Pfeiffer VACUUM TPR 265 User manual

Operating Instructions
Incl. Declaration of Conformity
Compact Pirani Gauge
TPR 265
BG 805 177 BE / C (2005-04)
Product Identification
In all communications with Pfeiffer Vacuum, please specify
the information on the product nameplate. For convenient
reference copy that information into the space provided be-
low.
Typ:
No:
F-No:
V W
Pfeiffer Vacuum, D-35614 Asslar
Validity
This document applies to products with the following part
numbers:
PTR26750A (DN 16 ISO-KF 80 °C)
PTR26751A (DN 16 CF-R 80 °C)
PTR26752A (1/8" NPT 80 °C)
PTR26753A (8 VCR 80 °C)
PTR26760A (DN 16 ISO-KF 250 °C)
PTR26761A (DN 16 CF-R 250 °C)
PTR26800A (DN 16 ISO-KF 80 °C)
The part number (No) can be taken from the product name-
plate.
If not indicated otherwise in the legends, the illustrations in
this document correspond to gauges with DN 16 ISO-KF
vacuum connections. They apply other vacuum connections
by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
Intended Use
The Compact Pirani Gauge TPR 265 has been designed for
vacuum measurement of gases in the pressure range of
5×10-4 … 1000 mbar.
The gauge can be operated in connection with a Pfeiffer
Vacuum controller for Compact Gauges or with another
evaluation unit.
Functional Principle
Over the whole measurement range, the measurement signal
is output as a logarithm of the pressure.
Trademarks
VCR® Swagelok Marketing Co.
Safety
Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and envi-
ronmental damage.
Caution
Information on correct handling or use. Disregard can lead
to malfunctions or minor equipment damage.
Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out
by persons who have suitable technical training and the
necessary experience or who have been instructed by the
end-user of the product.
General Safety Instructions
• Adhere to the applicable regulations and take the nec-
essary precautions for the process media used.
Consider possible reactions between the materials and the
process media.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
• Adhere to the applicable regulations and take the nec-
essary precautions for all work you are going to do and
consider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions when
handling contaminated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty be-
comes null and void if the end-user or third parties
• disregard the information in this document
• use the product in a non-conforming manner
• make any kind of interventions (modifications, alterations
etc.) on the product
• use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with
the process media used.
Gauge failures due to contamination, as well as expendable
parts (filament), are not covered by the warranty.
Technical Data
Measurement principle thermal conductance accord-
ing to Pirani
Measurement range
(air, O2, CO, N2)5×10-4 … 1000 mbar
Accuracy ≈10% of measured value in
range 1×10-3 … 100 mbar
(outside this range up to
factor 2)
Repeatability ≈2% of measured value in
range 1×10-3 … 100 mbar
Output signal
(measurement signal)
Voltage range
Measurement range 0 … ≈+10.3 V
+2.2 … +8.5 V
Voltage vs. pressure logarithmic, 1.0 V / decade
Error signal <0.5 V (filament rupture)
Output impedance 2×10 Ω
Minimum loaded impedance 10 kΩ, short-circuit proof
Response time
PTR26750A
PTR26751A
PTR26752A
PTR26753A
PTR26760A
PTR26761A
PTR26800A
≈10 ms
≈10 ms
≈10 ms
≈10 ms
≈10 ms
≈10 ms
≈500 ms
Gauge identification resistance 3.0 kΩreferenced
to supply common
Adjustment
Potentiometer <HV>
Potentiometer <ATM> adjustment under 10-4 mbar
adjustment at atmospheric
pressure
Supply
DANGER
The gauge may only be connected to supply and
evaluation units that conform to the requirements
of a grounded protective extra-low voltage
(SELV-E according to EN 61010). The connec-
tion to the gauge has to be fused 1).
Supply voltage at the gauge +14 … +30 VDC
(ripple ≤1 Vpp)
Power consumption ≤1.5 W
Fuse required 1) ≤1 AT (slow)
Electrical connection Hirschmann appliance con-
nector, type GO 6, 6 poles
Sensor cable 5 poles plus shielding
Cable length ≤150 m (5×0.25 mm2)
≤200 m (5×0.34 mm2)
Grounding concept →"Electrical Connection"
Vacuum connection
to signal common connected via 10 kΩ
(voltage difference ≤±50 V)
Supply common
to signal common conducted separately, for differential measurement
Materials exposed to vacuum
Vacuum connection
Filament
Feedthrough
Baffle (only version
DN 16 ISO-KF)
Other materials
stainless steel
W
glass
stainless steel
Ni, Cu, NiFe
Internal volume
PTR26750A
PTR26751A
PTR26752A
PTR26753A
PTR26760A
PTR26761A
PTR26800A
≈2 cm3
≈2 cm3
≈2 cm3
≈2 cm3
≈10 cm3
≈10 cm3
≈2 cm3
Admissible pressure ≤10 bar (absolute) limited to
inert gases
1) Pfeiffer Vacuum controllers fulfill these requirements.

Admissible temperatures
Operation
Vacuum connection
PTR26750A
PTR26751A
PTR26752A
PTR26753A
PTR26760A
PTR26761A
PTR26800A
Filament
Storage
+5 … +60 °C
<80 °C
<80 °C
<80 °C
<80 °C
<250 °C
<250 °C
<80 °C
120 °C
–20 … +65 °C
Relative humidity ≤80% at temperatures up to
≤+31 °C, decreasing to 50%
at +40 °C
Mounting orientation any
Use indoors only altitude up to
2000 m NN
Degree of protection IP 40
Dimensions [mm]
PTR26753A
8 VCR
female
62
PTR26752A
1/8" NPT
41.4
ATMHV
28
65.3
16
22.5
20
45
22.65
19.4
PTR26750A
PTR26800A
DN 16 ISO-KF
PTR26751A
DN 16 CF-R
PTR26761A
DN 16 ISO-KF PTR26760A DN 16 CF-R
121.6
121.65
Weights
PTR26750A
PTR26751A
PTR26752A
PTR26753A
PTR26760A
PTR26761A
PTR26800A
≈100 g
≈120 g
≈120 g
≈140 g
≈145 g
≈160 g
≈100 g
Measurement Signal vs. Pressure
1E+05
1E+04
1E+03
1E+02
1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
overrange
Pa
mbar
torr
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.3 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
sensor error
underrange
Pressure p
Measurement signal U[V]
p = 10(U-c) ⇔U = c + log10 p
valid in the range 5×10-4 mbar <p< 1000 mbar
3.75×10-4 Torr <p< 750 Torr
5×10-2 Pa <p< 1×105Pa
Up c Up c
[V] [mbar] 5.5 [V] [micron] 2.625
[V] [µbar] 2.5 [V] [Pa] 3.5
[V] [Torr] 5.625 [V] [kPa] 6.5
[V] [mTorr] 2.625
where p pressure
U measurement signal
c constant (depending on pressure unit)
Gas Type Dependence
Pressure reading (gauge adjusted for air)
102
8
6
4
2
101
8
6
4
2
100
8
6
4
2
10–1
8
6
4
2
10–2
8
6
4
2
10–3
10–3 24
610–2 24 610–1 24 610024 610124 6102
H2He Ne
Xe
Kr
Ar
CO2
Freon 12
Air
O2
CO
N2
p (mbar)
peff (mbar)
Water vapor
Calibration factors for the pressure range below 1 mbar
peff = C × pressure reading
Gas
type Calibration factor C Gas type Calibration
factor C
He
Ne
Ar
Kr
Xe
0.8
1.4
1.7
2.4
3.0
H2
air, O2, CO, N2
CO2
water vapor
Freon 12
0.5
1.0
0.9
0.5
0.7
Installation
Vacuum Connection
DANGER
Caution: overpressure in the vacuum system
>1 bar
Injury caused by released parts and harm
caused by escaping process gases can result if
clamps are opened while the vacuum system is
pressurized.
Do not open any clamps while the vacuum sys-
tem is pressurized. Use the type clamps which
are suited to overpressure.
DANGER
Caution: overpressure in the vacuum system
>2.5 bar
KF connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Pro-
cess media can thus leak and possibly damage
your health.
Use O-rings provided with an outer centering
ring.
DANGER
Caution: protective ground
The gauge must be electrically connected to the
grounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:
• CF-, NPT- and 8 VCR connections fulfill this
requirement.
• For gauges with a KF connection, use a con-
ductive metallic clamping ring
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's
bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use cle-
an tools when working in this area.
The gauge may be mounted in any orientation. To
keep condensates and particles from getting into the
measuring chamber preferably choose a horizontal
to upright position and possibly use a seal with a
centering ring and filter. If adjustment should be pos-
sible after the gauge has been installed, be sure to
install it so that potentiometers <HV> and <ATM>
can be accessed with a screwdriver (→"Adjusting
the Gauge").
bg805177be/ c (2005-04)
Original: German BG 805 177 BD / C (2005-04)

Remove the protective lid and install the product to the
vacuum system.
Protective lid
Clamping
Seal with centering ring
or
Seal with center-
ing ring and filter
Keep the protective lid.
Electrical Connection
Make sure the vacuum connection is properly made
(→"Vacuum Connection").
If no sensor cable is available, make one according to
the following diagram.
2
5
31
6
4
10k
10
10
ident
2
3
1
4
5
6
–
+
–
+
Electrical connection
Pin 1 identification
Pin 2 signal output (measuring signal)
Pin 3 signal common
Pin 4 supply (+14 ... +30 VDC)
Pin 5 supply common
Pin 6 screening Connector
soldering side
Connect the sensor cable to the gauge and secure the
cable socket with the lock screw.
Connect the sensor cable to the controller.
Operation
When the supply voltage is applied, the measurement signal
is available between pins 2 and 3 (relationship between
measurement signal and pressure →"Technical Data").
Allow a stabilization period of at least 2 minutes. It is advis-
able to operate the gauge continuously, irrespective of the
pressure.
Gas type Dependence
The measurement value is gas dependent. The pressure
reading applies to dry air, O2, CO and N2. For other gases, it
has to be corrected (→"Technical Data").
If the gauge is operated with an Pfeiffer Vacuum controller for
Compact Gauges, a calibration factor for correction of the
actual reading can be applied (→of the corresponding
controller).
Adjusting the Gauge
The gauge is factory calibrated. Due to long time operation or
contamination, a zero drift could occur. Periodically check the
zero and adjust it if necessary.
The zero must be adjusted at the ambient temperature at
which the gauge is normally operated.
If you are using a seal with centering ring and filter,
check that they are clean or replace them if necessary
(→"Deinstallation").
Activate the gauge.
Evacuate it to p <<10-4 mbar and wait at least
2 minutes.

Adjust the <HV> potentiometer
by means of a 1.5 mm screwdriver …
… to 1.55 V or … to 5×10-4 mbar
… and then turn it coun-
terclockwise ≈¼ turn.
Vent the gauge with air to atmospheric pressure, and
wait at least 2 minutes.

Adjust the <ATM> potentiometer
by means of a 1.5 mm screwdriver …
… to 8.50 V or … to 1000 mbar.
Deinstallation
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the
vacuum component.
When handling vacuum components, take ap-
propriate measures to ensure cleanliness and
prevent damages.
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with one's
bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.
Vent the vacuum system.
Turn the gauge off.
Loose the lock screw and unplug the sensor cable.
Remove the gauge from the vacuum system.
Protective lid
Maintenance, Repair
In case of severe contamination or a malfunction, the sensor
can be replaced.
Gauge failures due to contamination, as well as ex-
pendable parts (filament), are not covered by the
warranty.

Spare Parts
When ordering spare parts, always indicate:
• all information on the product nameplate
• description and ordering number according to the spare
parts list
Sensor Ordering number
for gauge
PTR26750A PT120131-T
Returning the Product
WARNING
Caution: forwarding contaminated products
Contaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detri-
mental to health and environment.
Products returned to Pfeiffer Vacuum should pre-
ferably be free of harmful substances. Adhere to
the forwarding regulations of all involved coun-
tries and forwarding companies and enclose a
duly completed declaration of contamination.
Products that are not clearly declared as "free of harmful sub-
stances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of
contamination are returned to the sender at his own expense.
Disposal
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.
N
WARNING
Caution: substances detrimental to the environ-
ment
Products or parts thereof (mechanical and elec-
tric components, operating fluids etc.) can be
detrimental to the environment.
Dispose of such substances in accordance with
the relevant local regulations.
Separating the components
After disassembling the product, separate its components
according to the following criteria:
• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accor-
dance with the relevant national regulations, separated
according to their materials, and disposed of.
• Other components
Such components must be separated according to their
materials and recycled.
Declaration of Contamination
Legally binding declaration:
We hereby declare that the information on this form is
complete and accurate and that we will assume any further
costs that may arise. The contaminated product will be dis-
patched in accordance with the applicable regulations.
Organization/company
Address
Post code, place
Phone Fax
Email
Name
Company stamp
Copies: Original for addressee
1 copy for accompanying documents
1 copy for file of sender
Operating fluid(s) used
(Must be drained before shipping.)
The service, repair, and/or disposal of vacuum equipment and com-
ponents will only be carried out if a correctly completed declaration
has been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed
by authorized and qualified staff.
Reason for return
Description of product
Type
Part number
Serial number
no yes

Used in copper process Seal product in plastic
bag and mark it with a
corresponding label.
This form can be downloaded from our website.
The product is free
of any substances
which are damaging
to health.
yes 
Process related contamination of product:
toxic no 1) yes 
corrosive no 1) yes 
biological hazard no yes 2)
explosive no yes 2)
radioactive no yes 2)
other harmful substances no 1) yes 
1) or not containing any
amount of hazardous
residues that exceed the
permissible exposure limits
2) Products thus
contaminated
will not be
accepted with-
out written
evidence of
decontami -
nation.
Precautions associated with
substance Action if human contact
Trade/product name
manufacturer Chemical name (or symbol)
Harmful substances, gases and/or
by-products
Please list all substances, gases, and by-products
which the product may have come into contact with:
Declaration of Conformity
We, Pfeiffer Vacuum, hereby declare that the
equipment mentioned below complies with the
provisions of the Directive relating to electrical
equipment designed for use within certain vol-
tage limits 73/23/EEC and the Directive rela-
ting to electromagnetic compatibility
89/336/EEC.
Compact Pirani Gauge
TPR 265
Part numbers
PTR26750A
PTR26751A
PTR26752A
PTR26753A
PTR26760A
PTR26761A
PTR26800A
Standards
Harmonized and international/national standards and specifi-
cations:
• EN 61010 (Safety requirements for electrical equip-
ment for measurement, control and labora-
tory use)
• EN 50081-1 (Electromagnetic compatibility: generic
emission standard)
• EN 50082-2 (Electromagnetic compatibility: generic
immunity standard)
Signature
Pfeiffer Vacuum GmbH, Asslar
13 June 2001
Wolfgang Dondorf
Managing director
Berliner Strasse 33
D–35614 Asslar
Deutschland
Tel [phone]
Fax [phone]
[email protected]
www.pfeiffer-vacuum.net