Pfeiffer Vacuum TPH 2201 User manual

Operating Instructions
Turbomolecular Pumps
With Electronic Drive Units
TPH 2201 / TPU 2201
PM 800 567 BE/C (0008)

2
Index
Page Page
1. Safety Instructions.................................. 3
1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3
2. Understanding The Pumps
TPH/TPU 2201........................................... 4
2.1. Main Features..................................................................... 4
2.2. Differences Between The Pump Types.......................... 4
3. Installation............................................... 5
3.1. Preparations For Installation............................................ 5
3.2. Installing The Pump, Connecting The
High Vacuum Side.............................................................. 5
Fitting The Splinter Shield................................................. 5
3.3. Connecting The Fore-Vacuum Side................................ 6
3.4. Connecting The Cooling Unit............................................ 6
3.5. Connecting The Venting Valve......................................... 7
3.6. Connecting The Heating Unit........................................... 7
3.7. Connecting The Electronic Drive Unit TC 600................ 8
3.8. Installing The Power Pack Unit ....................................... 8
3.9. Connecting The Sealing Gas Valve................................. 8
3.10. Connecting The Remote Control Unit ............................. 9
3.11. Connecting The Serial Interface RS 485 ...................... 10
Connection........................................................................ 10
Connecting The RS 485 ................................................... 10
3.12. Connections Diagram...................................................... 11
Connections Diagram
For 3-phase Backing Pump ............................................ 12
4. Operations.............................................. 13
4.1. Filling In The Lubricant.................................................... 13
4.2. Before Switching ON....................................................... 13
4.3. Switching ON.................................................................... 13
4.4. Circulatory Lubrication.................................................... 14
4.5. Heating............................................................................... 14
4.6. Switching OFF And Venting............................................ 14
4.7. Gas Type Dependent Operations .................................. 14
4.8. Shutting Down For Longer Periods............................... 14
4.9. Operations With The DCU 001 / DCU 600 ..................... 15
4.10. Operations With The Remote Control Unit................... 15
Venting Release (Optional)............................................. 15
Motor, Turbopump .......................................................... 15
Pumping Station .............................................................. 15
Heating/Reset .................................................................. 15
Standby.............................................................................. 15
Rotation Speed Setting Operations
Via Input PWM ................................................................ 16
Switching Outputs............................................................ 16
5. Monitoring Operations ......................... 16
5.1. Operations Display Via LED............................................ 16
5.2. Turbopump Temperature Monitoring........................... 16
6. What To Do In Case
Of Breakdowns? .................................... 17
7. Service.................................................... 18
8. Maintenance.......................................... 19
8.1. Replacing The Lubricant................................................. 19
8.2. Cleaning Strainer And Floater........................................ 19
8.3. Cleaning And Changing
The Bearing On The Lubricant Pump............................ 19
9. Technical Data....................................... 21
9.1. Dimensions Diagram ....................................................... 22
10. Spare Parts............................................. 22
11. Accessories .......................................... 24
11.1. Lubricant............................................................................ 25
Declaration of Contamination.................... 26
Manufacturer´s Declaration..........(last page)
Please note: Current operating instructions are available via
www.pfeiffer-vacuum.de/Infoservice.

3
☞Read and follow all instructions in this manual.
☞Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can be caused by your system.
– Hazards which can be caused by the media being
pumped.
☞Avoid exposing any part of the body to vacuum.
☞Observe the safety and accident prevention regulations.
☞Regularly check that all accident prevention measures are
being complied with.
☞Do not operate the turbopump with open high vacuum
flange.
☞Do not carry out any unauthorised conversions or alterati-
ons to the turbopump with TC 600.
☞When returning the turbopump observe the shipping
instructions.
☞Use at least 6 bracket screws to connect the high vacuum
flange (ISO-flange).
☞The turbopump must be anchored in accordance with the
installation instructions.
☞Do not disconnect the plug between the TC 600 and acces-
sory components during operations.
☞When the turbopump is open disconnect the voltage supp-
ly to the TC 600.
☞When working on the turbopump, the high vacuum flange
should only be opened once the rotor is at rest.
☞When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.
☞If a heater is in use high temperatures can arise of the
turbopump. Take care to avoid burns.
☞Keep leads and cables well away from hot surfaces
( > 70 °C).
☞Operate the turbopump with TC 600 only in conjunction
with the relevant Power Pack Unit (accessory).
☞The unit has been accredited protection class IP 30. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken.
☞The mains connection must be subject to a safe
connection to the PE (protection class 1).
☞If the turbopump and the TC 600 are operated separately
(only permissible with the agreement of the manufacturer)
the turbopump must be connected to the PE.
☞The cause of any operating voltage leakage to earth (red
LED flashes) must be eliminated to avoid the danger of an
electric shock.
Modifications reserved.
1. Safety Instructions
1.1. For Your Orientation
Instruction in the text
➡Working instruction: here, you have to do something.
Symbols used
The following symbols are used throughout in illustrations:
High vacuum flange
Fore-vacuum flange
Electric connection
Sealing gas connection
Venting connection
Cooling water connection
Measuring connection
Abbreviations used
DCU = Operating and display control unit
TC = Electronic drive unit, turbopump
TPS = Power pack unit
Position numbers
The same pump and accessory parts have the same position
numbers in all illustrations.
1.2. Pictogram Definitions
Danger of burns from touching hot parts.
Danger of an electric shock.
Danger of personal injury.
Danger of damage to the pump or to the system.
Danger of injury from rotating parts.
M

4
2.1. Main Features
Turbopumps TPH/TPU 2201 with the TC 600 form a complete
unit. Voltage is supplied by Power Pack Unit (see
”Accessories”).
Turbomolecular Pump TPH/TPU 2201
1 High vacuum flange
2 Fore-vacuum flange
3 Cooling water connection
8 Electronic Drive Unit TC 600
42 Venting connection
66 Sealing gas connection
71 Lubricant filler srew
72 Lubricant drain screw
73 Sight glass
100 Measuring connection
Cooling
Standard: Water cooling
Integrated protective measures against excess temperatures:
The Electronic Drive Unit TC 600 reduces
the rotor rotation speed.
Bearings
The pump rotor has bearings at both ends. Each ball bearing
has its own circulatory lubrication system.
The turbopumps must not be transported when
filled with lubricant.
Feature TPH 2201 TPU 2201
High vacuum flange DN 250 ISO-K DN 250 CF-F
High vacuum seal Viton Metal
Attainable final < 1 · 10-8 mbar < 1 · 10-10 mbar
pressure (without baking-out) (with baking-out)
2. Understanding The Pumps TPH/TPU 2201
Proper use
– The Turbomolecular Pumps TPH/TPU 2201 may only be
used for the purpose of generating vacuum.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– If the pump is to be operated with more than 50% of the
permissible gas load, sealing gas must be used.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3.
– Only PFEIFFER power pack units may be used to operate
the TC 600. These power pack units guarantee voltage
which is safely separated from the mains accordance with
Standard EN 60 742. The use of other power pack units
requires the express agreement of the manufacturer.
– The pumps may only be operated providing the ambient
conditions in compliance with Protection Type IP 30 are
observed.
Improper use
The following is regarded, inter alia, as improper:
– The pumping of explosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with impermissibly high fore-vacuum pressure.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 9. ”Technical Data”).
– Operating the pump in environments which require a pro-
tection class superior to IP 30.
– The use of other power pack units or accessories which
are not named in this manual or which have not been
agreed by the manufacturer.
– The connection to power pack units with earthing of a
direct voltage pole.
Improper use will cause all claims for liability and guarantees
to be forfeited.
2.2. Differences Between The Pump Types
M
166 8
73 72 71 342 100 2

5
3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump.
– The maximum permissible rotor temperature of the pump is
120 °C. If the vacuum chamber or parts in the vacuum
chamber are heated, the values stated in the technical
data relating to the level of heat which may be radiated
into the pump must not be exeeded. If necessary, suitable
shielding must be fitted in the vacuum chamber before the
turbopump (constructional suggestions available on
request).
– Only remove the blank flange from the high and for-vacu-
um side immediately before connection.
– The turbopumps must not be transported when filled with
lubricant.
– Where magnetic fields of > 13.4 mT are involved suitable
shielding must be provided (available on request).
– If the pump is baked out, the body of the pump must be
insulated to prevent burns from accidental contact.
– Both the TPH and TPU 2201 must be anchored to the
surface.
– In the event of a sudden standstill of the rotor, torques of
up to 8960 Nm can arise and these must be taken up by the
turbopump and frame. Pumps must be anchored as
follows:
– ISO flange with 6 bracket screws,
or
– CF flange with the complete set of M8 screws,
or
– underside of the pump with 6 screws M6,
screws quality 8.8.
3.2. Installing The Pump,
Connecting The High Vacuum Side
Important
The utmost cleanliness must be observed when fitting all high
vacuum parts. Unclean components prolong the pumping
time.
Use a splinter shield
The use of a splinter shield in the high vacuum flange protec-
ts the turbopump against foreign bodies coming from the
vacuum chamber but does reduce the volume flow rate of the
pump by approximately 15%. For fitting splinter shields please
refer to “Fitting the splinter shield”.
The high vacuum side can be flanged onto the vacuum cham-
ber either directly or via a bellows or a vibration compensator
(see ”Accessories”).
Connecting via bellows
If the high vacuum side is to be flanged via a bellows, the tur-
bopump must be secured for example via the holes on the
underside of the turbopump (please see dimensions). The
fastening must be able to withstand the torque referred to in
Section 3.1.
Connecting Via A Vibration Compensator
The maximum permissible temperature at the
vibration compensator is 100 °C.
Where a vibration compensator is in use, a freely suspended
turbopump can be flanged onto the vacuum chamber.
Additional protective casing must be provided to take up the
energy of the rotor in the event of a malfunction (please
discuss this question with the manufacturer).
The maximum loading capacity of the high vacu-
um flange is 3000 N (equivalent to 300 kg).
This does not apply to pumps with flanges on the
side or below.
Asymmetric loading on the high vacuum flange
must be avoided.
If a vacuum chamber is fitted to the high vacuum flange with-
out support, it must be ensured that no torque is transmitted
to the flange (asymetrical weight of the vacuum chamber).
Even with side and under flanges, pumps can be flanged to
the vacuum chamber with a freely suspended horizontal rotor
shaft. It is a pre-condition that the vacuum chamber be firmly
anchored.
No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored.
Suspend or support all pipes to the pump.
Fitting The Splinter Shield
➡Insert the splinter shield in the ISO-K flange in condition on
delivery.
Inserting the splinter shield in ISO-K flage
A Strap (Condition on delivery)
A

6
3.3. Connecting The Fore-Vacuum Side
Backing pump: Fore-vacuum pressure ≤0.1 mbar
Recommendation: Rotary Vane Vacuum Pumps from the
PFEIFFER range.
Where large volumes of gas are
involved, we recommend a backing
pump combination of rotary vane
vacuum pump and roots vacuum pump.
Connecting the backing pump
All connections of the fore-vacuum line: With the usual small
flange or clamping flange components.
Be sure to conduct away the exhaust gases
from the backing pump. Do not reduce the free
cross section of the fore-vacuum flange with
following components.
The exhausted process gases and vapours can
represent a health hazard and can also be envi-
ronmentally damaging.
Comply with all the gas manufacture's safety
instructions.
➡With rigid pipe connections: Fit a bellows in the
connecting line to reduce vibration.
➡The electrical connection of the backing pump is made via
a relay box (Accessory) whose control line is connected to
”FV PUMP” on the TC 600.
Please refer to Operating Instructions PM 800 544 BN for
details on the relay box (1 phase backing pump and its instal-
lation).
Please refer to Section 3.12. for electrical connection of the
3 phase backing pump
Oxygen content: max. 4 mg/kg
Chloride content: max. 100 mg/kg
Carbonate hardness: max. 10 ° dH
Conaumption of potassium
permanganate: max. 10 mg/kg
Carbon dioxide: Undetectable
Ammonia: Undetectable
pH-value: 7 – 9
Max. fore-line over pressure: max. 6 bar
Minimum flow rate at gas load max.: 100 l/h at 15 °C
Connection to the cooling water mains
➡Fit the dirt trap (Accessory) in the supply line.
➡Connect the supply line with hose clips onto one of the two
cooling water connections.
➡Connect the return line to the other cooling water connec-
tion of the turbopump.
➡Tighten all hose clips and check for firm seating of the
hoses.
➡Tighten the hollow screws on the cooling water
connection to a torque of 20 Nm.
3.4. Connecting The Cooling Unit
The Turbopumps TPH/TPU 2201 have been designed to be
water cooled.
The cooling water can be drawn either
– from the cooling water mains, or
– from Recycled Water Cooling Unit TZK in closed circuit.
Cooling from the cooling water mains
To prevent deposits collecting in the pump the cooling water
must be filtered.
Minimum cooling water requirements:
Mechanically clean, optically clear, no turbidity, no sediment,
chemically neutral, temperature >dew point.
➡Before insert the splinter shield in the CF-F flange the strap
must be bent.
Inserting the splinter shield in CF-F flage
A Strap (bent)
A
3
31
3
33
32
Cooling from the cooling water mains
3 Cooling water connection
31 Supply line
32 Return line
33 Dirt trap

7
Cooling With The Recycled Water Cooling Unit TZK
(Accessory)
Dirt traps are not permissible in the lines.
All other steps as for connecting to the cooling water mains.
33
TZK
35
Cooling with Recycled Water Cooling Unit TZK
3 Cooling water connection
35 Recycled Water Cooling Unit TZK
8
HEAT/TMS 46
46a 46c 46b
Installing the heating unit
8 Electronic Drive Unit TC 600
46 Heating
46a Control lead, heating/TC 600
46b Heating relay box
46c Mains cable
3.6. Connecting The Heating Unit
High temperatures are generated when
turbopump or vacuum chamber are baked out.
Contact with hot parts can cause burns, even
when the heating has been switched off. Pump
casing should be insulated when fitting.
Do not touch pump casing during baking out.
➡Lay heating round the pump body and fasten beside on the
claps to the high vacuum flange.
➡Plug control lead 46a into the connection "HEAT/TMS" of
the TC 600 (8) on the turbopump.
➡Connect mains cable 46c to the mains voltage.
Caution! Ensure correct mains voltage range.
The electrical connections must be carried out
by qualified personnel in compliance with local
regulations. The mains plug may only be
connected to the mains voltage after the casing
heating unit has been fitted to the turbopump.
3.5. Connecting The Venting Valve
The venting valve (Accessory) provides automatic venting in
the event of a power failure and switching off.
Fitting the venting valve
➡Screw in venting valve with seal (USIT ring) on hexagonal
SW 14.
Electrical connection
➡Plug control lead 42a into the connection ”VENT“ of the
TC 600 (8) on the turbopump.
The venting mode of the venting valve is selected via the DCU
or Serial Interface RS 485.
VENT
8
42b
42a
42
Connecting the venting valve
8 Electronic Drive Unit TC 600
42 Venting valve
42a Connector plug venting valve/TC 600
42b Plug
The maximum pressure at the venting valve is
1.5 bar absolute.
Please refer to Operating Instructions PM 800 507 BN for
details on Venting Valve TVV 005.

8
3.8. Installing The Power Pack Unit
Voltage may only be supplied with the PFEIFFER
power pack units (Accessory). These power
pack units guarantee voltage which is safely
separated from the mains (in accordance with
Standard
EN 60 742). The use of other power pack units requires the
express agreement of the manufacturer.
Please note:
Operations with TPS 600/DCU 600 only possible in the
connection voltage range 185-264 VAC.
Please refer to Operating Instructions PM 800 521 BN for
details on Power Pack Unit TPS 600.
3.7. Connecting The Electronic
Drive Unit TC 600
Please note:
The turbopump and the Electronic Drive Unit TC 600 are
connected and together form a single unit.
Connecting cable 8a has to be ordered separately (see
”Accessories”).
➡Connect plug X4 on connecting cable 8a with connection
X4 on the TC 600 and secure with screw 8b.
➡Connect plug X2 on connecting cable 8a with Power Pack
Unit TPS 600/DCU 600 (”Accessories”) on connection X2.
Once operations voltage has been supplied, the
TC 600 performs a self test on the supply
voltage.
The supply voltage for the turbomolecularpumps
is 140 VDC ± 5% in accordance with EN 60 742.
8
8a X2
X4
X1 X2
S1
105
X4
8b
Connecting the TC 600 with Power Pack Unit TPS 600/DCU 600
X1 Mains connection
X2 Connection, Power Pack Unit TPS 600
X4 Connection TC 600
S1 ON/OFF switch
8 Electronic Drive Unit TC 600
8a Connecting cable, TC 600 – TPS/DCU
8b Screw
105 Power Pack Unit TPS 600
3.9. Connecting The Sealing Gas Valve
To protect the pump, particularly where corrosive or dust pro-
ducing processes are involved, it is necessary to use sealing
gas. Connection is made via the sealing gas valve (please see
“Accessories”).
Please refer to Section 9.1. ”Dimensions Diagram” for the
sealing gas connection.
Please refer to Operating Instructions PM 800 229 BN for
details on installing the sealing gas valve and adjusting the
sealing gas flow.

9
Pin arrangement and remote plug functions
Pin Nr. Input open (low) Input closed (high) On + 24 V (pin 1)
1 +24 V
2 venting blocked (see Section 3.5.) venting release (see Section 3.5.)
3 motor, turbopump off motor, turbopump on:
the turbopump is driven, current flows through the motor coils.
4 pumping station off pumping station on:
the turbopump is driven, backing pump is activated.
5 heating off heating on:
the heating is switched on once the rotation speed switchpoint is attained and
off when the rotation speed switchpoint is unattained.
5 Reset:
by supplying a pulse (T < 2s) with an amplitude of 24V a malfunction
acknowledgement can be processed.
6 standby off standby on:
pump is accelerated to 66% of its nominal rotation speed.
7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin or
via Serial Interface RS 485 (see Section 4.10. ”Rotation Speed Setting Mode”)
8Output (low) Output (high)
rotation speed set rotation speed switchpoint attained;
switchpoint not attained output can be loaded with 24 V/50 mA
9Output (low) Output (high)
collective malfunction message; malfunction-free operations
output can be loaded with 24 V/50 mA
10 Mass (ground)
3.10. Connecting The Remote Control Unit
Remote control options for various functions are provided
with the connection ”REMOTE” on the TC 600 via the 10 pole
screw connector plug (maximum cable cross section
0.14 - 1.5 mm2/connection).
Shielded cable should be used. Shielding has to be
connected with the TC casing on the plug side of the TC 600
by using cable clamps.
The inputs 2 - 6 are activated by connecting them to the + 24V
on pin 1 (active high) (please see Section 3.12. ”Connections
Diagram”).
Pin Arrangement And Remote Plug Functions
(please see following table).
When connecting supply voltage, the turbopump
is started.
On delivery:
Pin 1, Pin 2, Pin 3 and Pin 4 are bridged in the
mating plug.

10
3.11. Connecting The Serial
Interface RS 485
An external operating component (DCU 001/DCU 600) or an
external computer can be connected via the connection
”RS 485” on the TC 600 with the use of an 8 pole modular
connecting cable.
The serial interface is galvanically and safely separated from
the maximum supply voltage from the TC 600.
Connection
Connecting The RS 485
Connecting to a fixed bus system:
➡Connect all units with D+ (pin 5/RS 485) and
D- (pin7/RS 485) to the bus.
➡The bus must be connected at both ends.
The connections should be made in accordance with the
specification of the Serial Interface RS 485.
PIN Arrangement
1 not connected
2 +24V output (≤210 mA loading
capacity)
3 not connected
4 not connected
5 RS 485: D+ (DO / RI)
6 Gnd
7 RS 485: D- (DO / RI)
8 not connected
All units connected to the bus must have differing serial inter-
face addresses (parameter 797).
The group address of the TC 600 is 960.
Only safety low voltages (SELV) may be connec-
ted to Serial Interface RS 485 .
All switched on remote functions have priority over the serial
interface functions.
Please Note:
Please refer to the separate Operating Instructions
PM 800 488 BN for more detailed information on operations
via Serial Interface RS 485 and its electronic data.
1 ... 8
Description Value
Serial Interface Type: RS 485
Baudrate: 9600 baud
data word lenghts: 8 bit
Parity: no (no parity)
Startbits: 1
Stopbits: 1..2
The electrical connections are internally optically decoupled.
Please note:
It is possible to connect an RS 232 (e.g. PC) via a level conver-
ter (please see ”Accessories”).
(View from the
plug side of the
TC 600)
RS 485
5:D+, 7:D–
RTRT
PC
Level Converter
TC TC