)
rotation speed switchpoint not attained rotation speed switchpoint attained; output can be loaded with 24 V/50 mA
9Output (low) Output (high)
Collective malfunction message malfunction-free operations;
output can be loaded with 24 V/50 mA
10 Mass (ground) _________
11 Contact contact2) between pin 11 and pin 12 closed
Output 1: Switchpoint attained if the turbopump is above the switchpoint
12 Contact
Output 1: Switchpoint attained
13 Contact contact2) between pin 13 and pin 14 open in the event of a collective malfunction
Output 2: Collective malfunction message
14 Contact
Output 2: Collective malfunction message
15 Analog output rotation speed proportional output voltage 0 - 10 VDC =
0 - 100 % * fend/load R ≤10 kΩ
1) The Option must be set via the Serial Interface RS 485.
(see Operating Instructions PM 0547 BN, Pumping operations with DCU)
2) The following technical data is applicable for the contacts: Umax = 50 VDC
Imax = 1 A

14
3.12. Connecting The Serial
Interface RS 485
An external operating component (DCU 001/DCU 600 oorr
HPU 001) oorran external computer can be connected via the
connection ”RS 485” on the TC 750 with the use of a shielded
8 pole modular connecting cable contained with the delivery.
PIN Arrangement
1 not connected
2 +24V output (≤210 mA loading
capacity)
3 not connected
4 not connected
5 RS 485: D+ (DO / RI)
6 Gnd
7 RS 485: D- (DO / RI)
8 not connected
RS 485
1 ... 8
5:D+, 7:D
RTRT
PC
Level Converter
TC TC
The electrical connections are internally optically decoupled.
Description Value
Serial Interface Type: RS 485
Baud rate: 9600 baud
Data file word length: 8 bit
Parity: no (no parity)
Start bits: 1
Stop bits: 1..2
(View from the
plug side of the
TC 750)
It is possible to connect an RS 232 (e.g. PC) via
a level converter (please see Section 11.
Accessories).
☞
PLEASE NOTE
All units connected to the bus must have differing serial inter-
face addresses (parameter 797).
The group address of the TC 750 is 960.
Only safety low voltages (SELV) may be connec-
ted to Serial Interface RS 485 .
All switched on remote functions have priority over the serial
interface functions.
Please refer to the separate Operating Instruc-
tions PM 0488 BN for more detailed
information on operations via Serial Interface
RS 485 and its electronic data.
Profibus DP Gateway TIC 250 is available (accessory) for
connecting an Electronic Drive Unit TC 750 to a Profibus DP.
Please refer to the respective Operating Instructions
PM 0599 BN for detailed information on the operation of the
TIC 250.
☞
PLEASE NOTE
WARNING
Connecting The RS 485
Connecting to a fixed bus system:
➡Connect all units with D+ (pin 5/RS 485) and
D- (pin7/RS 485) to the bus.
➡The bus must be completed at both ends.
The connections should be made in accordance with the
specification of the Serial Interface RS 485.
The serial interface is galvanically and safely separated from
the maximum supply voltage from the TC 750.
Connection
DCU 001
without power supply
RS 485
PC
external
computer
DCU 600
with power supply
or
or
RS 485
RS 485
TC 750
RS 485
RS 485
HPU 001
Connecting the RS 485

15
TC 600
TC 750
X4
1
1
2
2
3
3
4
n.c.
Mains input
power supply
(90 - 132 /
185 - 265) VAC
TPS XXX/DCU XXX
X2
Protection conducter (PE)
Supply voltage, TC
GND
PE GY/YE
Br
Bl
1
2
3
4
5
6
FAN
Fan
M
Relay box
FV PUMP
1
2
3
4
5
6
L
N
PE
PE
N
L'
Pumping station (Imax = 16 A)
Mains input, pumping station
115/208/230 VAC
Connection, pumping station
VENT
1
2
3
4
5
6
Venting valve
TVF 005
HEAT/TMS
1
2
3
4
5
6
Relay box
Heating
Mains input, heating
115/208/230 VAC
HEATING
L
N
PE
PE
N
L'
REMOTE
1
2
3
4
5
6
+24 VDC*/max. 50 mA
Venting release
Motor TMP
Pumping station
Heating / Reset (opt. sealing gas)
Standby
PWM on (touch relation 25 - 75 %)
Switching output 1 (24 VDC / max. 50 mA)
Switching output 2 (24 VDC / max. 50 mA)
GND*
Contact current:
max. 6 mA / contact
7
8
9
10
12
13
14
15
11
Contact output 1: Switch point attaind
Contact output 2: Collective malfunction
Analog output 0-10 VDC
RS 485
1
2
3
4
5
6
7
8
1
2
3
4
5
6
7
8
n.c.
+24 VDC* / max. 200 mA (supply voltage, DCU)
n.c.
n.c.
n.c.
RS 485+/ (DO/RI)
GND* (mass connection, DCU)
RS 485- / (DO/RI)
3.13. Connections Diagram

16
4. Operations
4.1. Filling In The Lubricant
Turbopumps must be filled with lubricant before
being operated.
If possible fill in the lubricant in the fitting
position of the turbopump.
Pumps are designed to operate with Lubricant “F3”,
contained with the delivery 40 ml (see type plate).
If “F3” is heated above 300 °C, toxic vapours
which can harm the airways are given off. Do
not allow “F3” to come into contact with tobac-
co products (danger of poisoning when ignited).
The precautions necessary in the handling of
chemicals must be observed.
Filling in the lubricant
➡Unscrew lubricant filler screw 71 and, using the syringe
provided, inject approximately 40 ml of lubricant.
Where the set-up position is vertical or
horizontal the maximum lubricant level in the
sight glass is the lower edge of lubricant filler
screw 71.
☞
PLEASE NOTE
WARNING
CAUTION
4.2. Before Switching ON
Sections 4.2 to 4.6. refer only to operating the pump in its
condition on delivery, without the DCU/HPU display and
operating unit. The bridges ”venting release”, ”motor, TMP
ON” and ”pumping station ON” are fitted in the remote
control plug.
Please refer to Section 4.8. regarding the switching on with
the Display And Operating Unit DCU or HPU.
Turbopump rotors rotate at high speed. When
the high vacuum flange is open there is a
danger of injury and of damage to the pump
caused by objects falling into the pump.
Therefore never operate the pump with open
high vacuum flange!
Take care when pumping hazardous gases and
observe the safety precautions of the gas
manufacturer!
➡With sealing gas: Open the sealing gas supply.
➡Open cooling water supply and check flow.
➡Plug connecting cable 8a (see Section 11. Accessories)
into the TC 750 and connect with Power Unit TPS 600 on X2
(please see Section 3.6.).
The following pre-settings have been
programmed:
– Start-up time 11 min
– Rotation speed switchpoint 80%
– Automatic venting 50%
These settings can only be altered via Serial Interface RS 485
(DCU, HPU or PC); please refer to the respective operating
instructions.
☞
PLEASE NOTE
WARNING
WARNING
➡Screw back in lubricant filler screw 71 with the O-ring 75.
It is essential to ensure that the lubricating
pump is not over-filled with lubricant.
Overfilling will cause the excess lubricant to be
secreted from the hole for the lubricant filler
screw 71.
If necessary, dismantle the lubricating pump
from the pump and fill up with lubricant (please
see Section 8.1).
CAUTION
73 72 75 71
A
5
ml
4
3
2
1
Filling in the lubricant
A Syringe
71 Lubricant filler screw
72 Lubricant drain screw
73 Sight glass
75 O-ring

17
When the unit is switched on for the first time
or after a lubricant change the contact to the
lubricating pump can open as a result of the
degassification of the lubricant. In such cases,
as for other malfunctions, the electronic drive
unit shuts down the turbopump.
➡The turbopump must be re-started with switch S1 on the
power supply.
4.4. Gas Type Dependent Operations
Water cooling is required if the pumps are to be
operated with gas load.
Where high level gas loads and rotation speeds are involved,
the resulting friction subjects the rotor to the effect of great
heat. To avoid over-heating, a power rotation speed
characteristic line is implemented in the TC 750; this ensures
that where maximum gas loads are involved, the pump will
operate at any rotation speed without the danger of damage
arising.
The maximum power is dependent on the type of gas. Two
characteristic lines are available for any type of gas in order
to fully exploit the power potential of the pump:
CAUTION
☞
PLEASE NOTE
F1
Rear panel, TPS 600
S1 ON/OFF switch
X1 Mains connection
X2 Connection TC 750
F1 Fuse
F2 Fuse
S1 F2 X1 X2
– "Gas Mode 0" for gases with molecular mass ≥40 as, for
example, Argon;
– "Gas Mode 1" for all lighter gases.
Works setting: “Gas Mode 0”
➡Set the applicable gas mode on the TC 750 via the
DCU/HPU (please refer to respective operating
instructions).
Pumping gases with molecular mass ≥ 40 with
the incorrect gas mode can cause damage to
the pump.
When pumping noble gases heavier then Argon
it can come to the destruction of the pump.
Please contact the manufacturer before using
such gases.
For the vertex of the power characteristic line please refer to
Section 9. Technical Data.
Maximum power is applied when the pump starts in order to
limit the time required. Once the set rotation speed is
attained, switching to the selected power characteristic line
is automatic.
If the gas dependent maximum power is exceeded, the rotati-
on speed is reduced until equilibrium between the
permissible power and gas friction is attained. The power
limitation serves to protect the pump against thermal over-
loading. In order to avoid rotation speed fluctuations it is
recommended to set, in rotation speed setting mode, the
equilibrium frequency or a somewhat lower frequency.
There can be types of pump whereby there is
no differentiation between the two ”gas
modes” settings.
☞
PLEASE NOTE
WARNING
Po er
Frequency
DB
C
A
D-C = Gas mode «0»
B-A = Gas mode «1»
Run up
fnom
Gas type characteristic line
4.3. Switching ON
➡Switch on the turbopump with switch S1 on the power
supply.
– Once the self test has been successfully completed on the
TC 750 (duration approximately 30 seconds), both the
turbopump and the backing pump (if connected) begin
operating.

18
4.5. Circulatory Lubrication
The ball bearing on the fore-vacuum side is supplied with
lubricant via the lubricating pump.
The circulation of the lubricant is monitored via a switching
contact. If there is insufficient lubricant, the electronic drive
unit switches off the turbopump. Monitoring is active only
from 60% of the final rotation speed.
If, at a rotation speed of > 60% of the final rotation speed (for
example through the degassification of the lubricant), the
contact opens for ≥2 minutes, the electronic drive unit assu-
mes a lubricant deficiency and switches off the turbopump.
In rotation speed setting mode with set speed
below 60% of the rated rotation speed the
pump is first accelerated to 60% and then
adjusted to the selected rotation speed.
➡Check the filling level of the lubricant.
➡Re-start the turbopump with switch S1 on the power
supply.
4.6. Switching OFF And Venting
To avoid contamination occurring when switching off, the
pump should be vented before shut-down.
➡Switch off both turbopump and backing pump on the
power supply at the same time with switch S1.
Where corrosive gas processes are involved, the sealing
gas supply should be shut off after approximately 10 minu-
tes and both turbo pump and backing pump switched off
with switch S1.
➡Venting
There are three possibilities to vent turbopump:
–Manual venting with the use of the venting screw
(status on delivery).
–Venting with the venting valve TTVVFF000055(see Section 11.
Accessories) which is selectable via the remote control
(please see Section 4.9.), or via the DCU/HPU (please
refer to the respective operating instructions).
–Venting in two stages when the vacuum chamber
should be vented as quickly as possible.
First stage: venting with a pressure increase rate of 15
mbar/s for 20 seconds.
Second stage: venting with an optionally large venting
valve.
The valve cross-section for a venting rate of 15 mbar/s
must be compatible with the size of the vacuum chamber.
Where small vacuum chambers are involved, the
Pfeiffer Vacuum Venting Valve TVF 005 can be used for
first stage venting.
➡Shut off water supply.
☞
PLEASE NOTE
4.7. Shutting Down For Longer Periods
Vacuum pumps are sometimes used to pump
aggressive or hazardous gases. There is a
danger of personal injury resulting from coming
into contact with process gases. Before
removing a turbopump from the system, first:
– Vent the turbopump with a neutral gas or dry air.
– Ensure that there is no residual process gas in the system
nor in the feeder lines.
If the turbopump is to be shut down for more than aayyeeaarr:
➡Remove turbopump from the system.
➡Change the lubricant (see Section 8.1.).
➡Close the high vacuum flange and evacuate the turbopump
via the fore-vacuum flange.
➡Vent turbopump via the venting connection with nitrogen
or dry air.
➡Close fore-vacuum and venting connection by blank
flanging.
➡Place the pump vertically on its rubber feet.
➡In rooms with moist or aggressive atmospheres, the turbo-
pump must be air-sealed in a plastic bag together with a
bag of dessicant.
If the pump has been shut down for 3 years a
bearing change must be carried out (please
get in touch with Pfeiffer Vacuum Service).
4.8. Operations With The DCU 001/DCU
600 or HPU 001
Operations with the DCU 001, DCU 600 or HPU 001 should be
carried out in accordance with the relevant operating
instructions:
PM 0477 BN “DCU description”,
PM 0547 BN, “Operating the pump with the DCU” and
PT 0101 BN, “Display and Operating Unit HPU 001”.
Operations with the DCU 001, DCU 600 and
HPU 001, the remote plug 8d on the TC 750
should be disconnected (please see Section
3.6.).
☞
PLEASE NOTE
☞
PLEASE NOTE
WARNING

19
Standby
The pump can be operated optionally at 66% of its nominal
rotation speed (standby ON) or at its nominal rotation speed
(standby OFF).
Pumping Station
Any connected pumping station components are started up
(e.g. backing pump, venting valve, air cooling) and with simul-
taneous activation of the input ”motor, turbopump” the turbo-
pump is set in operation once the self test has been
successfully completed (duration approximately 30 seconds).
Rotation Speed Setting Operations Via
Input PWM
The supply of pulse width modulated signals (PWM) with a
ground frequency of 100 Hz ±20% with an amplitude of
maximum 24 V and a touch ratio of 25-75% enables the rotati-
on speed to be set in the range from 20-100% of the nominal
rotation speed.
4.9. Operations With The Remote Control
Unit
Remote control operations can be performed via the connec-
tion with the designation “REMOTE” on the TC 750.
The connection is via a 15 pole D-Sub connector.
Pin arrangement and remote plug functions please see table
under Section 3.11..
Inputs 2-6 are activated if they are connected with the +24 V
on pin 1 (active high).
OOnnddeelliivveerryytthheerreeiissaabbrriiddggeebbeettwweeeennppiinn11,,
ppiinn22,,ppiinn33aannddppiinn44oonntthheeTTCC775500mmaattiinnggpplluugg.
When operations voltage is supplied and
a successfully completed TC 750 self-test the
turbopump and any connected backing pump
will be started.
Venting Release (Optional)
Automatic venting
(works setting on the remote plug pin 2 high):
CAUTION
If no signal is present the pump runs up to its final rotation
speed.
AAvvaaiillaabblleeaassaacccceessssoorriieess((pplleeaasseesseeeeSSeeccttiioonn1111..))::
– A PWM adapter box for rotation speed setting operations
for the turbopump.
– A Brake Unit TBU 600 which enables, in rotation speed
setting mode, faster braking on turbopumps with TC 750.
Switching Outputs
Switching outputs 1 and 2 can be loaded with a maximum
24 V / 50 mA per output. The following functions are assigned
to the switching outputs:
Switching output 1: Active high when the rotation speed
switchpoint is attained. The switchpoint
for the turbopump is set at 80% of the
nominal rotation speed. It can be used,
for example, for a message ”pump
ready to operate”.
Switching output 2: Active low with a malfunction -
collective malfunction message
The connection of a relay is made between pin 10 (mass) and
the respective switching output pin 8 or pin 9 (see Section
3.13. Connections Diagram).
T
0
U20%*f 100%*fend
max. +33V
min. +13V
max. +7V
min. -33V
TT
PWM
*25% *75%
T
= 10ms (1±20%)
f=100Hz (1±20%)
end
PWM
PWM
PWM
1) When mains power is restored the venting process is interrupted.
Venting OFF (remote plug pin 2 low):
Venting does not take place.
Other venting modes:
Other venting modes can be selected via the DCU.
Motor, Turbopump
When the pumping station is switched on and once the self
test has been successfully completed (duration approximate-
ly 30 seconds), the turbopump is set in operation.
During operations, the turbopump can be switched on and off
while the pumping station is switched on.
Thereby the turbopump will not be vented.
Heating/Reset
Heating (optional)
Once the rotation speed switchpoint is attained the heating
unit is switched on; when the rotation speed switchpoint is
fallen below the heating unit is switched off.
Reset
The heating input has two functions (please see Section 3.11.,
point 5 ”Reset”).
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ffrreeqquueennccyytthheeppuummppiinnggssttaattiioonn
< 330 Hz venting valve opens venting valve opens and
(correspond to 50% for 3600 s (1 h) closes on attainment
of the final rotation (works setting) of approximately 15% of
speed) the final rotation speed

20
5. Monitoring Operations
5.1. Operations Display Via LED
Certain operations modes of the turbopump and the TC 750
can be ascertained via the two integrated LEDs located on
the front panel of the TC 750.
The following operations modes are displayed:
5.2. Turbopump Temperature Monitoring
Where impermissible motor temperatures are involved or the
temperature of the casing is too high, the motor current is
reduced. This can lead to dipping below the set rotation
speed switchpoint and results in the turbomolecular pump
being switched off.
LED on the TC 750 glows red: Collective malfunction.
LED Cause
green red
glows – Power unit OK
– Function ”pumping station ON”
carried out
flashes – Power unit OK
(1/12 s active) – Pumping station OFF
blinks green – Mains power supply failure
(1/2 s active)
glows – Collective malfunction
(for example, start-up time
error, excess temperature,
turbopump or TC 750, lubricant
deficiency)
– Switching output 2 active (low)
blinks – Warning
(1/2 s active) (for example, earth leakage
fault in the voltage supply,
mains power supply failure)
Differentiated malfunction and warning signals
are only possible with the use of the DCU or
HPU.
☞
PLEASE NOTE