Piezoconcept HS1H User manual

1
INSTALLATION AND OPERATION MANUAL
HS1H
PIEZOCONCEPT
15 Rue du Bocage
69008 LYON
France

2
IMPORTANT SAFETY INFORMATION
The high voltage drivers can produce hazardous voltages and currents. Use caution when
operating the drivers and when handling the linear actuators. Piezoactuators have large
capacitance and are capable of storing hazardous amounts of electrical energy over long periods
of time. Various conditions such as load and temperature changes can also cause piezoactuators to
accumulate charge.
Before disconnecting the DB-9 connector from the PIEZOCONCEPT controller, first set the
command voltage to 0.0V, then turn the AC power to the PIEZOCONCEPT controller off, and
finally wait one minute before disconnecting.
The HS1H has no user serviceable parts. Only trained service personnel should perform service.
IMPORTANT
All Technical Information, recommendations, and examples related to PIEZOCONCEPT
Products made in this manual are based on information believed to be correct. The purchaser or
user should determine the suitability of each product before using. The purchaser or user assumes
all risks and liability whatsoever in connection with the use of any and all PIEZOCONCEPT
products or services.

3
CONTENTS
1INTRODUCTION ......................................................................................................................................... 4
1.1 Unpacking the HS1H.......................................................................................................................... 4
1.2 Handling the HS1H............................................................................................................................. 4
1.3 HS1H. ................................................................................................................................................... 5
2INSTALLATION ........................................................................................................................................... 5
2.1 Installing a single axis HS1H unit. .................................................................................................... 5
2.2 Installing a two axis HS1H unit ......................................................................................................... 6
3GROUND LOOPS ....................................................................................................................................... 6
3.1 Prevention and identification of ground loops................................................................................. 7
4OPERATING THE NANOPOSITIONING STAGE .................................................................................. 7
4.1 Operating in closed loop mode ......................................................................................................... 7
4.2 Care during operation......................................................................................................................... 8

4
1 INTRODUCTION
The HS1H is a PZT actuated linear nanopositioning stage of exceptional resolution and
stability. Two HS1H’s can be stacked to form a high performance XY nanopositioning
system. The HS1H comes complete with a position sensitive detector for closed loop
operation.
TRANSLATION (μm) (X)
10, 30, 50, 70 or 100 µm
VOLTAGE RANGE (V)
-15V to +150V
RESONANT FREQUENCY
UNLOADED (Hz)
7000Hz (10µm), 4000Hz (30/50/70µm)
1500Hz (100µm)
STIFFNESS (N/μm)
5.2N/µm (10µm), 3N/µm (30/50/70µm)
1.1N/µm (100µm)
MAXIMUM LOAD (hor/vert) (kg)
1/0.5
CABLE LENGTH (m)
>1.5m
CABLE CONNECTION
DB-9
1.1 Unpacking the HS1H
Before unpacking the HS1H read this entire operation manual, paying special attention to
the following section on “Handling the HS1H”. Check the contents of the package
against the shipping list and notify PIEZOCONCEPT immediately if any items are
missing.
1.2 Handling the HS1H
The HS1H is a high precision scientific instrument and therefore requires special
handling in order to ensure proper operation. Mishandling can cause permanent damage
to the nanopositioning stage. To ensure a long and useful life the following guidelines
should be strictly followed.
•Never insert anything into the EDM grooves. The EDM grooves are the cuts
that form the flexure hinges and separate the moving portion of the stage
•Do not move the translation stage by pushing on it with your hands or any other
object.
•Avoid applying a torque between the moving stage and the frame.
•Do not drop, treat roughly, or physically shock the Nanopositioning stage.
•Do not lift by the cable.
•The surface to which the HS1H is mounted to should be flat and clean. Likewise,
the bottom of the HS1H should be free of particles and dust before mounting.
•Do not immerse in any liquid. If the HS1H requires cleaning slightly dampen a lint
free cloth with iso-propanol or ethanol and lightly wipe the surface. Do not get any
liquid or lint into the EDM grooves.
•Never disassemble the nanopositioning stage, there are no serviceable parts
inside.

5
1.3 HS1H.
The HS1H is manufactured from a high performance Aluminium 7075 alloy. PZT
actuators are preloaded within the HS1H and supply the driving force for stage
movement. The flexure hinges, which form the guidance mechanism, are cut into the
stage using electric discharge machining (EDM). The PZT actuators are oriented parallel
to the stage motion direction. There are no serviceable parts in the HS1H stage.
A stage direction arrow is located on the side of the stage. This arrow indicates which
direction the stage moves when a positive voltage is applied. For XY systems, an
identification label of either X (CHANNEL 1) or Y (CHANNEL 2) is located near the
direction arrow. This identification, X or Y, describes which driver axis that particular
stage should be connected to.
2 INSTALLATION
The HS1H may be installed either vertically or horizontally. When installed vertically the
stage direction arrow should be pointing upward. Larger loads may be carried when
mounted in the horizontal direction. It is always advisable to minimize the load carried by
the Nanopositioning stage. Heavier loads reduce the stage response time and may
cause fatigue and /or reduced motion.
2.1 Installing a single axis HS1H unit
To install a single axis HS1H use the following steps.
•On the surface that the HS1H is to be mounted on, tap M3 holes on a
79X52,50mm rectangle.
•Make sure the surface to be mounted to is clean, flat, and free of burs.
•Using a lint free cloth, gently wipe off the bottom of the HS1H to remove any
particles or dust.
•Use M3 Socket screws to secure the stage. Use a maximum torque of 0.5 Nm.
Attempt to minimize the torque between the moving and fixed part of the stage
during tightening.
IMPORTANT! Check for ground loops (Section 3) between the HS1H and the mounting
surface.
Items can be attached to the scanning stage using one or more of the M2.5 holes that
are tapped on the moving part of the stage. These M2.5 holes are on a 29mm square. To
attach an item to the scanning stage, use the following procedure.
•Using a lint free cloth, gently wipe off the top of the HS1H to remove any particles
or dust.
•Make sure the item to be attached is flat and free of particles or dust.
•Locate the item to be attached and ensure that it does not come into contact with
any portion of the stage other than the moving portion. Ensure that the item being
attached does not come into physical contact with any other item.
•Tighten the M2.5 screws, using a maximum torque of 0.5 Nm. Attempt to minimize
the torque between the moving part and fixed part of the stage during tightening.

6
2.2 Installing a two axis HS1H unit
Two nanopositioning stages can be used to form an XY scanning stage. An adapter plate
is used to connect the top stage to the bottom. The XY scanner can be installed either
horizontally or vertically. When installed vertically the first stage mounted should be
oriented with the direction arrow pointing upward. The second stage is then mounted to
this stage with the direction arrow in the horizontal plane. Larger loads may be carried
when mounted in the horizontal direction. It is always advisable to minimize the load
carried by the nanopositioning stage. Heavier loads reduce the stage response time and
may cause fatigue and /or reduced motion.
If a two axis system was purchased the stages are shipped assembled as a two axis
system. The convention used is that the bottom stage is the Y-axis (CHANNEL 2) and
the top stage is the X-axis (CHANNEL 1).
Before installing the two axis system the stages must be taken apart using the following
steps.
1. While holding on to the top or X axis loosen the four M3 socket head cap screws.
Do not hold on to the bottom or Y-axis while loosening. Holding onto the Y-axis
will induce a torque between moving part and stationary parts of the stage
2. While holding on to the adapter plate loosen the four M2.5 flat head screws. Do
not hold on to the bottom or Y-axis while loosening
To install a two axis HS1H system use the following steps :
1. Install the first or bottom HS1H (Y-axis) using the procedures described above in
Section 2.1.
2. Using a lint free cloth, gently wipe off the top of the installed HS1H and the bottom
of the adapter plate to remove any particles or dust.
3. Using four M2.5 screws (provided) bolt the adapter plate to the installed
Nanopositioning stage. Use a maximum torque of 0.5 Nm. Minimize the torque
between the fixed and moving part of the stage during installation.
4. Using a lint free cloth, gently wipe off the top of the adapter plate and the bottom
of the remaining HS1H to remove any particles or dust.
5. Using four M3 socket screws (provided) bolt the top stage (X-axis) to the adapter
plate. Use a maximum torque of 0.5 Nm. The provided socket screws do not
touch the bottom stage and therefore do not interfere with motion. Do not use
longer screws to secure the top axis to the adapter plate. Longer screws
may interfere with the motion and damage the stages. Minimize the torque
between the stages and the fixed and moving parts of the stages during
installation.
IMPORTANT! Check for ground loops (Section 3) between the HS1H and the mounting
surface.
3 GROUND LOOPS
The single greatest danger to your nanopositioning system is a ground loop between the
stage and the mounting surface. Ground loops can be the source of noise in the HS1H,

7
and in some cases the oscillations may be severe enough to permanently damage the
piezoactuators.
3.1 Prevention and identification of ground loops
Ground loops may sometimes be detected by a digital Voltmeter and can usually be
detected by using the differential mode of a dual channel oscilloscope.
Prevention of ground loops can be achieved in two ways. An effective and simple
method is to insulate the stage from the mounting surface (e.g. mylar or paper between
the stage and the mounting surface combined with non-conductive mounting screws).
The second method is to connect the PIEZOCONCEPT's controller ground to the
mounting surface. The stage is connected directly to the ground of the
PIEZOCONCEPT's controller, which in turn is connected to the ground of the AC power
cord. The PIEZOCONCEPT's controller enclosure is also at ground potential. Attaching a
grounding wire between any of the PIEZOCONCEPT's controller enclosure screws and
the mounting surface may short-circuit the ground loop. In a few cases, this may not be
an effective method. When this occurs, please identify high current sources returning to
ground through your mounting surface. Mounting surfaces should never be used as the
electrical ground current path for any instrumentation (such as vacuum pumps,
computers, etc.).
Should you observe unexpected oscillations in your nanopositioning stage after you have
switched on the power, this likely indicates the continued presence of a ground loop or
excessive sample mass (see Section 2). SWITCH THE SYSTEM OFF IMMEDIATELY
AND SEARCH FOR THE SOURCE OF THE GROUND LOOP. SHOULD THE
PROBLEMS CONTINUE PLEASE CONTACT PIEZOCONCEPT FOR TECHNICAL
ASSISTANCE.
4 OPERATING THE NANOPOSITIONING STAGE
The HS1H comes complete with a position sensitive detector for closed loop operation.
In closed loop operation, achieved using the PIEZOCONCEPT controller, the effects of
creep and hysteresis are removed and the position is held constant at the command
position.
4.1 Operating in closed loop mode
The HS1H comes with a 9 pin D-type connector and uses the PIEZOCONCEPT's
controller for complete positioning control. To operate in closed loop mode use the
following procedure :
•Install the HS1H as discussed in Section 2.
•Turn the PIEZOCONCEPT's controller power off.
•Set the command signal to 0.0 Volts either on the analog interface or the digital
interface.
•Connect the 9 pin D-type connector to the PIEZOCONCEPT's controller, secure
the two screws.
•Turn the power switch on.

8
The command voltage now controls the position of the nanopositioning stage.
Never disconnect the 9-Pin connector with the power on. Always set the command
voltage to zero and turn the power off before disconnecting. Allow 1 minute for the PZT
actuators to discharge before disconnecting. For more information see the
“PIEZOCONCEPT CONTROLLER OPERATION MANUAL”.
4.2 Care during operation
The HS1H is a high precision scientific instrument and should be handled with care
during operation. Failure to do so may result in permanent damage.
During operation ensure that there are no physical constraints on the moving stage or
anything fixtured to the moving stage.
Never apply a voltage greater than 150V or less than -5V to the PZT.
Maintain a clean working environment to reduce the chance of particles or other
substances from gathering in the EDM grooves.