PI Q-Motion Q-545 Series User manual

PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone [phone], Fax [phone], Email [e-mail], www.pi.ws
MP135E
Q
-545 Precision Linear Stage
User Manual
Version: 1.1.0
Date: 13.05.2019
This document describes the following products:

Q-545.140
Q-Motion® linear stage, piezoelectric inertia
drive, 13 mm travel range, linear encoder,
1 nm resolution, 8 N drive force,
dimensions 45 × 48 × 15 mm (W × L × H),
vacuum compatible to 10-6 hPa

Q-545.240
Q-Motion® linear stage, piezoelectric inertia
drive, 26 mm travel range, linear encoder,
1 nm resolution, 8 N drive force,
dimensions 45 × 63 × 15 mm (W × L × H),
vacuum compatible to 10-6 hPa

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.
KG:
PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,
Q-Motion®
The patents held by PI are found in our patent list: http://www.physikinstrumente.com/en/about-pi/patents
© 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in
this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains
all the rights. Use of said text, photographs and drawings is permitted only in part and only upon citation of
the source.
Original instructions
First printing: 13.05.2019
Document number: MP135E, KSch, version 1.1.0
Subject to change without notice. This manual is superseded by any new release. The latest release is
available for download (p. 3) on our website.

1About this Document 1
1.1 Objective and Target Audience of this User Manual.................................................. 1
1.2 Symbols and Typographic Conventions...................................................................... 1
1.3 Definition of Terms..................................................................................................... 2
1.4 Figures ........................................................................................................................ 2
1.5 Other Applicable Documents ..................................................................................... 3
1.6 Downloading Manuals................................................................................................ 3
2Safety 5
2.1 Intended Use .............................................................................................................. 5
2.2 General Safety Instructions ........................................................................................ 5
2.3 Organizational Measures............................................................................................ 6
2.4 Measures for Handling Vacuum-Compatible Products.............................................. 6
3Product Description 7
3.1 Model Overview ......................................................................................................... 7
3.2 Product View .............................................................................................................. 8
3.3 Product Labeling......................................................................................................... 9
3.4 Scope of Delivery...................................................................................................... 10
3.5 Accessories ............................................................................................................... 10
3.6 Suitable Electronics .................................................................................................. 11
3.7 Technical Features.................................................................................................... 11
3.7.1 Linear Encoder (Sensor)............................................................................... 11
3.7.2 Reference Point Switch................................................................................ 11
3.7.3 ID Chip.......................................................................................................... 11
4Unpacking 13
5Installation 15
5.1 General Notes on Installation................................................................................... 15
5.2 Avoiding Mounting Errors ........................................................................................ 17
5.3 Mounting the Q-545 onto an Underlying Surface and Connecting it to a
Protective Earth Conductor...................................................................................... 21
5.4 Building a Multi-Axis System .................................................................................... 24
5.4.1 General Information on Building a Multi-Axis System ................................ 25
5.4.2 Building an XY System.................................................................................. 25
5.4.3 Building a Z System with an Adapter Bracket.............................................. 27
5.5 Fixing the Load to the Q-545 .................................................................................... 32
Contents

5.6 Connecting the Q-545 to the Electronics ................................................................. 34
5.6.1 Overview: Connecting for Atmospheric Operation..................................... 34
5.6.2 Overview: Connecting for Operating in a Vacuum...................................... 35
5.6.3 Connecting the Q-545 to the Electronics .................................................... 36
6Startup and Operation 37
6.1 General Notes on Startup and Operation ................................................................ 37
6.2 Starting and Operating the Q-545............................................................................ 40
7Maintenance 43
7.1 General Notes on Maintenance ............................................................................... 43
7.2 Performing a Maintenance Run ............................................................................... 43
7.3 Cleaning the Q-545................................................................................................... 43
8Troubleshooting 45
9Customer Service 47
10 Technical Data 49
10.1 Specifications............................................................................................................ 49
10.1.1 Data Table.................................................................................................... 49
10.1.2 Maximum Ratings........................................................................................ 51
10.1.3 Ambient Conditions and Classifications ...................................................... 51
10.2 Operating Time......................................................................................................... 52
10.3 Velocity and Force.................................................................................................... 52
10.4 Dimensions ............................................................................................................... 53
10.4.1 Q-545.140 .................................................................................................... 53
10.4.2 Q-545.240 .................................................................................................... 54
10.4.3 Q-145.1001 Adapter Bracket....................................................................... 55
10.4.4 Q-145.200 Adapter Bracket......................................................................... 56
10.4.5 C-815.VF Vacuum Feedthrough for 10-6 hPa ............................................... 57
10.5 Pin Assignment ......................................................................................................... 59
10.5.1 Q-545 (Vacuum Compatible to 10-6 hPa)..................................................... 59
10.5.2 C-815.VF Vacuum Feedthrough................................................................... 60
11 Old Equipment Disposal 61
12 EU Declaration of Conformity 63

1 About this Document
Q-545 Precision Linear Stage MP135E Version: 1.1.0 1
In this Chapter
Objective and Target Audience of this User Manual..................................................................... 1
Symbols and Typographic Conventions......................................................................................... 1
Definition of Terms ........................................................................................................................ 2
Figures............................................................................................................................................ 2
Other Applicable Documents......................................................................................................... 3
Downloading Manuals ................................................................................................................... 3
1.1 Objective and Target Audience of this User Manual
This manual contains information necessary for the intended use of the Q-545.
It assumes that the reader has a fundamental understanding of basic servo systems as well as
motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
Failure to comply could lead to minor injuries or damage to equipment.
Precautionary measures for avoiding the risk.
NOTICE
Dangerous situation
Failure to comply could cause damage to equipment.
Precautionary measures for avoiding.
INFORMATION
Information for easier handling, tricks, tips, etc.
1
About this Document

1 About this Document
2 Version: 1.1.0 MP135E Q-545 Precision Linear Stage
Symbol/
Label
Meaning
1.
2.
Action consisting of several steps whose
sequential order must be observed
Action consisting of one or several steps whose
sequential order is irrelevant
 List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product
(example: socket of the RS-232 interface)
Warning sign affixed to the product that refers to
detailed information in this manual.
1.3 Definition of Terms
Term Explanation
Load capacity,
horizontal
Maximum load capacity when the positioner is mounted horizontally.
The contact point of the load is at the center of the motion platform.
The load acts vertically.
Specified in kg.
Load capacity, any Maximum load capacity when the positioner is mounted in any
orientation of the motion axis. The contact point of the load is at the
center of the motion platform. The load acts vertically.
Specified in kg.
Self-locking Holding force of the drive in a power off condition. Specified in N.
Linear encoder The linear encoder is an incremental sensor for capturing changes in
position. Signals from the sensor are used for axis position feedback.
After switching on the controller a reference point definition must be
performed before absolute target positions can be commanded and
reached.
1.4 Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can
deviate from the actual circumstances. Photographic illustrations may also differ and must not
be seen as guaranteed properties.

1 About this Document
Q-545 Precision Linear Stage MP135E Version: 1.1.0 3
1.5 Other Applicable Documents
The devices and software tools from PI mentioned in this documentation are described in their
own manuals.
Description Document
E-873.1AT Q-Motion® controller, 1 channel, TCP/IP, USB
and RS-232 Interface, benchtop device (industry)
PZ274E User manual
E-873.3QTU Q-Motion® controller for piezoelectric inertia
drives, 3 axes, benchtop device (industry), TCP/IP, USB, I/O,
joystick
PZ273E User manual
E-873.10C885 Q-Motion® controller module for
PIMotionMaster, 1 axis, for systems with piezoelectric
inertia drive
E873T0002 Technical note
PIMikroMove SM148E Software manual
1.6 Downloading Manuals
INFORMATION
If a manual is missing or problems occur with downloading:
Contact our customer service department (p. 47).
INFORMATION
For products that are supplied with software (CD in the scope of delivery), access to the
manuals is protected by a password. Protected content is only displayed on the website after
entering the access data.
You need the product CD to get the access data.
For products with CD: Get access data
1. Insert the product CD into the PC drive.
2. Switch to the Manuals directory on the CD.
3. In the Manuals directory, open the Release News (file including releasenews in the file
name).
4. Get the access data for downloading protected content in the "User login for software
download" section of the Release News. Possible methods for getting the access data:
−Link to a page for registering and requesting the access data
−User name and password is specified
5. If the access data needs to be requested via a registration page:
a) Follow the link in the Release News.

1 About this Document
4 Version: 1.1.0 MP135E Q-545 Precision Linear Stage
b) Enter the required information in the browser window.
c) Click Show login data in the browser window.
d) Note the user name and password shown in the browser window.
Downloading manuals
If you have requested access data for protected contents via a registration page (see above):
Click the links in the browser window to change to the content for your product and log
in using the access data that you received.
General procedure:
1. Open the website www.pi.ws.
2. If access to the manuals is protected by a password:
a) Click Login.
b) Log in with the user name and password.
3. Click Search.
4. Enter the product number up to the period (e.g., P-882) or the product family (e.g.,
PICMA® Bender) into the search field.
5. Click Start search or press the Enter key.
6. Open the corresponding product detail page in the list of search results:
a) If necessary: Scroll down the list.
b) If necessary: Click Load more results at the bottom of the list.
c) Click the corresponding product in the list.
7. Click the Downloads tab.
The manuals are shown under Documentation.
8. Click the desired manual and save it to the hard disk of your PC or to a data storage
medium.

2 Safety
Q-545 Precision Linear Stage MP135E Version: 1.1.0 5
In this Chapter
Intended Use.................................................................................................................................. 5
General Safety Instructions............................................................................................................ 5
Organizational Measures............................................................................................................... 6
Measures for Handling Vacuum-Compatible Products ................................................................. 6
2.1 Intended Use
The Q-545 is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor use and
use in an environment that is free of dirt, oil, and lubricants.
In accordance with its design, the Q-545 is intended for single-axis positioning, adjusting and
shifting of loads at different velocities in interval mode. The Q-545 uses a piezoelectric inertia
drive. The drive is self-locking at rest, requires no current, generates no heat, and maintains its
position.
The Q-545 can be mounted in any orientation. The specifications of the Q-545 apply to
horizontal mounting (p. 49).
The Q-545 is not intended for applications in areas where failure would be a considerable risk
for people or the environment. For further information on the operating conditions of the
Q-545, see "Technical Data" (p. 49).
The Q-545 has a linear encoder for detecting the position directly and is designed for a
minimum ambient pressure to 10-6 hPa.
It is only possible to use the Q-545 as intended when it is completely mounted and connected.
The Q-545 must be operated with suitable electronics (p. 11). The electronics are not in the
Q-545's scope of delivery.
2.2 General Safety Instructions
The Q-545 is built according to state-of-the-art technology and recognized safety standards.
Improper use can result in personal injury and/or damage to the Q-545.
Use the Q-545 for its intended purpose only, and only when it is in perfect technical
condition.
Read the user manual.
Eliminate any malfunctions that may affect safety immediately.
The operator is responsible for the correct installation and operation of the Q-545.
2
Safety

2 Safety
6 Version: 1.1.0 MP135E Q-545 Precision Linear Stage
2.3 Organizational Measures
User manual
Keep this user manual with the Q-545 always.
The latest versions of the user manuals are available for download (p. 3) on our
website.
Add all information from the manufacturer to the user manual, for example
supplements or technical notes.
If you give the Q-545 to other users, include this user manual as well as other relevant
information provided by the manufacturer.
Use the device only if the user manual is complete. Missing information due to an
incomplete user manual can result in minor injury and damage to equipment.
Install and operate the Q-545 only after you have read and understood this user
manual.
Personnel qualification
The Q-545 may only be installed, started, operated, maintained, and cleaned by authorized and
appropriately qualified personnel.
2.4 Measures for Handling Vacuum-Compatible Products
Attention must be paid to appropriate cleanliness when the positioner is to be used in a
vacuum. All parts are cleaned at PI before assembly. Powder-free gloves are worn during
assembly and measuring.
Touch the positioner only with powder-free gloves.
If necessary, wipe the positioner clean after unpacking.

3 Product Description
Q-545 Precision Linear Stage MP135E Version: 1.1.0 7
In this Chapter
Model Overview............................................................................................................................. 7
Product View.................................................................................................................................. 8
Product Labeling ............................................................................................................................ 9
Scope of Delivery ......................................................................................................................... 10
Accessories................................................................................................................................... 10
Suitable Electronics...................................................................................................................... 11
Technical Features ....................................................................................................................... 11
3.1 Model Overview
The Q-545 is available in the following versions:
Order number Product name
Q-545.140 Q-Motion® linear stage, piezoelectric inertia drive, 13 mm travel range,
linear encoder, 1 nm resolution, 8 N drive force, dimensions 45 × 48 × 15 mm
(W × L × H), vacuum compatible to 10-6 hPa
Q-545.240 Q-Motion® linear stage, piezoelectric inertia drive, 26 mm travel range,
linear encoder, 1 nm resolution, 8 N drive force, dimensions 45 × 63 × 15 mm
(W × L × H), vacuum compatible to 10-6 hPa
3
Product Description

3 Product Description
8 Version: 1.1.0 MP135E Q-545 Precision Linear Stage
3.2 Product View
Figure 1: Example for models with sensor: Q-545.140 positioner
1Motion platform
2Cable exit for drive connector
3Warning sign "Electrostatic sensitive devices"
4Connector for drive and sensor: D-sub 15 (m)
5ESD protection cap
6Type plate p. 9
7Cable exit for sensor connector
8Inner guide element (2×)
9Outer guide element (2×)
10 Base body
Figure 2: Direction of motion of the platform of the Q-545, Q-545.140 used as example
The arrow in the figure above shows the direction of motion on positive commanding.

3 Product Description
Q-545 Precision Linear Stage MP135E Version: 1.1.0 9
3.3 Product Labeling
Figure 3: Example Q-545.140: Product labeling and type plate of a positioner
Position Labeling Description
A, C
Manufacturer's logo
B, C
CE conformity mark
B, C
Warning sign "Pay attention to the manual!"
B
Symbol for the protective earth conductor,
marks the protective earth connection of the
Q-545 (p. 21)
C
Warning sign "Electrostatic-sensitive devices"
C 113064246
Serial number (example), individual for each
Q-545
Meaning of each position (from the left):
1 = internal information,
2 and 3 = year of manufacture,
4 to 9 = consecutive number
C Q-545.240 Product name (example), the characters
following the period refer to the model
C
Old equipment disposal
C WWW.PI.WS Manufacturer's address (website)

3 Product Description
10 Version: 1.1.0 MP135E Q-545 Precision Linear Stage
3.4 Scope of Delivery
The Q-545 is delivered with the following components:
Item
ID
Components
Q-545 Positioner according to order (p. 7)
5861500010
Screw set for mounting the Q-545, consisting of:
2 dowel pins, A2 2.5 m6 × 5 ISO 8734
4 socket head screws, A2 M2.5x5 ISO 4762
MP139EK Short instructions for the Q-5xx / Q-6xx Q-Motion® positioners
3.5 Accessories
Order
number Description
E-873.UHV1 Air-side extension cable from the vacuum feedthrough or Q-545 to the
electronics, D-sub 15 (f) to D-sub 15 (m), 1 mm
E-873.UHV2 Air-side extension cable from the vacuum feedthrough or Q-545 to the
electronics, D-sub 15 (f) to D-sub 15 (m), 2 mm
E-873.UHV3 Air-side extension cable from the vacuum feedthrough or Q-545 to the
electronics, D-sub 15 (f) to D-sub 15 (m), 3 mm
C-815.VF Vacuum feedthrough (drive and sensor signals), D-sub 15 (m/f), including
C815T0003 technical note
Q-145.1001 Adapter bracket for vertical mounting of Q-545.140 positioners. Material:
Aluminum (3.3206), anodized; mass: 42 g; includes:
2 dowel pins, A2 2.5 m6 × 4 ISO 2338
4 socket head screws, A2 M2.5x8 ISO 4762
Q-145.200 Adapter bracket for mounting Q-545.240 positioner vertically. Material:
Aluminum (3.3206), anodized; mass: 49 g; includes:
2 dowel pins, A2 2.5 m6 × 4 ISO 2338
4 socket head screws, A2 M2.5x8 ISO 4762
To order, contact our customer service department (p. 47).

3 Product Description
Q-545 Precision Linear Stage MP135E Version: 1.1.0 11
3.6 Suitable Electronics
Order number Description
E-873.1AT Q-Motion® controller for piezoelectric inertia drives, 1 axis, benchtop
device (industry), SPI, TCP/IP, USB, RS-232, I/O, connector for joystick
E-873.3QTU Q-Motion® controller for piezoelectric inertia drives, 3 axes, benchtop
device (industry), TCP/IP, USB, I/O, joystick
E-873.10C885 Q-Motion® controller module for PIMotionMaster, 1 axis, for systems
with piezoelectric inertia drive
To order, contact our customer service department (p. 47).
3.7 Technical Features
3.7.1 Linear Encoder (Sensor)
The Q-545 is equipped with an optical linear encoder. Refer to the table in the "Specifications"
section (p. 49) for the encoder resolution.
Optical linear encoders measure the actual position directly (direct metrology). Therefore,
errors occurring in the drivetrain such as nonlinearity, backlash or elastic deformation, cannot
influence the measurement of the position.
3.7.2 Reference Point Switch
The Q-545 also has an optical reference switch.
The commands that use the reference signal are described in the user manual for the controller
and/or in the corresponding software manuals.
3.7.3 ID Chip
The Q-545 has an ID chip in the connector.
The following data is stored as parameters on the ID chip:
Information on the positioner: Type, serial number, date of manufacturer, hardware
version
Settings for the sensor: Interpolation rate, corrections to hysteresis, phase and offset,
gain values
When switched on or rebooted, controllers from PI read the data from the ID chip.
For more information on ID chip detection, see the manual for the controller.

4 Unpacking
Q-545 Precision Linear Stage MP135E Version: 1.1.0 13
NOTICE
Electrostatic hazard
Touching the pins on the D-sub 15 connector can damage the Q-545's electrostatic-sensitive
(also: ESD) components. For this reason, the Q-545 is supplied with ESD protection.
Remove the ESD protection from the connection only when you connect the Q-545 to the
controller.
INFORMATION
Attention must be paid to appropriate cleanliness when the positioner is to be used in a
vacuum. All parts are cleaned at PI before assembly. Powder-free gloves are worn during
assembly and measuring.
Touch the positioner only with powder-free gloves.
If necessary, wipe the positioner clean after unpacking.
1. Unpack the Q-545 with care.
2. If present, do not remove the ESD protection from the connection of the Q-545.
3. Compare the contents with the items listed in the contract and the packing list.
4. Inspect the contents for signs of damage. If there is any sign of damage or missing parts,
contact PI immediately.
5. Keep all packaging materials and the ESD protection in case the product needs to be
returned.
4
Unpacking

5 Installation
Q-545 Precision Linear Stage MP135E Version: 1.1.0 15
In this Chapter
General Notes on Installation ...................................................................................................... 15
Avoiding Mounting Errors............................................................................................................ 17
Mounting the Q-545 onto an Underlying Surface and Connecting it to a Protective Earth
Conductor .................................................................................................................................... 21
Building a Multi-Axis System........................................................................................................ 24
Fixing the Load to the Q-545 ....................................................................................................... 32
Connecting the Q-545 to the Electronics..................................................................................... 34
5.1 General Notes on Installation
Figure 4: Accessible when the motion platform is driven out: Ceramic rod of the drive, example
Q-545.140
NOTICE
Malfunction due to soiling!
Any soiling; e.g., dust, oil, lubricant or condensation, will render the Q-545 inoperable.
Keep the Q-545 free of dirt and condensation.
Avoid touching the drive's ceramic rod.
5
Installation

5 Installation
16 Version: 1.1.0 MP135E Q-545 Precision Linear Stage
NOTICE
Electrostatic hazard
Touching the pins on the D-sub 15 connector can damage the Q-545's electrostatic-sensitive
(also: ESD) components. For this reason, the Q-545 is supplied with ESD protection.
Remove the ESD protection from the connection only when you connect the Q-545 to the
controller.
NOTICE
Heating up of the Q-545 during operation!
The heat produced during operation of the Q-545 can affect your application.
Install the Q-545 so that the application is not impaired by the dissipated heat.
Ensure sufficient ventilation at the place of installation.
Make sure that the complete bottom side of the Q-545 is in contact with the surface on
which the Q-545 is mounted.
NOTICE
Unwanted changes in position!
Unwanted changes in position are possible if a force acts on the motion platform (e.g., because
of a cable attached to the load or when a heavy load is mounted vertically) that is greater than
the self-locking of the drive (p. 49). You will see a definition of self-locking under "Terms" (p. 2).
Unwanted changes in the position of the motion platform can damage the drive, the load or
the surroundings.
Take appropriate measures to ensure that only a force less than the self-locking force acts
on the motion platform: For example, cables attached to the load should have sufficient
strain relief.
NOTICE
Damage from unsuitable cables!
Unsuitable cables can damage the electronics.
Use cables provided by PI only for connecting the Q-545 to the electronics.
INFORMATION
For optimum repeatability, all components must be firmly affixed to each other.
INFORMATION
The positive direction of motion of the axis is specified in the product view (p. 8).