
2
Contents
1. Outline of the Product ................................................................................................................................. 3
Preface............................................................................................................................................................ 3
Purpose of use................................................................................................................................................ 3
Definition of DANGER, WARNING, CAUTION and NOTE ............................................................................ 3
2. Important Notices on Safety........................................................................................................................ 4
2-1. Danger cases........................................................................................................................................... 4
2-2. Warning cases ......................................................................................................................................... 5
2-3. Precautions.............................................................................................................................................. 6
3. Product Components .................................................................................................................................. 7
3-1. Main unit and standard accessories........................................................................................................ 7
3-2. Names and functions for each part ......................................................................................................... 9
3-3. Tubing diagram......................................................................................................................................13
4. How to Use ................................................................................................................................................14
4-1. Before using the purity meter ................................................................................................................14
4-2. Preparation for start-up .........................................................................................................................14
4-3. How to start the purity meter .................................................................................................................16
4-4. Basic operating procedures................................................................................................................... 17
4-5. Self-diagnosis function at start-up.........................................................................................................18
4-6. Reference calibration.............................................................................................................................19
4-7. Supplying measuring gas ......................................................................................................................20
4-8. Performing measurement......................................................................................................................21
4-9. Manual memory .....................................................................................................................................22
4-10. Measuring gas/range detail display.....................................................................................................23
4-11. Checking zero point .............................................................................................................................24
4-12. Power-off .............................................................................................................................................25
5. How to Set Setup Mode ............................................................................................................................ 26
5-1. Entering the setup mode .......................................................................................................................26
5-2. Measuring gas setting "1. SELECT GAS".............................................................................................28
5-3. Date/time setting "2. SET DATE/TIME".................................................................................................29
5-4. Saved data display "3. VIEW SAVED DATA"........................................................................................30
5-5. Saved data clear "4. CLEAR SAVED DATA".........................................................................................31
5-6. Switch to measuring mode "6. START MEAS." .................................................................................... 32
6. Operations and Functions .........................................................................................................................33
6-1. CAUTION display ..................................................................................................................................33
6-2. ERROR display .....................................................................................................................................34
7. Maintenance..............................................................................................................................................35
7-1. Maintenance intervals and items...........................................................................................................35
7-2. Calibration..............................................................................................................................................37
7-3. How to clean ..........................................................................................................................................38
7-4. Parts replacement .................................................................................................................................39
8. Storage and Disposal................................................................................................................................40
8-1. Procedures to store the purity meter or leave it for a long time............................................................ 40
8-2. Procedures to use the purity meter again ............................................................................................. 40
8-3. Disposal of products ..............................................................................................................................40
9. Troubleshooting.........................................................................................................................................42
9-1. Troubles on the unit ...............................................................................................................................42
9-2. Troubles in reading ................................................................................................................................44
10. Product Specifications ..........................................................................................................................45
10-1. List of product specifications ............................................................................................................... 45
10-2. List of options ......................................................................................................................................45
11. Appendix ...............................................................................................................................................46
12. Detection Principle ................................................................................................................................ 47