Scanlab hurrySCAN 10 Guide

Installation and
Operation
hurrySCAN®10 (ID# 112466)
digital, 1064 nm,
with f = 254 mm Objective (ID# 100832)
December 2, 2008Rev. 2.6 e
innovators for industry

SCANLAB AG
Siemensstr. 2a
82178 Puchheim
Germany
Tel. [phone]
Fax: [phone]
[email protected]
www.scanlab.de
©SCANLAB AG 2008
(Doc. Rev. 2.6 e - June 20, 2008)
SCANLAB reserves the right to change the information in this document without notice.
No part of this manual may be processed, reproduced or distributed in any form (photocopy, print, microfilm or by any other
means), electronic or mechanical, for any purpose without the written permission of SCANLAB.
hurrySCAN®is a registered trademark of SCANLAB AG.
Other mentioned trademarks are hereby acknowledged as properties of their respective owners.

hurrySCAN®10, digital, 1064 nm, f = 254 mm
Rev. 2.6 e
Table of Contents
3
innovators for industry
Table of Contents
1 Introduction ....................................................................................................................................... 5
1.1 Product Overview ...................................................................................................................... 5
1.2 Unpacking Instructions and Typical Package Contents ............................................................... 5
1.3 I.D. Plate .................................................................................................................................... 5
2 The hurrySCAN®10 – Principle of Operation .................................................................................... 6
2.1 Dynamic Positioning Laser Beams .............................................................................................. 6
Customized Optical Configuration .................................................................................... 6
2.2 Scan Head Control ..................................................................................................................... 7
Data Transmission between the Controller and the Scan Head .......................................... 7
Position Signals, Image Field and X-Y Reference System .................................................... 8
Status Signals ................................................................................................................... 9
2.3 Internal Protective Functions ................................................................................................... 11
Assuring Safe Operating Temperatures ............................................................................ 11
3 Safety During Installation and Operation ....................................................................................... 12
3.1 Operational Guidelines and Standards .................................................................................... 12
3.2 Laser Safety ............................................................................................................................. 13
3.3 Electrical Safety ....................................................................................................................... 15
4 Installation ....................................................................................................................................... 16
4.1 Checking the Specifications ..................................................................................................... 16
4.2 Mounting the Objective ........................................................................................................... 16
Objective Holder .............................................................................................................. 16
Objective ......................................................................................................................... 17
4.3 Layout and Dimensions ........................................................................................................... 18
4.4 Mounting the Scan Head ......................................................................................................... 22
4.5 Electrical Connections .............................................................................................................. 23
Power Supply .................................................................................................................. 23
Data Cable Guidelines ..................................................................................................... 24
4.6 Operating and Storage Conditions .......................................................................................... 25
5 Start-up and Operation .................................................................................................................... 26
5.1 Checking the Installation ......................................................................................................... 26
5.2 Checking the Laser Parameters ................................................................................................ 26
5.3 Adjustment and Alignment ..................................................................................................... 27
5.4 Checking the Parameters of Application Software ................................................................... 28
5.5 Safe Start-up and Shutdown Sequences .................................................................................. 28
6 Optimizing the Application ............................................................................................................. 29
6.1 Dynamic Positioning with Galvanometer Scanners .................................................................. 29
6.2 Optimum Environmental Conditions and Automatic Self-Calibration ...................................... 30
6.3 Process Monitoring .................................................................................................................. 30
Software Monitoring ....................................................................................................... 30
Optical Process Monitoring ............................................................................................. 30
7 Routine Maintenance and Customer Service ................................................................................... 31
7.1 Routine Maintenance of the Optical Surfaces .......................................................................... 31
Routine Maintenance of the Mirrors ............................................................................... 31
Routine Maintenance of the Objective’s Optical Surface ................................................. 31
7.2 Customer Service ..................................................................................................................... 32

hurrySCAN®10, digital, 1064 nm, f = 254 mm
Rev. 2.6 e
Table of Contents
4
innovators for industry
8 Troubleshooting ............................................................................................................................... 33
9 hurrySCAN®10 Technical Specifications ......................................................................................... 34
9.1 Electromagnetic Compatibility ................................................................................................. 35

hurrySCAN®10, digital, 1064 nm, f = 254 mm
Rev. 2.6 e
1Introduction
5
innovators for industry
1Introduction
This operating manual describes the hurrySCAN®10
scan head with ID number 112466 together with an
objective (ID number 100832).
The manual is a part of the product. Please read these
instructions carefully before you proceed with
installing and operating the scan head. In particular
observe all safety guidelines in this manual. If there
are any questions regarding the contents of this
manual, please contact SCANLAB (see page 32).
Keep the manual available for servicing, repairs and
product disposal. This manual should accompany the
product if ownership changes hands.
SCANLAB reserves the right to update this operating
manual at any time and without notification.
1.1 Product Overview
The hurrySCAN®10 scan head with ID number
112466 is designed for positioning laser beams with
a wavelength of 1064 nm and is equipped with a
10 mm aperture.
The scan head is designed for digital signal transfer
via the integrated digital interface.
The objective with ID number 100832 has a focal
length of f = 254 mm and is designed for a wave-
length of 1064 nm.
The technical specifications of the product are
summarized on page 34.
1.2 Unpacking Instructions and
Typical Package Contents
Carefully remove the scan head from the
package.
Protect the scan head from dust and other
contaminants.
Keep the packaging, so that in case of repair the
scan head can be properly repackaged and
returned to SCANLAB.
Also remove all other articles from the package.
Check that all parts have been delivered. Please
refer to the corresponding packaging list.
A scan head package typically includes a product
test protocol with test data. For mounting an
objective an objective mounting set may be
included in the package or already mounted to
the scan head. For controlling the scan head, an
RTC®control board may be included in the
package.
1.3 I.D. Plate
The scan head’s I.D. plate (see figure 1) with the scan
head’s serial number is found on the housing.
1
I.D. plate with serial number (SN)
Siemensstr. 2a · 82178 Puchheim · Germany
Made in Germany
Typ
SN
hurrySCAN
®
10
1064 nm

hurrySCAN®10, digital, 1064 nm, f = 254 mm
Rev. 2.6 e
2 The hurrySCAN®10 – Principle of Operation
6
innovators for industry
2 The hurrySCAN®10 – Principle of Operation
2.1 Dynamic Positioning Laser
Beams
The primary tasks of an X-Y scan head are to deflect
a laser beam in the X-Y directions and to focus the
beam onto the working plane.
The beam deflection task is realized with the help of
two tiltable deflection mirrors (see figure 2). The
beam enters the scan head through the input aper-
ture and is first deflected in the Y direction by
mirror 1 attached to galvanometer scanner 1. The
beam then goes on to be deflected in the X direction
by mirror 2 attached to galvanometer scanner 2. The
resulting deflection angles can be precisely and high-
dynamically adjusted by controlling the positions of
the galvanometer scanners.
Focusing the beam onto the working plane can be
achieved with the help of a scan lens fitted to the
scan head’s beam exit hole. If an F-Theta objective is
used, the position of the focal point on the image
field will be directly proportional to the angle of inci-
dence of the beam.
Alternatively, focusing of the beam can be realized
with the help of a dynamic focusing system (for
instance, SCANLAB’s varioSCAN 20) positioned in
front of the scan head’s entrance aperture.
Customized Optical Configuration
To obtain optimum optical performance for a partic-
ular laser application, the scan head’s optical config-
uration must meet the requirements of the
application and the used laser system. To achieve
optimum reflectivity at the mirrors, SCANLAB there-
fore selects mirror coatings appropriate for the wave-
length and power of the user’s laser. The size of the
mirrors or the scan head’s aperture is selected in
accordance with the desired spot size and scan
speed. The spot size is also influenced by the objec-
tive, which is also selected in accordance with the
desired field size (or working distance A between the
laser input and the image field) as well as the wave-
length and power of the user’s laser.
The user, on the other hand, has to ensure that the
parameters of the entering laser beam (wavelength,
power density and diameter) match the specifica-
tions of the scan head.
First the coatings of the deflection mirrors are
designed for a defined wavelength or wavelength
range. If the wavelength of the employed laser devi-
ates from the specified value, the mirrors will not
work properly and can be destroyed.
Second for the mirror coatings also the allowed laser
rating is defined. If the specified values are exceeded,
destruction of the coatings might result (also see
section "Checking the Laser Parameters" on page 26).
In addition the deflection mirrors are intended for a
specific beam diameter and a maximum allowed scan
angle. If the beam diameter or the scan angle exceeds
the specified maximum values, vignetting of the
beam can occur. The beam is then no longer fully
deflected by the mirrors or can no longer fully pass
through the objective. A portion of the beam is then
absorbed by the scan head, resulting in a loss of
power density at the edges of the image field.
Furthermore, the interior of the scan head and the
objective might be damaged due to the absorption of
laser radiation.
2
Basis of Operation: beam deflection via two galvanometer scanners
F-Theta
Objective
Galvanometer
Scanner 1
Beam in
Galvanometer
Scanner 2
Mirror 1
Mirror 2
Image Field
X
Y

hurrySCAN®10, digital, 1064 nm, f = 254 mm
Rev. 2.6 e
2 The hurrySCAN®10 – Principle of Operation
7
innovators for industry
The amount of possible power loss depends, among
other things, on the beam profile of the employed
laser. For a Gaussian beam profile, beam vignetting is
insignificant when the scan angle of each mirror does
not exceed the maximum allowed scan angle defined
on page 34 and when the diameter of the beam
doesn’t exceed the specified aperture.
2.2 Scan Head Control
Data Transmission between the
Controller and the Scan Head
The controller and the scan head are interconnected
via a serial interface for digital data transfer. Data
transmission follows the XY2-100 protocol. In the
process, essentially the following signals are trans-
ferred:
Figure 3 shows the timing of the clock signal
(CLOCK), the synchronization signal (SYNC) and the
three data channels (CHAN1/CHAN2/CHAN3).
Every 10 µs, three 20-bit words (3 control bits, 16
data bits, 1 parity bit) are transmitted serially as
differential signals.
Caution!
• Make sure the aperture and the coatings of the
deflection mirrors meet the requirements of
your application (see "Technical Specifications"
on page 34). For information on tolerances and
deviations, please contact SCANLAB.
• Make sure that the focal length, the typical
image field size and the wavelength of the
objective meet the requirements of your appli-
cation. If this is not the case, then please contact
SCANLAB.
• Check if the wavelength of the input beam and
the maximum ratings for beam diameter and
laser power match the specifications of the scan
head (see page 34).
• When using scan angles larger than the
maximum allowed scan angle indicated on
page 34, some vignetting inside the scan head
and the objective can occur and damage to the
interior of the scan head might result. If your
application requires larger scan angles, then
please contact SCANLAB.
• The maximum allowed scan angle is derived
from the geometric and optical data of the
employed components (see the section
"Customized Optical Configuration" on page 6).
In some cases, particularly with sufficiently small
calibration angles, the maximum allowed scan
angle can be larger than the maximum adjust-
able angle. In such cases, the specified
maximum allowed scan angle has no practical
relevance.
• The controller delivers position values, i.e. set
values for the X and Y axes as well as (optionally)
the Z axis.
• The scan head generates a status signal to be
returned to the controller.
• Two additional channels transmit
the data transport synchronization signal
and a clock signal.
3
Timing diagram of the serial interface signals
16 data bits3 ctr. 1 p
t
201
1
2
3
Legend
1CLOCK
2SYNC
3 CHAN1/CHAN2/CHAN3

hurrySCAN®10, digital, 1064 nm, f = 254 mm
Rev. 2.6 e
2 The hurrySCAN®10 – Principle of Operation
8
innovators for industry
Position Signals, Image Field and X-Y
Reference System
Position signals are digitally transferred from the
controller to the scan head.
Figure 4 shows the definition of the X-Y reference
system which is used for the position signals trans-
mitted to the scan head. The orientation of the axes
corresponds to the orientation used by the RTC®
boards from SCANLAB: The Y axis points in the oppo-
site direction of the entry beam (and the Z axis in the
opposite direction of the exit beam). Consequently:
Scanner 1 deflects the beam in the Y direction,
Scanner 2 in the X direction.
The scan head is calibrated in such a way that for a
scan angle of 0.408 rad optically with excursion in
the negative axis direction the bit-value "1311" has to
be transmitted, for the neutral position (null point)
the bit-value "32768, and for a scan angle of
0.408 rad optically with excursion in the positive axis
direction the bit-value "64225".
The maximum adjustable scan angle is (1 / 0.96)
larger than the calibration angle. The input signal
values for the maximum adjustable image field points
(see figure 4) are listed in the following table.
Vignetting can occur at a particular scan angle
dependent on the specific scan head and objective.
The laser beam is then partially blocked within the
scan head or objective, which results in transmission
losses. The higher the power loss, the greater is the
risk of damage to the scan system. In view of this, the
technical specifications page 34 include not only the
calibration angle, but also the maximum allowed
scan angle. This is not the same as the maximum
adjustable scan angle. To avoid scan system damage,
make sure the maximum allowed scan angle is never
exceeded.
The maximum allowed scan angle is derived from the
geometric and optical data of the employed compo-
nents (see the section "Customized Optical Configu-
ration" on page 6). In some cases, particularly with
sufficiently small calibration angles, the maximum
allowed scan angle can be larger than the maximum
adjustable angle. In such cases, the specified
maximum allowed scan angle has no practical rele-
vance.
Figure 4 also depicts the pillow-barrel-shaped distor-
tion of the square image field and shows the orienta-
tion of this distortion with reference to the axes. The
field distortion is caused by the beam path within the
scan head and by the characteristics of the objective.
It must be compensated by the controller.
If you use a SCANLAB RTC®interface board or an
RTC®SCANalone standalone board for controlling
the scan head, the field distortion is compensated
automatically. Before data values are transferred to
the scan head, the values are transformed by the
RTC®boards with the help of a correction table. A
Position X bit-Value
(CHAN2)
Y bit-Value
(CHAN1)
032768 32768
165535 32768
265535 65535
332768 65535
4065535
5032768
60 0
732768 0
865535 0
4
Positions in the image field
X
Y
1
8
7
6
5
4
3
2
0

hurrySCAN®10, digital, 1064 nm, f = 254 mm
Rev. 2.6 e
2 The hurrySCAN®10 – Principle of Operation
9
innovators for industry
correction table specific for your system is included in
the RTC®software package or can be ordered from
SCANLAB (also refer to the RTC®manual). You can
use positive and negative coordinate bit-values
( – 32768 to +32767) of an ideal image field, based
on the reference system shown in figure 4, with the
origin (zero point) in the center of the image field.
The RTC®board calculates the corresponding input
values and transfers them to the scan head.
The image field size, as well as the working distance A
between the input laser beam and the nominal
working plane, depend on various factors – among
them the focal length of the objective and the aper-
ture of the scan head. The divergence of the input
beam also has an influence on the working
distance A.
Status Signals
When used with a collimated input beam, the
hurrySCAN®10 in combination with the delivered
objective (focal length f = 254 mm) with working
distance A = 390 mm produces a typical usable
square image field of (170 x 170) mm2.
Calculation of the typical image field size is based on
a scan angle of ±0.349 rad optically. Possible image
field limitations due to vignetting or imaging deficits
are considered (see the section "Customized Optical
Configuration" on page 6). Calibration angles big
enough to produce larger-than-specified image fields
might be possible in some cases. To avoid scan system
damage, make sure the maximum allowed scan angle
is never exceeded.
The scan head provides three status signals available
via the XY2-100 protocol. If you use a RTC®board,
then these status signals can be evaluated via the
GET_HEAD_STATUS command.
• PWROK (i.e. "Power OK")
PWROK = 0 signifies a problem in the power
supply or a protective action by the electronics.
Upon power-up, the PWROK signal is initially 0.
After a few seconds (when the electronic compo-
nents have reached a stable operating state) the
PWROK signal then switches to 1. If, upon
powering up, the PWROK signal doesn’t switch to
1 within several seconds or if the signal switches
from 1 to 0 during operation, then the laser must
be turned off immediately. Under some circum-
stances the system could deflect the laser beam in
an unintended direction, which may cause health
hazards and severe equipment damage. The
system should be checked immediately to deter-
mine the cause.
Switching of the PWROK status signal from 1 to 0
during operation can be caused, for example, by
a defective power supply (also see section "Power
Supply" on page 23).
The PWROK status signal also switches from 1 to
0, if the galvanometer scanner’s temperature
exceeds a critical value due to excessive load or
excessive environmental temperature (see
page 11).
• TempOK (i.e. "Temperature OK")
The TEMPOK signal always switches from 0 to 1
when the operating temperature has been
reached (which might take a few minutes). If,
during operation, the galvo temperature drops
below its minimum operating temperature or
exceeds a maximum allowable temperature, the
TEMPOK signal will switch to 0. In this case,
system operation does not need to be stopped
immediately, but large drift or other side-effects
may occur.

hurrySCAN®10, digital, 1064 nm, f = 254 mm
Rev. 2.6 e
2 The hurrySCAN®10 – Principle of Operation
10
innovators for industry
If system operation is not stopped and the
scanner temperatures then reach a still higher
critical value, then the built-in temperature
control mechanism will switch off the galvanom-
eter scanner drive stages to avoid heat-induced
damage to the scanners or the head (see
page 11).
If the scanner temperature drops again below the
power-down threshold, the scanner drive stages
are automatically restarted.
• PosAck (i.e. "Position Acknowledge")
PosAck = 1 signifies that the difference between
the set value and the real position is less than
0.5% of the maximum adjustable image field size
(see page 8). The PosAck signal normally switches
to 1 within a few seconds after power-up.