Pfeiffer Vacuum ATH 1603 M User manual

OPERATING INSTRUCTIONS
OPERATING INSTRUCTIONS
EN
EN
Translation of the original instructions
Translation of the original instructions
ATH 1603 M -ATH 2303 M
ATH 1603 M -ATH 2303 M
Turbomolecular pumps
Turbomolecular pumps

GB 03857 - Edition 05 - 06/2017
1/2
ATH 1603 M - ATH 2303 M
Turbomolecular pumps
Dear Customer,
You have just purchased an
hybrid turbo pump.
We would like to thank you
and are proud to count you
as one of our customers.
This product has benefited
from Pfeiffer Vacuum SAS
many years of experience
in the field of turbo pump
design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation and
start-up section.
This operating instruction manual includes only the instructions to connect
the pump to the equipment. Refer to the controller operating instructions to
power and use the pump (chapter B, C and D).
This pumping component is designed to generate vacuum by pumping on
gases, but no liquids neither solids. It is dedicated for running in industrial
environments.
The integrator of this component must provide all operator safety measures
mainly against hot surfaces.
This pumping component must not operate in an area with risk of explosion.
Consult us to study a solution.
APPLICATIONS:
SEMICONDUCTOR APPLICATIONS:
Plasma etching, Ion implantation, Sputtering, Plasma deposition.
OTHERS APPLICATIONS:
Electron microscopes, Surface analysis, Research and development,
High energy physics, Space simulation, Accelerators.
OTHERS INDUSTRIES:
Glass-coating, flat panel display, leds, deposition coating,
hard disk manufacturing.
ADVANTAGES:
High throughput - Quiet and clean vacuum - Corrosion proof- High
MTBF - Minimum size, volume and weight - Smart and - Compact
electronic controller - Reliability - Maintenance free - Battery free - Easy
integration.
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

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ATH 1603 M - ATH 2303 M
Turbomolecular pumps
GB 03857 - Edition 05 - 06/2017
Copyright/Intellectual property:
The use of Pfeiffer Vacuum SAS are subject to
copyright and intellectual property rights in force in
any jurisdiction.
All rights reserved, including copying this
document in whole or any part without prior written
authorization from Pfeiffer Vaccum SAS.
Specifications and information are subject to change
without notice by the manufacturer.
This product complies with the requirements of European Directives, listed
in the Declaration of Conformity contained in sheet G100 of the controller
operating instructions.
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

GB 03858 - Edition 05 - 06/2017
1/2
MANUAL REFERENCE: 115101
EDITION: 04 - June 2017 General contents
ATH 1603 M - ATH 2303 M
Operating instructions
Translated from original version
Chapter A INTRODUCTION
A 150 - Introduction to the ATH 1603 M - ATH 2303 M
A 200 - Control loop of the pump
A 210 - The pump operating principle
A 400 - Pump technical characteristics
A 510 - The accessories of the pump
A 515 - Pump accessory dimensions
Chapter B START-UP
B 100 - Safety instructions for installation
B 201 - Unpacking and storage of the pump
B 300 - Pump connections to an installation
B 310 - Inlet and exhaust connections
B 330 - Nitrogen purge and inlet air valve device connections
B 340 - Water cooling connection
B 401 - Typical electrical wiring diagram
Chapter C OPERATION
C 100 - Safety instructions for product use
Chapter D MAINTENANCE
D 100 - Safety instructions for product removal
D 150 - Maintenance frequency
Chapter E MAINTENANCE INSTRUCTIONS
E 100 - Shipping procedure for contaminated pump
Chapter F MAINTENANCE COMPONENTS
F 000 - Spare parts - Instructions of use
F100 - First level maintenance parts
Chapter G APPENDIX
G 200 - Service
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against unsafe
practices.
Indicates an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

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General contents
ATH 1603 M - ATH 2303 M
Operating instructions
GB 03858 - Edition 05 - 06/2017
MANUAL REFERENCE:115101
EDITION: 04 - June 2017
Translated from original version
The performance and operational safety of this product are guaranteed pro-
vided it is used normally in the operating conditions defined in this manual.
It is the customer’s task to:
- train operators to use the product if they do not speak the language the
manual is written in,
- ensure operators know the safe practices to apply when using the product.
Before switching on the product, study the Operating instructions and make
sure you follow the safety instructions it gives. You can recognise these by
the ‘Caution’, ‘Warning’ and ‘Danger’ symbols.
Good practice tips and manufacturer’s recommendations are in a grey box.
Symbols, labels Description
Warning : hot surface
Warning : hazardous voltage
Caution : risk of danger. Refer to the operating
instructions before use
ON
OFF
Do not touch when the pump is running
Use of glove is recommended
Moving parts present
Heavy object
Electrical connector locking
Purge Purge port
Pump exhaust Exhaust of the pump
Water Water cooling circuit connection
Water max Pr.7 bar/101 psi Max. cooling water pressure
Direction of rotation of the pump
LOCK
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

GB 03859 - Edition 03 - 06/2017
1/1
Introduction
Operating instructions ATH 1603 M - ATH 2303 M
Detailed contents
A
A 150 Introduction to the ATH 1603 M - ATH 2303 M
A 200 Control loop of the pump
- 5 actives axis
- Unbalanced force rejection control
A 210 The pump operating principle
- Pumping principle
- The hybrid-turbo pump in an installation
- The back-up ball bearing
- Variation of the pump rotational speed
A 400 Pump technical characteristics
A 510 The accessories of the pump
A 515 Accessory dimensions
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

GB 03860 - Edition 04 - 06/2017
1/1
A 150
Introduction to
ATH 1603 M - ATH 2303 M pumps
Controller The ATH 1603 M and ATH 2603 M pumps work with OBC controller or
with the MAGPOWER controller.
(refer to the operating instructions corresponding).
Five active axes
Rotor position control in 5 directions.
Unbalanced Force Rejection Control
Lowest possible levels of noise and vibration.
Automatic adjustment to any imbalance of the rotor, from very low
speed.
Maintenance free
Inert gas purge
Protects from corrosion the magnetic spindle.
Battery free
In case of a power failure, the pump motor acts like a generator to
transform the rotor energy into electrical power to supply the controller.
A magnetically
levitated hybrid
turbomolecular pump
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

5 active axis The mobile assembly formed by the turbo rotor and the shaft
is known as the rotor. The rotor is driven by the motor and held
in suspension by magnetic fields generated by electromagnets
housed in an active bearing.
The mobile rotor has 5 axes of freedom monitored by 5 active
magnetic bearings.
Z
X
X
Y
Y
Movements in relation to these axes are monitored by position
sensors. According to the position data recorded, the controller
corrects differences to bring the rotor back to its optimum position,
by varying the current in electromagnets
3 controlled translations (X, Y, Z)
2 controlled tiltings (X, Y)
+
Rotor
Stator
BearingElectronics
Power
amplifiers
Position of
Reference
Position return
Electro-
magnet
+
Correction
+
Position
sensor
A 200
Control loop of the pump
1/2
GB 02721 - Edition 04 - Aug 07
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

Unbalanced force
rejection control The unbalanced force rejection control is an electronic function,
that monitors the rotor position, allowing it to rotate in its own axis
of inertia.
Changes in the rotor balance, due to deposit built-up during the
life time of the pump, are automatically compensated by the
unbalanced force rejection control.
It ensures the lowest possible levels of noise and vibration.
Stator geometric axis
Rotor geometric axis
Rotor inertia axis
A 200
Control loop of the pump
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GB 02721 - Edition 04 - Aug 07
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

GB0 4428 - Edition 03 - 10/2012
1/2
A 210
The pump operating principle
Pumping principle The ATHM pump integrates the advantages of a multi-staged
turbomolecular pump with a spiral helix molecular drag section.
The turbomolecular section provides high pumping speeds and
high ultimate vacuum. The molecular drag section provides a high
compression ratio and extends forevacuum tolerance.
* The gas purge provides an excellent protection of the pump bearings
for corrosive applications and ensures the rotor cooling.
Inlet
Dry back-up
bearings
Exhaust
Cooling
Gas
purge*
Magnetic
levitated
bearings
Motor
Molecular
drag
Stator
Rotor
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A 210
The pump operating principle
GB 04428 - Edition 03 - 10/2012
Chamber
to be
pumped
Secondary
pumping
INLET
PRESSURE
ATMOSPHERIC
PRESSURE
Primary
pumping
Primary vacuum
Secondary vacuum
At the pump exhaust, the gases are evacuated to atmosphere by a
primary pump.
The ATHM compression ratio is set by the design. The pumping
performances depend of the primary pump and of the installation.
The back-up ball
bearings They are dry-lubricated ceramic ball bearings.
They are never used in normal operation, since the rotor is not in
contact with the ball bearings.
The back-up ball bearings are only used to protect the pump in
accidental air in-rushes, accidental shocks or power failure.
No maintenance By design, the pump doesn’t include parts liable to wear and doesn’t
need preventive maintenance. However, the back-up ball bearings
used in case of accidental shut-downs have to be changed when the
controller indicates it: the percentage of landing time to be deducted
depends on the number of incidents. The maximum life time of the rotor
is described in D 150.
Battery free In case of a power failure, the motor acts like a generator, supplying
enough power for the magnetic bearings.
When the rotation speed is too low, the pump shuts down and lands on
the back-up ball bearings.
Variation of the pump
rotational speed The ATHM pump rotation speed can be selected and set between a
minimum speed and the maximum speed. This makes it possible to
optimize pumping characteristics according to each customer application
(for example, high pressure pumping).
A distinction is made between the following speeds:
- reduced speed (STANDBY speed) which can be set between the low
speed value and the nominal speed.
- nominal speed preselected at factory.
The hybrid-
turbopump in an
installation
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

GB 03861 - Edition 05 - 06/2017
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A 400
Pump technical characteristics
Technical data Units ATH 1603 M ATH 2303 M
Inlet flange ISO-F DN 200 DN 250 DN 200 DN 250
Exhaust flange ISO-KF DN 40
Purge flange ISO-KF DN 16
Pumping speed *
N2 l/s 1360 1400 1550 2150
Ar l/s 1280 1350 1450 2000
He l/s 940 970 1650 1800
H2 l/s 540 540 1100 1100
Compression ratio
N2 5·107> 1·108
Ar 1.7·108> 1·108
He 4·103> 3·104
H2 5·102> 1·103
Maximum flow (3)
N2 sccm 4000 4000
Ar sccm 1200 1500
He sccm > 4000 > 4000
H2 sccm > 4000 > 4000
Maximum pressure at inlet (3)
N2 hPa 0.6 0.25
Ar hPa 0.026 0.025
He hPa > 0.6 -
H2 hPa > 0.6 -
Maximum pressure at exhaust (2)
N2 hPa 1.7 2.9
Ar hPa 2.5 3.5
He hPa 1.2 2
H2 hPa 0.3 0.75
Leak rate hPa l/s < 5·10-8
Ultimate pressure (1) hPa 6·10-9
Nominal rotation speed rpm (Hz) 39 000 (650) 31 000 (516)
Stand-by speed rpm (Hz) 15 000 (250) to nominal speed
Sound level dB (A) < 48 < 47
Maximum heating temperature for degassing °C 120
Recommended purge flow rate hPa l/s 0.845 mini
Vibration level (at nominal speed) μm < 0.01
Max. apparent start up power VA 1500 2100
The performances of the pumps
* Without inlet screen
(1) With ISO-F flange (better with CFF flange). Contact Pfeiffer Vacuum.
(2) With ratio inlet pressure/exhaust pressure >100, max. throughput reduced.
(3) With an exhaust pressure < 0.4 hPa depends on external conditions (temperature, water flow rate, ambient temperature). For other
conditions, contact Pfeiffer Vacuum.
(4) Reduced maximum flow rate, ultimate pressure at exhaust without loss of flow rate speed. Depends on environmental conditions.
(5) Over 25 °C. modify the operating conditions to reduce the nominal power. Contact Pfeiffer Vacuum.
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

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A 400
Pump technical characteristics
GB 03861 - Edition 05 - 06/2017
Technical date Units ATH 1603 M ATH 2303 M
Start-up time (8) mn < 6 < 8
Start-up power (8) watt 850 < 1200
Power consumed at ultimate pressure watt < 200 < 200
Power at minimum Stand-by speed watt 100 100
Supply voltage VAC 200-240V - 50/60 HZ
Maximum current leakage (7) mA < 12
Pump protection index IP 42
Cooling water flow rate l/h > 60
Maximum pressure of cooling water hPa 7·103
Mounting orientation all
Cooling water temperature (5) °C 15 < T < 40
Control (option)
Magpower yes
Profibus yes
OBCV4
autres yes
Weight (without controller) kg (lb) 34 (75.5) 60 (132.3)
Recommended forepump
(Pfeiffer Vacuum) ADP / ADS
Environmental conditions:
Use Indoor use
Ambient operating temperature °C 5 < T < 45
Installation altitude m until 2000
Overvoltage protection Category II
Pollution degree rate 2
Relative humidity max. 80% at T 31°C. up to max. 50% at T 40°C
Characteristics of the three-phase motor (maximum values)
Voltage between phases
Power frequency
Line current
Vrms
Hz
A
44
1300
7
40
1033
12
The performances of the pumps
(7) Value for the pump. All the current leakage may not pass through the earth wire. this depends on the way the pump is connected to
the earth via the equipment in which it is integrated.
(8) The value depends on controller type.
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

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GB 03861 - Edition 05 - 06/2017
A 400
Pump technical characteristics -
ATH 1603 M pump Pump only Pump+OBC
Inlet flange mm / (inch) E H I J K L T D d1 d2 N A° CG1 CG2 CG1 CG2 DN 250 ISO F 16
(0.63) 240.1
(9.46) 285.6
(11.25) 297.4
(11.72) 289.2
(11.4) 317.2
(12.5) 142
(5.59) 335
(13.2) 310
(12.21) 11
(0.43) 12 15 163
(8.42) 0202
(7.95) 15
(0.59)
DN 250 ISO-K 12
(0.47) 240.1
(9.46) 285.6
(11.25) 297.4
(11.72) 289.2
(11.4) 317.2
(12.5) 142
(5.59) 290
(11.42) ----
144
(5.67) 0183
(7.2) 15
(0.59)
DN 250 CF-F 26
(1.02) 240.1
(9.46) 258.60
(11.25) 297.4
(11.72) 289.2
(11.4) 317.2
(12.5) 142
(5.59) 304.8
(12) 284
(11.18) 8.5
(0.33) 4 7.5 139
(5.47) 0178
(7.0) 15
(0.59)
DN 200 ISO F 16
(0.63) 243.41
(9.58) 288.6
(11.37) 300.4
(11.84) 292.2
(11.51) 320.2
(12.62) 145
(5.71) 285
(11.23) 260
(10.24) 11
(0.43) 12 15 146
(5.75) 0185
(7.28) 15
(0.59)
DN 200 ISO-K 12
(0.47) 243.41
(9.58) 288.6
(11.37) 300.4
(11.84) 292.2
(11.51) 320.2
(12.62) 145
(5.71) 240
(9.45) ----
149
(5.86) 0188
(7.4) 15
(0.59)
DN 200 CF-F 20
(0.79) 250.4
(9.87) 295.9
(11.66) 307.7
(12.12) 299.5
(11.8) 327.5
(12.9) 152.3
(5.99) 256
(10.08) 231.9
(9.14) 8.5
(0.33) 24 7.5 154
(6.06) 0193
(7.6) 15
(0.59)
Purge
DN16 ISO-KF
5 holes M10 for handling equipment
electrical connector
ATH 1603 M without OBC
N holes
equidistant
Exhaust
center of gravity
1/4 NPT female water inlet/outlet
fixing hole to connect the pump to earth
SS integrated inlet screen
(5.51)
(4.82)
(1.36)
(8.54)
(9.45)
(10.08)
(1.36)
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

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GB 03861 - Edition 05 - 06/2017
Pump technical characteristics - A 400
ATH 1603 M pump Pump only Pump+OBC
Bride aspiration mm / (inch) E H I J K L T D d1 d2 N A° CG1 CG2 CG1 CG2 DN 250 ISO F 16
(0.63) 240.1
(9.46) 285.6
(11.25) 297.4
(11.72) 289.2
(11.4) 317.2
(12.5) 142
(5.59) 335
(13.2) 310
(12.21) 11
(0.43) 12 15 163
(8.42) 0202
(7.95) 15
(0.59)
DN 250 ISO-K 12
(0.47) 240.1
(9.46) 285.6
(11.25) 297.4
(11.72) 289.2
(11.4) 317.2
(12.5) 142
(5.59) 290
(11.42) ----
144
(5.67) 0183
(7.2) 15
(0.59)
DN 250 CF-F 26
(1.02) 240.1
(9.46) 258.60
(11.25) 297.4
(11.72) 289.2
(11.4) 317.2
(12.5) 142
(5.59) 304.8
(12) 284
(11.18) 8.5
(0.33) 4 7.5 139
(5.47) 0178
(7.0) 15
(0.59)
DN 200 ISO F 16
(0.63) 243.41
(9.58) 288.6
(11.37) 300.4
(11.84) 292.2
(11.51) 320.2
(12.62) 145
(5.71) 285
(11.23) 260
(10.24) 11
(0.43) 12 15 146
(5.75) 0185
(7.28) 15
(0.59)
DN 200 ISO-K 12
(0.47) 243.41
(9.58) 288.6
(11.37) 300.4
(11.84) 292.2
(11.51) 320.2
(12.62) 145
(5.71) 240
(9.45) ----
149
(5.86) 0188
(7.4) 15
(0.59)
DN 200 CF-F 20
(0.79) 250.4
(9.87) 295.9
(11.66) 307.7
(12.12) 299.5
(11.8) 327.5
(12.9) 152.3
(5.99) 256
(10.08) 231.9
(9.14) 8.5
(0.33) 24 7.5 154
(6.06) 0193
(7.6) 15
(0.59)
connectors according to choosen configuration
N holes
equidistant
Exhaust
female water inlet
Air purge valve with 50 sccm flow reducer
see view A
center of gravity
OBC V4 front panel
switch on/off
1/4 NPT female water outlet
fixing hole to connect the pump to earth
lifting eye bolt can be removed
SS integrated inlet screen
electrical power supply
F
view according to F
ATH 1603 M with OBC
(8.54)
(10.07)
(4.76)(4.76)
(9.07) (6.89)
(5.51)
(4.82)
(5.4)
(0.59)
(12.04)
(7.6)
(5.35)
(6.99)
(1.95)
(7.87) (5.81) (3.86)
(3.04) (2.26)
(1.93)
GB 00728 - Edition 11 - 02/2017
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

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GB 03861 - Edition 05 - 06/2017
A 400
Pump technical characteristics -
ATH 2303M without OBC
exhaust
DN16 ISO-KF purge
electrical powersupply
inlet flange with SS inlet screen
12 holes
equidistant
center of gravity
1/4 NPT female water inlet
(5.85)
(4.55)
(5.71)
(7.03)
(12.36)
(12.36)
(10.43)
(8.31)
(2.12)
(3.37)
(2.05) (0.7)
ATH 2303 M pump Pump only Pump+OBC
Inlet flange mm / (inch) E H D d1 d2 N A° CG CG2 CG CG1 DN 250 ISO F 16
(0.63) 268.6
(10.57) 335
(13.2) 310
(12.21) 11
(0.43) 12 15 162
(6.38) 0193
(7.6) 8
(0.31)
DN 250 CF-F 26
(1.02) 312.6
(12.3) 306
(12.04) 284
(11.18) 8.6
(034) 32 5.625 191
(7.52) 0222
(8.74) 8
(0.31)
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

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GB 03861 - Edition 05 - 06/2017
Pump technical characteristics - A 400
N holes
equidistant
Exhaust
DN16 ISO-KF purge
center of gravity
1/4 NPT female water outlet
ATH 2303M with OBC
inlet flange with SS inlet screen
1/4 NPT female water inlet
(5.85)
(10.43)
(12.36)
(6.65)
(5.4)
(7.03)
(1.95)
(7.68) (4.92)
(6.61)
(6.12)
(3.86)
(3.37)
(2.05)
(0.74)
ATH 2303 M pump Pump only Pump+OBC
Inlet flange mm / (inch) E H D d1 d2 N A° CG CG2 CG CG1 DN 250 ISO F 16
(0.63) 268.6
(10.57) 335
(13.2) 310
(12.21) 11
(0.43) 12 15 162
(6.38) 0193
(7.6) 8
(031)
DN 250 CF-F 26
(1.02) 312.6
(12.3) 306
(12.04) 284
(11.18) 8.6
(034) 32 5.625 191
(7.52) 0222
(8.74) 8
(0.31)
GB 00728 - Edition 11 - 02/2017
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

GB 01724 - Edition 12 - 06/2017
1/2
A 510
The accessories of the pumps
Inlet screen This screen protects the pump against solid particles. It is integrated into
the pump housing.
Purge flow reduction
device This device is used to reduce
the purge gas flow rate in some
processes.
Isolation valve
at pump inlet The secondary isolation valve is used to maintain the vacuum in the
chamber while the pump is reset to atmospheric pressure.
See the manufacturer’s catalog.
* For pumps equipped with purge valve
(see next page).
Bolt and washer kit
for pump installation
* With the presence of centering ring at inlet port
DN 200 P/N
Convexe filter (S.steel) + clip (mesh size 4.5 mm) 108872
Convexe filter kit (Alu) + clip (mesh size 4.5 mm) 109200
DN 250 P/N
Convexe filter (S.steel) + clip (mesh size 5 mm) 108762
Flow Reduction
device DN 16 * P/N
50 SCCM 066752
Pumps model Inlet size DN P/N for
ISO F Description P/N for CF-F Description
ATH 1603 M
ATH 1600 M
200 110675
110676S* 12 CHC M10x30 12 CHC M10x35 111664 24 CHC M8x65
250 110675
110676S* 12 CHC M10x30 12 CHC M10x35 111665 32 CHC M8x65
ATH 2303 M
ATH 2300 M
ATP 2300 M
ATH 2800 M
200 114510* 12 studs M10x35 - -
250 110034
110676S* 12 CHC M10x30 12 CHC M10x35 118690 32 Studs M8x35
ATH 3200 M 320 113189* 12 CHC M12x45 - -
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

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A 510
The accessories of the pumps
GB 01724 - Edition 12 - 06/2017
Purge valve * (50 sccm)
(driven by the customer
tool)
Air inlet valve *
Air inlet valve cables
and purge valve cables
(for pumps controlled by
Magpower)
The air inlet valve, powered by the
controller, is installed on the pump
exhaust port. It allows to reduce the
braking time of the pump to put it at
the atmospheric pressure. It is a NC
valve which is activated when the
pump nominal speed is below
10 000 rpm.
The gas purge provides an excellent
protection of the maglev bearings for
corrosive applications and ensures
the rotor cooling.
This valve must be isolated during an
air tightness test.
* Provide a power line compatible with extra low voltage and safety
standards (SELV), if powered by the customer’s tool
Dust filter
Water valve
Dimensions P/N
1 m A462403-010
3,5 m A462403-035
5 m A462403-050
10 m A462403-100
20 m A462403-200
Purge valve
50 sccm P/N
24 V DC 111921S
Air inlet valve P/N.
24 V DC 114280
P/N.
Water valve 108668
Dust filter
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M

GB 04430 - Edition 06 - 06/2017
1/2
A 515
Accessory dimensions
Purge valve 50 sccm
dimensions
mm (inch)
Pump connection
Can rotate
32 (1.26)
Connection 1/8” NPT female
Plug coil
65.6 (2.58)
83.3 (3.26)
30 (1.18)
22 (0.86)
Water valve
dimensions
mm (inch)
Cable water valve
Scale 13/20
Inlet and outlet
1/8 NPT female
(0.86)
(2.15)
(0.59)
54,7
15
15
(0,59)
38,7
(1.88)
(2.58)
(1.52)
65,6
50,3 (1.98)
29,7 (1.17)
47,7
18(0.7)
34,2 (1.34)
(0.28) 22
7
OUT
IN
Pfeiffer Vacuum SAS – Operating instructions - ATH 1603 M - 2303 M