Raith 150 User manual

System Operation Manual
RAITH150
Version 4.0

Product: RAITH150
Document number: 04-12-9911-404-1.01
Date generated: Monday, December 13, 2004
Statement All information in this document has been carefully prepared and are
believed to be accurate and complete. If doubts exist about any detail
or additional information is necessary, please inquire Raith GmbH or
their accredited representative.
Copyright © 2004 by Raith GmbH. All rights reserved.
Trademarks
Microsoft, Windows,
and Windows 2000
are the registered trademarks of Microsoft,
Inc.
AutoCAD, DXF are the registered trademarks of Autodesk,
Inc.
Design CAD is the registered trademark of American Small
Business Computers, Inc.
GEMINI is the registered trademark of LEO
Elektronenmikroskopie GmbH.
GDSII is the registered trademark of Calma GE.
Addresses
Raith GmbH Tel.: [phone] – 0
Hauert 18 Fax.: [phone] – 5
44227 Dortmund WWW: www.raith.com
Germany Email: [email protected]
Raith USA, Inc. Tel.: [phone]
2805 Veterans Hwy Fax.: [phone]
Suite 23 WWW: www.raith.com
Ronkonkoma, New York Email: [email protected]

3
1 Introduction 5
1.1 Using this manual 5
1.2 Notes, cautions, and warnings 5
1.3 Navigating through the manuals 6
2 Safety and handling 7
2.1 Site requirements 7
2.2 General precautions 7
2.3 Operation, maintenance, service procedures 7
2.4 Miscellaneous Precautions 10
3 Notes concerning Personal Computer 13
3.1 Operation system 13
3.2 Hardware 13
3.3 Software 13
3.4 Backup 14
4 Power on and off 15
4.1 Starting the instrument 15
4.2 Troubleshooting 18
4.3 Going into standby 19
4.4 Shutting down the instrument 19
5 Maintenance of system 21
5.1 Column maintenance 21
5.2 Filament lifetime 23
5.3 Utility maintenance 24
5.4 Sample holders 25
5.5 Computer systems 26

5
1 Introduction
1.1 Using this manual 5
1.2 Notes, cautions, and warnings 5
1.3 Navigating through the manuals 6
1.1 Using this manual
Make sure that you use the system correctly by reading the operation
manual before usage carefully.
Keep the operation manual on hand to read it whenever necessary.
Contact directly Raith or your local representative whenever you are
uncertain about operating your system.
1.2 Notes, cautions, and warnings
Stickers on the left column provide you with the following messages:
A note emphasizes information requiring special attention.
A Caution message appears when special handling is necessary to
prevent product damage.
A dedicated message appears when special handling is necessary to
prevent personal injury or death.

1 Introduction
6
1.3 Navigating through the manuals
This manual provides information about
• safety and handling procedure for system and personal safety,
• startup, standby, shutdown, and bakeout procedures.
• Information on the task-oriented operation of the system as well
as the user interface are given in separate documents.
You can read the manual from beginning to end. This is highly
recommended but rarely done. Be sure to read the safety section,
before operation, in ►chapter Safety and handling.

7
2 Safety and handling
2.1 Site requirements 7
2.2 General precautions 7
2.3 Operation, maintenance, service procedures 7
2.4 Miscellaneous Precautions 10
2.1 Site requirements
Verify that the safety and environmental requirements of the
workstation site, which are the responsibility of the customer, are
satisfied. In particular,
• the X-ray radiation requirements,
• the electrical supply and grounding requirements,
• the requirements regarding pneumatic gate valve (RAITH150
only),
• the LASER radiation requirements,
• the hot surface requirements, and
• local codes regarding floor loading and earthquake safety.
2.2 General precautions
We request that you use the instrument in a proper manner and within
the scope of its purpose. Never make any modifications, especially,
removing protective parts, replacing components, and unlocking
safety measures. The cover of the system is also for your protection,
so never unscrew covers.
2.3 Operation, maintenance, service
procedures
Operators and service personnel must be trained on potential safety
hazards and safe techniques, and must observe all warnings and
cautions encountered on the system and in the manuals. If you have
any doubt regarding procedures, contact Raith directly or your local
representative.

2 Safety and handling
8
There may be additional limitations to operation, maintenance, and
service procedures not mentioned in this manual as well as industry-
approved methods and procedures which must be observed. If you
have any doubt regarding approved procedures, contact safety
personnel at your company, or representatives of your state, territory
or province, or federal government.
Therefore,
• No operator should perform any normal operations without prior
training. Operation procedures are described in this Operation
manual.
• Allow only trained personnel to perform maintenance procedures.
Maintenance procedures are described in this Operation manual.
• Only authorized service personnel are allowed to service the
system. Service procedures are described in the system service
manual, which is only available for Raith’s service engineers only.
2.3.1 X-ray radiation
The system produces X-rays, if the high voltage is switched on. Under
no mode of operation the measured X radiation exceeds 1µSv/h at a
distance of 0.1m from any surface of the system. To insure this,
Do not remove the cover, especially near the column.
Never attempt maintenance of any kind on the electron column other
than that described in this Operation manual.
Servicing the column is restricted to service engineers.
According to German Law (X-ray Protection Directive revised June
18, 2002 or Röntgenverordnung geändert am 18. Juni 2002) the
operation of this e-beam lithography-System is not subject to official
permission. Outside Germany, the user of this e-beam lithography-
System must observe the specific regulations of the country where the
system is installed. See provided important document for further
details.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.2 High voltages
Your system uses lethal high voltages up to 30 kV. Therefore,
Touching the power supply may result in death or serious injury.
For the same reason do not change the instrument’s connections
especially the grounding to the main power line.
The system is equipped with interlocks to minimize hazards.

2.3 Operation, maintenance, service procedures
9
Overriding interlocks is dangerous and should never be done.
Never attempt maintenance of any kind on the high voltage other than
that described in this Operation manual.
Servicing the high voltage is restricted to service engineers.
The system meets the requirement for protection against electrical
shocks.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.3 Line voltage
Line voltage up to 240 V AC may be present in various locations
within the system, even when the system or instrument is turned off.
Therefore,
Completely disconnect the unit from line voltage by disconnecting the
AC plug from the AC power source before performing service or
maintenance.
Never attempt maintenance of any kind on the line voltage other than
that described in this Operation manual.
Servicing the line voltage is restricted to service engineers.
The system meets the requirement for protection against electrical
shocks.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.4 Pneumatic gate valve (RAITH150 only)
Your system uses a pneumatic gate valve for separating the load lock
from the chamber. Therefore,
Never put your arm or hands through the gate valve. They may get
bruised.
Never attempt maintenance of any kind on the gate valve other than
that described in this Operation manual.
Servicing the gate valve is restricted to service engineers.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.

2 Safety and handling
10
2.3.5 LASER radiation
Your system uses a LASER. Therefore,
Never look into the LASER beam to avoid damaging your eyes.
Never attempt maintenance of any kind on the LASER other than that
described in this Operation manual.
Servicing the LASER is restricted to service engineers.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.6 Hot surface
While performing a bake out of the column, its surface becomes hot.
Therefore,
Never touch the column while performing a bake out.
Be careful not to place any flammable objects on the protection grid
behind the electron-optic column.
Servicing the bake out is restricted to service engineers.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.4 Miscellaneous Precautions
2.4.1 Monitor
The system may include a cathode ray tube (CRT) monitor for
display. If the screen portion of the CRT is broken, a high-velocity
scattering of glass fragments results. Use care when handling the
CRT. Avoid striking it with any object which may cause it to crack.
2.4.2 Electric Fans
Some instruments in the system may be air-cooled. Do not block the
air flow to or from the fans. Do not operate fans with the protective
covers or filters removed. Keep fingers, loose clothing, etc. away from
fans. Periodic filter maintenance may be required to prevent
overheating.

2.4 Miscellaneous Precautions
11
2.4.3 Corrosion
Components are painted, plated, or otherwise treated to resist
corrosion. However, the components must be handled and stored
properly to prevent corrosion.

13
3 Notes concerning Personal Computer
2.1 Site requirements 7
2.2 General precautions 7
2.3 Operation, maintenance, service procedures 7
2.4 Miscellaneous Precautions 10
The system comes with two personal computers (PC) whose operation
system is Windows. The following notes and caution apply to both
PC. There are no serviceable parts inside.
3.1 Operation system
• Never install or update the operation system.
• Never change the screen size, the number of colors and their color
palette, the font and its size, and the refresh frequency.
• Never activate a screen saver.
If you do so, the displays may be disturbed or not visible and the
system may not work normally or hang up. If possible, bring the
system back into its ground state and, if required, restart it. Otherwise
a service visit causing additional costs may be required.
3.2 Hardware
• Never install additional hardware.
• Never connect external hardware.
• Never attach hardware to the interfaces used to operate your
system.
• Never modify the current hardware or the settings for their
drivers.
If you do so, the system may not work normally and a service visit
causing additional costs may be required. The only exception is a
network which can be connected at the installed network boards.
3.3 Software
• Never install additional software.

3 Notes concerning Personal Computer
14
• Never delete additional software.
• Never modify the current software settings.
If you do so, the system may not work normally and a service visit
causing additional costs may be required.
3.4 Backup
• Make sure that the system is backup on a regularly basis.
If you do not so and the PC had been corrupted, a service visit causing
additional costs may be required.

15
4 Power on and off
4.1 Starting the instrument 15
4.2 Troubleshooting 18
4.3 Going into standby 19
4.4 Shutting down the instrument 19
4.1 Starting the instrument
4.1.1 Turning on the hardware
STEP 1 ►Before turning on the lithography system make sure that all the
electrical, gas and cooling water supply are given and within the
specification. If existent and necessary, turn on the water chiller.
STEP 2 ►Turn on the power switch at the rear side of the instrument.
Figure 1 Main switch
connecting system to
power outlet.
If this was not vented, plug in the Airlock cable at the back of the
system.
STEP 3 ►Press the yellow standby button at the front side of the instrument and
wait at least 5 seconds before continuing. The vacuum pumps will
start.
Figure 2 Power
switch; use yellow
button for Standby
STEP 3 ►Press the green ON button at the front side of the instrument.

4 Power on and off
16
Figure 3 Power
switch; use green
button for full power.
The column PC and the lithography PC are starting automatically. If
not turn them on. Further all the electrical components located in the
rack are starting automatically. Check if the follow hardware
components are turned on.
From top to button
• Beam Blank Controller
• High Speed Pattern Generator
• Piezo Controller
• Airlock Control
• Precision Stage Controller
• Laser Interferometer Source
STEP 4 ►Switch on the Keithley pico-ameter if necessary.
4.1.2 Starting the column software
STEP 1 ►Login at the windows system with your assigned user account or as
the user “training”, password “training”.
STEP 2 ►The column software is starting automatically. If not, double click on
the corresponding link on the desktop. Wait till the LEO server has
been run up.
STEP 3 ►Login at the column software with your assigned user account or as
the user “training”, password “training”.

4.1 Starting the instrument
17
4.1.3 Starting the lithography software
STEP 1 ►Login at the windows system with your assigned user account or as
the user “training”, password “training”
STEP 2 ►The lithography software is starting automatically. If not, double click
on the corresponding link on the desktop.
STEP 3 ►The login screen of the lithography software opens. Select your
assigned user or use user “training” and type in the corresponding
password (“training”)
Select the desired project or choose “Template1280” and press the
Login Button. The software starts loading the necessary modules.

4 Power on and off
18
4.2 Troubleshooting
PROBLEM 1 ►The stage is not moving smoothly at higher magnification.
Cause / solution The frequency of Laser Interferometer is not locked and the stage is
running in coder mode. This could happen if the Laser Interferometer
Source was turned on just some minutes before. In this case, wait
around 20 Minutes. After the frequency is locked the stage can be
switched to laser mode via the laser control window.
PROBLEM 2 ►The communication between the Raith and the SEM software failed.
Cause / solution Check if the RenCom32 program is running on the SEM PC. If not
start this interface program. Further check, if the port is opened. This
is case, if the command Comms > Close Port is visible.

4.3 Going into standby
19
PROBLEM 3 ►The communication between the Raith PC and the High Speed Pattern
Generator failed.
Cause / solution The High Speed Pattern Generator hangs up or was turned off when
the Raith PC was booting. Reset the High Speed Pattern Generator
and restart the software.
If the communication still fails reset the High Speed Pattern Generator
and reboot the Raith PC.
4.3 Going into standby
STEP 1 ►Turn off EHT.
STEP 2 ►Turn of the gun.
STEP 3 ►Close the both programs on column and lithography PC. Shut down
the both PC’s.
STEP 4 ►Press the YELLOW “STANDBY” button on the front of the system.
Figure 4 Power
switch; use yellow
button for Standby.
4.4 Shutting down the instrument
If this is not an emergency shut down, disconnect the Airlock cable on
the back of the system. This prevents the system from venting.
STEP 5 ►Press the RED “OFF” button on the front of the system. The vacuum
pumps will stop.

4 Power on and off
20
Figure 5 Power
switch; use red button
for shut down.
STEP 6 ►On the back of the system, rotate the MAINS switch to OFF.