Primes LQM series User manual

LaserQualityMonitor LQM
LQM 20, LQM 200/500, HP-LQM II (10 kW)
LaserDiagnosticsSoftware LDS
Revision 02/2018 EN
Operating Manual
35,0(6
Translation of the original instructions

IMPORTANT!
READ CAREFULLY BEFORE USE.
KEEP FOR FUTURE USE.

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Table of contents
1 Basic safety instructions 9
2 Symbol explanations 11
3 About this operating manual 12
4 Conditions at the installation site 12
5 Introduction 13
5.1 Laser beam measurement.......................................................................................................13
5.2 System description .................................................................................................................14
5.3 Measuring principle .................................................................................................................14
5.4 Short overview installation .......................................................................................................16
6 Transport 17
7 Installation 17
7.1 Preparation and mounting position..........................................................................................17
7.2 Manually aligning the LaserQualityMonitor LQM.......................................................................18
7.2.1 Alignment tools .........................................................................................................18
7.2.2 Manual alignment of the basic device........................................................................19
7.2.3 Manual alignment of the 1st attenuator module and fine adjustment ..........................19
7.2.4 Manual alignment of the 2nd attenuator module .........................................................20
7.3 Install the LaserQualityMonitor LQM ........................................................................................21
7.3.1 Install the LQM 20/200 without bottom plate ............................................................21
7.3.2 Install the LQM 200/500 with bottom plate ...............................................................22
7.3.3 Install the HP-LQM II with bottom plate.....................................................................23
8 Connect cooling circuit (HP-LQM II and 500W water cooled version only) 24
8.1 Water quality ...........................................................................................................................24
8.2 Water pressure........................................................................................................................24
8.3 Humidity..................................................................................................................................25
8.4 Water connections and water flow rate....................................................................................26
8.4.1 HP-LQM II (10 kW)....................................................................................................26
8.4.2 LQM (500W) ............................................................................................................26
9 Electrical connections 27
9.1 Connections............................................................................................................................27
9.2 Pin assignment .......................................................................................................................28
9.2.1 Power supply............................................................................................................28
9.2.2 Inlet external trigger ..................................................................................................28
9.2.3 Outlet internal trigger.................................................................................................28
9.3 Safety facilities ........................................................................................................................29
9.3.1 Temperature control..................................................................................................29
9.3.2 External safety circuit (HP-LQM II with 2nd attenuator only) ........................................30
9.4 Connection to the PC and connect power supply ...................................................................31
10 Status LEDs 32

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11 Installation and configuration of the LaserDiagnosticsSoftware LDS 33
11.1 System requirements ..............................................................................................................33
11.2 Installing the software..............................................................................................................33
11.3 Ethernet configuration .............................................................................................................34
11.3.1 Enter IP address .......................................................................................................34
11.3.2 Establishing a connection to PC (menu Communication > Free Communication)..35
11.3.3 Changing the standard IP address of the device (menu Communication > Free
Communication)......................................................................................................36
12 Description of the LaserDiagnosticsSoftware LDS 38
12.1 Graphical user interface...........................................................................................................38
12.1.1 The menu bar ...........................................................................................................40
12.1.2 The toolbar ...............................................................................................................41
12.1.3 Menu overview..........................................................................................................42
12.2 File ..........................................................................................................................................45
12.2.1 New (menu File > New)............................................................................................45
12.2.2 Open (menu File > Open).........................................................................................45
12.2.3 Close/Close all (menu File > Close/Close all)...........................................................45
12.2.4 Save (menu File > Save)...........................................................................................45
12.2.5 Save as (menu File > Save As).................................................................................45
12.2.6 Export (menu File > Export).....................................................................................45
12.2.7 Load measurement preferences (menu File > Load measurement preferences)....46
12.2.8 Save measurement preferences (menu File > Save measurement preferences).....46
12.2.9 Protocol (menu File > Protocol)...............................................................................46
12.2.10 Print (menu File > Print)...........................................................................................46
12.2.11 Print preview (menu File > Print preview).................................................................46
12.2.12 Recently opened files (menu File > Recently opened Files).....................................46
12.2.13 Exit (menu File > Exit)...............................................................................................46
12.3 Edit .........................................................................................................................................47
12.3.1 Copy (menu Edit > Copy).........................................................................................47
12.3.2 Clear plane (menu Edit > Clear plane).....................................................................47
12.3.3 Clear all planes (menu Edit > Clear all planes).........................................................47
12.3.4 Change user level (menu Edit > Change User Level)...............................................47
12.4 Measurement..........................................................................................................................48
12.4.1 Measuring environment (menu Measurement > Environment)................................48
12.4.2 Sensor parameters (menu Measurement > Sensor parameter)..............................49
12.4.3 Beam find settings (menu Measurement > BeamFind Settings: Beamfind ...........50
12.4.4 CCD info (menu Measurement > CCD Info)............................................................51
12.4.5 CCD settings (menu Measurement > CCD Settings)..............................................52
12.4.6 LQM adjustment (menu Measurement > LQM Adjustment)....................................55
12.4.7 Power measurement (menu Measurement > Power Measurement).......................55
12.4.8 Single (menu Measurement > Single)......................................................................56
12.4.9 Caustic measurement (menu Measurement > Caustic)...........................................60
12.4.10 Start adjust mode (menu Messung > Start Adjust mode).......................................63
12.4.11 Option (advanced user only) (menu Measurement > Option)...................................63
12.5 Presentation............................................................................................................................65
12.5.1 False colors (menu Presentation > False colors).....................................................66
12.5.2 False colors (filtered) (menu Presentation > False colors (filtered)).........................67
12.5.3 Isometry (menu Presentation > Isometry)...............................................................67
12.5.4 Isometry 3D (menu Presentation > Isometry 3D) ...................................................68
12.5.5 Review 86% or 2nd Moment (menu Presentation > Review (86%)/
(Sec. Moments)) .....................................................................................................69
12.5.6 Caustic (menu Presentation > Caustic) ..................................................................70
12.5.7 Raw beam (menu Presentation > Raw-beam) .......................................................75
12.5.8 Symmetry check (menu Presentation > SymmetryCheck)......................................76
12.5.9 Fixed contour lines (menu Presentation > Fixed Contour Lines).............................77

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12.5.10 Variable contour lines (menu Presentation > Variable Contour Lines).....................78
12.5.11 Graphical review (menu Presentation > Graphical Review).....................................80
12.5.12 Systemstate (menu Presentation > Systemstate)...................................................80
12.5.13 Evalution parameter view (menu Presentation > Evalution Parameter View)..........81
12.5.14 Evaluate document (menu Presentation > Evaluate doc)........................................82
12.5.15 Color tables (menu Presentation > Color Tables)....................................................84
12.5.16 Toolbar (Menu Presentation > Toolbar)...................................................................84
12.5.17 Position (menu Presentation > Position).................................................................85
12.5.18 Evaluation (option) (menu Presentation > Evaluation)..............................................85
12.6 Communication.......................................................................................................................87
12.6.1 Rescan bus (menu Communication > Rescan bus)................................................87
12.6.2 Free communication (menu Communication > Free Communication)...................87
12.6.3 Scan device list (menu Communication > Scan device list) ...................................88
12.7 Script ......................................................................................................................................89
12.7.1 Editor (menu Script > Editor) ..................................................................................89
12.7.2 List (menu Script > List) ..........................................................................................89
12.7.3 Python (menu Script > Python) ...............................................................................89
13 Measurement 90
13.1 Safety instructions...................................................................................................................90
13.2 Selection and change of the measuring objective and the neutral-density filter ........................91
13.2.1 Selection of the measuring objective .........................................................................91
13.2.2 Exchanging the measuring objective or the neutral-density filter................................92
13.2.3 Neutral-density filter ..................................................................................................93
13.3 Align the laser beam with the LaserDiagnosticsSoftware LDS..................................................94
13.3.1 Align the laser beam at position z2 in the measuring window ....................................94
13.3.2 Display the misalignment angle of the laser beam via Position z1 and z3...................95
13.4 Enter the measurement settings into the LaserDiagnosticsSoftware LDS ................................96
13.4.1 CCD settings (menu Measurement > CCD Settings)..............................................96
13.4.2 Measuring environment (menu Measurement > Environment)................................97
13.5 Flowchart of a measurement...................................................................................................98
13.5.1 Align the laser manually and with the LaserDiagnosticsSoftware LDS........................98
13.5.2 Set caustic limits.......................................................................................................98
13.5.3 Perform caustic measurement ..................................................................................99
14 Maintenance and service 100
15 Storage and transport 100
16 Measures for the product disposal 100
17 Declaration of conformity 101
18 Technical data 102
19 Dimensions 103
19.1 LaserQualityMonitor LQM 20 basic module...........................................................................103
19.2 LaserQualityMonitor LQM 200/500 (without bottom plate).....................................................104
19.3 HighPower-LaserQualityMonitor HP-LQM II with optional fiber adapter..................................105

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20 Appendix 106
20.1 Install a fiber adapter.............................................................................................................106
20.2 Changing the factory setting on the LQM UV.........................................................................107
20.3 HighYAG collimation module .................................................................................................109
20.3.1 Key data for the cooling system for the HighYAG collimation module ......................110
20.3.2 Schematic of the cooling system for the HighYAG collimation module.....................111
20.3.3 Schematic of the cooling circuit for the HP-LQM II ..................................................111
20.3.4 Remove HighYAG collimation module .....................................................................112
20.3.5 Choosing the measuring objective with a HighYAG collimation module installed......113
20.4 Optical path in the HP-LQM II (with collimator).......................................................................115
20.5 Description of the MDF file format .........................................................................................116
20.6 Measuring pulsed irradiation .................................................................................................117
20.6.1 Measuring configuration selection ...........................................................................119
20.6.2 Influence of the pulse parameters on the integration time control ............................119
20.6.3 Examples for triggered measuring mode.................................................................123
20.6.4 Summary ................................................................................................................124
21 Basis of laser beam diagnosis 125
21.1 Laser beam parameter..........................................................................................................125
21.1.1 Rotationally symmetric beams.................................................................................126
21.1.2 Non rotationally symmetric beams ..........................................................................127
21.2 Calculation of beam data ......................................................................................................128
21.2.1 Determination of the zero level ................................................................................128
21.2.2 Determination of the beam position.........................................................................129
21.2.3 Radius determination with the 2nd moment method of the power density
distribution..............................................................................................................129
21.2.4 Radius determination with the method of the 86% power inclusion .......................130
21.2.5 Measurement errors................................................................................................130
21.2.6 Error in determining zero level .................................................................................131
21.2.7 Saturating the signal ...............................................................................................131
21.2.8 Errors from incorrect measurement window size .....................................................132
21.3 Formula and algorithms for raw beam back calculation of the LQM.......................................133

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PRIMES - The Company
PRIMES manufactures measuring devices used to analyze laser beams. These devices are employed for
the diagnostics of high-power lasers ranging from CO2lasers and solid-state lasers to diode lasers. A wave-
length range from infrared through to near UV is covered, offering a wide variety of measuring devices to
determine the following beam parameters:
• Laser power
• Beam dimensions and position of an unfocused beam
• Beam dimensions and position of a focused beam
• Beam quality factor M²
PRIMES is responsible for both the development, production, and calibration of the measuring devices. This
guarantees optimum quality, excellent service, and a short reaction time, providing the basis for us to meet all
of our customers’ requirements quickly and reliably.
Max-Planck-Str. 2 - 64319 Pfungstadt - Germany - [email protected] - www.primes.de
35,0(6

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1 Basic safety instructions
Intended use
The LaserQualityMonitor LQM is exclusively intended for measurements which are carried out in or nearby
the optical path of high power lasers. Please mind and adhere to the specifications and limit values given in
chapter 18 „Technical data“ on page 102. Other forms of usage are improper. The information contained in
this operating manual must be strictly observed to ensure proper use of the device.
Using the device for unspecified use is strictly prohibited by the manufacturer. By usage other than intended
the device can be damaged or destroyed. This poses an increased health hazard up to fatal injuries. When
operating the device, it must be ensured that there are no potential hazards to human health.
The device itself does not emit any laser radiation. During the measurement, however, the laser beam is
guided onto the device which causes reflected radiation (laser class 4). That is why the applying safety regu-
lations are to be observed and necessary protective measures need to be taken.
In measuring mode, the device’s safety circuit (interlock) must be connected with the laser control.
Observing applicable safety regulations
Please observe valid national and international safety regulations as stipulated in ISO/CEN/TR standards as
well as in the IEC-60825-1 regulation, in ANSI Z 136 “Laser Safety Standards” and ANSI Z 136.1 “Safe Use
of Lasers”, published by the American National Standards Institute, and additional publications, such as the
“Laser Safety Basics”, the “LIA Laser Safety Guide”, the “Guide for the Selection of Laser Eye Protection”
and the “Laser Safety Bulletin”, published by the Laser Institute of America, as well as the “Guide of Control
of Laser Hazards” by ACGIH.
Necessary safety measures
DANGER
Serious eye or skin injury due to laser radiation
During the measurement the laser beam is guided on the device, which causes scattered or
directed reflection of the laser beam (laser class 4).
The LaserQualityMonitor LQM cannot be operated in any of the available configurations
without taking the following precautions. All precautions must be taken, even when the fiber
is in the collimator or fiber adapter.
X
Please take the following precautions.
If people are present within the danger zone of visible or invisible laser radiation, for example near laser
systems that are only partly covered, open beam guidance systems, or laser processing areas, the following
safety measures must be implemented:
• Connect the device’s safety circuit (interlock) to the laser control. Check that the safety circuit (interlock)
will switch off the laser properly in case of error.
• Please wear safety goggles adapted to the power, power density, laser wave length and operating
mode of the laser beam source in use.
• Depending on the laser source, it may be necessary to wear suitable protective clothing or protective
gloves.
• Protect yourself from direct laser radiation, scattered radiation, and beams generated from laser radiation
(by using appropriate shielding walls, for example, or by weakening the radiation to a harmless level).
• Use beam guidance or beam absorber elements that do not emit any hazardous substances when they
come in to contact with laser radiation and that can withstand the beam sufficiently.
• Install safety switches and/or emergency safety mechanisms that enable immediate closure of the laser
shutter.

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• Ensure that the device is mounted securely to prevent any movement of the device relative to the beam
axis and thus reduce the risk of scattered radiation. This in the only way to ensure optimum performance
during the measurement.
Employing qualified personnel
The device may only be operated by qualified personnel. The qualified personnel must have been instructed
in the installation and operation of the device and must have a basic understanding of working with high-
power lasers, beam guiding systems and focusing units.
Conversions and modifications
The device must not be modified, neither constructionally nor safety-related, without our explicit permission.
The device must not be opened e.g. to carry out unauthorized repairs. Modifications of any kind will result in
the exclusion of our liability for resulting damages.
Liability disclaimer
The manufacturer and the distributor of the measuring devices do not claim liability for damages or injuries
of any kind resulting from an improper use or handling of the devices or the associated software. Neither the
manufacturer nor the distributor can be held liable by the buyer or the user for damages to people, material
or financial losses due to a direct or indirect use of the measuring devices.

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2 Symbol explanations
The following symbols and signal words indicate possible residual risks:
DANGER
Means that death or serious physical injuries will occur if necessary safety precautions are not
taken.
WARNING
Means that death or serious physical injuries may occur if necessary safety precautions are not
taken.
CAUTION
Means that minor physical injury may occur if necessary safety precautions are not taken.
NOTICE
Means that property damage may occur if necessary safety precautions are not taken.
The following symbols indicating requirements and possible dangers are used on the device:
Components susceptible to ESD
Read and observe the operating instructions and safety guidelines before startup!
Further symbols that are not safety-related:
Here you can find useful information and helpful tips.
With the CE designation, the manufacturer guarantees that its product meets the requirements of
the relevant EC guidelines.
X
Call for action

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3 About this operating manual
This documentation describes how to work with the LaserQualityMonitor LQM and operate it with the Laser-
DiagnosticsSoftware LDS.
The software description includes a brief introduction on using the device for measurements.
This operating manual describes the software version valid at the time of printing.
Since the user software is continuously being developed further, the supplied data medium may
have a different version number. Correct functioning of the device is, however, still guaranteed with
the software.
Should you have any questions, please specify the software version installed on your device. The software
version can be found under the following menu item: Help > About LaserDiagnosticsSoftware.
Fig. 3.1: Information regarding the current software version
4 Conditions at the installation site
• The device must not be operated in a condensing atmosphere.
• The ambient air must be free of organic gases.
• Protect the device from splashes of water and dust.
• Operate the device in closed rooms only.

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5 Introduction
5.1 Laser beam measurement
Laser beams in industrial applications, whether they be CO2, Nd:YAG- diode or fibre lasers, work with invis-
ible beams in the infra-red or near infra-red spectral range (NIR). Hence changes in beam quality or power
cannot be detected visually, and only become evident from the outcome of their application. Under some
circumstances, this results in very expensive rejects being produced.
If the deterioration in quality is not recognised in the manufacturing process, this usually results in the subse-
quent failure of the product in use, with consequences for the manufacturer of rectification, replacement and
loss of image.
This is where PRIMES beam diagnostics devices for measuring beam quality, focusability and laser power
come in. Process monitoring in production with laser beam diagnostics devices by PRIMES enables consis-
tent quality assurance and allows the timely detection and elimination of malfunctions of laser beams.
PRIMES measuring devices allow the reliable recording of current beam parameters, and enable ongoing
documentation of beam properties for quality assurance purposes. This is a requirement that should not be
underestimated in many industrial areas, such as automotive or medical technology.
With PRIMES devices for beam diagnostics, troubleshooting of laser applications is simplified considerably.
The beam intensity profile, beam diameter, beam caustic before and after focusing, and laser power to be
applied are directly measured and analysed. Based on the readings and their evaluation, maintenance and
servicing personnel can work in a targeted way on repair. Loss of time and system downtimes due to “trying
out” possible causes of the problem are effectively avoided.
The same applies to process optimisation and approval of process windows in laser material processing.
Only if the focal position and focal dimension and also the intensity profile of the laser beam are known, can
processes such as laser beam cutting, welding or drilling be adjusted to the particular component geometry,
materials be selected and the breadth of process windows be determined reliably.

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5.2 System description
The LaserQualityMonitor LQM is used to measure the beam properties of a beam source either by measuring
the open beam across several meters or with a fiber placed in a fiber holder or collimator.
Cw lasers can be measured and pulsed lasers can also be measured using an internal trigger.
The electronics and all optical components shown are installed in the basic device. The basic device can be
supplemented by a front-end module with a beam splitter, an absorber and an alignment unit, which enables
the use of the device even in the multikilowatt range. Fiber retainers, collimators, neutral-density filters as well
as additional measuring objectives are available upon request.
1st Attenuator module
(with alignment unit)
Basic module
Absorber
2nd Attenuator module
(with beam splitter)
Fig. 5.1: Components using the example of LQM + HP
5.3 Measuring principle
Due to the very long measuring path of three to six Rayleigh lengths, a lot of measuring is needed to char-
acterize a collimated laser beam. The LaserQualityMonitor LQM therefore generates a compact caustic
inside the device by focusing the irradiated collimated laser beam with a focussing optic. In the process, the
focused beam is weakened as it passes through an integrated absorber and OD filter and then appears on
the CCD sensor, enlarged by a measuring objective.
The LaserDiagnosticsSoftware LDS software determines the radius, location, and orientation of the laser
beam by moving the prisms inside the device and measuring the two-dimensional power density distribution
repeatedly at various positions. The electronic integration time control of the CCD sensor expands the sys-
tem’s dynamic area. As a result of this, it generally isn’t necessary to adjust the filter during a measurement.

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The following laser sources can be measured:
• All cw and pulsed laser sources in the wave length area of 340-360 nm/515-545 nm/1030-1090 nm with
medium power from approx. 1 mW up to multikilowatt ranges with an M² ranging from 1 to approx. 50.
• The beam diameter at the aperture of the measuring system can vary in the range of 1.5 mm to 15 mm,
with divergence below 10 mrad.
Focusing optic AbsorberLaser beam Prisms
Prisms
Measuring objective 5:1
Position 1
(illustrated inserted)
Measuring objective 1:1
Position 2
(illustrated not inserted)
CCD sensorOD filterTrigger
Fig. 5.2: Optical assembly of the LQM basic module
Scaning rangeRaw beam
Focusing optic Measuring objective
CCD sensor
Fig. 5.3: Measuring principle

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5.4 Short overview installation
1. Taking safety precautions Chapter 1 on page 9
2. Prepare installation (only during open beam measurement)
• Make preparations
• Set the installation position
• Align the device manually
Chapter 7 on page 17
3. Installing the water-cooling
(HP-LQM II and LQM 500W water-cooled version only)
• Connection diameter
• Note the flow rate
Chapter 8 on page 24
4. Power supply
• Connect power supply
• Connect external safety switch (interlock)
Chapter 9 on page 27
5. Connect with the computer
• Via Ethernet or LAN
Chapter 9.4 on page 31
6. Install the LaserDiagnosticsSoftware LDS on the computer
• The Software is part of the scope of delivery
• Connect the LaserQualityMonitor LQM with the LaserDiagnosticsSoftware LDS
Chapter 11 on page 33
7. Complete installation (open beam measurement only)
• Align the device with the LaserDiagnosticsSoftware LDS according to chapter
13.3 „Align the laser beam with the LaserDiagnosticsSoftware LDS“ on page
94
• Mount the device firmly in accordance with chapter 7 on page 17
Chapter 13.3 on page 94
8. Measure
• Follow the safety instructions
• Select and use the measuring objective and neutral-density filter
• Check the device's alignment with the LaserDiagnosticsSoftware LDS
• Perform a test measurement
Chapter 13.5 on page 98

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6 Transport
WARNING
Risk of injury when lifting or dropping the device
Lifting and positioning heavy devices can, for example, stress intervertebral disks and cause
chronic changes to the lumbar or cervical spine. The device may fall.
X
Use a lifting device to lift and position the device.
CAUTION
Damaging/destroying the device
Optical components may be damaged if the device is subjected to hard shocks or is allowed
to fall.
X
Handle the measuring device carefully when transporting or installing it.
X
To avoid contamination, cover the apertures with the provided lid or optical tape.
X
Only transport the device in the original PRIMES transport box.
CAUTION
Damage/destruction of the device caused by leaking or freezing cooling water
Leaking cooling water can damage the device. Transporting the device at temperatures
near or below freezing and without emptying the cooling circuit completely can damage the
device.
X
Empty the lines of the cooling circuit completely.
X
To empty the cooling circuit, the HP-LQM II/LQM 500 W can be flushed out with clean, dry
compressed air.
The optional PowerLossMonitor PLM cannot be flushed with compressed air.
X
Even when the lines of the cooling circuit have been emptied, a small amount of residual
water will remain in the device at all times. This may leak out and end up inside the device.
Close the connector plug of the cooling circuit with the included sealing plug.
7 Installation
7.1 Preparation and mounting position
Check the space available before mounting the device, especially the required space for the connection
cables. The device must be set up so that it is stable and fastened with screws (see chapter 7.3 on page
21).
The LaserQualityMonitor LQM can be mounted and operated in any position. During open beam measure-
ment, the LaserQualityMonitor LQM must be aligned with the laser beam. The steps taken for installation can
be found in chapter 5.4 on page 16.

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7.2 Manually aligning the LaserQualityMonitor LQM
For an open beam measurement, the LaserQualityMonitor LQM must be aligned with the laser beam:
1. Align the LaserQualityMonitor LQM manually with a pilot laser and the alignment tool.
• The LaserQualityMonitor LQM is properly aligned when the pilot beam is centered through the holes in
the alignment tool.
2. Check the alignment as specified in chapter 13.3 on page 94 with the alignment mode of the
LaserDiagnosticsSoftware LDS.
7.2.1 Alignment tools
Depending on the LaserQualityMonitor LQM version, there are several alignment tools with different aperture
diameters.
Aperture diameter in mm LQM Version Order No.
40 1st Attenuator
• 200W Air Cooling
• 500W Water Cooling
850-006-005
45 2nd Attenuator (HP Water Cooling) 850-006-006
54 Basic Module 850-006-001
Tab. 7.1: Alignment tools for different aperture diameters
The inlet aperture must be aligned centrally and at a right angle to the laser beam. Alignment tools for the
various LQM versions help with alignment.
Fig. 7.1: Alignment tools for aligning the LQM versions with various apertures

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7.2.2 Manual alignment of the basic device
In order to align the laser beam with the basic device, the alignment tool is mounted with a mounting plate
and two knurled screws included in the scope of delivery (see Fig. 7.2 on page 19).
Fig. 7.2: Alignment tool mounted on the basic device
7.2.3 Manual alignment of the 1st attenuator module and fine adjustment
To align the laser beam with the 1st attenuator module, the alignment tool is mounted with a mounting plate
and two knurled screws included in the scope of delivery (see Fig. 7.3 on page 19).
Fig. 7.3: Mounted alignment tool on the 1st attenuator module
With the 1st attenuator module, the angle of incidence of the laser beam can be corrected ± 3° by fine tuning
the angle with two integrated micrometer screws (see Fig. 7.4 on page 19).
Fig. 7.4: Micrometer screws on the 1st attenuator module for fine adjustment

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7.2.4 Manual alignment of the 2nd attenuator module
To align the laser beam with the 2nd attenuator module, the alignment tool is mounted with a mounting plate
and two knurled screws included in the scope of delivery (see Fig. 7.5 on page 20).
Fig. 7.5: Mounted alignment tool on the 2nd attenuator module