PI H-850 Series User manual

Physik Instrumente (PI) GmbH & Co. KG · Auf der Römerstr. 1 76228 Karlsruhe, Germany
Telephon [phone] · Telefax [phone] · E-Mail [email protected]s
MS202E
H
-850 Hexapod Microrobot
User Manual
Version: 1.1.0
Date: 04.06.2013
This document describes the following
products:

H-850.H1
Hexapod Microrobot with Excellent Position
Repeatability, DC Motor Gearhead,
0.5 mm/s, 250 kg Load

H-850.HV
Hexapod Microrobot with Excellent Position
Repeatability, DC Motor Gearhead,
0.15 mm/s, 80 kg Load, Vacuum
Compatible to 10-6 hPa

H-850.G1
Hexapod Microrobot with Excellent Position
Repeatability, DC Motor Gearhead,
8 mm/s, 50 kg Load

H-850.GV
Hexapod Microrobot with Excellent Position
Repeatability, DC Motor Gearhead,
2.5 mm/s, 25 kg Load, Vacuum Compatible
to 10-6 hPa

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®,
NanoCube®, NanoAutomation®, Picoactuator®, PInano®
© 2013 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said
text, photographs and drawings is permitted only in part and only upon citation of the
source.
Original instructions
First printing: 04.06.2013
Document number: MS202E, BRo, version 1.1.0
Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download (p. 3) on our website.

1About this Document 1
1.1 Goal and Target Audience of this User Manual ...................................................1
1.2 Symbols and Typographic Conventions...............................................................1
1.3 Other Applicable Documents................................................................................2
1.4 Downloading Manuals ..........................................................................................3
2Safety 5
2.1 Intended Use ........................................................................................................5
2.2 General Safety Instructions..................................................................................5
2.2.1 Organizational Measures....................................................................6
2.2.2 Measures for Handling Vacuum-Compatible Products ......................6
2.2.3 Safety Measures during Transport.....................................................6
2.2.4 Safety Measures during Installation ...................................................7
2.2.5 Safety Measures during Start-Up.......................................................8
2.2.6 Safety Measures during Maintenance................................................8
3Product Description 9
3.1 Features and Applications....................................................................................9
3.2 Model Overview..................................................................................................10
3.3 Product View.......................................................................................................12
3.4 Scope of Delivery ...............................................................................................13
3.5 Accessories ........................................................................................................14
3.6 Technical Features.............................................................................................15
3.6.1 Struts ................................................................................................15
3.6.2 Reference Point Switch and Limit Switches.....................................15
3.6.3 Control ..............................................................................................15
3.6.4 Motion...............................................................................................16
4Unpacking 21
5Installation 23
5.1 General Notes on Installation.............................................................................23
5.2 Determining the Permissible Load and Working Space.....................................24
5.3 Attaching the snap-on ferrite suppressor ...........................................................25
5.4 Grounding the Hexapod .....................................................................................26
5.5 Mounting the Hexapod on a Surface..................................................................26
5.6 Affixing the Load to the Hexapod .......................................................................28
Contents

5.7 Connecting the Cable Set to the Hexapod.........................................................31
5.7.1 Connecting the C-887.A03 Standard Cable Set...............................31
5.7.2 Connecting the C-887.V02 Standard Cable Set for Vacuum
Versions............................................................................................32
5.7.3 Connecting the cable set with line driver boxes to the
Hexapod ...........................................................................................34
6Start-Up 37
6.1 General Notes on Start-Up.................................................................................37
6.2 Starting Up the Hexapod System.......................................................................38
7Maintenance 39
7.1 Carrying out a Maintenance Run........................................................................39
7.2 Packing the Hexapod for Transport....................................................................40
7.3 Cleaning the Hexapod........................................................................................43
8Troubleshooting 45
9Customer Service 47
10 Technical Data 49
10.1 Specifications......................................................................................................49
10.1.1 Data Table........................................................................................49
10.1.2 Maximum Ratings.............................................................................50
10.1.3 Specifications for Vacuum-Compatible Versions .............................51
10.2 Ambient Conditions and Classifications .............................................................52
10.3 Dimensions.........................................................................................................53
10.4 Pin Assignment...................................................................................................55
10.4.1 Power Supply Connection ................................................................55
10.4.2 Data Transmission Connection ........................................................55
11 Old Equipment Disposal 57
12 Glossary 59
13 Appendix 63
13.1 Explanations of the Performance Test Sheet.....................................................63
13.2 EC Declaration of Conformity.............................................................................64

1 About this Document
H-850 Hexapod Microrobot MS202E Version: 1.1.0 1
In this Chapter
Goal and Target Audience of this User Manual ............................................................ 1
Symbols and Typographic Conventions........................................................................ 1
Other Applicable Documents......................................................................................... 2
Downloading Manuals................................................................................................... 3
1.1 Goal and Target Audience of this User Manual
This manual contains information on the intended use of the H-850.
It assumes that the reader has a fundamental understanding of basic servo systems
as well as motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our
website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1
About this Document

1 About this Document
2Version: 1.1.0 MS202E H-850 Hexapod Microrobot
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/Label Meaning
1.
2. Action consisting of several steps whose sequential order
must be observed
Action consisting of one or several steps whose sequential
order is irrelevant
 List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product (example:
socket of the RS-232 interface)
Warning sign on the product which refers to detailed
information in this manual.
1.3 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are
described in their own manuals.
Description Document
C-887 Hexapod controller MS204E User Manual
C-887 Hexapod controller MS204Equ User Manual Short Version

1 About this Document
H-850 Hexapod Microrobot MS202E Version: 1.1.0 3
1.4 Downloading Manuals
INFORMATION
If a manual is missing on our website or if there are problems in downloading:
Contact our customer service department (p. 47).
The current versions of the manuals are found on our website. To download a manual,
proceed as follows:
1. Open the website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding category (e. g. H-Hexapods).
4. Click the corresponding product code (e. g. H-850).
An overview of the available file types is shown for the selected product.
5. If (0 Files) is shown in the Documents line, log in as follows to display and
download the documents:
a) Insert the product CD in the corresponding PC drive.
b) Open the Manuals directory.
c) Open the Release News (e. g. C-887_Releasenews_V_x_x_x.pdf) on
the CD of the product.
d) Find the user name and password in the User login for software
download section in the Release News.
e) In the User login area on the left margin in the website, enter the user
name and the password in the corresponding fields.
f) Click Login.
If Documents (0 Files) is still being displayed, no manuals are available:
−Contact our customer service department (p. 47).
6. Click Documents.
7. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.

2 Safety
H-850 Hexapod Microrobot MS202E Version: 1.1.0 5
In this Chapter
Intended Use ................................................................................................................. 5
General Safety Instructions........................................................................................... 5
2.1 Intended Use
The Hexapod microrobot (in short: "Hexapod") is a laboratory device in accordance
with DIN EN 61010-1. It is intended to be used in interior spaces and in an
environment that is free of dirt, oil and lubricants.
Based on its design and realization, the Hexapod is intended for positioning, adjusting
and shifting of loads in six axes at various velocities.
The Hexapod is part of a Hexapod system. The intended use of the Hexapod is only
possible in connection with the Hexapod controller, which is part of the Hexapod
system and coordinates all motions of the Hexapod.
2.2 General Safety Instructions
The H-850 is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the H-850.
Only use the H-850 for its intended purpose, and only use it if it is in a good
working order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect
safety.
The operator is responsible for the correct installation and operation of the H-850.
2
Safety

2 Safety
6Version: 1.1.0 MS202E H-850 Hexapod Microrobot
2.2.1 Organizational Measures
User manual
Always keep this user manual available by the H-850.
The latest versions of the user manuals are available for download (p. 3) on
our website.
Add all information given by the manufacturer to the user manual, for example
supplements or Technical Notes.
If you pass the H-850 on to other users, also turn over this user manual as
well as other relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing
information due to an incomplete user manual can result in minor injury and
property damage.
Only install and operate the H-850 after having read and understood this user
manual.
Personnel qualification
The H-850 may only be started up, operated, maintained and cleaned by authorized
and qualified staff.
2.2.2 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the Hexapod, attention must be paid to
appropriate cleanliness. At PI, all parts are cleaned before assembly. During assembly
and measurement, powder-free gloves are worn. Afterwards, the Hexapod is cleaned
once again by wiping and shrink-wrapped twice in vacuum-compatible film.
Only touch the Hexapod with powder-free gloves.
If necessary, wipe the Hexapod clean after unpacking.
2.2.3 Safety Measures during Transport
An impermissible mechanical load can damage the Hexapod.
Only send the Hexapod in the original packaging.
Only hold the Hexapod by the transport lock or the base plate.

2 Safety
H-850 Hexapod Microrobot MS202E Version: 1.1.0 7
2.2.4 Safety Measures during Installation
Impermissible mechanical load and collisions between the Hexapod, the load to be
moved and the environment can damage the Hexapod.
Only hold the Hexapod by the base plate.
Before installing the load, determine the limit value for the load of the Hexapod
with a simulation program (p. 24).
Before installing the load, determine the work space of the Hexapod with a
simulation program (p. 24).
Make sure that the installed load observes the limit value determined with the
simulation program.
Avoid high forces and torques on the moving platform during installation of the
Hexapod and the load.
Ensure an uninterruptible power supply in order to prevent an unintentional
deactivation of the Hexapod system and resulting unintentional position
changes of the Hexapod.
Make sure that no collisions between the Hexapod, the load to be moved and
the environment are possible in the work space of the Hexapod.
Incorrect mounting can warp the base plate. Warping of the base plate reduces the
accuracy.
Mount the Hexapod on an even surface. The recommended evenness of the
surface is 300 µm.
The Hexapod can be damaged by excessively long screws.
When selecting the screw length, observe the thickness of the moving
platform (p. 53) or the depth of the mounting holes together with the load to be
mounted.
Only use screws that do not project under the moving platform after being
screwed in.
Only mount the Hexapod and a load on the mounting fixtures (holes) intended
for this purpose.

2 Safety
8Version: 1.1.0 MS202E H-850 Hexapod Microrobot
2.2.5 Safety Measures during Start-Up
There is a risk of minor injuries caused by crushing which can occur between the
moving parts of the Hexapod and a stationary part or obstacle.
Keep your fingers away from areas where they can get caught by moving
parts.
The geometrical data used by the Hexapod controller must be adapted to the
Hexapod. If incorrect geometrical data is used, the Hexapod can be damaged by
uncontrolled motions or collisions. The geometrical data is adapted before delivery.
Check whether the Hexapod controller matches the Hexapod.
A label on the rear panel of the controller indicates for which Hexapod the
controller is intended.
Only operate the Hexapod with a Hexapod controller whose geometrical data
is adapted to the Hexapod.
Collisions can damage the Hexapod, the load to be moved, and the surroundings.
Make sure that no collisions between the Hexapod, the load to be moved, and
the surroundings are possible in the working space of the Hexapod.
Do not place any objects in areas where they can get caught by moving parts.
Immediately stop the motion if a malfunction occurs in the Hexapod controller
(see user manual of the Hexapod controller).
Damage can occur to the Hexapod if the transport lock of the Hexapod has not been
removed and a motion is commanded.
Remove the transport lock before you start up the Hexapod system.
2.2.6 Safety Measures during Maintenance
The Hexapod can become misaligned as a result of improper maintenance. The
specifications (p. 49) can change as a result.
Do not loosen any screws.

3 Product Description
H-850 Hexapod Microrobot MS202E Version: 1.1.0 9
In this Chapter
Features and Applications............................................................................................. 9
Model Overview........................................................................................................... 10
Product View ............................................................................................................... 12
Scope of Delivery ........................................................................................................ 13
Accessories ................................................................................................................. 14
Technical Features...................................................................................................... 15
3.1 Features and Applications
The H-850 Hexapod is offered in four models that have different maximum velocities,
load capacities as well as different suitability for use in a vacuum.
Models for higher velocities:
Velocities of up to 8 mm/s are possible with the H-850.G1 model.
The version H-850.GV, which is suitable for use in a vacuum, achieves
velocities of up 2.5 mm/s.
Models with a higher load capacity:
The H-850.H1 with a higher gear ratio achieves a load capacity of 250 kg
vertically and 50 kg in any orientation.
The version H-850.HV, which is suitable for use in a vacuum, can be loaded
with up to 80 kg vertically and 40 kg in any orientation.
The parallel kinematics structure and the free choice of the pivot point offer the
following advantages:
Positioning operations in six independent axes (three translation axes, three
rotation axes) with short settling times
Pivot point is maintained for rotations and moves along with linear motions
High accuracy and step resolution in all axes
No addition of the errors of individual axes
No friction and torques from moving cables
The Hexapod is controlled with the Hexapod controller, which is part of the Hexapod
system. The position commands to the Hexapod controller are entered in Cartesian
coordinates.
3
Product Description

3 Product Description
10 Version: 1.1.0 MS202E H-850 Hexapod Microrobot
3.2 Model Overview
Hexapod and Hexapod controller are only available together as a system.
Possible system components
Standard versions of the H-850 Hexapod:
Model Name
H-850.H1 Hexapod Microrobot, with Excellent Position Repeatability, DC Motor
Gearhead, 0.5 mm/s, 250 kg Load
H-850.HV Hexapod Microrobot, with Excellent Position Repeatability, DC Motor
Gearhead, 0.15 mm/s, 80 kg Load, Vacuum Compatible to 10-6 hPa
H-850.G1 Hexapod Microrobot, with Excellent Position Repeatability, DC Motor
Gearhead, 8 mm/s, 50 kg Load
H-850.GV Hexapod Microrobot, with Excellent Position Repeatability, DC Motor
Gearhead, 2.5 mm/s, 25 kg Load, Vacuum Compatible to 10-6 hPa
Standard versions of the C-887 Hexapod controller:
Model Name
C-887.11 6-D Hexapod Controller, Control of 2 Additional Servo-Motor Axes
Included, TCP/IP and RS-232 Interface, 19'' Chassis
C-887.21 6-D Hexapod Controller, TCP/IP and RS-232 Interface, Bench-Top
Standard cable sets:
Model Name
C-887.A03 Cable Set for Hexapod, 3 m, consisting of:
Data transmission cable, MDR68 to MDR68, 1:1 (K040B0034)
Power supply cable, M12m 180° to M12f 90°(K060B0111)

3 Product Description
H-850 Hexapod Microrobot MS202E Version: 1.1.0 11
Model Name
C-887.V02 Cable Set for Hexapod, 2 m Vacuum-Side Cable, Feedthrough, 3 m
Air-Side Cable, consisting of:
Data transmission cable on the vacuum side, MDR68m to HD
Sub-D 78m, 2 m (M824B0010)
Power supply cable on the vacuum side, LEMO 2-pin to LEMO 2-
pin, 2 m (K060B0132)
Vacuum feedthrough for data transmission, HD Sub-D 78m/f
(4668)
Vacuum feedthrough for power supply, LEMO 2-pin to M12m
(C887B0002)
Data transmission cable on the air side, HD Sub-D 78f to
MDR68m, 3 m (K040B0092)
Power supply cable on the air side, M12m to M12f, 3 m
(K060B0112)
Available Hexapod systems
The following Hexapod systems are available as combinations of Hexapod, Hexapod
controller and cable set:
System Hexapod Hexapod Controller Cable Set
– H-850.H1 H-850.HV H-850.G1 H-850.GV C-887.11 C-887.21 C-887.A03 C-887.V02
H-850.H11 X – – – X – X –
H-850.H12 X – – – – X X –
H-850.HV1 – X – – X – – X
H-850.HV2 – X – – – X – X
H-850.G11 – – X – X – X –
H-850.G12 – – X – – X X –
H-850.GV1 – – – X X – – X
H-850.GV2 – – – X – X – X

3 Product Description
12 Version: 1.1.0 MS202E H-850 Hexapod Microrobot
3.3 Product View
Figure 1: Product view
1 Moving platform
2 Strut
3 Panel plug for power supply cable
4 Socket for data transmission cable
5 Base plate

3 Product Description
H-850 Hexapod Microrobot MS202E Version: 1.1.0 13
3.4 Scope of Delivery
The following table contains the scope of delivery of the Hexapod.
The scope of delivery of the Hexapod controller is listed in the user manual of the
Hexapod controller.
For the scope of delivery of the cable set that belongs to the Hexapod system, see the
listing of the standard cable sets in "Model Overview" (p. 10).
Order Number Items
H-850 Hexapod according to your order (p. 10)
000015165 Steward snap-on ferrite suppressor
Packaging, consisting of:
– Transport lock with following accessories:
4 M6x20 screws
2 M6x30 screws
6 plastic flat washers
2512 Inner cushion set
000012899 Inner box with handle, 560 mm x 560 mm x 400 mm
000012323 Outer box with soft foam cushions
2026 Pallet
Documentation, consisting of:
H850T0001 Technical note in printed form on unpacking the Hexapod
MS202E User manual for the Hexapod (this document)
Screw sets:
000034605 Mounting accessories:
6 M6x30 hex-head cap screws ISO 4762
1 Allen wrench 5.0 DIN 911
000036450 Accessories for connection to the grounding system:
1 M4x8 flat-head screw with cross recess ISO 7045
2 washers, form A-4.3 DIN 7090
2 safety washers, Schnorr Ø 4 mm N0110

3 Product Description
14 Version: 1.1.0 MS202E H-850 Hexapod Microrobot
3.5 Accessories
Order Number Description
C-887.A20 Hexapod cable set 20 m, consisting of:
Name
Length
Item ID
Line driver box for data transmission cable, controller-
side - C030B0011
Line driver box for data transmission cable, Hexapod-
side - C030B0012
Short data transmission cable MDR68 to MDR68 1:1; 2
pieces 3 m K040B0034
Long data transmission cable MDR68 to MDR68 1:1 14 m K040B0186
Power supply cable for line driver box,
with M12 coupling/M12 connector 17 m K060B0126
Power supply cable for Hexapod,
with M12 coupling/M12 connector 20 m K060B0127
C-887.A30 Hexapod cable set 30 m, consisting of:
Name Length Item ID
Line driver box for data transmission cable, controller-
side - C030B0011
Line driver box for data transmission cable, Hexapod-
side - C030B0012
Short data transmission cable MDR68 to MDR68 1:1; 2
pieces 3 m K040B0034
Long data transmission cable MDR68 to MDR68 1:1 24 m K040B0440
Power supply cable for line driver box,
with M12 coupling/M12 connector 27 m K060B0160
Power supply cable for Hexapod,
with M12 coupling/M12 connector 30 m K060B0161
To order, contact our customer service department (p. 47).

3 Product Description
H-850 Hexapod Microrobot MS202E Version: 1.1.0 15
3.6 Technical Features
3.6.1 Struts
The Hexapod has six adjustable-length struts. Each strut carries out linear motions.
Each set of settings of the six struts defines a position of the moving platform in six
degrees of freedom (three translational axes and three rotational axes).
Each strut is equipped with the following components:
One actuator
Reference and limit switches
Joints for connecting to the base plate and moving platform
The actuator contains the following components:
DC motor with rotary encoder
Gearhead
Drive screw
3.6.2 Reference Point Switch and Limit Switches
The reference point switch of a strut functions independently of the angular positions
of the strut ends and the lengths of the other struts.
When a limit switch is activated, the power source of the motor is switched off to
protect the Hexapod against damage from malfunctions.
3.6.3 Control
The Hexapod is intended for operation with the Hexapod controller which belongs to
the Hexapod system. The Hexapod controller makes it possible to command motion of
individual axes, combinations of axes or all six axes at the same time in a single
motion command.
The Hexapod controller calculates the settings for the individual struts from the target
positions given for the translational and rotational axes. The velocities and
accelerations of the struts are calculated in such a way that all struts start and stop at
the same time.
After the Hexapod controller has been switched on or restarted, the Hexapod has to
complete a reference move in which each strut moves to its reference point switch.
After the reference move, the moving platform is in the reference position and can be
commanded to move to absolute target positions.
For more information, see the user manual of the Hexapod controller.

3 Product Description
16 Version: 1.1.0 MS202E H-850 Hexapod Microrobot
3.6.4 Motion
The platform moves along the translational axes X, Y and Z and around the rotational
axes U, V and W.
Figure 2: XYZ coordinate system and rotations to the rotation coordinates U, V and W. The coordinate
system is depicted above the platform for better clarity.
Translation
Translations are described in the spatially-fixed XYZ coordinate system. The
translational axes meet at the origin of the XYZ coordinate system (0,0,0). For more
information, see the glossary (p. 59).
Rotation
Rotations take place around the rotational axes U, V and W. The rotational axes meet
at the pivot point. For more information on the pivot point, see the glossary (p. 59).
In contrast to the spatially-fixed translational axes, the rotational axes and thus the
pivot point as well move along with the platform (see also the example below for
consecutive rotations).
A given rotation in space is calculated from the individual rotations in the sequence
U > V > W.