Pfeiffer Vacuum ES 25S User manual

OPERATING INSTRUCTIONS
EN
Translation of the Original
ES 25S
External Silencer

Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
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Table of contents
1 About this manual 4
1.1 Validity 4
1.1.1 Applicable documents 4
1.1.2 Products concerned 4
1.2 Target group 4
1.3 Conventions 4
1.3.1 Pictographs 4
1.3.2 Instructions in the text 4
1.3.3 Abbreviations 5
1.3.4 Labels 5
2 Safety 6
2.1 General safety information 6
2.2 Precautions 6
2.3 Safety instructions 7
2.4 Intended use 7
2.5 Foreseeable misuse 7
3 Product description 8
3.1 Product identification 8
3.1.1 Scope of delivery 8
3.1.2 Function 8
3.2 Storage 8
4 Installation 9
4.1 Assembly direction 9
4.2 Installation on the pump 10
5 Use 12
6 Maintenance 13
6.1 Maintenance safety instructions 13
6.2 Disassembly 13
6.3 Cleaning 13
6.4 Disposal 14
6.5 Reassembly 14
7 Spare parts 15
8 Technical data and dimensions 16
8.1 Technical characteristics 16
8.2 Dimensions 16
Table of contents
3/18

1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-
scribe the functions of the named product and provide the most important information for the safe use of
the device. The description is written in accordance with the valid directives. The information in this op-
erating instructions refers to the product's current development status. The document shall remain valid
provided that the customer does not make any changes to the product.
1.1.1 Applicable documents
Operating instructions Part Number
Dry compact multi-stage Roots pump ACP 15 123884 1)
Dry compact multi-stage Roots pump ACP 15 V2 128853 1)
Dry compact multi-stage Roots pump ACP 28-40 112369 1)
Dry compact multi-stage Roots pump ACP 28-40 V2 128852 1)
1) also available at www.pfeiffer-vacuum.com
1.1.2 Products concerned
This document applies to products with the following part numbers:
Part Number Description
109873 ES 25S External silencer
1.2 Target group
This user manual is intended for all persons in charge of transport, installation, commissioning/decom-
missioning, use, maintenance or storage of the product.
The work described in this document must only be carried out by persons with suitable technical training
(specialized staff) or persons who have undergone Pfeiffer Vacuum training.
1.3 Conventions
1.3.1 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.3.2 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
About this manual
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Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.3 Abbreviations
EMC Electromagnetic Compatibility
ES External Silencer
Exh. Exhaust
IN Inlet flange
1.3.4 Labels
P/N :
Qty : 1 PM
Manufactured : 21-Aug-2022
SILENCIEUX EXTER ES
109873
109873DFSEF
Product signage plate (example)
FLOW
PUMP PORT
RESPECT PARTS ASSEMBLING ORDER (CARTRIDGE - VALVE - SPRING)
This label indicates:
● the ES direction of assembly.
● that the assembly order of parts should be respected.
FLOW
PUMP PORT
RESPECT PARTS ASSEMBLING ORDER (CARTRIDGE - VALVE - SPRING)
Fig. 1: Location of safety labels
About this manual
5/18

2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Precautions
Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product
The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
●Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
Installation and maintenance procedures described in this manual must be performed by qualified tech-
nicians trained in the relevant health and safety aspects (EMC, electrical safety, chemical pollution). Our
service centers can provide the necessary training.
►Do not expose any part of the human body to the vacuum.
►Comply with all safety and risk prevention instructions in accordance with local safety standards.
►Regularly check compliance with all precautionary measures.
►The protections provided by the pump are not guaranteed if the pump is used in a manner not
specified in this manual.
Safety
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►Do not remove the blanking plates sealing the inlet and exhaust ports if the product is not con-
nected to the pumping line.
►Do not operate the product unless the inlet and exhaust are connected to a vacuum and exhaust
pumping line.
2.3 Safety instructions
All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-
ble, all life cycle phases of the product were taken into account.
DANGER
Risk to the health in the event of contact with toxic substances
During pump disconnection, operator could be in contact with process residues on the exhaust that
could cause severe injury or death.
►Take the appropriate safety measures to prevent injury. Consult the department manager for in-
structions and safety information.
►Wear gloves, goggles, a respirator or other appropriate safety equipment.
►Ventilate well the premises or work under an extract hood.
►Do not dispose of residues in the usual network and, if necessary, seek a competent agency for
their destruction.
►Do not discard the used filter element in the usual network, seek a competent agency for its de-
struction.
►Set up the blanking plates at the inlet and exhaust of the pump (supplied with the product).
2.4 Intended use
The ES is used only to reduce the noise from the exhaust of multi-stage Roots pumps.
●The ES is only used with air-cooled multi-stage Roots pumps (ACP), with which it is compatible.
●The ES is installed at the exhaust of multi-stage Roots pumps, standard ACP type, SD, G models.
2.5 Foreseeable misuse
Misuse of the product will render the warranty and any claims void. Any use, whether intended or not,
that diverges from the uses already mentioned will be treated as non-compliant; this includes but is not
limited to:
●the connection of ACP multi-stage Roots pumps, CV model,
●connection of the pumps and devices for which it is not intended,
●connection of devices that are not electrically insulated,
●accessories or spare parts that are not mentioned in this manual,
●the use of an ES on the pumping applications of corrosive products,
●pumping applications for flammable products such as oxygen or silane,
●microelectronic applications, LPCVD, LTO because of the incompatibility of the filtration element,
●drying applications, lyophilization, pumping of condensable substances, impregnation using poly-
merizable resins, debubbling of monomers
Safety
7/18

3 Product description
3.1 Product identification
To correctly identify the product when communicating with our service center, always have the informa-
tion from the product rating plate available.
3.1.1 Scope of delivery
Delivered with Part Number
1 DN 25 ISO-KF centering ring -
1 DN 25 ISO-KF nitrile O-ring -
1 DN 25 ISO-KF quick-connect clamp -
1 DN 16 ISO-KF centering ring -
1 DN 25 ISO-KF nitrile O-ring -
1 DN 16 ISO-KF quick-connect clamp -
1 elbow fitting 104113
1 DN 25 ISO-KF / DN 16 ISO-KF straight reducer -
1 operating instruction manual -
3.1.2 Function
The ES, fitted to the exhaust of an ACP pump, significantly reduces the sound level when the pump
operates at high pressures on clean applications. Noise reduction reaches -12 dBA when the pump is at
atmospheric pressure.
The ES includes a safety valve calibrated at 500 relative hPa which prevents any overpressure in the
pump tank when the filtration element is saturated.
3.2 Storage
The filtration element inserted in the ES can absorb humidity.
If the new product is to be stored:
►Store the product in its original packaging in a clean, dry, and unpolluted environment.
►Store the product within the storage temperature range (+5 – +65 °C).
►Make sure the filtration element is not crushed during storage.
Before using the ES, ensure that the valve is not stuck to the filtration element.
If the product has been unpacked, used, or stored for a long duration (> 1 year):
►Proceed with replacing the filtration element.
Product description
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4 Installation
WARNING
Outlet of toxic substances through the exhaust
Risk of poisoning by the gases or vapors released which, depending on the application, can be harm-
ful to health and/or pollute the environment.
►Comply with the regulations for handling toxic substances.
►Use only filtration devices authorized by public authorities to separate these substances.
General instructions for installing the pump in the pumping line in accordance with industry
best practices
1. Carry out installation on a stopped and switched off pump.
2. Use the connecting accessories supplied with the ES.
3. Only use accessories on the pumping line, for the inlet and exhaust lines, with materials and seal-
ing properties that are compatible with the gases being pumped. Refer to the connection accesso-
ries catalog available at the Pfeiffer-Vacuum website
4. When assembling the pumping line, include accessories for isolating the pump from the pumping
line and making maintenance easier to carry out (pump inlet and exhaust isolation valves, purge
valves, etc.).
5. Remove the blanking plates used to seal the inlet and exhaust ports.
4.1 Assembly direction
Install the ES at the pump exhaust, following the assembly direction (see label).
►Use the ES with the separator fitted with a DN 25 ISO-KF square end for the ACP 15 model.
If the ES is connected to a chimney or to an exhaust pipe, care must be taken that the pressure drop for
this equipment does not exceed 500 hPa.
Exh.
ACP15
Exh.
ACP28 / ACP 40
Fig. 2: Orientation of the external silencer
Installation
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4.2 Installation on the pump
ACP 15
5
2
2
1
1
3
4
0
1
ACP 28 / ACP 40
5
Fig. 3: Installing the ES 25S on the ACP 15 / ACP 28 / ACP 40 pumps
1 Pump inlet connection
2 Silencer exhaust
3 Separator fitted with a DN 25 ISO-KF square end (for adaptation on the ACP 15 model)
4 DN 25 ISO-KF / DN 16 ISO-KF straight reducer
5 Pump exhaust
Square end assembly procedure for installation on the ACP 15 pump
For assembly on the ACP 15, a square end must be used on the ES 25S and the DN 25 ISO-KF / DN
16 ISO-KF reducer.
1. Unscrew the 4 nuts of the 4 HSHC screws while pressing manually at each end of the ES 25S
(this is to avoid the sudden relaxation of the spring), and remove the 4 HSHC screws (see chapter
"Spare parts").
2. Remove the lower right end (side opposite the spring).
3. Replace the lower right end with the square end.
4. Assemble everything using the HSHC screws, washers, nuts, and apply a tightening torque of 2
N.m.
5. Assemble the DN 25 ISO-KF / DN 16 ISO-KF reducer, using the connection accessories supplied
with the ES 25S (see chapter "Scope of delivery").
6. Ensure the assembly is properly sealed.
Installation
10/18

1-2-3
6-7-8
4
5
Fig. 4: Installing the ES 25S square end on the ACP 15 pumps
1 DN 16 ISO-KF Centering ring
2 DN 16 ISO-KF nitrile O-ring
3 DN 16 ISO-KF quick-connect clamp
4 DN 25 ISO-KF / DN 16 ISO-KF straight reducer
5 square end
6 DN 25 ISO-KF Centering ring
7 DN 25 ISO-KF nitrile O-ring
8 DN 25 ISO-KF quick-connect clamp
Installation
11/18

5 Use
Do not reuse an ES 25S that has been stored for a long period of time (> 1 year).
Perform maintenance and replace the filtration element before use.
NOTICE
Risk of deterioration due to overpressure at exhaust
At the pump exhaust, the drainage circuit must be such that the resulting overpressure in the tank is
as low as possible. An overpressure of 500 hPa is a recommended maximum for correct operation of
the pump. A slight depression in the tank (100 to 200 hPa) at the exhaust will prevent the build-up of
gases, and will limit pollution and corrosion of the pump.
When the ES is installed at the pump exhaust, periodically check that:
►the exhaust is not clogged and does not interfere with the operation of the ES.
►the valve operates so as not to create overpressure in the tank.
WARNING
Outlet of toxic substances through the exhaust
Risk of poisoning by the gases or vapors released which, depending on the application, can be harm-
ful to health and/or pollute the environment.
►Comply with the regulations for handling toxic substances.
►Use only filtration devices authorized by public authorities to separate these substances.
Commissioning
►Start the pump.
Monitoring the filter’s operation
An increase in the sound level over time may mean that the filtration element is saturated.
►Replace the filtration element when it is saturated.
Decommissioning
1. Stop the pump.
2. Bring the pump back to atmospheric pressure and let it cool.
3. Ensure that the exhaust pipework is not under pressure.
Use
12/18

6 Maintenance
6.1 Maintenance safety instructions
DANGER
Risk of poisoning in case of contact with toxic substances and by-products generated by the
process
The vacuum pump, pumping line components and operating fluids will potentially be contaminated
with toxic, corrosive, reactive and/or radioactive materials related to the process. Any contact with the
contaminated parts or by-products generated by the process may be injurious to health and could
cause poisoning.
►Appropriate protective equipments must be worn when disconnecting the pump for maintenance,
filling it with operating fluid, or draining it.
►Ventilate the area thoroughly or carry out the maintenance under an extraction hood.
►Do not eliminate the by-products/residue via as common waste; have them destroyed by a quali-
fied company where necessary.
►Close off all the ports with airtight blanking plates (the product comes with blanking plates
that are also available for sale as accessories).
DANGER
Risk to health posed by residual traces of process gases inside the pump
Process gases are toxic and hazardous to health. They can cause poisoning and be fatal. Before dis-
connecting the pump, any remaining traces of process gases must be eliminated.
►The equipment (pumping installation) must be purged with a stream of nitrogen for 30 mi-
nutes at the same pressure and flow as that used for the process itself.
6.2 Disassembly
Filtration element replacement
The ES is disconnected from the pump.
Proceed with disassembly of the ES on a bench.
1. Unscrew the 4 nuts of the 4 HSHC screws while pressing manually at each end of the ES 25S
(this is to avoid the sudden relaxation of the spring), and remove the 4 HSHC screws (see chapter
"Spare parts").
–Remove the reducer if it is installed.
2. Remove the upper end and its O-ring.
3. Remove the spring and the valve fitted with a flat seal.
4. Remove the filtration element and the flat seal.
5. Remove the lower body or the square end (if disassembly on ACP 15), then remove its O-ring.
6.3 Cleaning
Never clean a filtration element!
Always replace the filtration element with a new one.
►Always replace the seals with new seals.
Proceed as follows:
Pump part numbers V6SHxxxxxx and V8SHxxxxxx
Pumps delivered in mineral oil
1. Clean the parts with a mineral solvent in compliance with current legislation; for example, with
AXAREL 1), CARECLEAN 2), PREMACLEAN 3), NAPHTESOL 4).
2. Clean when cold or hot (45°C max) by immersion or using a lint-free cloth.
3. Dry in hard vacuum in a ventilated oven.
Maintenance
13/18

Pump part numbers V6xxxxxxxx and V8xxxxxxxx
Pumps delivered in synthetic oil (perfluorinated)
1. Clean the parts with a solvent of type GALDEN S 90 5)
2. Clean when cold by immersion or using a lint-free cloth.
3. Dry the parts in the open air or with compressed air.
6.4 Disposal
Environmental protection
The product and its components must be disposed of in accordance with the applica-
ble regulations relating to environmental protection and human health, with a view to
reducing natural resource wastage and preventing pollution.
Our products contain different materials which must be recycled. Take special precautions for:
●fluoroelastomers which may breakdown if they are exposed to high temperatures
●components in contact with the products resulting from the processes which may have been con-
taminated
●a used filtration element should not be discarded of in the usual manner: call a qualified organiza-
tion for disposal
6.5 Reassembly
Reassembling the filtration element
The ES is disconnected from the pump.
Proceed with reassembly of the ES on a bench.
1. Install the flat seal in the bottom of the body.
2. Position the filtration element on its centering device resting on the flat seal at the bottom of the
body.
3. Fit the new O-rings on each of the lower and upper ends.
4. Fit a flat seal on the valve.
5. Install the assembly on the filtration element: the side with the flat seal resting on the filtration ele-
ment.
6. Install the spring on the valve: see direction of assembly on the label (chapter "Assembly").
7. Position the now-fitted body on the lower end or the square end if reassembly on ACP 15.
8. Mount the top end on the spring and assemble using the screws, washers, and nuts.
9. Tighten crosswise and apply a tightening torque of 2 N.m.
10. Connect the ES to the pump exhaust using the accessories supplied (chapter "Mounting").
1) Registered Trademark DUPONT DE NEMOURS
2) Registered Trademark CASTROL
3) Registered Trademark DOW
4) Registered Trademark NIPPON OIL CORPORATION
5) Registered Trademark MONTEDISON
Maintenance
14/18

7 Spare parts
12
11
10
13
14
15
1
3 / 6
789
B
A5
2 / 3
4
Fig. 5: ES 25S spare parts
A DN 16 ISO-KF connection B DN 25 ISO-KF connection
Item Description Material Quantity Part Number
1 and 10 Flat seal Elastomer NBR 1) 2052117 2)
2 HSHC screw Steel 4 -
3 Washer Steel 8 -
4 Filtration element Glass microfibers + epoxy resin 1 109797 2)
5 and 12 O-ring Elastomer NBR 1) 2111197 2)
6 Nut Steel 4 -
7 and 15 Straight end Polyamide 1 -
8 Square end Polyamide 1 -
9 Straight reducer Steel 1 -
11 Body Polyamide 1 -
13 Check valve Polyamide 1 -
14 Spring Stainless steel 1 -
1) According to standard ISO 2230: Elastomer-based products - Storage guidelines
2) Parts to be replaced during each maintenance
Spare parts
15/18

8 Technical data and dimensions
8.1 Technical characteristics
ES 25S
Weight 0.22 kg
Connection DN 16 ISO-KF / DN 25 ISO-KF
Max Leak Rate 5 · 10-3 hPa l/s
Filtration grade Filtration element from the manufacturer.
Filtration element capture characteristics: 99.99% of particles > 25
microns in diameter.
Maximum operating pressure 1500 hPa
Maximum flow through ES 25S 5900 hPa l/s
8.2 Dimensions
Dimensions in mm
DN25
ISO-KF
DN25
ISO-KF
DN25
ISO-KF
49.5
Ø 55
5
.
811
741
62 x 62
FLOW
PUMP PORT
RESPECT PARTS ASSEMBLING ORDER (CARTRIDGE - VALVE - SPRING)
Fig. 6: Dimensions of the ES 25S
Technical data and dimensions
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Technical data and dimensions
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*109922* Ed 08 - Date 2023/02 - P/N:109922OEN