Pfeiffer Vacuum TMH 071 P User manual

Turbomolecular Drag Pumps
With Electronic Drive Unit TC 600
PM 800 504 BE/I (0308)
TMH 071 P
TMU 071 P
Betriebsanleitung • Operating Instructions

2
Index
Page Page
1. Safety Instructions................................ 3
1.1. For Your Orientation......................................................... 3
1.2. Pictogram Definitions...................................................... 3
2. Understanding The Pumps
TMH 071 P/TMU 071 P ........................... 4
2.1. Main Features................................................................... 4
Proper Use ........................................................................ 4
Improper Use .................................................................... 4
2.2. Differences Between The Pump Types........................ 4
3. Installation ............................................. 5
3.1. Preparations For Installation.......................................... 5
3.2. Installing The Pump,
Connecting The High Vacuum Side .............................. 5
Fitting The Splinter Shield............................................... 6
3.3. Connecting The Fore-Vacuum Side .............................. 6
3.4. Connecting The Cooling Unit.......................................... 7
3.5. Connecting The Venting Valve....................................... 7
3.6. Connecting The Casing Heating Unit............................ 7
3.7. Connecting The Sealing Gas Valve............................... 7
3.8. Connecting The Electronic Drive Unit TC 600.............. 8
3.9. Installing The Power Unit ............................................... 8
3.10. Connecting The Remote Control Unit ........................... 9
3.11. Connecting The Serial Interface RS 485 ...................... 10
Connection ........................................................................ 10
Connecting The RS 485 ................................................... 10
3.12. Connections Diagram...................................................... 11
4. Operations.............................................. 12
4.1. Before Switching ON....................................................... 12
4.2. Switching ON.................................................................... 12
4.3. Switching OFF And Venting............................................ 13
4.4. Operations With The DCU 001/DCU 100 ....................... 13
4.5. Gas Type Dependent Operations ...................................13
4.6. Shutting Down For Longer Periods ............................... 14
4.7. Operations With The Remote Control Unit................... 14
Venting Release (Optional)............................................. 14
Motor, Turbopump ........................................................... 14
Pumping Station ............................................................... 15
Heating/Reset ................................................................... 15
Standby.............................................................................. 15
Rotation Speed Setting Mode Via
Input PWM ........................................................................ 15
Switching Outputs............................................................ 15
5. Monitoring Operations.......................... 16
5.1. Operations Display Via LED............................................ 16
5.2. Turbopump Temperature Management....................... 16
6. What To Do In Case Of
Breakdowns ? ....................................... 17
7. Maintenance.......................................... 18
7.1. Replacing The Lubricant Reservoir............................... 18
8. Service.................................................... 19
9. Technical Data ....................................... 20
9.1. Dimensions Diagram ....................................................... 21
10. Spare Parts............................................. 22
11. Accessories ........................................... 23
Declaration of Contamination..................... 24
Manufacturer’s Declaration (last page)
PPlleeaasseennoottee::Current operating instructions are available via
www.pfeiffer-vacuum.de under ”Infoservice”.

3
1. Safety Instructions
1.1. For Your Orientation
Instruction in the text
➡Working instruction: here, you have to do something.
Symbols used
The following symbols are used throughout in all illustrations.
High vacuum flange
Fore-vacuum flange
Venting connection
Cooling water connection
Air cooling
Electric connection
Sealing gas connection
Abbreviations used
DCU = Display and operating unit
TC = Electronic drive unit, turbopump
TPS = Power unit
Position numbers
The same pump and accessory parts have the same position
numbers in all illustrations.
1.2. Pictogram Definitions
Warning, danger of burns from touching hot
parts.
Warning, danger of personal injury.
Caution, danger of damage to the pump or to
the system.
Warning, danger of injury from rotating parts.
Please note, attention to particulary important
information
on the product, handling the product or to a
particular part of the documentation.
☞
PLEASE NOTE
WARNING
CAUTION
WARNING
WARNING
☞Read and follow all instructions in this manual.
☞Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can be caused by your system.
– Hazards which can be caused by the media being
pumped.
☞Avoid exposing any part of the body to vacuum.
☞Observe the safety and accident prevention regulations.
☞Regularly check that all accident prevention measures are
being complied with.
☞Do not operate the turbopump with open high vacuum
flange.
☞Do not carry out any unauthorised conversions or
alterations to the turbopump with TC 600.
☞When returning the turbopump observe the shipping
instructions.
☞Use at least 4 bracket screws to connect the high vacuum
flange (ISO-flange).
☞The turbopump must be anchored in accordance with the
installation instructions.
☞Do not disconnect the plug between the TC 600 and
accessory components during operations.
☞Disconnect the voltage supply to the TC 600 before
opening the turbopump.
☞When working on the turbopump, the high vacuum flange
should only be opened once the rotor is at rest.
☞When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.
☞If a heater is in use temperatures of up to 120 °C can be
present in the area of the high vacuum flange. Take care
to avoid burns !
☞During operations, temperatures of up to 65 °C can arise in
the lower part of the turbopump. Take care to avoid burns!
☞Keep leads and cables well away from hot
surfaces ( > 70 °C).
☞Operate the turbopump with TC 600 only in conjunction
with the relevant power unit (accessory).
☞The unit has been accredited protection class IP 30. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken. Protection class IP 54 is afforded by retro-fitting a
cover plate (Accessory) to the TC 600.
☞The mains connection must be subject to a safe
connection to the PE (protection class 1).
☞If the turbopump and the TC 600 are operated
independently of each other (only permissible with the
agreement of the manufacturer) the turbopump must be
connected to the PE.
☞The turbopump and the TC 600 must only be disconnected
from each other when the turbopump is completely at rest
and the TC 600 has been disconnected from the power
supply.
☞The cause of any operating voltage leakage to earth (red
LED flashes) must be eliminated to avoid the danger of an
electric shock.
Modifications reserved.

4
2.1. Main Features
Turbopumps TMH 071 P/TMU 071 P with the TC 600 form a
complete unit. Voltage is supplied by the power unit (see
”Accessories”).
On delivery, the pumps have been set up for
operations in remote mode. Remote plug 8d
should therefore be disconnected if operations
with the DCU are required.
☞
PLEASE NOTE
Cooling
– Enhanced convection cooling with cooling unit (accessory),
– air cooling (accessory) or
– water cooling (accessory).
Integrated protective measures against excess temperatures:
The Electronic Drive Unit TC 600 reduces
the rotor rotation speed.
Bearings
High vacuum side: Wear free permanent magnetic bearing.
Fore-vacuum side: Oil circulatory lubricated ball bearing
with ceramic balls.
Proper Use
– The Turbomolecular Pumps TMH 071 P/TMU 071 P may
only be used for the purpose of generating vacuum.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
Feature TMH 071 P TMU 071 P
High vacuum flange ISO-KF / ISO-K CF-F
High vacuum seal Elastomer Metal
Attainable final < 1 · 10-7 mbar < 5 · 10-10 mbar
pressure (without baking-out) (with baking-out)
2. Understanding The Pumps TMH 071 P/TMU 071 P
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3.
– Only Pfeiffer Vacuum power units may be used to operate
the
TC 600. The use of other power units requires the prior
agreement of the manufacturer and equalization with the
valid specification.
– The pumps may only be operated providing the ambient
conditions in compliance with Protection Type IP 30 are
observed.
Improper Use
The following is regarded, inter alia, as improper:
– The pumping of explosive or corrosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
Operations involving impermissibly high levels of gas
loads.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 9. ”Technical Data”).
– Operations without the use of cooling equipment.
– Operating the pump in environments which require a pro-
tection class superior to IP 30.
– The use of other power units or accessories which are not
named in this manual or which have not been agreed by
the manufacturer.
– The connection to power units with earthing of a direct
voltage pole.
Improper use will cause all claims for liability and guarantees
to be forfeited.
2.2. Differences Between The Pump Types
Abbreviations on the type of the pump
Suffix ””PP””: Purge gas connection for the prevention of the
ingress of aggressive gases into the motor and
bearing arena.
Turbomolecular Drag Pump TMH 071 P/TMU 071 P
1 High vacuum flange
2 Fore-vacuum flange
4 Venting Valve
6 Rubber feet
8 Electronic Drive Unit TC 600
8d Remote plug
1
8d
86
42

5
3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump.
The operator must ensure that the TC 600 is inte-
grated into an emergency safety circuit. The
supply voltage of the TC 600 must be interrupted
when releasing the emergency safety condition.
For special requirements please contact Pfeiffer
Vacuum.
– The maximum permissible rotor temperature of the pump is
80 °C. If the vacuum chamber or parts in the vacuum
chamber are heated must be fitted if necessary, suitable
shielding in the vacuum chamber before the turbopump
(constructional suggestions available on request).
– The temperature of the high vacuum flange may not exeed
120 °C.
– Only remove the blank flange from the high and fore-vacu-
um side immediately before connection.
– On Turbopumps TMH 071 P/TMU 071 P the lubricant reser-
voir is already fitted and filled.
– Where magnetic fields of > 3 mT are involved suitable
shielding must be provided (available on request).
– If the pump is baked out, the heating sleeve and the body
of the pump must be insulated to prevent burns from
accidental contact.
– In the event of a sudden standstill of the rotor, torques of
up to 330 Nm can arise and these must be taken up by the
turbopump and frame. Pumps must be anchored as
follows:
– ISO flange with 4 bracket screws, or
– CF flange with the complete set of M8 screws, or
– Underside of the pump with 4 screws M5,
screws quality 8.8.
– Either air or water cooling is necessary for operating the
pump. Where operations with convection cooling are
involved, a cooling unit must be used (please see
"Accessories")
WARNING
3.2. Installing The Pump,
Connecting The High Vacuum Side
The utmost cleanliness must be observed
when fitting all high vacuum parts. Unclean
components prolong the pumping time.
Using the splinter shield
The use of a splinter shield in the high vacuum flange
protects the turbopump against foreign bodies coming from
the vacuum chamber but does reduce the volume flow rate of
the pump by approximately 15%.
For fitting splinter shields please refer to “Fitting the splinter
shield”.
The high vacuum side can be flanged onto the the vacuum
chamber directly or via a Pfeiffer Vacuum bellows or a vibra-
tion compensator (see ”Accessories”).
Connecting via a bellows
If the high vacuum side is to be flanged via a bellows, the tur-
bopump must be secured for example via the holes on the
underside of the turbopump must be secured for example via
the holes on the underside of the pump. The fastening must
be able to withstand the torque referred to in Section 3.1.
Connecting via a Pfeiffer Vacuum vibration compensator
Where a Pfeiffer Vacuum vibration compensator is in use, a
freely
suspended turbopump can be flanged onto the vacuum
chamber. Additional fastening is unnecessary.
The maximum permissible temperature at the
vibration compensator is 100 °C.
CAUTION
☞
PLEASE NOTE

6
Fitting The Splinter Shield
Insert the splinter shield in the high vacuum flange in such a
way that the corrugation of the strainer points outwards.
DN 63
➡Bend the clamping lugs slightly outwards so that
subsequently the splinter shield is seated firmly in the high
vacuum flange (to avoid noise).
➡Insert the splinter shield in the high vacuum flange while
pressing the clamping lugs slightly inwards.
➡Press the outer ring of the splinter shield up to the limit
stop point in the high vacuum flange.
DN 40
➡Insert the splinter shield up to the limit stop point in the
high vacuum flange (bend not the clamping lugs
outwards).
12a
12
H
Inserting the splinter shield
12 Splinter shield
12a Clamping lug
3.3. Connecting The Fore-Vacuum Side
Backing pump: Vacuum pressure ≤ 10 mbar; with
enhanced convection cooling < 0.1 mbar.
Recommendation: Oil-Free Diaphragm Pump or Rotary
Vane Vacuum Pumps from the Pfeiffer
Vacuum
range (note installation position,
turbopump, see Section 3.2.).
Connecting the backing pump
All connections of the fore-vacuum line: with the usual small
flange components or hose screw connections.
Be sure to conduct away the exhaust gases
from the backing pump. Do not reduce the free
cross section of the fore-vacuum flange with
following components.
The exhausted process gases and vapours can
represent a health hazard and can also be envi-
ronmentally damaging.
Comply with all the gas manufacture's safety
instructions.
➡With rigid pipe connections: fit a bellows in the connecting
line to reduce vibration.
➡The electrical connection of the backing pump is made via
a relay box whose control line is connected to ”FV PUMP”
on the TC 600.
Please refer to Operating Instructions PT 0030 BN for
details on the relay box, backing pump and its installation.
WARNING
CAUTION
Directly flanging the pump
The turbopump can be flanged onto the vacuum chamber
vertically (0°) up to an angle of 90° maximum.
The fore-vacuum flange must always point
downwards.
CAUTION
90°
11
Permissible installation positions for the turbopump
11 Vacuum chamber
The maximum loading capacity of the high vacu-
um flange is 200 N (equivalent to 20 kg).
Assymetric loading on the high vacuum flange
must be avoided.
With horizontal pump installation and oil-sealed backing
pumps (e.g. rotary vane pumps) the fore-vacuum flange of the
turbopump must be aligned vertically downwards (maximum
deviation ±20°), otherwise the turbopump could become
dirty.
CAUTION
20°
20°
11
Installation position with oil-sealed backing pump
No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored.
Suspend or support all pipes to the pump.
CAUTION

7
Connecting the venting valve
8 Electronic Drive Unit TC 600
42 Venting valve TVF 005
42a Control lead venting valve/TC 600
42b Plug
The maximum pressure at the venting valve is
1.5 bar absolute.
Please refer to Operating Instructions PM 800 507 BN for
details on Venting Valve TVF 005.
CAUTION
3.4. Connecting The Cooling Unit
Turbopumps TMH 071 P/TMU 071 P can optionally be
provided with enhanced convection cooling, air cooling or
water cooling.
The turbopumps must be operated with air or water cooling
where the fore-vacuum pressure is increased (> 0.1 mbar)
and/or operations with gas loads.
Use and installation:
– For water cooling please refer to Operating Instructions
PM 800 546 BN.
– For air cooling please refer to Operating Instructions
PM 800 543 BN.
– Permissible installation positions for the cooling unit
where convection cooling is involved please see
Section 9.1. ”Dimensions Diagram”.
3.5. Connecting The Venting Valve
The Venting Valve TVF 005 provides automatic venting in the
event of a power failure and switching off.
Fitting the venting valve
➡Unscrew the venting screw from the venting connection of
the turbopump.
➡Screw in venting valve 42 with seal (USIT ring) on hexago-
nal SW 14.
Electrical connection
➡Plug control lead 42a into the connection ”VENT” of the
TC 600 (8) on the turbopump.
The venting mode of the venting valve is selected via the DCU
or Serial Interface RS 485.
3.6. Connecting The Casing Heating Unit
The attainment of final pressures is accelerated when turbo-
pumps and vacuum chambers are baked out.
The heating duration is dependent on the degree of dirt and
on the required final pressure level. The heating duration
should be at least 4 hours.
Where casing heating is involved the
turbopump must be water cooled.
High temperatures are generated when the tur-
bopump is baked out. There is a danger of
burns resulting from touching hot parts, even
after the casing heating has been switched off.
Ideally, the heating sleeve.and the pump casing
should be insulated during installation. Do not
touch the heating sleeve and the pump casing
during the baking out process.
Please refer to Operating Instructions PM 800 542 BN for
details on the casing heating unit and its installation.
3.7. Connecting The Sealing Gas Valve
To protect the pump, particularly where corrosive or dust pro-
ducing processes are involved, it is necessary to use sealing
gas.
Connection is made via the sealing gas valve (please see
“Accessories”).
WARNING
☞
PLEASE NOTE
Please refer to Operating Instructions PM 800 229 BN for
details on installing the sealing gas valve and adjusting the
sealing gas flow.
66 66a
915
Connecting the sealing gas valve
9 Locking screw sealing gas connection
15 Dichtung
66 Sperrgasventil
66a Dichtung

8
3.8. Connecting The Electronic Drive Unit TC 600
The turbopump and the Electronic Drive Unit
TC 600 are connected and together form a
single unit.
Connecting cable 8a has to be ordered
separately (see ”Accessories”).
➡Unscrew screw with tooth lock 8c from the TC 600 (above
the connection X4).
➡Plug the plug X4 on connecting cable 8a into the connec-
tion X4 on the TC 600 and screw in screw 8b.
➡Secure plug X4 on the TC 600 with a screw and
tooth lock 8c.
➡Connect plug X2 on connecting cable 8a with power unit
TPS 100/DCU 100 (”Accessories”) on connection X2.
➡Using screws and toothlock 8c (two pieces, included with
the cable consigment) secure plug X2 to power unit 105.
Once operations voltage has been supplied, the
TC 600 performs a self test on the supply
voltage. The supply voltage for Turbomolecular
Pumps TMH 071 P/TMU 071 P is 24 VDC ±5% in
accordance with EN 60 742.
If the turbopump is being operated with the Operations And
Display Unit DCU 001/100, remote plug 8d should be
disconnected. Connection should be carried out in accor-
dance with Operating Instructions PM 800 477 BN.
CAUTION
☞
PLEASE NOTE
X4 8
8b
X4
8c
8a
8c
X2
X1
S1
X2
105
8d
Connecting the TC 600 with Power Unit TPS 100/DCU 100
X1 Mains connection
X2 Connection, power unit
X4 Connection TC 600
S1 ON/OFF switch
8 Electronic Drive Unit TC 600
8a Connecting cable, TC 600 – TPS/DCU
8b Screw
8c Screw with tooth lock (3 pieces)
8d Remote plug
105 Power unit
3.9. Installing The Power Unit
Voltage may only be supplied with the Pfeiffer
Vacuum power units (Accessory). The use of
otherpower units requires the prior agreement
of the manufacturer and equalization with the
valid specification (power unit specifications
availa-ble on request).
Please refer to Operating Instructions PM 800 521 BN for
details on Power Unit TPS 100.
CAUTION

9
PPiinnooccccuuppaannccyyaannddrreemmootteepplluuggffuunnccttiioonnss
PPiinnnnrr..IInnppuuttooppeenn((llooww))IInnppuuttcclloosseedd((hhiigghh))oonn++2244VV((ppiinn11))
1 +24 V
2 venting blocked (see Section 3.5.) venting released (see Section 3.5.)
3 motor, turbopump off motor, turbopump on:
the turbopump is driven, current flows through the motor coils
4 pumping station off pumping station on:
the turbopump is driven, backing pump is started via the relay box
5 heating off heating on:
the heating is switched on once the rotation speed switchpoint is attained and off
when the rotation speed switchpoint is unattained
5 reset:
by supplying a pulse (T < 2s) with an amplitude of 24V a malfunction
acknowledgement can be processed
6 standby off standby on:
pump is accelerated to 66% of its nominal rotation speed
7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin or
via Serial Interface RS 485 (see Section 4.7. ”Rotation Speed Setting Mode”)
8OOuuttppuutt((llooww))OOuuttppuutt((hhiigghh))
rotation speed switchpoint not attained rotation speed switchpoint attained;
output can be loaded with 24 V/50 mA
9OOuuttppuutt((llooww))OOuuttppuutt((hhiigghh))
Collective malfunction message malfunction-free operations;
output can be loaded with 24 V/50 mA
10 Mass (ground) ____________
11 Contact
Output 1: Switchpoint attained contact 1) between pin 11 and pin 12 closed
if the turbopump is above the switchpoint
12 Contact
Output 1: Switchpoint attained
13 Contact
Output 2: Collective malfunction message contact 1) between pin 13 and pin 14 open in the event of a collective malfunction
14 Contact
Output 2: Collective malfunction message
15 Analog output rotation speed proportional output voltage 0 - 10 VDC =
0 - 100 % * fend/load R ≥ 10 kΩ
3.10. Connecting The Remote Control Unit
Remote control options for various functions are provided with
the connection "REMOTE" on the TC 600 via the 15-pole D-Sub-
Connector. Shielded cable must be used. Shielding is on the
plug side of the TC 600 connected to the TC casing.
The inputs 2-6 are activated by connecting them to the + 24 V
on pin 1 (active high) (please see 3.12. ”Connection Diagram”).
Pin occupancy and remote plug functions
(please see following table)
When connecting supply voltage, the turbopump
is started.
OOnnddeelliivveerryy::
PPiinn11,,PPiinn22,,PPiinn33aannddPPiinn44aarreebbrriiddggeeddiinntthhee
mmaattiinnggpplluugg..
CAUTION
1) The following technical data is applicable for the contacts: U max = 50 VDC
I max = 1 A
1
8
9
15
Pin occupancy remote plug

10
3.11. Connecting The Serial Interface RS 485
An external operating component (DCU 001/DCU 100) or an
external computer can be connected via the connection
”RS 485” on the TC 600 with the use of a shielded 8 pole
modular connecting cable contained with the delivery.
All units connected to the bus must have differing serial
interface addresses (parameter 797).
The group address of the TC 600 is 960.
Only SELV may be connected to the Serial
Interface RS 485.
All switched on remote functions have priority over the serial
interface functions.
Please refer to Operating Instructions
PM 800 488 BN for detailed operating
procedures and electrical data in respect of
the Serial Interface RS 485.
Profibus DP Gateway TIC 250 is available (accessory) for
connecting an Electronic Drive Unit TC 600 to a Profibus DP.
Please refer to the respective Operating Instructins
PM 800 599 BN for detailed information on the operation of
the TIC 250.
☞
PLEASE NOTE
WARNING
DDeessiiggnnaattiioonnVVaalluuee
Serial interface type: RS 485
Baud rate: 9600 Baud
Data file word length: 8 bit
Parity: no parity
Start bits: 1
Stop bits: 1..2
The electrical connections in the TC 600 are optically
decoupled.
Pin OOccccuuppaannccyy
1 not connected
2 + 24 V output (loadable with 210 mA)
3 not connected
4 not connected
5 RS 485: D+ (DO / RI)
6 Gnd
7 RS 485: D- (DO / RI)
8 not connected
RS 485
1 ... 8
Connecting The RS 485
Connection to a fixed bus system
➡Connect all units with D+ (pin 5 / RS 485) and D- (pin 7 /
RS 485) to the bus.
➡The bus must be closed at both ends.
The connections should be made in accordance with the
specification of the Serial Interface RS 485.
5:D+, 7:D
RTRT
PC
Level Co verter
TC TC
(View from
the plug side
of the TC 600)
It is possible to connect an RS 232 (e.g. PC) via
a level converter (please see ”Accessories”).
☞
PLEASE NOTE
The serial interface is galvanically and safely separated from
the maximum supply voltage from the TC 600.
Connection
DCU 100 with
power u it
DCU 001 without
power u it
TC 600
RS 485
or
Exter al
computer
RS 485
RS 485
RS 485
or
Connecting the Serial Interface RS 485

11
TC 600
TC 750
RS 485
REMOTE
1
2
3
4
5
6
7
8
.c.
+24 VDC*/max. 200 mA (supply voltage, DCU)
.c.
.c.
.c.
RS 485+/ (DO/RI)
GND* (mass co ectio , DCU)
RS 485- / (DO/RI)
+24 VDC*/max. 50 mA
Ve ti g release
Motor, turbopump
Pumpi g statio
Heati g/Reset
Sta dby
PWM ON (touch relatio 25 -75%)
Switchi g output 1 (24 VDC / max. 50 mA)
Switchi g output 2 (24 VDC / max. 50 mA)
GND*
HEAT/TMS
VENT
FV PUMP
1
1
1
1
2
2
2
3
3
3
4
4
4
Relay box
Heati g
Mai s i put, heati g
115/208/230 VAC
Mai s i put, pumpi g statio
(115/208/230) VAC
Co ectio , pumpi g statio
Relay box,
Pumpi g statio (Imax=16A)
HEATING
VENTING VALVE
TVF 005
L
N
PE
PE
N
L
L
N
PE
PE
N
L
Co tact output 1: switchi g poi t
Co tact output 2: collective malfu ctio
A alog output 0-10 VDC = 0-100 % *fe d/R ³ 10 ký
5
6
5
6
FAN
2
3
4
FAN
M
5
6
X4
1
2
34
.c.
X2
Protectio co ducter (PE)
Supply voltage TC
GND
PE GY/YE
BK1
BK2
5
6
Co tact curre t max.
6 mA / Co tact
1
2
3
.c.
Mai s i put
power u it
(90-132/
185-265) VAC
TPS XXX/DCU XXX
1
2
3
4
5
6
7
8
9
10
12
13
14
15
11
3.12. Connections Diagram

12
4. Operations
4.1. Before Switching On
Sections 4.1. to 4.3. refer only to operating the pump in its
condition on delivery, without the DCU operating unit. The
bridges ”venting release”, ”motor, TMP ON” and ”pumping
station ON” are fitted in the remote control plug.
Turbopump rotors rotate at high speed. When
the high vacuum flange is open there is a
danger of injury and of damage to the pump
caused by objects falling into the pump.
Therefore never operate the pump with open
high vacuum flange.
➡With water cooling: Open cooling water supply and check
flow.
➡Plug connecting cable 8a (”Accessory”) into the TC 600
and connect with Power Unit TPS 100 on X2 (please see
Section 3.8.).
PPlleeaasseennoottee::
The following pre-settings have been programmed:
– Running up time 8 min
– Rotation speed switchpoint 80%
– Automatic venting 50%
These settings can only be altered via Serial Interface RS 485
(DCU or PC); please refer to the respective operating
instructions.
WARNING
Rear panel, TPS 100
S1 ON/OFF switch
X1 Mains connection
X2 Connection TC 600
F1 Fuse
F2 Fuse
S1
F1
F2
X2
X1
4.2. Switching ON
➡Switch on the turbopump with switch S1 on the power
unit.
– With air cooling the cooling fan is also switched on via
Electronic Drive Unit TC 600.
– Once the self test has been successfully completed on the
TC 600 (duration approximately 10 seconds), both the
turbopump and the backing pump (if connected) begin
operating.
Take care when pumping hazardous gases and
observe the safety precautions of the gas
manufacturer.
WARNING

13
4.3. Switching OFF And Venting
Before coming to rest after switching off, the turbopump must
be vented in order to prevent contamination.
➡Close the fore-vacuum.
➡Switch off the turbopump with switch S1 on the power
unit.
➡Venting
There are three possibilities to vent turbopump:
–MMaannuuaallvveennttiinngg
Open the venting screw (on delivery, screwed in) on the
venting connection about one turn.
–VVeennttiinnggwwiitthhtthheeVVeennttiinnggVVaallvveeTTVVFF000055(accessories)
Venting release via the remote control (please see
Section 4.7.) or via the serial interface which is
selectable via DCU or interface (see Operating
Instructions, "Pumping Operations With The DCU",
PM 800 547 BN).
–VVeennttiinnggiinnttwwoossttaaggeesswhen the vacuum chamber
should be vented as quickly as possible.
First stage: venting with a pressure increase rate of
15 mbar/s for 20 seconds.
Second stage: venting with an optionally large venting
valve.
The valve cross-section for a venting rate of 15 mbar/s
must be compatible with the size of the vacuum chamber.
Where small vacuum chambers are involved, the
Pfeiffer Vacuum Venting Valve TVF 005 can be used for first
stage venting.
➡Shut off water supply (if installed).
4.4. Operations With The DCU 001/DCU 100
Operations with the DCU 001 or DCU 100 should be carried
out in accordance with the relevant Operating Instructions
PM 800 477 BN (DCU description) and
PM 800 547 BN (operating the pump with the DCU).
Where operations with the DCU are
involved, the remote plug 8d on the TC 600
(please refer to Section 2.1.) should be
disconnected.
4.5. Gas Type Dependent Operations
Water cooling is required if the pumps are to be
operated with gas load.
CAUTION
☞
PLEASE NOTE
Where high level gas loads and rotation speeds are involved,
the resulting friction subjects the rotor to the effect of great
heat. To avoid over-heating, a power rotation speed
characteristic line is implemented in the TC 600; this ensures
that where maximum gas loads are involved, the pump will
operate at any rotation speed without the danger of damage
arising.
The maximum power is dependent on the type of gas. Two
characteristic lines are available for any type of gas in order
to fully exploit the power potential of the pump:
– "Gas-Mode 0" for gases with molecular mass ≥ 40 as, for
example, Argon;
– "Gas-Mode 1" for all lighter gases.
Works setting: "Gas-Mode 0"
➡Set the applicable gas mode on the TC 600 via the DCU
(please refer to Operating Instructions ”Pumping
operations with The DCU” PM 800 547 BN).
Pumping gases with molecular mass ≥40 with
the incorrect gas mode can cause damage to
the pump.
For the vertex of the power characteristic line please refer to
Section 9. Technical Data.
Maximum power is applied when the pump starts in order to
limit the time required. Once the set rotation speed is
attained, switching to the selected power characteristic line
is automatic.
If the gas dependent maximum power is exceeded, the
rotation speed is reduced until equilibrium between the
permissible power and gas friction is attained. The power
limitation serves to protect the pump against thermal over-
loading. In order to avoid rotation speed fluctuations it is
recommended to set, in rotation speed setting mode, the
equilibrium frequency or a somewhat lower frequency.
There can be types of pump whereby there is
no differentiation between the two ”gas
modes” settings.
☞
PLEASE NOTE
WARNING
Power
Freque cy
DB
C
A
D-C = Gas mode «0»
B-A = Gas mode «1»
Ru up
fom
Gas type characteristic line

14
4.7. Operations With The Remote Control Unit
Remote control operations can be performed via the
connection with the designation “REMOTE” on the TC 600.
For pin occupancy and remote plug functions please refer to
the table in Section 3.10..
Inputs 2 - 6 are activated if they are connected with the 24 V
on pin 1 (active high; please see Section 3.12. Connections
Diagram).
OOnnddeelliivveerryytthheerreeiissaabbrriiddggeebbeettwweeeennPPiinn11,,
PPiinn22,,PPiinn33aannddPPiinn44oonntthheeTTCC660000mmaattiinngg
pplluugg.
.
Once operating voltage has been supplied and
on successful completion of the self-test on the
TC 600, the turbopump and any possible
connected backing pump is started.
Venting Release (Optional)
Automatic venting:
CAUTION
4.6. Shutting Down For Longer Periods
If aggressive or hazardous gases are pumped
there is a danger of personal injury resulting
from coming into contact with process gases.
Before removing a turbopump from the system,
first:
– Vent the turbopump with a neutral gas or dry air.
– Ensure that there is no residual process gas in the system
nor in the feeder lines.
If the turbopump is to be shut down for more than a year:
➡Remove turbopump from the system.
➡Change the lubricant reservoir (see Section 7.1.).
Lubricant TL 011 should not be used when
there have been no operations for 22yyeeaarrss..
➡Close the high vacuum flange and evacuate the turbopump
via the fore-vacuum flange.
➡Vent turbopump via the venting connection with nitrogen
or dry air.
➡Close fore-vacuum and venting connection by blank flan-
ging.
➡Place the pump vertically on its rubber feet.
➡In rooms with moist or aggressive atmospheres, the
turbopump must be air-sealed in a plastic bag together
with a bag of dessicant, e.g silicagel.
If the pump has been shut down for 33yyeeaarrss, the
bearing must be changed (please contact
Pfeiffer Vacuum Service).
☞
PLEASE NOTE
☞
PLEASE NOTE
WARNING
VVeennttiinnggSSwwiittcchhooffffMMaaiinnssppoowweerrffaaiilluurree11))
ffrreeqquueennccyytthheeppuummppiinnggssttaattiioonn
< 750 Hz venting valve opens venting valve opens
(correspond to 50% for 150 ms at 4 s for 150 ms at 4 s
of the final rotation intervals intervals
speed)
< 500 Hz venting valve opens venting valve opens as
for 3600 s long as sufficient
(works setting) energy is generated
by the turbopump
1) When mains power is restored the venting procedure is interrupted.
Venting blocked:
Venting does not take place.
Other venting modes:
Other venting modes can be selected via the DCU.
Motor, Turbopump
When the pumping station is switched on and once the self
test has been successfully completed (duration approximate-
ly 10 seconds), the turbopump is set in operation.
During operations, the turbopump can be switched on and off
while the pumping station is switched on.
Thereby the turbopump will not be vented.

15
Pumping Station
Any connected pumping station components are started up
(e.g. backing pump, venting valve, air cooling) and with simul-
taneous activation of the input ”motor, turbopump” the
turbopump is set in operation once the self test has been
successfully completed (duration approximately 10 seconds).
Heating/Reset
HHeeaattiinngg((ooppttiioonnaall))
Once the rotation speed switchpoint is attained the heating
unit is switched on; when the rotation speed switchpoint is
fallen below the heating unit is switched off.
Reset
The heating input has two functions (please see Section 3.10.,
point 5 ”Reset”).
Standby
The pump can be operated optionally at 66% of its nominal
rotation speed (standby ON) or at its nominal rotation speed
(standby OFF).
Rotation Speed Setting Mode Via Input PWM
The supply of pulse width modulated signals (PWM) with a
ground frequency of 100 Hz ±20% with an amplitude of
maximum 24 V and a key ratio of 25-75% enables the rotation
speed to be set in the range 20-100% of the nominal rotation
speed.
If no signal is present the pump accelerates up to its final
rotation speed.
A PWM adapter box for rotation speed setting operations for
the turbopump is available as an option (please see
”Accessories”).
T
0
U20%*f 100%*f
e d
max. +33V
min. +13V
max. +7V
min. -33V
TT
PWM
*25% *75%
T
= 10ms (1±20%)
f=100Hz (1±20%)
e d
PWM
PWM
PWM
Switching Outputs
Switching outputs 1 and 2 can be loaded with a maximum
24 V / 50 mA per output. The following functions are assigned
to the switching outputs:
SSwwiittcchhiinnggoouuttppuutt11: Active high when the rotation speed
switchpoint is attained. The switchpoint
for the turbopump is set at 80% of the
nominal rotation speed. It can be used,
for example, for a message ”pump
ready to operate”.
SSwwiittcchhiinnggoouuttppuutt22: Active low with a malfunction -
collective malfunction message.
The connection of a relay is made between pin 10 (mass) and
the respective switching output pin 8 or pin 9 (see Section
3.12. Connections Diagram).

16
5. Monitoring Operations
5.1. Operations Display Via LED
Certain operations modes of the turbopump and the TC 600
can be ascertained via the two integrated LEDs located on
the front panel of the TC 600.
The following operations modes are displayed:
5.2. Turbopump Temperature Management
Where impermissible motor temperatures are involved or the
temperature of the casing is too high, the motor current is
reduced.
This can lead to dipping below the set rotation speed switch-
point and results in the turbomolecular pump being switched
off.
LED on the TC 600 glows red: Collective malfunction.
LLEEDDCCaauussee
ggrreeeennrreedd
Glows – Power unit OK
– Function ”pumping stati on ON”
carried out
Flashes short – Power unit OK
(1/12s active) – Pumping station OFF
Blinks – Mains power supply failure
(1/2s active)
Glows – Collective malfunction
(for example, run-up time
error, over-temperature,
turbopump or TC 600)
– Switching output 2 active
(low)
Blinks – Warning
(1/2s active) (e.g. supply voltage short
circuit to earth, mains
power failure)
Differentiated malfunction and warning signals
are only possible with the use of the DCU.
☞
PLEASE NOTE

17
6. What To Do In Case Of Breakdowns?
PPrroobblleemmPPoossssiibblleeCCaauusseessRReemmeeddyy
Pump doesn't start; • Power supply interrupted • Check fuse in the power pack unit
None of the integrated LEDs • Check plug contacts on the mains
glow on the TC 600 power unit
• Check power unit feeder line
• Check voltage on the power unit
(24 V DC) at connection X2
• Incorrect operations voltage supplied • Supply correct operations voltage
• Pins 1-3 and 1-4 on the remote • Connect pins 1-3 and 1-4 on the
plug not connected remote plug
• No supply of operations voltage • Check plug contacts on the power unit
• Defect TC 600 • Inform Pfeiffer Vacuum Service of need for
repair
• Reduction in the voltage in the cable • Use suitable cable
Pump doesn't attain nominal • Fore-vacuum pressure too high • Check backing pump function
rotation speed within the set • Leak or too much gas • Check seals
run-up time • Seek leak and repair
Pump cuts out during operations • Reduce supply of process gas
• Rotor sluggish caused by • Check bearing (noises?): Inform
defective bearing Pfeiffer Vacuum Service
• TC run-up time too short • Set longer start-up time with the DCU or PC
• Thermal overloading caused by
– Water flow insufficient • Ensure free flow
– Insufficient air supply • Ensure adequate air supply
– Fore-vacuum pressure too high • Reduce fore-vacuum pressure
– Ambient temperature too high • Reduce ambient temperature
Pump doesn't attain final pressure • Pump dirty • Bake out pump
• If seriously contaminated: Request
Pfeiffer Vacuum Service to clean
• Leak in vacuum chamber, • Seek leak starting with vacuum chamber
lines or pump • Repair leak
Unusual operating noises • Bearing damaged • Inform Pfeiffer Vacuum Service of need for
repair
• Rotor damaged • Inform Pfeiffer Vacuum Service of need for
repair
• Splinter shield (if fitted) • Check seat of splinter shield
not seated firmly (see Section 3.2.)
Red LED on the TC 600 glows • Collective malfunction • Reset via mains OFF/ON or remote pin 5
• Different malfunction display with the
DCU possible 1)
Red LED on the TC 600 flashes • Warning through: • Different warning message with
the DCU possible 1)
– Mains power failure • Check power unit voltage
• Check power unit mains
– Supply voltage short connection
circuit to earth • Check power unit voltage for short
circuit to earth
1) Without a DCU inform Pfeiffer Vacuum Service to check the cause of trouble.

18
7. Maintenance
No liability for personal injury nor material
damage will be accepted for damages and
operational interruptions which have been
caused by improper maintenance; in addition,
all guarantees become invalid.
– You can change the lubricant reservoir yourself (please
see Section 7.1.).
– Please contact your local Pfeiffer Vacuum service for all
other
maintenance and service work.
Apply no mechanical stress to the TC 600.
7.1. Replacing The Lubricant Reservoir
The lubricant reservoir should be replaced at least once a
year.
Where extreme operating conditions or unclean processes
are involved, the replacement interval should be checked
with your Pfeiffer Vacuum Service Center.
➡Switch off the turbopump, vent to atmospheric pressure
(see Section 4.3.) and allow to cool as necessary.
➡If necessary, remove the turbopump from the system.
➡Unscrew rubber feet 6 from the underside of the pump.
➡Remove the locking cover 90 on the underside of the pump
with adjustable pin type face wrench E (order number
N 5709 103); take care with the O-ring 91.
➡Lever out the lubricant reservoir 92 with the help of two
screwdrivers.
CAUTION
☞
PLEASE NOTE
E
90
91
93
92
6
1
C40-942/4
➡Clean off any dirt on the pump and locking cover with a
clean, fluff-free cloth.
➡Insert new lubricant reservoir 92 uuppttootthheeOO--rriinngg9933in the
pump.
The lubricant reservoir 92 is already filled with
lubricant TL 011; do not add additional lubricant.
➡Screw in locking cover 90 with O-ring 91. The lubricant
reservoir is brought into the correct axial position with the
locking cover.
➡Screw the rubber feet 6 back in.
CAUTION
Remove locking cover and extract lubricant reservoir
6 Rubber feet (4x)
90 Locking cover
91 O-ring
92 Lubricant reservoir
93 O-ring
EAdjustable pin type face wrench
Lubricant reservoir can contain toxic
substances from the medium pumped. Lubricant
must be disposed of in accordance with the
respective regulations.
Safety instructions data sheet for the lubricant
on request.
WARNING
92

19
8. Service
Do Make Use Of Our Service Facilities
In the event that repairs are necessary a number of options
are available to you to ensure any system down time is kept to
a minimum:
– Have the pump repaired on the spot by our Pfeiffer
Vacuum
Service Engineers;
– Return the pump to the manufacturer for repairs;
– Replace the pump.
Local Pfeiffer Vacuum representatives can provide full
details.
Please take into account that where Pfeiffer
Vacuum
Service replacement service is involved the
standard operating parameters are always
preset.
If your application requires different parameters,
please modify accordingly.
The turbopump and the Electronic Drive Unit
TC 600 form a single unit and must therefore be
returned complete for repair purposes. Before
returning the unit it should be ensured that the
power unit is not the cause of the malfunction
(checking the power unit).
Before Returning:
➡Dismantle all accessories.
➡When the unit is free of harmful substances, please attach
a clearly visible notice "Free of harmful substances" (both
on the unit and also on the delivery note and any
accompanying letters).
"Harmful substances" are substances and preparations as
defined in the current, local, dangerous substances
regulations; in the U.S.A. as
"materials in accordance with the Code of Federal
Regulations (CFR) 49 Part 173.240 Definition and Preparation".
We will carry out the decontamination and invoice this work
to you if you have not attached this note. This also applies
where the operator does not have the facilities to carry out
the decontamination work. Units which are contaminated
microbiologically, explosively or radioactively cannot be
accepted as a matter of principle.
Fill Out The Declaration Of Contamination
➡In every case the "Declaration of Contamination" must be
completed diligently and truthfully.
➡A copy of the completed declaration must accompany the
unit; any additional copies must be sent to your local
Pfeiffer Vacuum Service Center.
Please get in touch with your local Pfeiffer Vacuum represen-
tatives
if there are any questions regarding contamination.
☞
PLEASE NOTE
CAUTION
Decontaminate units before returning or
possible disposal. Do not return any units which
are microbiologically, explosively or
radioactively contaminated.
Returning Contaminated Units
If contaminated have to be returned for maintenance/repair,
the following instructions concerning shipping must be
followed:
➡Neutralise the pump by flushing with nitrogen or dry air.
➡Seal all openings to the air.
➡Seal pump or unit in suitable protective foil.
➡Ship units only in appropriate transport containers.
Repair orders are carried out according to our
general conditions of sale and supply.
If repairs are necessary, please send the pump together with
a short damage description to your nearest Pfeiffer Vacuum
Service
Center.
Contact Addresses And Telephone Hotline
Contact addresses and telephone numbers can be found on
the back cover of these operating instructions.
☞
PLEASE NOTE
WARNING

20
FFeeaattuurreeUUnniittTTMMHH007711PPTTMMHH007711PPTTMMUU007711PP
Connection nominal diameter
Inlet DN 40 ISO-KF DN 63 ISO-K DN 63 CF-F
Outlet DN 16 ISO-KF/G 1/4“ DN 16 ISO-KF/G 1/4“ DN 16 ISO-KF/G 1/4“
Venting connection G 1/8” G 1/8” G 1/8”
Nominal rotation speed 1/min 90 000 90 000 90 000
Standby rotation speed 1/min 60 000 60 000 60 000
Start-up time min 2 2 2
Noise level dB (A) < 45 < 45 < 45
Final pressure, backing pump mbar < 10 < 10 < 10
Maximum permissible
rotor temperature °C 90 90 90
Permissible heat radiation power W 4 4 4
Volume flow rate for
Nitrogen N2l/s 33 60 60
Helium He l/s 38 55 55
Hydrogen H2l/s 39 45 45
Compression ratio for
N2> 10 11 > 10 11 > 10 11
He 1 · 10 71 · 10 71 · 10 7
H2> 10 5> 10 5> 10 5
Maximum fore-vacuum pressure for
N2mbar 18 18 18
He mbar 17 17 17
H2mbar 8 8 8
Maximum gas throughput 1)
With water cooling N2mbar l/s 1.1 1.1 1.1
He mbar l/s 2.5 2.5 2.5
With air cooling 2) N2mbar l/s 0.45 0.45 0.45
Maximum gas throughput at intake pressure of 0.1 mbar 3)
With water cooling N2mbar l/s 2.2 2.2 2.2
He mbar l/s 2.6 2.6 2.6
H2mbar l/s 2 2 2
Vertex power characteristics line 4)
A W / Hz 80 / 1500 80 / 1500 80 / 1500
B W / Hz 80 / 1500 80 / 1500 80 / 1500
C W / Hz 55 / 1500 55 / 1500 55 / 1500
D W / Hz 80 / 1300 80 / 1300 80 / 1300
Final pressure 5)
With rotary vane pumps mbar < 1 · 10 -7 <.1 · 10 -7 < 5 · 10 -10
With diaphragm pumps mbar < 1 · 10 -7 < 1 · 10 -7 < 1 · 10 -8
Lubricant TL 011 TL 011 TL 011
Maximum cooling water
consumption with water at 15 °C 6) l/h 100 100 100
Cooling water temperature °C 5 - 25 5 - 25 5 - 25
Permissible ambient temperature
with air cooling °C 0 - 35 0 - 35 0 - 35
Heating power consumption W 32 32 32
Weight kg 2.8 2.8 3.5
Permissible magnetic field mT 3 3 3
Operating voltage VDC 24 ± 5% 24 ± 5% 24 ± 5%
Duration 6) - / max. current consumption A 4.1 / 4.6 4.1 / 4.6 4.1 / 4.6
Duration 6) - / max. power W 100 / 110 100 / 110 100 / 110
Fuse, internal V T8A/250 T8A/250 T8A/250
Protection class 7) IP 30 IP 30 IP 30
Relative humidity % 5-85 non-condensing 5-85 non-condensing 5-85 non-condensing
9. Technical Data
1) Until frequency fall-off; higher gas throughputs with reduced rotation speed.
2) Until ambient temperature 30 °C.
3) Rotation speed of pump may drop below the nominal rotation speed.
4) For gas characteristic lines please refer to Section 4.5.
5) In accordance with German Industrial Standard 28428 the final
pressure which is attained in a measuring dome 48 hours after baking out.
6) At maximum gas throughput.
7) Protection class IP 54 is afforded for the Electronic Drive Unit TC 600
by retro-fitting a cover plate (Accessory) to the TC 600.