Pfeiffer Vacuum TPH 2201 User manual

Operating Instructions
Turbomolecular Pumps
With Electronic Drive Units
TPH 2201 / TPU 2201
PM 800 567 BE/C (0008)

2
Index
Page Page
1. Safety Instructions.................................. 3
1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3
2. Understanding The Pumps
TPH/TPU 2201........................................... 4
2.1. Main Features..................................................................... 4
2.2. Differences Between The Pump Types.......................... 4
3. Installation............................................... 5
3.1. Preparations For Installation............................................ 5
3.2. Installing The Pump, Connecting The
High Vacuum Side.............................................................. 5
Fitting The Splinter Shield................................................. 5
3.3. Connecting The Fore-Vacuum Side................................ 6
3.4. Connecting The Cooling Unit............................................ 6
3.5. Connecting The Venting Valve......................................... 7
3.6. Connecting The Heating Unit........................................... 7
3.7. Connecting The Electronic Drive Unit TC 600................ 8
3.8. Installing The Power Pack Unit ....................................... 8
3.9. Connecting The Sealing Gas Valve................................. 8
3.10. Connecting The Remote Control Unit ............................. 9
3.11. Connecting The Serial Interface RS 485 ...................... 10
Connection........................................................................ 10
Connecting The RS 485 ................................................... 10
3.12. Connections Diagram...................................................... 11
Connections Diagram
For 3-phase Backing Pump ............................................ 12
4. Operations.............................................. 13
4.1. Filling In The Lubricant.................................................... 13
4.2. Before Switching ON....................................................... 13
4.3. Switching ON.................................................................... 13
4.4. Circulatory Lubrication.................................................... 14
4.5. Heating............................................................................... 14
4.6. Switching OFF And Venting............................................ 14
4.7. Gas Type Dependent Operations .................................. 14
4.8. Shutting Down For Longer Periods............................... 14
4.9. Operations With The DCU 001 / DCU 600 ..................... 15
4.10. Operations With The Remote Control Unit................... 15
Venting Release (Optional)............................................. 15
Motor, Turbopump .......................................................... 15
Pumping Station .............................................................. 15
Heating/Reset .................................................................. 15
Standby.............................................................................. 15
Rotation Speed Setting Operations
Via Input PWM ................................................................ 16
Switching Outputs............................................................ 16
5. Monitoring Operations ......................... 16
5.1. Operations Display Via LED............................................ 16
5.2. Turbopump Temperature Monitoring........................... 16
6. What To Do In Case
Of Breakdowns? .................................... 17
7. Service.................................................... 18
8. Maintenance.......................................... 19
8.1. Replacing The Lubricant................................................. 19
8.2. Cleaning Strainer And Floater........................................ 19
8.3. Cleaning And Changing
The Bearing On The Lubricant Pump............................ 19
9. Technical Data....................................... 21
9.1. Dimensions Diagram ....................................................... 22
10. Spare Parts............................................. 22
11. Accessories .......................................... 24
11.1. Lubricant............................................................................ 25
Declaration of Contamination.................... 26
Manufacturer´s Declaration..........(last page)
Please note: Current operating instructions are available via
www.pfeiffer-vacuum.de/Infoservice.

3
☞Read and follow all instructions in this manual.
☞Inform yourself regarding:
– Hazards which can be caused by the pump;
– Hazards which can be caused by your system.
– Hazards which can be caused by the media being
pumped.
☞Avoid exposing any part of the body to vacuum.
☞Observe the safety and accident prevention regulations.
☞Regularly check that all accident prevention measures are
being complied with.
☞Do not operate the turbopump with open high vacuum
flange.
☞Do not carry out any unauthorised conversions or alterati-
ons to the turbopump with TC 600.
☞When returning the turbopump observe the shipping
instructions.
☞Use at least 6 bracket screws to connect the high vacuum
flange (ISO-flange).
☞The turbopump must be anchored in accordance with the
installation instructions.
☞Do not disconnect the plug between the TC 600 and acces-
sory components during operations.
☞When the turbopump is open disconnect the voltage supp-
ly to the TC 600.
☞When working on the turbopump, the high vacuum flange
should only be opened once the rotor is at rest.
☞When using sealing gas, the pressure in the hose connec-
tion should be limited to 2 bar via the overpressure valve.
☞If a heater is in use high temperatures can arise of the
turbopump. Take care to avoid burns.
☞Keep leads and cables well away from hot surfaces
( > 70 °C).
☞Operate the turbopump with TC 600 only in conjunction
with the relevant Power Pack Unit (accessory).
☞The unit has been accredited protection class IP 30. When
the unit is operated in environments which require other
protection classes, the necessary measures must be
taken.
☞The mains connection must be subject to a safe
connection to the PE (protection class 1).
☞If the turbopump and the TC 600 are operated separately
(only permissible with the agreement of the manufacturer)
the turbopump must be connected to the PE.
☞The cause of any operating voltage leakage to earth (red
LED flashes) must be eliminated to avoid the danger of an
electric shock.
Modifications reserved.
1. Safety Instructions
1.1. For Your Orientation
Instruction in the text
➡Working instruction: here, you have to do something.
Symbols used
The following symbols are used throughout in illustrations:
High vacuum flange
Fore-vacuum flange
Electric connection
Sealing gas connection
Venting connection
Cooling water connection
Measuring connection
Abbreviations used
DCU = Operating and display control unit
TC = Electronic drive unit, turbopump
TPS = Power pack unit
Position numbers
The same pump and accessory parts have the same position
numbers in all illustrations.
1.2. Pictogram Definitions
Danger of burns from touching hot parts.
Danger of an electric shock.
Danger of personal injury.
Danger of damage to the pump or to the system.
Danger of injury from rotating parts.
M

4
2.1. Main Features
Turbopumps TPH/TPU 2201 with the TC 600 form a complete
unit. Voltage is supplied by Power Pack Unit (see
”Accessories”).
Turbomolecular Pump TPH/TPU 2201
1 High vacuum flange
2 Fore-vacuum flange
3 Cooling water connection
8 Electronic Drive Unit TC 600
42 Venting connection
66 Sealing gas connection
71 Lubricant filler srew
72 Lubricant drain screw
73 Sight glass
100 Measuring connection
Cooling
Standard: Water cooling
Integrated protective measures against excess temperatures:
The Electronic Drive Unit TC 600 reduces
the rotor rotation speed.
Bearings
The pump rotor has bearings at both ends. Each ball bearing
has its own circulatory lubrication system.
The turbopumps must not be transported when
filled with lubricant.
Feature TPH 2201 TPU 2201
High vacuum flange DN 250 ISO-K DN 250 CF-F
High vacuum seal Viton Metal
Attainable final < 1 · 10-8 mbar < 1 · 10-10 mbar
pressure (without baking-out) (with baking-out)
2. Understanding The Pumps TPH/TPU 2201
Proper use
– The Turbomolecular Pumps TPH/TPU 2201 may only be
used for the purpose of generating vacuum.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– If the pump is to be operated with more than 50% of the
permissible gas load, sealing gas must be used.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3.
– Only PFEIFFER power pack units may be used to operate
the TC 600. These power pack units guarantee voltage
which is safely separated from the mains accordance with
Standard EN 60 742. The use of other power pack units
requires the express agreement of the manufacturer.
– The pumps may only be operated providing the ambient
conditions in compliance with Protection Type IP 30 are
observed.
Improper use
The following is regarded, inter alia, as improper:
– The pumping of explosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with impermissibly high fore-vacuum pressure.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 9. ”Technical Data”).
– Operating the pump in environments which require a pro-
tection class superior to IP 30.
– The use of other power pack units or accessories which
are not named in this manual or which have not been
agreed by the manufacturer.
– The connection to power pack units with earthing of a
direct voltage pole.
Improper use will cause all claims for liability and guarantees
to be forfeited.
2.2. Differences Between The Pump Types
M
166 8
73 72 71 342 100 2

5
3. Installation
3.1. Preparations For Installation
Do not carry out any unauthorised conversions
or alterations to the turbopump.
– The maximum permissible rotor temperature of the pump is
120 °C. If the vacuum chamber or parts in the vacuum
chamber are heated, the values stated in the technical
data relating to the level of heat which may be radiated
into the pump must not be exeeded. If necessary, suitable
shielding must be fitted in the vacuum chamber before the
turbopump (constructional suggestions available on
request).
– Only remove the blank flange from the high and for-vacu-
um side immediately before connection.
– The turbopumps must not be transported when filled with
lubricant.
– Where magnetic fields of > 13.4 mT are involved suitable
shielding must be provided (available on request).
– If the pump is baked out, the body of the pump must be
insulated to prevent burns from accidental contact.
– Both the TPH and TPU 2201 must be anchored to the
surface.
– In the event of a sudden standstill of the rotor, torques of
up to 8960 Nm can arise and these must be taken up by the
turbopump and frame. Pumps must be anchored as
follows:
– ISO flange with 6 bracket screws,
or
– CF flange with the complete set of M8 screws,
or
– underside of the pump with 6 screws M6,
screws quality 8.8.
3.2. Installing The Pump,
Connecting The High Vacuum Side
Important
The utmost cleanliness must be observed when fitting all high
vacuum parts. Unclean components prolong the pumping
time.
Use a splinter shield
The use of a splinter shield in the high vacuum flange protec-
ts the turbopump against foreign bodies coming from the
vacuum chamber but does reduce the volume flow rate of the
pump by approximately 15%. For fitting splinter shields please
refer to “Fitting the splinter shield”.
The high vacuum side can be flanged onto the vacuum cham-
ber either directly or via a bellows or a vibration compensator
(see ”Accessories”).
Connecting via bellows
If the high vacuum side is to be flanged via a bellows, the tur-
bopump must be secured for example via the holes on the
underside of the turbopump (please see dimensions). The
fastening must be able to withstand the torque referred to in
Section 3.1.
Connecting Via A Vibration Compensator
The maximum permissible temperature at the
vibration compensator is 100 °C.
Where a vibration compensator is in use, a freely suspended
turbopump can be flanged onto the vacuum chamber.
Additional protective casing must be provided to take up the
energy of the rotor in the event of a malfunction (please
discuss this question with the manufacturer).
The maximum loading capacity of the high vacu-
um flange is 3000 N (equivalent to 300 kg).
This does not apply to pumps with flanges on the
side or below.
Asymmetric loading on the high vacuum flange
must be avoided.
If a vacuum chamber is fitted to the high vacuum flange with-
out support, it must be ensured that no torque is transmitted
to the flange (asymetrical weight of the vacuum chamber).
Even with side and under flanges, pumps can be flanged to
the vacuum chamber with a freely suspended horizontal rotor
shaft. It is a pre-condition that the vacuum chamber be firmly
anchored.
No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored.
Suspend or support all pipes to the pump.
Fitting The Splinter Shield
➡Insert the splinter shield in the ISO-K flange in condition on
delivery.
Inserting the splinter shield in ISO-K flage
A Strap (Condition on delivery)
A

6
3.3. Connecting The Fore-Vacuum Side
Backing pump: Fore-vacuum pressure ≤0.1 mbar
Recommendation: Rotary Vane Vacuum Pumps from the
PFEIFFER range.
Where large volumes of gas are
involved, we recommend a backing
pump combination of rotary vane
vacuum pump and roots vacuum pump.
Connecting the backing pump
All connections of the fore-vacuum line: With the usual small
flange or clamping flange components.
Be sure to conduct away the exhaust gases
from the backing pump. Do not reduce the free
cross section of the fore-vacuum flange with
following components.
The exhausted process gases and vapours can
represent a health hazard and can also be envi-
ronmentally damaging.
Comply with all the gas manufacture's safety
instructions.
➡With rigid pipe connections: Fit a bellows in the
connecting line to reduce vibration.
➡The electrical connection of the backing pump is made via
a relay box (Accessory) whose control line is connected to
”FV PUMP” on the TC 600.
Please refer to Operating Instructions PM 800 544 BN for
details on the relay box (1 phase backing pump and its instal-
lation).
Please refer to Section 3.12. for electrical connection of the
3 phase backing pump
Oxygen content: max. 4 mg/kg
Chloride content: max. 100 mg/kg
Carbonate hardness: max. 10 ° dH
Conaumption of potassium
permanganate: max. 10 mg/kg
Carbon dioxide: Undetectable
Ammonia: Undetectable
pH-value: 7 – 9
Max. fore-line over pressure: max. 6 bar
Minimum flow rate at gas load max.: 100 l/h at 15 °C
Connection to the cooling water mains
➡Fit the dirt trap (Accessory) in the supply line.
➡Connect the supply line with hose clips onto one of the two
cooling water connections.
➡Connect the return line to the other cooling water connec-
tion of the turbopump.
➡Tighten all hose clips and check for firm seating of the
hoses.
➡Tighten the hollow screws on the cooling water
connection to a torque of 20 Nm.
3.4. Connecting The Cooling Unit
The Turbopumps TPH/TPU 2201 have been designed to be
water cooled.
The cooling water can be drawn either
– from the cooling water mains, or
– from Recycled Water Cooling Unit TZK in closed circuit.
Cooling from the cooling water mains
To prevent deposits collecting in the pump the cooling water
must be filtered.
Minimum cooling water requirements:
Mechanically clean, optically clear, no turbidity, no sediment,
chemically neutral, temperature >dew point.
➡Before insert the splinter shield in the CF-F flange the strap
must be bent.
Inserting the splinter shield in CF-F flage
A Strap (bent)
A
3
31
3
33
32
Cooling from the cooling water mains
3 Cooling water connection
31 Supply line
32 Return line
33 Dirt trap

7
Cooling With The Recycled Water Cooling Unit TZK
(Accessory)
Dirt traps are not permissible in the lines.
All other steps as for connecting to the cooling water mains.
33
TZK
35
Cooling with Recycled Water Cooling Unit TZK
3 Cooling water connection
35 Recycled Water Cooling Unit TZK
8
HEAT/TMS 46
46a 46c 46b
Installing the heating unit
8 Electronic Drive Unit TC 600
46 Heating
46a Control lead, heating/TC 600
46b Heating relay box
46c Mains cable
3.6. Connecting The Heating Unit
High temperatures are generated when
turbopump or vacuum chamber are baked out.
Contact with hot parts can cause burns, even
when the heating has been switched off. Pump
casing should be insulated when fitting.
Do not touch pump casing during baking out.
➡Lay heating round the pump body and fasten beside on the
claps to the high vacuum flange.
➡Plug control lead 46a into the connection "HEAT/TMS" of
the TC 600 (8) on the turbopump.
➡Connect mains cable 46c to the mains voltage.
Caution! Ensure correct mains voltage range.
The electrical connections must be carried out
by qualified personnel in compliance with local
regulations. The mains plug may only be
connected to the mains voltage after the casing
heating unit has been fitted to the turbopump.
3.5. Connecting The Venting Valve
The venting valve (Accessory) provides automatic venting in
the event of a power failure and switching off.
Fitting the venting valve
➡Screw in venting valve with seal (USIT ring) on hexagonal
SW 14.
Electrical connection
➡Plug control lead 42a into the connection ”VENT“ of the
TC 600 (8) on the turbopump.
The venting mode of the venting valve is selected via the DCU
or Serial Interface RS 485.
VENT
8
42b
42a
42
Connecting the venting valve
8 Electronic Drive Unit TC 600
42 Venting valve
42a Connector plug venting valve/TC 600
42b Plug
The maximum pressure at the venting valve is
1.5 bar absolute.
Please refer to Operating Instructions PM 800 507 BN for
details on Venting Valve TVV 005.

8
3.8. Installing The Power Pack Unit
Voltage may only be supplied with the PFEIFFER
power pack units (Accessory). These power
pack units guarantee voltage which is safely
separated from the mains (in accordance with
Standard
EN 60 742). The use of other power pack units requires the
express agreement of the manufacturer.
Please note:
Operations with TPS 600/DCU 600 only possible in the
connection voltage range 185-264 VAC.
Please refer to Operating Instructions PM 800 521 BN for
details on Power Pack Unit TPS 600.
3.7. Connecting The Electronic
Drive Unit TC 600
Please note:
The turbopump and the Electronic Drive Unit TC 600 are
connected and together form a single unit.
Connecting cable 8a has to be ordered separately (see
”Accessories”).
➡Connect plug X4 on connecting cable 8a with connection
X4 on the TC 600 and secure with screw 8b.
➡Connect plug X2 on connecting cable 8a with Power Pack
Unit TPS 600/DCU 600 (”Accessories”) on connection X2.
Once operations voltage has been supplied, the
TC 600 performs a self test on the supply
voltage.
The supply voltage for the turbomolecularpumps
is 140 VDC ± 5% in accordance with EN 60 742.
8
8a X2
X4
X1 X2
S1
105
X4
8b
Connecting the TC 600 with Power Pack Unit TPS 600/DCU 600
X1 Mains connection
X2 Connection, Power Pack Unit TPS 600
X4 Connection TC 600
S1 ON/OFF switch
8 Electronic Drive Unit TC 600
8a Connecting cable, TC 600 – TPS/DCU
8b Screw
105 Power Pack Unit TPS 600
3.9. Connecting The Sealing Gas Valve
To protect the pump, particularly where corrosive or dust pro-
ducing processes are involved, it is necessary to use sealing
gas. Connection is made via the sealing gas valve (please see
“Accessories”).
Please refer to Section 9.1. ”Dimensions Diagram” for the
sealing gas connection.
Please refer to Operating Instructions PM 800 229 BN for
details on installing the sealing gas valve and adjusting the
sealing gas flow.

9
Pin arrangement and remote plug functions
Pin Nr. Input open (low) Input closed (high) On + 24 V (pin 1)
1 +24 V
2 venting blocked (see Section 3.5.) venting release (see Section 3.5.)
3 motor, turbopump off motor, turbopump on:
the turbopump is driven, current flows through the motor coils.
4 pumping station off pumping station on:
the turbopump is driven, backing pump is activated.
5 heating off heating on:
the heating is switched on once the rotation speed switchpoint is attained and
off when the rotation speed switchpoint is unattained.
5 Reset:
by supplying a pulse (T < 2s) with an amplitude of 24V a malfunction
acknowledgement can be processed.
6 standby off standby on:
pump is accelerated to 66% of its nominal rotation speed.
7 rotation speed setting mode off the rotation speed can be changed by feeding a PWM signal to this pin or
via Serial Interface RS 485 (see Section 4.10. ”Rotation Speed Setting Mode”)
8Output (low) Output (high)
rotation speed set rotation speed switchpoint attained;
switchpoint not attained output can be loaded with 24 V/50 mA
9Output (low) Output (high)
collective malfunction message; malfunction-free operations
output can be loaded with 24 V/50 mA
10 Mass (ground)
3.10. Connecting The Remote Control Unit
Remote control options for various functions are provided
with the connection ”REMOTE” on the TC 600 via the 10 pole
screw connector plug (maximum cable cross section
0.14 - 1.5 mm2/connection).
Shielded cable should be used. Shielding has to be
connected with the TC casing on the plug side of the TC 600
by using cable clamps.
The inputs 2 - 6 are activated by connecting them to the + 24V
on pin 1 (active high) (please see Section 3.12. ”Connections
Diagram”).
Pin Arrangement And Remote Plug Functions
(please see following table).
When connecting supply voltage, the turbopump
is started.
On delivery:
Pin 1, Pin 2, Pin 3 and Pin 4 are bridged in the
mating plug.

10
3.11. Connecting The Serial
Interface RS 485
An external operating component (DCU 001/DCU 600) or an
external computer can be connected via the connection
”RS 485” on the TC 600 with the use of an 8 pole modular
connecting cable.
The serial interface is galvanically and safely separated from
the maximum supply voltage from the TC 600.
Connection
Connecting The RS 485
Connecting to a fixed bus system:
➡Connect all units with D+ (pin 5/RS 485) and
D- (pin7/RS 485) to the bus.
➡The bus must be connected at both ends.
The connections should be made in accordance with the
specification of the Serial Interface RS 485.
PIN Arrangement
1 not connected
2 +24V output (≤210 mA loading
capacity)
3 not connected
4 not connected
5 RS 485: D+ (DO / RI)
6 Gnd
7 RS 485: D- (DO / RI)
8 not connected
All units connected to the bus must have differing serial inter-
face addresses (parameter 797).
The group address of the TC 600 is 960.
Only safety low voltages (SELV) may be connec-
ted to Serial Interface RS 485 .
All switched on remote functions have priority over the serial
interface functions.
Please Note:
Please refer to the separate Operating Instructions
PM 800 488 BN for more detailed information on operations
via Serial Interface RS 485 and its electronic data.
1 ... 8
Description Value
Serial Interface Type: RS 485
Baudrate: 9600 baud
data word lenghts: 8 bit
Parity: no (no parity)
Startbits: 1
Stopbits: 1..2
The electrical connections are internally optically decoupled.
Please note:
It is possible to connect an RS 232 (e.g. PC) via a level conver-
ter (please see ”Accessories”).
(View from the
plug side of the
TC 600)
RS 485
5:D+, 7:D–
RTRT
PC
Level Converter
TC TC

11
3.12. Connections Diagram
1~
1~

12
Connection Diagram For 3-phase Backing Pump

13
4. Operations
4.1. Filling In The Lubricant
Pumps must be filled with lubricant before being
operated.
If possible fill in the lubricant in the fitting
position of the pump.
The pumps must not be transported when filled
with lubricant.
Pumps are designed to operate with Lubricant “TL 011” or
“F3” (see rating plate).
For pumps which have been designed to operate with
“TL 011” a pack of “TL 011” is supplied with the pump.
For pumps which have been designed to operate with “F3”,
no lubricant is supplied with the pump. The lubricant must be
ordered separately (see Section 11.1.).
If “F3” is heated above 300 °C, toxic vapours
which can harm the airways are given off. Do
not allow “F3” to come into contact with tobac-
co products (danger of poisoning when ignited).
The precautions necessary in the handling of
chemicals must be observed.
Pumps designed to operate with “TL 011” must
not be modified to operate with “F3” and vice
versa.
Filling in the lubricant
➡Unscrew lubricant filler screw and, using the syringe pro-
vided, inject approximately 125 cm3lubricant into each
lubricant chambers.
➡The sight glass should be filled approximately in the middle
with lubricant
➡Screw back in lubricant filler screw with the O-ring.
4.2. Before Switching ON
Sections 4.2 to 4.6. refer only to operating the pump in its con-
dition on delivery, without the DCU operatimg unit. The
bridges ”venting release”, ”motor, TMP ON” and ”pumping
station ON” are fitted in the remote control plug.
Turbopump rotors rotate at high speed. When
the high vacuum flange is open there is a dan-
ger of injury and of damage to the pump caused
by objects falling into the pump.
Therefore never operate the pump with open
high vacuum flange.
➡With sealing gas: Open the sealing gas supply.
➡Open cooling water supply and check flow.
➡Plug connecting cable 8a (”Accessory”) into the TC 600
and connect with Powe Pack Unit TPS 600 on X2 (please
see Section 3.7.).
Please note:
The following pre-settings have been programmed:
– Start-up time 8 min
– Rotation speed switchpoint 80%
– Automatic venting 50%
These settings can only be altered via Serial Interface RS 485
(DCU or PC); please refer to the respective operating
instructions.
4.3. Switching ON
➡Switch on the turbopump with switch S1 on the power
pack unit.
– Once the self test has been successfully completed on the
TC 600 (duration approximately 20 seconds), both the
turbopump and the backing pump (if connected) begin
operating.
– With air cooling the cooling fan is also switched on via
Electronic Drive Unit TC 600.
Please note:
When the unit is switched on for the first time or after a lubri-
cant change the contact to the lubricating pump can open as
a result of the degassification of the lubricant. In such cases,
as for other malfunctions, the electronic drive unit shuts
down the turbopump.
➡The turbopump must be re-started with switch S1 on the
power pack unit.
Take care when pumping hazardous gases and
observe the safety precautions of the gas
manufacturer.
F1
Rear panel, TPS 600
S1 ON/OFF switch
X1 Mains connection
X2 Connection TC 600
F1 Fuse
F2 Fuse
S1 F2 X1 X2

14
Pumping gases with molecular mass ≥40 with
the incorrect gas mode can cause damage to
the pump.
For the vertex of the power characteristic line please refer to
Section 8. Technical Data.
Maximum power is applied when the pump starts in order to
limit the time required. Once the set rotation speed is
attained, switching to the selected power characteristic line
is automatic.
If the gas dependent maximum power is exceeded, the rotati-
on speed is reduced until equilibrium between the
permissible power and gas friction is attained. The power
limitation serves to protect the pump against thermal over-
loading. In order to avoid rotation speed fluctuations it is
recommended to set, in rotation speed setting mode, the
equilibrium frequency or a somewhat lower frequency.
Please note:
There can be types of pump whereby there is no differentiati-
on between the two ”gas modes” settings.
4.4. Circulatory Lubrication
The ball bearing on the fore-vacuum side is supplied with
lubricant via the lubricating pump.
The circulation of the lubricant is monitored via a switching
contact. If there is insufficient lubricant, the electronic drive
unit switches off the turbopump. Monitoring is active only
from 60% of the final rotation speed.
If, at a rotation speed of > 60% of the final rotation speed (for
example through the degassification of the lubricant), the
contact opens for ≥2 minutes, the electronic drive unit assu-
mes a lubricant deficiency and switches off the turbopump.
➡Check the filling level of the lubricant.
➡Re-start the turbopump with switch S1 on the power pack
unit.
4.5. Heating
Heating turbopumps and vacuum chambers accelorates the
attainment of final pressures.
The heating period is dependent on the level of contamination
and the required final pressure. Heat for at least four hours.
4.6. Switching OFF And Venting
To avoid contamination occurring when switching off, the
pump should be vented before shut-down.
➡Switch off both turbopump and backing pump on the
power pack unit at the same time with switch S1.
➡With the Venting Valve TVF 005 the turbopump is vented
automatically.
➡Shut off water supply.
4.7. Gas Type Dependent Operations
Water cooling is required if the pumps are to be
operated with gas load.
Where high level gas loads and rotation speeds are involved,
the resulting friction subjects the rotor to the effect of great
heat. To avoid over-heating, a power rotation speed charac-
teristic line is implemented in the TC 600; this ensures that
where maximum gas loads are involved, the pump will opera-
te at any rotation speed without the danger of damage
arising.
The maximum power is dependent on the type of gas. Two
characteristic lines are available for any type of gas in order
to fully exploit the power potential of the pump:
– "Gas-Mode 0" for gases with molecular mass ≥40 as, for
example, Argon;
– "Gas-Mode 1" for all lighter gases.
➡Set the applicable gas mode with the DCU 001 or DCU 100
(please refer to Operating Instructions ”Pumping
operations with the DCU” PM 800 547 BN).
Power
Frequency
DB
C
A
D-C = Gas mode «0»
B-A = Gas mode «1»
Run up
fnom
Gas type characteristic line
4.8. Shutting Down For Longer Periods
Vacuum pumps are sometimes used to pump
aggressive or hazardous gases. There is a dan-
ger of personal injury resulting from coming into
contact with process gases. Before removing a
turbopump from the system, first:
– Vent the turbopump with a neutral gas or
dry air.
– Ensure that there is no residual process gas in the system
nor in the feeder lines.
If the turbopump is to be shut down for more than a year:
➡Remove turbopump from the system.
➡Change the lubricant (see Section 8.1.).
Please note: Lubricant TL 011 must no longer be used after
2 years of non-operations.
➡Close the high vacuum flange and evacuate the turbopump
via the fore-vacuum flange.
➡Vent turbopump via the venting connection with nitrogen
or dry air.

15
Venting Release (Optional)
Automatic venting:
When the turbopump or pumping station is switched off the
venting valve opens for the venting time of 3600 seconds
(1 hour) when the venting frequency falls below 50% of the
final rotation speed (330 Hz). In the event of a mains power
failure if the venting frequency falls below 50% of the final
rotation speed the venting valve opens and closes on attain-
ment of 15% of the final rotation speed.
Venting OFF:
Venting does not take place.
Other venting modes:
Other venting modes can be selected via the DCU.
Motor, Turbopump
When the pumping station is switched on and once the self
test has been successfully completed (duration approximate-
ly 20 seconds), the turbopump is set in operation.
During operations, the turbopump can be switched on and off
while the pumping station is switched on.
Pumping Station
Any connected pumping station components are started up
(e.g. backing pump, venting valve, air cooling) and with simul-
taneous activation of the input ”motor, turbopump” the turbo-
pump is set in operation once the self test has been
successfully completed (duration approximately 20 seconds).
Heating/Reset
Heating (optional)
Once the rotation speed switchpoint is attained the heating
unit is switched on; when the rotation speed switchpoint is
fallen below the heating unit is switched off.
Reset
The heating input has two functions (please see Section 3.10.,
point 5 ”Reset”).
Standby
The pump can be operated optionally at 66% of its nominal
rotation speed (standby ON) or at its nominal rotation speed
(standby OFF).
➡Close fore-vacuum and venting connection by blank
flanging.
➡In rooms with moist or aggressive atmospheres, the turbo-
pump must be air-sealed in a plastic bag together with a
bag of dessicant, e.g silicagel.
Important:
If the pump has been shut down for 3 years a bearing change
must be carried out (please get in touch with PFEIFFER
Service).
4.9. Operations With The DCU 001 / DCU 600
Operations with the DCU 001 or DCU 600 should be carried out
in accordance with the relevant Operating Instructions
PM 800 477 BN (DCU description) and PM 800 547 BN (opera-
ting the pump with the DCU).
4.10. Operations With The Remote Control Unit
(please refer to the table in Section 3.10.).
Remote control operations can be performed via the connec-
tion with the designation “REMOTE” on the TC 600.
The connection is via a 10 pole screwed connector plug with
the following arrangement:
1- + 24V
2 - Input, venting
3 - Input, turbopump motor
4 - Input, pumping station
5 - Input, heating unit
6 - Input, Standby
7 - Input, PWM
8 - Switching output 1: Rotation speed switchpoint
9 - Switching output 2: Collective malfunction message
10 - Mass
Inputs 2-6 are activated if they are connected with the +24 V
on pin 1 (active high).
On delivery there is a bridge between Pin 1,
Pin 2, Pin 3 and Pin 4 on the TC 600 mating
plug.
When operations voltage is supplied and a
successfully completed
TC 600 self-test the turbopump and any connected backing
pump will be started.

16
5. Monitoring Operations
5.1. Operations Display Via LED
Certain operations modes of the turbopump and the TC 600
can be ascertained via the two integrated LEDs located on
the front panel of the TC 600.
The following operations modes are displayed:
5.2. Turbopump Temperature Monitoring
Where impermissible motor temperatures are involved or the
temperature of the TC 600 casing is too high, the motor
current is reduced. This can lead to dipping below the set
rotation speed switchpoint and results in the turbomolecular
pump being switched off.
LED on the TC 600 glows red: Collective malfunction.
LED Cause
glows green – Power pack unit OK
– Function ”pumping station ON”
carried out
flashes green – Power pack unit OK
– Pumping station OFF
blinks green – Mains power supply failure
glows red – Collective malfunction
(for example, start-up time
error, excess temperature,
turbopump or TC 600, lubricant
deficiency)
– Switching output 2 active (low)
blinks red – Warning
(for example, earth leakage
fault in the voltage supply,
mains power supply failure)
Please note:
Differentiated malfunction and warning signals are only
possible with the use of the DCU.
Switching Outputs
Switching outputs 1 and 2 can be loaded with a maximum
24 V / 50 mA per output. The following functions are assigned
to the switching outputs:
Switching output 1: Active high when the rotation speed
switchpoint is attained. The switchpoint
for the turbopump is set at 80% of the
nominal rotation speed. It can be used,
for example, for a message ”pump
ready to operate”.
Switching output 2: Active low with a malfunction -
collective malfunction message
The connection of a relay is made between pin 10 (mass) and
the respective switching output pin 8 or pin 9 (see Section
3.12. Connections Diagram).
T
0
U20%*f 100%*f
end
max. +33V
min. +13V
max. +7V
min. -33V
TT
PWM
*25% *75%
T
= 10ms (1±20%)
f=100Hz (1±20%)
end
PWM
PWM
PWM
Rotation Speed Setting Operations
Via Input PWM
The supply of pulse width modulated signals (PWM) with a
ground frequency of 100 Hz ±20% with an amplitude of maxi-
mum 24 V and a touch ratio of 25-75% enables the rotation
speed to be set in the range from 20-100% of the nominal
rotation speed.
If no signal is present the pump runs up to its final rotation
speed.
A PWM adapter box for rotation speed setting operations for
the turbopump is available as an option (please see
”Accessories”).

17
6. What To Do In Case Of Breakdowns?
Problem Possible Causes Remedy
Pump doesn't start; • Power supply interrupted • Check fuse in the power pack unit
None of the integrated LEDs • Check plug contacts on the power pack unit
glow on the TC 600 • Check power pack unit feeder line
• Check voltage on the power pack
unit (140V DC) at connection X2
• Incorrect operations voltage supplied • Supply correct operations voltage
• Pins 1-3 and 1- 4 on the remote- • Connect pins 1-3 and 1- 4 on the remote plug
plug not connected
• No supply of operations voltage • Check plug contacts on the power pack unit
• Defect TC 600 • Inform PFEIFFER Service of need for repair
• Reduction in the voltage in the cable • Use suitable cable
Pump doesn't attain nominal • Fore-vacuum pressure too high • Check backing pump function
rotation speed within the set - • Leak or too much gas • Check seals
start-up time; • Seek leak and repair
Pump cuts out during • Supply of process gas too high; reduce
operations • Rotor sluggish caused by • Check bearing (noises?): Request
defective bearing PFEIFFER Service to replace
• TC start-up time too short • Set longer start-up time with the DCU or PC
• Thermal overloading caused by:
– Insufficient water flow • Ensure free flow
– Insufficient air supply • Ensure adequate air supply
– Fore-vacuum pressure too high • Reduce fore-vacuum pressure
– Ambient temperature too high • Reduce ambient temperature
• Leak or too high a gas load • Seek leak in the system and repair
• Process gas supply too high; reduce
• Lubricant or lubricant
pump dirty • Carry out lubricant change as per
Section 8.1. or clean the lubricant
pump as per Section 8.3.
• Lubricant deficiency • Check lubricant and replace as necessary
Pump doesn't attain final pressure • Pump dirty • Bake out pump
• If seriously contaminated: Request
PFEIFFER Service to clean
• Leak in vacuum chamber, • Seek leak starting with vacuum chamber
lines or pump • Repair leak
Unusual operating noises • Bearing damaged • Inform PFEIFFER Service of need for repair
• Rotor damaged • Inform PFEIFFER Service of need for repair
• Splinter shield (if fitted) not • Check seat of splinter shield
seated firmly (see Section 3.2.)
Red LED on the TC 600 glows • Collective malfunction • Reset via mains OFF/ON or remote pin 5
• Different malfunction display
with a DCU possible
Red LED on the TC 600 blinks • Warning from: • Different warning display
with a DCU is possible
– Mains power failure • Ckeck power pack voltage
• Check the power pack mains connection
– Supply voltage short
circuit to earth • Check the power pack unit voltage for short
circuit to earth

18
7. Service
Do make use of our service facilities
In the event that repairs are necessary a number of options
are available to you to ensure any system down time is kept to
a minimum:
– Have the pump repaired on the spot by our PFEIFFER
Service Engineers;
– Return the pump to the manufacturer for repairs;
– Replace the pump.
Local PFEIFFER representatives can provide full details.
Please take into account that where PFEIFFER
Service replacement service is involved the
standard operating parameters are always
pre-set.
If your application requires different
parameters, please modify accordingly.
Please note:
The turbopump and the Electronic Drive Unit TC form a single
unit and must therefore be returned complete for repair pur-
poses. Before returning the unit it should be ensured that the
power pack unit is not the cause of the malfunction (please
see Section 5. for checking the power pack unit).
Before returning:
➡Please attach a clearly visible notice "Free of harmful sub-
stances" (both on the unit and also on the delivery note
and any accompanying letters).
"Harmful substances" are substances and preparations as
defined in the current, local, dangerous substances regulati-
ons; in the U.S.A. as" materials in accordance with the Code
of Federal Regulations (CFR) 49 Part 173.240 Definition and
Preparation". We will carry out the decontamination and
invoice this work to you if you have not attached this note.
This also applies where the operator does not have the facili-
ties to carry out the decontamination work.
Fill out the declaration of contamination
➡In every case the "Declaration of Contamination" must be
completed diligently and truthfully.
➡A copy of the completed declaration must accompany the
unit; any additional copies must be sent to your local
PFEIFFER Service Center.
Please get in touch with your local PFEIFFER representatives
if there are any questions regarding contamination.
Decontaminate units before returning or possi-
ble disposal. Do not return any units which are
microbiologically, explosively or radioactively
contaminated.
Returning contaminated units
If contaminated have to be returned for maintenance/repair,
the following instructions concerning shipping must be follo-
wed:
➡Neutralise the pump by flushing with nitrogen or dry air.
➡Seal all openings to the air.
➡Seal pump or unit in suitable protective foil.
➡Ship units only in appropriate transport containers.
Please note:
Repair orders are carried out according to our general condi-
tions of sale and supply. If repairs are necessary, please send
the pump to your nearest PFEIFFER Service Center.
Contact addresses and telephone hotline
Contact addresses and telephone numbers can be found on
the back cover of these operating instructions.

19
8. Maintenance
Important
No liability for personal injury nor material damage will be
accepted for damages and operational interruptions which
have been caused by improper maintenance; in addition, all
guarantees become invalid.
You can change the lubricant yourself. Your pump can be
cleaned on the spot if it is not very dirty.
Your local PFEIFFER Service can advise you regarding
cleaning procedures and any other maintenance and service
work.
Ensure no mechanical forces act on the
Electronic Drive Unit TC 600.
8.1. Replacing The Lubricant
The lubricant should be replaced, at the latest, after 5000 ope-
rating hours or at least once a year.
Where extreme operating conditions or unclean processes
are involved, the replacement interval should be checked
with your PFEIFFER Service Center.
➡Switch off the turbopump, vent to atmospheric pressure
(see Section 4.7.) and allow to cool as necessary.
➡Unsrew lubricant drain screw 72 and drain lubricant out of
both chambers into a suitable container.
➡Screw back in lubricant drain screws with o-ring 75.
➡Unsrew lubricant filler screws 71.
➡Using the syringe provided inject approximately 125 cm3of
lubricant into each lubricant chambers as per the rating
plate (please see Section 4.1. for the lubricant level).
➡Screw in lubricant filler screws 71 with o-ring 75.
Lubricants can contain toxic substances from
the medium pumped. Lubricant must be
disposed of in accordance with the respective
regulations.
Safety instructions data sheet on request.
8.2. Cleaning Strainer And Floater
The strainer 81 and the floater 79 must be cleaned in pure
alcohol after every lubricant replace or after every 20,000
operating hours.
All legal requirements regarding the handling of
solvents must be observed.
➡Drain lubricant and dispose of as described in Section 8.1.
➡Screw out screws 82 (4 pieces) and withdraw lubricant
pump 77.
➡Remove circlip 89.
➡Pull off strainer 81 and clean.
➡Screw off locking screw 80.
➡Remove floater 79.
➡Clean boring, sealing surface and floater.
➡Re-assemble all parts in reverse order.
Check cleanliness and correct positioning of the o-rings;
if necessary fit new once.
8.3. Cleaning And Changing The Bearing On
The Lubricant Pump
Please note:
If one lubricant pump requires a bearing change, the other
bearing should be changed at the same time.
➡Drain lubricant and dispose of as discribed in Section 8.1.
➡Remove fixtures of supply cable 83 on cooling water pipe.
➡Screw out screws 82 (4 pieces) and draw out lubricant
pump 77 from the housing in an axial direction; take care
with o-ring 74 and 87.
➡Remove circlip 89 and detach strainer 81 from bearing
mounting 84.
➡Unscrew screws 86 and detach bearing mounting 84.
➡Remove pump shaft 78a from part 84.
➡Remove both ball bearings 78 from pump shaft 78a.
➡Unscrew locking screw 80; take care to o-ring 88.
➡Remove floater 79 from the boring.
➡Clean all parts in pure alcohol.
➡Check strainer, ball bearings and o-rings for wear and taer
and replace as necessary.
➡Re-assemble lubricant pump in reverse order.
➡Fill in lubricant in accordance with Section 8.1.

20
71 Lubricant filler screw
72 Lubricant drain screw
73 Sight glass
74 O-ring
75 O-ring
76 O-ring
77 Lubricant pump
78 Ball bearing
78a Pump shaft
79 Floater
80 Locking screw
81 Strainer
82 Securing screw
83 Supply cable
84 Bearing mounting
86 Screw
87 O-ring
88 O-ring
89 Circlip
94 Switch
Lubricant pump