PI H-850 Series User manual

Physik Instrumente (PI) GmbH & Co. KG · Auf der Römerstr. 1 76228 Karlsruhe, Germany
Telephon [phone] · Telefax [phone] · E-Mail [email protected]s
MS202E
H
-850 Hexapod Microrobot
User Manual
Version: 1.1.0
Date: 04.06.2013
This document describes the following
products:

H-850.H1
Hexapod Microrobot with Excellent Position
Repeatability, DC Motor Gearhead,
0.5 mm/s, 250 kg Load

H-850.HV
Hexapod Microrobot with Excellent Position
Repeatability, DC Motor Gearhead,
0.15 mm/s, 80 kg Load, Vacuum
Compatible to 10-6 hPa

H-850.G1
Hexapod Microrobot with Excellent Position
Repeatability, DC Motor Gearhead,
8 mm/s, 50 kg Load

H-850.GV
Hexapod Microrobot with Excellent Position
Repeatability, DC Motor Gearhead,
2.5 mm/s, 25 kg Load, Vacuum Compatible
to 10-6 hPa

Physik Instrumente (PI) GmbH & Co. KG is the owner of the following trademarks:
PI®, PIC®, PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®,
NanoCube®, NanoAutomation®, Picoactuator®, PInano®
© 2013 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text,
photographs and drawings in this manual are protected by copyright. With regard
thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights. Use of said
text, photographs and drawings is permitted only in part and only upon citation of the
source.
Original instructions
First printing: 04.06.2013
Document number: MS202E, BRo, version 1.1.0
Subject to change without notice. This manual is superseded by any new release. The
latest release is available for download (p. 3) on our website.

1About this Document 1
1.1 Goal and Target Audience of this User Manual ...................................................1
1.2 Symbols and Typographic Conventions...............................................................1
1.3 Other Applicable Documents................................................................................2
1.4 Downloading Manuals ..........................................................................................3
2Safety 5
2.1 Intended Use ........................................................................................................5
2.2 General Safety Instructions..................................................................................5
2.2.1 Organizational Measures....................................................................6
2.2.2 Measures for Handling Vacuum-Compatible Products ......................6
2.2.3 Safety Measures during Transport.....................................................6
2.2.4 Safety Measures during Installation ...................................................7
2.2.5 Safety Measures during Start-Up.......................................................8
2.2.6 Safety Measures during Maintenance................................................8
3Product Description 9
3.1 Features and Applications....................................................................................9
3.2 Model Overview..................................................................................................10
3.3 Product View.......................................................................................................12
3.4 Scope of Delivery ...............................................................................................13
3.5 Accessories ........................................................................................................14
3.6 Technical Features.............................................................................................15
3.6.1 Struts ................................................................................................15
3.6.2 Reference Point Switch and Limit Switches.....................................15
3.6.3 Control ..............................................................................................15
3.6.4 Motion...............................................................................................16
4Unpacking 21
5Installation 23
5.1 General Notes on Installation.............................................................................23
5.2 Determining the Permissible Load and Working Space.....................................24
5.3 Attaching the snap-on ferrite suppressor ...........................................................25
5.4 Grounding the Hexapod .....................................................................................26
5.5 Mounting the Hexapod on a Surface..................................................................26
5.6 Affixing the Load to the Hexapod .......................................................................28
Contents

5.7 Connecting the Cable Set to the Hexapod.........................................................31
5.7.1 Connecting the C-887.A03 Standard Cable Set...............................31
5.7.2 Connecting the C-887.V02 Standard Cable Set for Vacuum
Versions............................................................................................32
5.7.3 Connecting the cable set with line driver boxes to the
Hexapod ...........................................................................................34
6Start-Up 37
6.1 General Notes on Start-Up.................................................................................37
6.2 Starting Up the Hexapod System.......................................................................38
7Maintenance 39
7.1 Carrying out a Maintenance Run........................................................................39
7.2 Packing the Hexapod for Transport....................................................................40
7.3 Cleaning the Hexapod........................................................................................43
8Troubleshooting 45
9Customer Service 47
10 Technical Data 49
10.1 Specifications......................................................................................................49
10.1.1 Data Table........................................................................................49
10.1.2 Maximum Ratings.............................................................................50
10.1.3 Specifications for Vacuum-Compatible Versions .............................51
10.2 Ambient Conditions and Classifications .............................................................52
10.3 Dimensions.........................................................................................................53
10.4 Pin Assignment...................................................................................................55
10.4.1 Power Supply Connection ................................................................55
10.4.2 Data Transmission Connection ........................................................55
11 Old Equipment Disposal 57
12 Glossary 59
13 Appendix 63
13.1 Explanations of the Performance Test Sheet.....................................................63
13.2 EC Declaration of Conformity.............................................................................64

1 About this Document
H-850 Hexapod Microrobot MS202E Version: 1.1.0 1
In this Chapter
Goal and Target Audience of this User Manual ............................................................ 1
Symbols and Typographic Conventions........................................................................ 1
Other Applicable Documents......................................................................................... 2
Downloading Manuals................................................................................................... 3
1.1 Goal and Target Audience of this User Manual
This manual contains information on the intended use of the H-850.
It assumes that the reader has a fundamental understanding of basic servo systems
as well as motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 3) on our
website.
1.2 Symbols and Typographic Conventions
The following symbols and typographic conventions are used in this user manual:
CAUTION
Dangerous situation
If not avoided, the dangerous situation will result in minor injury.
Actions to take to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.
Actions to take to avoid the situation.
1
About this Document

1 About this Document
2Version: 1.1.0 MS202E H-850 Hexapod Microrobot
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/Label Meaning
1.
2. Action consisting of several steps whose sequential order
must be observed
Action consisting of one or several steps whose sequential
order is irrelevant
 List item
p. 5 Cross-reference to page 5
RS-232 Labeling of an operating element on the product (example:
socket of the RS-232 interface)
Warning sign on the product which refers to detailed
information in this manual.
1.3 Other Applicable Documents
The devices and software tools which are mentioned in this documentation are
described in their own manuals.
Description Document
C-887 Hexapod controller MS204E User Manual
C-887 Hexapod controller MS204Equ User Manual Short Version

1 About this Document
H-850 Hexapod Microrobot MS202E Version: 1.1.0 3
1.4 Downloading Manuals
INFORMATION
If a manual is missing on our website or if there are problems in downloading:
Contact our customer service department (p. 47).
The current versions of the manuals are found on our website. To download a manual,
proceed as follows:
1. Open the website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding category (e. g. H-Hexapods).
4. Click the corresponding product code (e. g. H-850).
An overview of the available file types is shown for the selected product.
5. If (0 Files) is shown in the Documents line, log in as follows to display and
download the documents:
a) Insert the product CD in the corresponding PC drive.
b) Open the Manuals directory.
c) Open the Release News (e. g. C-887_Releasenews_V_x_x_x.pdf) on
the CD of the product.
d) Find the user name and password in the User login for software
download section in the Release News.
e) In the User login area on the left margin in the website, enter the user
name and the password in the corresponding fields.
f) Click Login.
If Documents (0 Files) is still being displayed, no manuals are available:
−Contact our customer service department (p. 47).
6. Click Documents.
7. Click the desired manual and save it on the hard disk of your PC or on a data
storage medium.

2 Safety
H-850 Hexapod Microrobot MS202E Version: 1.1.0 5
In this Chapter
Intended Use ................................................................................................................. 5
General Safety Instructions........................................................................................... 5
2.1 Intended Use
The Hexapod microrobot (in short: "Hexapod") is a laboratory device in accordance
with DIN EN 61010-1. It is intended to be used in interior spaces and in an
environment that is free of dirt, oil and lubricants.
Based on its design and realization, the Hexapod is intended for positioning, adjusting
and shifting of loads in six axes at various velocities.
The Hexapod is part of a Hexapod system. The intended use of the Hexapod is only
possible in connection with the Hexapod controller, which is part of the Hexapod
system and coordinates all motions of the Hexapod.
2.2 General Safety Instructions
The H-850 is built according to state-of-the-art technology and recognized safety
standards. Improper use can result in personal injury and/or damage to the H-850.
Only use the H-850 for its intended purpose, and only use it if it is in a good
working order.
Read the user manual.
Immediately eliminate any faults and malfunctions that are likely to affect
safety.
The operator is responsible for the correct installation and operation of the H-850.
2
Safety

2 Safety
6Version: 1.1.0 MS202E H-850 Hexapod Microrobot
2.2.1 Organizational Measures
User manual
Always keep this user manual available by the H-850.
The latest versions of the user manuals are available for download (p. 3) on
our website.
Add all information given by the manufacturer to the user manual, for example
supplements or Technical Notes.
If you pass the H-850 on to other users, also turn over this user manual as
well as other relevant information provided by the manufacturer.
Only use the device on the basis of the complete user manual. Missing
information due to an incomplete user manual can result in minor injury and
property damage.
Only install and operate the H-850 after having read and understood this user
manual.
Personnel qualification
The H-850 may only be started up, operated, maintained and cleaned by authorized
and qualified staff.
2.2.2 Measures for Handling Vacuum-Compatible Products
When handling the vacuum version of the Hexapod, attention must be paid to
appropriate cleanliness. At PI, all parts are cleaned before assembly. During assembly
and measurement, powder-free gloves are worn. Afterwards, the Hexapod is cleaned
once again by wiping and shrink-wrapped twice in vacuum-compatible film.
Only touch the Hexapod with powder-free gloves.
If necessary, wipe the Hexapod clean after unpacking.
2.2.3 Safety Measures during Transport
An impermissible mechanical load can damage the Hexapod.
Only send the Hexapod in the original packaging.
Only hold the Hexapod by the transport lock or the base plate.