Pfeiffer TC400 User manual

Betriebsanleitung • Operating Instructions
PT 0203 BE/E (0910)
TC 400
PM C01 800
D-35614 Asslar
B
A
RS485
remote
accessory
PV.can
DC in
Electronic Drive Unit
TC 400

2
Table of contents
Table of contents
1 About this manual. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.1 Validity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2 Conventions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.1 Safety precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.2 Proper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
2.3 Improper use. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3 Product description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3.1 Product identification. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3.2 Range of application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
3.3 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
3.4 General connection description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
4 Connections diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
5 Connection "remote" . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5.1 Pin assignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
5.2 Operation via "remote" connection . . . . . . . . . . . . . . . . . . . . . . . . . . 8
6 Connection "RS485". . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
6.1 Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
6.2 Connecting Pfeiffer Vacuum display and control units or PC . . . . . 11
6.3 Cross-linking via the connection RS485 . . . . . . . . . . . . . . . . . . . . . 12
7 The Pfeiffer Vacuum parameter set. . . . . . . . . . . . . . . . . . . . . . . 12
7.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
7.2 Parameter overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
7.3 Configuring the connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
7.4 Operation with the Pfeiffer Vacuum parameter set . . . . . . . . . . . . . 19
8 Pfeiffer Vacuum Protocol for "RS485" . . . . . . . . . . . . . . . . . . . . 25
8.1 Telegram frame. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
8.2 Telegrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
8.3 Applied data types. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
9 Malfunctions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
9.1 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
9.2 Operating mode display via LED. . . . . . . . . . . . . . . . . . . . . . . . . . . 27
9.3 Error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
10 Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28
Declaration of conformity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

3
About this manual
1 About this manual
1.1 Validity
This operating manual is for customers of Pfeiffer Vacuum. It describes the func-
tioning of the designated product and provides the most important information for
safe use of the unit. The description follows applicable EU guidelines. All informa-
tion provided in this operating manual refer to the current state of the product's de-
velopment. The documentation remains valid as long as the customer does not
make any changes to the product.
Up-to-date operating instructions can also be downloaded from www.pfeiffer-vac-
uum.net.
1.2 Conventions
Safety instructions The safety instructions in Pfeiffer Vacuum operating manuals are the result of risk
evaluations and hazard analyses and are oriented on international certification
standards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844.
In this document, the following hazard levels and information are considered:
Pictograph defini-
tions
Instructions in the
text
Work instruction: here you have to do something.
Abbreviations used DCU:Display and operating unit
HPU:Handheld programming unit
TC:Electronic drive unit for turbopump
TPS:Mains pack
DI / DO:Digital input / digital output
AI / AO:Analog input / analog output
f:Rotation speed (derivated from frequency in Hz)
[P:000]:Parameter of the electronic drive unit with number
CAUTION
Possible danger
Injuries or property damages can occur.
NOTE
Command or note
Command to perform an action or information about properties, the disregarding of
which may result in damage to the product.
Warning of a displayed source of danger in connection
with operation of the unit or equipment.
Command to perform an action or task associated with a
source of danger, the disregarding of which may result in
serious accidents.

4
Safety
2Safety
2.1 Safety precautions
•Power supply: The turbopump power supply must apply to the requirements of
double insulation between mains input voltage and operating voltage according
to the regulations of IEC 61010 and IEC 60950. Therefore Pfeiffer Vacuum recom-
mends to use exclusively original-power packs and -accessories. Only in this
case Pfeiffer Vacuum is able to guarantee the compliance of the European and
North American guidelines.
• Observe all safety and accident prevention regulations.
• A safe connection to the protective earthing conductor (PE) is recommended
(protection class III).
• Regularly check the proper observance off all safety measures.
• Before carrying out any work disconnect the unit and all associated installations
safely from the mains.
• Do not loosen any plug connection during operations.
• The unit has been accredited with protection class IP 54. When installing into
ambient conditions, which afford other protection classes, the necessary mea-
sures must be taken.
• Keep leads and cables well away from hot surfaces (> 70 °C).
• Only seperate the pump and the electronic drive unit from each other after dis-
connecting the supply voltage and the complete standstill of the pump.
2.2 Proper use
NOTE
Duty to inform
Each person involved in the installation or operation of the unit must read and observe
the safety-related parts of these operating instuctions.
The operator is obligated to make operating personnel aware of dangers originating
from the unit or the entire system.
WARNING
Ensure safe electrical installation
Safe operation after installation is the responsibility of the operator.
Do not independently modify or change the pump and electrical equipment.
Make sure that the system is integrated in an emergency off safety circuit.
Consult Pfeiffer Vacuum for special requirements.
WARNING
Danger of electric shock
In case of defect, the parts connected to the power supply are under voltage.
Always keep the mains connection freely accessible so you can disconnect it at any
time.
NOTE
CE conformity
The manufacturer's declaration becomes invalid if the operator modifies the original
product or installs additional components!
Following installation into a plant and before commissioning, the operator must
check the entire system for compliance with the valid EU directives and reassess it
accordingly.

5
Product description
• The electronic drive unit TC 400 operates designated Pfeiffer Vacuum turbo-
pumps and their accessories.
2.3 Improper use
Improper use will cause all claims for liability and guarantees to be forfeited. Im-
proper use is deemed to be all use for purposes deviating from those mentioned
above, especially:
• The use of accessories, which are not named in this manual.
• The operation of the devices in potentially radioactive areas.
3 Product description
3.1 Product identification
Product features The electronic drive unit TC 400 is an integrated component of the turbopump. It's
purpose is to drive, monitor and control the entire pump.
To correctly identify the product when communicating with Pfeiffer Vacuum, al-
ways have the information from the rating plate available.
3.2 Range of application
Pfeiffer Vacuum electronic drive units TC 400 must be installed and operated in the
following ambient conditions.
Warranty void
if seal is broken
NOTE
Warranty seal
The product is sealed at the factory. Damaging or removal of the seal leads to the loss
of liability and warranty entitlements.
Do not open the product within its warranty period!
For process-related shorter maintenance intervals please contact the Pfeiffer Vacu-
um Service.
Characteristics TC 400
Connection voltage TC 24 V DC ± 5 % 48 V DC ± 5 %
Connection panel Standard (RS485) Standard (RS485)
Turbopump HiPace 300 300, 400, 700
Installation location weather protected (indoors)
Protection category IP 54
Protection class III
Temperature +5 °C to +40 °C (up to +35 °C with air cooling)
Relative humidity max. 80 %, at T ≤31 °C, up to max. 50% at T ≤40 °C
Atmospheric pressure: 77 kPa - 106 kPa
Installation altitude 2000 m max.
Degree of pollution 2
Overvoltage category II

6
Product description
3.3 Function
Fig. 1: Standard panel of the TC 400
3.4 General connection description
8a Connection "DC in"
8b Connection "accessory A+B"
8c Connection "remote"
8d Service connection "PV.can"
8e Connection "RS485"
8b
8d
8b
8c
8e 8a
DC in1
Casing plug with bayonet locking for the voltage supply between Pfeiffer Vac-
uum mains packs and the electronic drive unit TC.
1. "DC in" and "accessory" are already described in the operating instructions of the
turbopump.
accessory
M12 socket with screw coupling for the connection of Pfeiffer Vacuum acces-
sories. The use of a Y-connector enables double assignment of one connec-
tion.
PV.can
M12 casing socket with screw coupling and LED. The connection "PV.can"
serves to service purposes exclusively.
remote
High Density D-sub 26 pole female socket for the connection of a remote con-
trol.
RS485
M12 socket with screw coupling for the connection of a Pfeiffer Vacuum con-
trol unit or a PC. The use of a Y-connector enables the series connection in a
bus system.
Casing socket on the rear side of the electronic drive unit for the connection
to the turbopump.

7
Connections diagram
4 Connections diagram
Fig. 2: Connections diagram and assignment of the TC 400
41
5
23
32
5
14
13
4
2
13
2
19
10 18
1926
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
1
2
3
1
2
3
4
5
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
accessory A
accessory B
remote
DC inPV.canRS485
TC 400
Potential free contacts
n.c.
24 VDC
Accessory B1
FE
Accessory B2
+ UB(+24 / +48 VDC ± 5 %)
FE
GND
n.c.
24 VDC
Accessory A1
FE
Accessory A2
+ 24 VDC* out
DI Motor pump
DI Pumping station
DI Standby
DI1
DI2
DO1
DO2
DI3
AI+ 0-10 VDC
AI- GND
DI Error acknowledgement
DI Remote priority
Relay 1
Relay 1
Relay 1
Relay 2
Relay 2
Relay 2
Relay 3
Relay 3
AO1 / 0-10 V
DO Remote priority active
RS485 D-
RS485 D+
GND*
24 VDC* out
RS 485 D +
RS 485 D -
n.c.
GND*
All inputs and outputs
in this areaare
galvanically seperated
from +UB

8
Connection "remote"
5 Connection "remote"
Remote control options are provided via the 26-pole D-Sub connector with the des-
ignation ”remote“ on the electronic drive unit.
Remove the remote plug from the TC 400 and connect a remote control unit. Pin
assignment of the connector according to table.
Shielded connectors and cables must be used.
5.1 Pin assignment
5.2 Operation via "remote" connection
+24 VDC* Output /
Pin 1
Inputs 2 - 6 and the connections to Pins 10, 13, 14 are activated by connecting them
with +24 VDC to Pin 1 (active high). They can also be activated via an external PLC.
The functions are deactivated by "PLC high level" and by "PLC low level".
• PLC high level: +13 V to +33 V
• PLC low level: -33 V to +7 V
• Ri: 7 kΩ
Inputs The digital inputs at connection "remote" are used to connect various functions of
the electronic drive unit. Functions are assigned to the inputs DI1 - DI2 ex factory.
These can be configured via interface RS485 and the Pfeiffer Vacuum parameter
set.
19
1018
1926
Pin Function Designation factory settings
1 +24 VDC output (V+) Reference voltage for all digital in- and outputs
2 DI1 Enable venting; open: no; V+: yes
3 DI Motor pump Drive motor; open: off; V+: on
4 DI Pumping station Open: off; V+: on and error acknowledgement
5 DI Standby Standby rotation speed; open: off; V+: on
6 DI2 Heating; open: off; V+: on
7 AI+ Rotation speed setting
mode
Set value in rotation speed setting mode;
2-10 VDC = 20-100% of the nominal rotation speed
8 DO1 Rotation speed switch point attained; GND:no;
V+: yes (Imax =50mA/24V)
9 DO2 GND: error; V+: no error (Imax = 50 mA/24 V)
10 DI3 Sealing gas; open: off; V+: on
11 AI- Rotation speed setting
mode GND
Set value in rotation speed setting mode; GND
12 AO1 Actual rotation speed; 0-10 VDC is equivalent to 0-100%;
RL> 10 kΩ
13 DI Error acknowledgement Error acknowledgement: V+ pulse (min 500 ms)
14 DI Remote priority Control via interface "remote"; open: off
V+: set and priority over other digital inputs
15 Relais 1 Connection to Pin 16 if relay 1 is inactive
16 Relais 1 Rotation speed switchpoint attained;
relay contact 1 (Umax = 50 VDC; Imax = 1 A)
17 Relais 1 Connection to Pin 16 if relay 1 is active
18 Relais 2 Connection to Pin 19 if relay 2 is inactive
19 Relais 2 No error; relay contact 2 (Umax = 50 VDC; Imax = 1 A)
20 Relais 2 Connection to Pin 19 if relay 2 is active
21 Relais 3 Connection to Pin 22 if relay 3 is inactive
22 Relais 3 Warning; relay contact 3 (Umax = 50 VDC; Imax = 1 A)
23 DO Remote priority GND: off; V+: remote priority active
24 RS485 D+ according to specifications and Pfeiffer Vacuum protocol
25 RS485 D- according to specifications and Pfeiffer Vacuum protocol
26 Ground (GND) Reference ground for all digital inputs and all outputs

9
Connection "remote"
DI1 (Enable venting) / Pin 2
V+ : Venting is enabled (venting according to venting mode)
open: Venting locked (no venting is performed)
DI Motor pump / Pin 3
After Pin 4 (pumping station) is activated and the electronic drive unit successfully
completes the self-test (duration approx. 8 seconds), the turbopump is placed into
operation. During operation, the turbopump can be switched off and on again,
while the pumping station remains switched on. The turbopump is not vented
thereby.
V+ : Turbopump motor on
open: Turbopump motor off
DI Pumping station / Pin 4
Connected pumping station components (e.g. backing pump, venting valve, air
cooling unit) are triggered and, with Pin 3 (motor) simultaneously activated, the
turbopump is placed in operation. Any ongoing error messages are reset when
their cause has been eliminated.
V+ : Malfunction acknowledgement and pumping station on
open: Pumping station off
DI Standby / Pin 5
In standby mode, the turbopump operates at a specified rotor speed < nominal ro-
tation speed. Factory setting and recommended operation are 66.7 % of the nomi-
nal rotation speed.
V+ : Standby activated
open: Standby off, operation at nominal rotation speed
DI2 (Heating) / Pin 6
V+ : Heating on
open: Heating off
DI3 (Sealing gas) / Pin 10
V+ : Sealing gas valve open
open: Sealing gas valve closed
DI Error acknowledgement / Pin 13
V+ : Reset ongoing error messages when cause has been eliminated with a pulse
of min. 500 ms duration.
open: Inactive
DI Remote priority / Pin 14
V+ : The connection "remote" has operation priority over all other digital inputs.
open: Remote priority inactive
AI Rotation speed setting mode / Pin 7 and Pin 11
The analog input at the TC 400 defines the set rotation speed of the turbopump. An
input signal of 2 - 10 V between AI+ (Pin 7) and AI- (Pin 11) corresponds to a rotation
speed within the range of 20 - 100% of the nominal rotation speed. If the input is
open or signals fall below 2 V, the pump is accelerated up to nominal rotation
speed.
f(%)
100
20
210
U(V)

10
Connection "remote"
Outputs The digital outputs at the connection "remote" can be loaded with a maximum of
24 V / 50 mA per output. Outputs DO1 - DO2 are assigned functions in the factory.
These can be configured via interface RS485 and the Pfeiffer Vacuum parameter
set.
DO1 (Rotation speed switch point attained) / Pin 8
Active high after the rotation speed switch point is attained. Rotation speed switch
point 1 is factory-set to 80% of the nominal rotation speed. It can, for example, be
used for a "pump operational" message.
DO2 (No errors) / Pin 9
When the supply voltage for the TC has been established, digital output DO2 per-
manently outputs 24 VDC which means "no errors". Active low in case of error (col-
lective error message).
DO Remote priority active / Pin 23
Active high: The connection "remote" takes priority over any other control panels
connected to the TC (e.g. RS485). With active low, the connection "remote" is ig-
nored.
AO1 Analog output 0-10 V DC / Pin 12
A rotation-speed-proportional voltage (0-10 VDC equals 0 - 100 % x fNominal) can be
picked up via the analog output (load R ≥10 kΩ). Additional functions (optionally
current/power) can be assigned to the analog output via DCU, HPU or PC.
Relay contacts Relay 1 / Pin 15, Pin 16 and Pin 17
The contact between Pin 16 and Pin 15 is closed when the rotation speed switch
point is underrun; relay 1 is inactive. The contact between Pin 16 and Pin 17 is
closed when the rotation speed switch point is attained; relay 1 is active.
Relay 2 / Pin 18, Pin 19 and Pin 20
The contact between Pin 19 and Pin 18 is closed when operation is malfunction
free; relay 2 is inactive. The contact between Pin 19 and Pin 20 is closed when a
malfunction is present; relay 2 is active.
Relay 3 / Pin 21 and Pin 22
The contact between Pin 21 and Pin 22 is closed when no warning messages are
active; relay 3 is inactive. The contact between Pin 21 and Pin 22 is open when a
warning message is present; relay 3 is active.
RS485 One Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can
be connected respectively to the electronic drive unit via Pin 24 and Pin 25 of the
connection "remote" on the electronic drive unit.
Establish the connections according to the specification of the interface RS485.

11
Connection "RS485"
6 Connection "RS485"
6.1 Connections
A Pfeiffer Vacuum display and control panel (DCU or HPU) or an external PC can be
connected to the electronic drive unit via the connection designated "RS485". The
interface is electrically isolated from the maximum supply voltage of the electronic
drive unit. The electrical couplings are optically decoupled internally.
6.2 Connecting Pfeiffer Vacuum display and control units or PC
Use the connection cable supplied with the control panel or from the range of
accessories.
The connection of respectively one external operating unit is possible on the in-
terface RS 485.
A USB interface (PC) can be connected via the USB/RS485-converter.
Fig. 3: Optional connection possibilities for interface RS485
Designation Value
Serial interface RS485
Baud rate 9600 Baud
Data file word length 8 bit
Parity keine (no parity)
Start bits 1
Stop bits 1..2
12
34
5Pin Assignment
1RS485:D+
2 +24 V output, loadable with ≤210 mA
3 GND
4RS485:D-
5notconnected
DCU 002
DCU 310 / 400
TC 400
HPU 001
RS485
USB/RS485-converter

12
The Pfeiffer Vacuum parameter set
6.3 Cross-linking via the connection RS485
Establish the connections according to the specification of the interface RS485.
Connect all units with D+ and D- to the bus.
• The group address of the electronic drive unit is 962.
• All units connected to the bus must have differing RS485 device addresses
[P:797].
7 The Pfeiffer Vacuum parameter set
7.1 General
All function-relevant variables of a turbopump are anchored in the corresponding
electronic drive unit in the form of parameters. Each parameter has a three-digit
number and a designation. Parameters can be used via Pfeiffer Vacuum display
and control panels or via RS485 with the Pfeiffer Vacuum protocol.
USB/RS485-converterTC 400
TC 600 / 750
M12
RJ45
TC TC
D+
D-
USB/RS485-converter
RS 485
USB
PC
CAUTION
Danger of electric shock
The insulation measures of the bus system are designed only for use with safety extra-
low voltage.
Connect only suitable devices to the bus system.

13
The Pfeiffer Vacuum parameter set
Conventions Parameters are displayed in square brackets as a three-digit number in bold font.
The designation may also be stated if necessary.
Example: [P:002] Standby
7.2 Parameter overview
Annotation
Control commands
NOTE
Additional parameters in the control unit
For the control of connected external components (e.g. vacuum measurement devices)
there are additional parameters fixed in the respective Pfeiffer Vacuum display and con-
trol unit.
Please consider the respective operating instructions.
#Three figure number of the parameter
Display Notification of the parameter in a Pfeiffer Vacuum display and control unit
Designation Short description of the parameter
Functions Functional description of the parameter
Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum
protocoll
Access method R: read access; W: write access
Unit Physical unit of the described characteristic
min / max permissible limits for value input
default factory settings (partially specific of the pump type)
Parameter can be stored non volatile in the electronic drive unit and may
be reused after resetting of the mains supply.
# Display Designation Functions
Data type Access method
Unit min max default 
001 Heating Heating 0 = off
1 = on
0RW 0 1 0 x
002 Standby Standby 0 = off
1 = on
0RW 0 1 0 x
004 RUTimeCtrl Run-up time control 0 = off
1 = on
0RW 0 1 1 x
009 ErrorAckn Error acknowledgement 1 = Error acknowledgement 0 W 1 1 x
010 PumpgStatn Pumping station 0 = off
1 = on and error acknowledgement
0RW 0 1 0 x
012 EnableVent Enable venting 0 = no
1 = yes
0RW 0 1 0 x
017 CfgSpdSwPt Configuration rotation speed switch point 0 = Rotation speed switch point 1
1 = Rotation speed switch point 1&2
7RW 0 1 0 x

14
The Pfeiffer Vacuum parameter set
019 Cfg DO2 Configuration output DO2 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pumpe decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
7RW 0 15 1 x
023 MotorPump Motor pump 0 = off
1 = on
0RW 0 1 0 x
024 Cfg DO1 Configuration output DO1 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pumpe decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
7RW 0 15 0 x
025 OpMode BKP Operation mode backing pump 0 = Continous operating
1 = Intermittend mode
2 = Delayed switch-on
7RW 0 2 0 x
026 SpdSetMode Rotation speed setting mode 0 = off
1 = on
7RW 0 1 0 x
027 GasMode Gas mode 0 = Heavy Gase
1 = Light Gase
2 = Helium
7RW 0 1 0 x
030 VentMode Venting mode 0 = Delayed venting
1 = No venting
2 = Direct venting
7RW 0 2 0 x
035 Cfg Acc A1 Configuration accessory connection A1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Venting valve, normally open
7RW 0 7 0 x
036 Cfg Acc B1 Configuration accessory connection B1 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Venting valve, normally open
7RW 0 7 1 x
# Display Designation Functions
Data type Access method
Unit min max default 

15
The Pfeiffer Vacuum parameter set
037 Cfg Acc A2 Configuration accessory connection A2 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Venting valve, normally open
7RW 0 7 3 x
038 Cfg Acc B2 Configuration accessory connection B2 0 = Fan (continous operation)
1 = Venting valve, normally closed
2 = Heating
3 = Backing pump
4 = Fan (temperature controlled)
5 = Sealing gas
6 = always 0
7 = always 1
8 = Venting valve, normally open
7RW 0 7 2 x
045 Cfg Rel R1 Configuration Relay 1 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pumpe decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
7RW 0 15 0 x
046 Cfg Rel R2 Configuration Relay 2 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pumpe decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
7RW 0 15 1 x
047 Cfg Rel R3 Configuration Relay 3 0 = Rot. speed switch point attained
1 = No error
2 = Error
3 = Warning
4 = Error and/or warning
5 = Set speed attained
6 = Pump on
7 = Pump accelerates
8 = Pumpe decelerates
9 = always 0
10 = always 1
11 = Remote priority active
12 = Heating
13 = Backing pump
14 = Sealing gas
15 = Pumping station
7RW 0 15 3 x
050 SealingGas Sealing gas 0 = off
1 = on
0RW 0 1 0 x
# Display Designation Functions
Data type Access method
Unit min max default 

16
The Pfeiffer Vacuum parameter set
Status requests
055 Cfg AO1 Configuration output AO1 0 = Actual rotation speed
1 = Power
2 = Current
3 = always 0 V
4 = always 10 V
5 = follows AI1
7RW 0 5 0 x
057 Cfg AI1 Configuration input AI1 0 = Disconnected
1 = Set value rot. speed setting mode
7RW 0 1 0 x
060 CtrlViaInt Control via interface 1 = Remote
2 = RS485
4 = PV.can
8 = Field bus
16 = E74
7RW 1 255 1 x
061 IntSelLckd Interface selection locked 0 = no
1 = yes
0RW 0 1 0 x
062 Cfg DI1 Configuration input DI1 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting ≠[P:063/064]
7RW 0 5 1 x
063 Cfg DI2 Configuration input DI2 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting ≠[P:062/064]
7RW 0 5 2 x
064 Cfg DI3 Konfiguration input DI3 0 = Deactivated
1 = Enable venting
2 = Heating
3 = Sealing gas
4 = Run-up time control
5 = Rotation speed setting mode
Setting ≠[P:062/063]
7RW 0 5 3 x
# Display Designation Functions
Data type Access method
Unit min max default 
# Display Designation Functions
Data type Access method
Unit min max default 
300 RemotePrio Remote priority 0 = no
1 = yes
0R 0 1
302 SpdSwPtAtt Rotation speed switch point attained 0 = no
1 = yes
0R 0 1
303 Error code Error code 4R
304 OvTempElec Excess temperature electronic drive unit 0 = no
1 = yes
0R 0 1
305 OvTempPump Excess temperature pump 0 = no
1 = yes
0R 0 1
306 SetSpdAtt Set rotation speed attained 0 = no
1 = yes
0R 0 1
307 PumpAccel Pump accelerates 0 = no
1 = yes
0R 0 1
308 SetRotSpd Set rotation speed (Hz) 1 R Hz 0 999999
309 ActualSpd Actual rotation speed (Hz) 1 R Hz 0 999999
310 DrvCurrent Drive current 2 R A 0 9999.99
311 OpHrsPump Operating hours pump 1 R h 0 65535 x
312 Fw version Firmware version electronic drive unit 4 R
313 DrvVoltage Drive voltage 2 R V 0 9999.99
314 OpHrsElec Operating hours electronic drive unit 1 R h 0 65535 x
315 Nominal Spd Nominal rotation speed (Hz) 1 R Hz 0 999999
316 DrvPower Drive power 1 R W 0 999999
319 PumpCylces Pump cycles 1 R 0 65535 x
324 TempPwrStg Temperature power stage 1 R °C 0 999999

17
The Pfeiffer Vacuum parameter set
Set value settings
7.3 Configuring the connections
The electronic drive unit is pre-configured in the factory. Thereby the turbopump
is immediately operational with the necessary functions. The connections of the
electronic drive unit can be configured to suit individual requirements using the
parameter set.
Accessory connection Configuration via parameters [P:035], [P:036], [P:037] or [P:038].
326 TempElec Temperature electronic 1 R °C 0 999999
330 TempPmpBot Temperature pump bottom part 1 R °C 0 999999
336 AccelDecel Acceleration / Deceleration 1 R rpm/s 0 999999
342 TempBearng Temperature bearing 1 R °C 0 999999
346 TempMotor Temperature motor 1 R °C 0 999999
349 ElecName Name of electronic drive unit 4 R
354 HW Version Hardware version electronic drive unit 4 R
360 ErrHist1 Error code history, pos. 1 4 R x
361 ErrHist2 Error code history, pos. 2 4 R x
362 ErrHist3 Error code history, pos. 3 4 R x
363 ErrHist4 Error code history, pos. 4 4 R x
364 ErrHist5 Error code history, pos. 5 4 R x
365 ErrHist6 Error code history, pos. 6 4 R x
366 ErrHist7 Error code history, pos. 7 4 R x
367 ErrHist8 Error code history, pos. 8 4 R x
368 ErrHist9 Error code history, pos. 9 4 R x
369 ErrHist10 Error code history, pos. 10 4 R x
384 TempRotor Temperature rotor 1 R °C 0 999999
397 SetRotSpd Set rotation speed (rpm) 1 R rpm 0 999999
398 ActualSpd Actual rotation speed (rpm) 1 R rpm 0 999999
399 NominalSpd Nominal rotation speed (rpm) 1 R rpm 0 999999
# Display Designation Functions
Data type Access method
Unit min max default 
# Display Designation Functions
Data type Access method
Unit min max default 
700 RUTimeSVal Set value run-up time 1 RW min 1 120 8 x
701 SpdSwPt1 Rotation speed switch point 1 1 RW % 50 97 80 x
707 SpdSVal Set value in rot. speed setting mode 2 RW % 20 100 50 x
708 PwrSVal Set value power consumption 7 RW % 10 100 1001x
710 Swoff BKP Switching off threshold backing pump in in-
termittend mode
1RWW 0 1000 0 x
711 SwOn BKP Switching on threshold backing pump in in-
termittend mode
1RWW 0 1000 0 x
717 StdbySVal Set value rotation speed at standby 2 RW % 20 100 66.7 x
719 SpdSwPt2 Rotation speed switch point 2 1 RW % 5 97 20 x
720 VentSpd Venting rot. speed at delayed venting 7 RW % 40 98 50 x
721 VentTime Venting time at delayed venting 1 RW s 6 3600 3600 x
777 NomSpdConf Nominal rotation speed confirmation 1 RW Hz 0 1500 x
797 RS485Adr RS485 device address 1 RW 1 255 1 x
1. depending on the pump type
Option Description
0 = Fan (continous operation) Control via parameter Pumping station
1 = Venting valve, normally closed Control via parameter Enable venting, when using a
venting valve which is normally closed.
2 = Heating Control via parameters Heating and Rotation speed
switchpont attained
3 = Backing pump Control via parameters Pumping station and operation
mode backing pump
4 = Fan (temperature controlled) Control via parameter Pumping station and temperature
thresholds

18
The Pfeiffer Vacuum parameter set
Digital inputs on
"remote"
Configuration via parameters [P:062], [P:063] or [P:064].
Digital outputs and
relays on "remote"
Configuration via parameters [P:019] and [P:024], respectively [P:045], [P:046]
and [P:047].
Analog output on
"remote"
Configuration via parameter [P:055].
Analog input on
"remote"
Configuration via parameter [P:057].
5 = Sealing gas Control via parameters Pumping station and Sealing gas
6 = always 0 GND for the control of an external device
7 = always 1 +24 VDC for the control of an external device
8 = Venting valve, normally open Control via parameter Enable venting, when using a
venting valve which is normally open.
Option Description
Option Description
0 = deaktiviert Connection deactivated
1 = Enable venting Control is equal to parameter [P:012]
2 = Heating Control is equal to parameter [P:001]
3 = Sealing gas Control is equal to parameter [P:050]
4 = Run-up time control Control is equal to parameter [P:004]
5 = Rotation speed setting mode Control is equal to parameter [P:026]
Option Description
0 = Rotation speed switchpoint attained Signal, if switchpoint attained
1 = No error Signal, if failure-free operation
2 = Error Signal, if error message is active
3 = Warning Signal, if warning message is active
4 = Error and / or warning Signal, if error and / or warning is active
5 = Set rotation speed attained Signal, if set rotation speed is attained
6 = Pump on Signal, if Pumping station and Motor is on; No Error
7 = Pump accelerates Pumping station is on;Actual rotation speed < Set rota-
tion speed
8 = Pumpe decelerates Pumping station is on;Actual rotation speed > Set rota-
tion speed
Pumping station is off;Rotation speed > 3 Hz
9 = always 0 GND for the control of an external device
10 = always 1 +24 VDC for the control of an external device
11 = Remote priority active Signal, if Remote priority is active
12 = Heating Control is equal to parameter [P:001]
13 = Backing pump Control via parameter Pumping station and operation
mode backing pump
14 = Sealing gas Control is equal to parameter [P:050]
15 = Pumping station Control is equal to parameter [P:010]
Option Description
0 = Rotation speed Rotation speed signal; 0 - 10 VDC = 0 - 100 % x fNominal
1 = Power Power signal; 0 - 10 VDC = 0 - 100 % x Pmax
2 = Current Current signal; 0 - 10 VDC = 0 - 100 % x Imax
3 = always 0 V always GND
4 = always 10 V output of continously 10 V DC
5 = follows AI1 follows the analogue input 1
Option Description
0 = Switched off Connection is deactivated
1 = Set value in rotation speed setting
mode
Rotation speed setting mode via pin 7 (0 - 10 V) and pin 11
(GND)

19
The Pfeiffer Vacuum parameter set
Control via interface Configuration via parameters [P:060] and [P:061].
7.4 Operation with the Pfeiffer Vacuum parameter set
Factory settings The electronic drive unit is pre-programmed in the factory. This guarantees proper,
reliable turbopump operation without the need for additional configuration.
Checking the adjust-
ments
Before operating with parameters, check set values and control commands for
their suitability for the pumping process.
Remove the remote plug from electronic drive unit if required.
Gas type dependent
operations
Friction causes the rotor to heat up severely under gas load and high rotation
speed. To avoid overheating, the electronic drive unit has implemented power-ro-
tation speed-characteristics, whereby the pump can be operated at every rotation
speed with the maximum allowable gas load without danger of damage. The max-
imum power consumption depends on the gas type. Three characteristics are
available in order to completely exhaust the pump's capacity for each gas type.
• Gas mode "0" for gases with the molecular mass >39, e.g. Ar.
• Gas mode "1" for gases with the molecular mass ≤39.
• Gas mode "2" for helium.
• Power characteristics according to the technical data of the turbopump.
Check and set-up the gas mode via [P:027].
Option [P:060] Description
1 = remote Operation via connection "remote"
2 = RS485 Operation via connection "RS485"
4 = PV.can For service purposes only
8 = Field bus Operation via field bus
16 = E74 Operation via connection "E74"
Option [P:061] Description
0 = no Interface selection via [P:060]
1 = yes Interfaces selection locked
CAUTION
Danger of the pump being destroyed
Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de-
struction of the pump.
Ensure the gas mode is correctly set.
Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80).

20
The Pfeiffer Vacuum parameter set
Fig. 4: Principle of power characteristics lines for gas type dependent operations,
e.g. gas mode = 0
The turbopump runs up with maximum power consumption. When the nominal
and/or set rotation speed is reached, the pump automatically switches over to the
chosen power characteristic of the selected gas mode. Increasing gas load is initial-
ly compensated by a rise in power consumption in order to keep the rotation speed
constant. Increasing gas friction, however, causes the turbopump to heat up more
severely. When the gastype-dependent maximum power is exceeded, the rotation
speed of the turbopump is reduced until an equilibrium between permissible pow-
er and gas friction is attained.
To avoid rotation speed fluctuations, Pfeiffer Vacuum recommends setting a
somewhat lower frequency in rotation speed setting mode.
Set value power con-
sumption
Adjust the parameter [P:708] to the desired value in %.
If adjusting the set value power consumption below 100 % the run-up time pro-
longs. To avoid error messages, the parameter [P:700] RUTimeSVal should be ad-
justed accordingly.
Run-up time The run-up of the turbopump is time-monitored ex factory. There are various caus-
es of prolonged run-up times, e.g.:
• Too high gas loads
• Leakage in the system
• The set value run-up time is too low
Eliminate any external and application-related causes.
Adjust the run-up time via parameter [P:700].
Adjusting the rota-
tion speed switch-
point
The rotation speed switch point can be used for the message "Pump operational
for the process". Overrunning or underrunning the active rotation speed switch
point activates or deactivates a signal at the pre-configured output on the electron-
ic drive unit and at the status parameter [P:302].
Rotation speed switchpoint 1
Adjust the parameter [P:701] to the desired value in %.
Parameter [P:017] = 0
Signal output and status parameter [P:302] are based on the set value for rotation
speed switch point 1 [P:701].
[P:708]
D
F
B
A
C
E
Pmax
fN
Run-up
Rotation speed
Power
C-D = gas mode "0"
A-B = gas mode "1"
E-F = gas mode "2"