Shimadzu TMP-3203MC User manual

263-13236E
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Magnetically Levitated Turbo Molecular Pump
Model:TMP-3203M （Air cooled type）
Model:TMP-3203MC （Air cooled chemical type）
Model:TMP-3203LM （Wide range type）
Model:TMP-3203LMC （Wide range chemical type）
Model:TMP-3403LMC （Wide range chemical type）
INSTRUCTION MANUAL

i
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
Introduction
Thank you for choosing the turbo molecular pump made by Shimadzu Corporation.
(hereafter referred to as "turbo molecular pump").
Please read the instruction manual carefully in conjuction with the instruction manual of
"Power Supply Unit" before using turbo molecular pump, and save the instruction manual for
future reference.
Copyrights and Disclaimers
This document is copyrighted by Shimadzu Corporation. Please refrain from reproducing
or copying part or all of this document without permission from Shimadzu.
In an effort to improve the product, this document may be revised in the future without
notice.
Every effort has been made to prepare an accurate and complete manual, but if an error
or omission should be discovered, revisions might not be possible immediately.
Shimadzu does not take responsibility for any effects that may result from the use of this
manual.
Copyright 2003-2006 Shimadzu Corporation.All rights reserved.
©

ii 263-13236
Precautions for Safe Operation
The instruction manual's nomenclature for warnings and precautions complies with
the following safety warning symbols.
WARNING
CAUTION
NOTICE
WARNING
Turbo molecular pump repair and/or power supply repair can be very hazardous.
Only trained technicians who are authorized by Shimadzu may do service of
products.
WARNING
Neither overhaul nor modify the pump proper and power supply unit without
admission. Doing so would impair safety of the pump proper.
WARNING
Decisions on system compatibility should be made by the system designer or the person
deciding the specifications after conducting tests as necessary.The responsibility for
guaranteeing the expected performance and safety of the system lies with the person who
decides system compatibility.
Indicates a potentially hazardous situation whitch, if not avoided, could result
in serious injuly or possibly death.
Indicates a potentially hazardous situation whitch, if not avoided, may result in
minor to moderate injuly or equipment damage.
Emphasizes additional information that is provided to ensure the proper use of
this product.

iii
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
WARNING
・Fix the pump to the device according to 5.1.2.1 and 5.1.2.2. The method to fix the pump is
different depending on the pump model and the size of inlet flange of the pump.
・The device should be fixed to the floor so as not to move. The device should be designed to
endure the torque 1.5 times the rapid shutdown torque to take the safety margin in
preparation for an emergency accident.
・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown
torque should be generated when abnormality occurs in the pump by any chance. Incidental
accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by
insufficient method.
WARNING
Do not remove the turbo molecular pump, before safety has been confirmed.
Improper turbo molecular pump use may be hazardous to operator's health in applications not
recommended or approved by Shimadzu. In the event removal of the turbo molecular pump from
an application is required, full protective measures including purging of the turbo molecular pump
with an inert gas and/or apparel are recommended when the turbo molecular pump has been
used in applications that required the use of corrosive, reactive, stimulative, or toxic gases.

iv 263-13236
CAUTION
After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid erosion trouble of the pump internals.
CAUTION
Avoid to install the pump at the following places.
(1) Place where the pump is inevitably exposed to significant vibration and impact.
(2) Unstable place.
(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.
The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock/
impact to it during transportation.This pump is not connected to grand. Please provide
PE(Protective earth) connection to the chassis of pump in final application.
CAUTION
The following "CAUTIONS" are to prevent operation anomalies.
1.This turbo molecular pump is not approved for use in applications exhausting process gas
containing gallium (Ga, e.g., triethyl gallium, etc.).
2.Protect the pump from any and all types of impact during operation.
3.Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces electro-
magnetic pollution, noise, etc., in the immediate proximity of an operating turbo molecular
pumping system (pump, power supply, cables, etc).
4.Do not interrupt the electrical power operating the turbo molecular pump while the turbo
molecular pump is in operation.
5.Do not connect or disconnect the turbo molecular pump control cable during the time the
power supply is "ON".
6.Be sure to use the chemical type pumps to exhaust of gas which contain chlorine, or fluorine.
7.Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical
components.
8.When using the variable speed function to change the pump rotation rate, use a rotation rate
that does not cause resonance with other devices installed at the site.

v
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
○Explanation of label
(1) HOT SURFACE label
Risk of burn. Keep off from touching surface of the
pump as it is heated.
(2) INSTALL PUMP label
Incidental accident will cause the pump to drop
out and to make a catastrophe if the pump is fixed
by insufficient method.
Fix the pump to the device according to 5.1.2
「Installation of the Pump」.
(3) SECURITY seal
This label certificates that the product was made
or maintenanced by Shimadzu or by Shimadzu
authorized facility .
In case "this label is removed" or "there is a mark
showing once this label has been removed",
Shimadzu warranty shall not be applied to the
product.
○Location of label
Series of TMP-3203 and TMP-3403LMC
Label attachment phase
(2)
(1)
(3)
(2), (3) (1)
(2)
(1)
(1)
CAUTION
！
高温注意
HOT SURFACE
Risk of burn. Avoid contact.
やけどのおそれがあります。触らないで下さい。
警 告
ポンプが装置から外れ，人体を傷つける
恐れがあります。取扱説明書に従い確実
にポンプを固定してください。
WARNING
263-16180
CAN CAUSE INJURY BY DROPED
PUMP, INSTALL PUMP SECURELY
ACCORDING TO INSTRUCTION
MANUAL.

vi 263-13236
○Installation Precautions
Do not apply abnormal loads to the turbo molecular pump control cable plug and/or connector.
Abnormal loads may cause cable disconnection.
(1) Do not pull the turbo molecular pump control cable by the connector or plug.
(2) Do not allow any electrical cables to be in tension or to have very tight bending radii.
(3) Do not twist the turbo molecular pump control cable during connection.
○Part Replacement
The lifetime of parts are specified as below.
The request for changing parts exceeding the estimated lifetime should be made to Shimadzu
or an approved service company in order for safety and adequate performance of the pump and
power supply unit.
Table 1 Estimated Part Life.
Parts List Estimated Part Life
Cooling fan 5 years
240mm

vii
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
○Air Cooled Turbo Molecular Pump
For the air cooled turbo molecular pumps, it is necessary to clean the cooling fan periodically
because of the cooling fan collecting dust, debris, etc. Shimadzu recommends removal of the
cooling fan for all methods of cleaning (compressed air, etc.) to prevent the particles, cleaning
debris, from accumulating in or on the turbo molecular pump. Please refer to Fig. 1 how to
change fan.
Fig. 1 How to Change the Cooling Fan Unit
○Warranty period
12 months on new TMP's from the date of shipment from Shimadzu, or from any of its
worldwide sales offices.
○Conditional warranty
During the warranty period and under normal operation, if the TMP fails to meet its product
specification due to defects in material and/or workmanship, Shimadzu will, at its discretion,
either repair it or exchange it with a new one for free.
○Scope of the warranty
The warranty covers only TMPs, controllers and accessories sold by Shimadzu.
○Warranty of repaired or replacement parts
In-warranty repaired or replacement parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the parts that have been repaired or replaced.
○Exemption from the warranty
During the warranty period, Shimadzu will charge for repair or exchange in the following cases:
1) Failure caused by natural disasters or fire.
2) Failure or functional deterioration due to the following:
a) Pumping of special gases and materials
b) Ingestion of foreign objects through the TMP's protective net
c) TMP is operated differently than what is prescribed in the instruction manual
Pump model Parts name Parts Number
TMP-3203M
TMP-3203MC
Cooling unit
DV24V 262-76043-01
CONNECTOR
COOLING UNIT
SCREW
FLOW
PUMP

viii 263-13236
d) When Shimadzu determines through failure analysis that the cause of failure was due to
abnormal operation or external circumstances. our engineers judge that the cause of the
trouble is an irregular operation
3) Warranty is voided if the "Security Seal" on the product has been removed, hampered with,
or altered.
○Disposal of Products and Parts
Please contact Shimadzu for proper disposal of its products or parts. There is a possibility to
pollute the environment with the material of the parts, when you dispose this product in an inap-
propriate way.
○LIMITATION OF LIABILITY
EXCEPT AS STATED HEREIN, SHIMADZU MAKES NO WARRANTY, EXPRESSED OR
IMPLIED (EITHER IN FACT OR BY OPERATION OF LAW), STATUTORY OR OTHERWISE:
AND, EXCEPT AS STATED HEREIN, SHIMADZU SHALL HAVE NO LIABILITY FOR
SPECIAL OR CONSEQUENTIAL DAMAGES OF ANY KIND OR FROM ANY CAUSE ARISING
OUT OF THE SALE, INSTALLATION, OR USE OF ANY OF ITS PRODUCTS.

Table of contents
ix
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
TABLE OF CONTENTS
Introduction
Copyrights and Disclaimers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i
Precautions for Safe Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . ii
○Explanation of label . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
○Location of label. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
○Installation Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi
○Part Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi
○Air Cooled Turbo Molecular Pump. . . . . . . . . . . . . . . . . . . . . . . . vii
○Warranty period . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii
○Conditional warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii
○Scope of the warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii
○Warranty of repaired or replacement parts . . . . . . . . . . . . . . . . . vii
○Exemption from the warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . vii
○Disposal of Products and Parts . . . . . . . . . . . . . . . . . . . . . . . . . viii
○LIMITATION OF LIABILITY . . . . . . . . . . . . . . . . . . . . . . . . . . . . viii
TABLE OF CONTENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ix
Section 1 OUTLINE AND DESCRIPTIONS
1.1 Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
1.2 Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2.1 Outside drawing of Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . 3
1.2.1.1 Outside drawing of series of TMP-3203 . . . . . . . . . . . . . . . 3
1.2.1.2 Outside drawing of TMP-3403LMC . . . . . . . . . . . . . . . . . . 5
1.2.2 Standard Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Section 2 IDENTIFICATION AND FUNCTION
2.1 Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

Table of contents
x263-13236
Section 3 CONSTRUCTION AND PRINCIPLE
3.1 Pump Construction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
3.2 Principle of Turbo Molecular Pumping . . . . . . . . . . . . . . . . . . 10
Section 4 SPECIFICATIONS
4.1 Pump Main Unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
4.1.1 Specification of series of TMP-3203 . . . . . . . . . . . . . . . . . . . . . . . 14
4.1.2 Specification of TMP-3403LMC . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
4.2 Standards Fulfilled . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Section 5 INSTALLATION
5.1 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
5.1.1 Pump Mounting Direction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
5.1.2 Installation of the Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
5.1.2.1 Installation of series of TMP-3203 . . . . . . . . . . . . . . . . . . 21
5.1.2.2 Installation of TMP-3403LMC . . . . . . . . . . . . . . . . . . . . . . 23
5.1.3 Example of piping connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
5.1.4 Center of gravity of the pump. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
5.2 Connection of the Pump to the Power Supply Unit . . . . . . . . 26
5.3 Interlock for Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . 27
Section 6 OPERATION
6.1 Outline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
6.1.1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
6.2 Start-up Preparation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
6.2.1 Start-up Preparation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
6.3 Start-up. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
6.3.1 Start-up Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
6.4 Shutting Down . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
6.5 Baking Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

Table of contents
xi
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
Section 7 GAS PURGE
Section 8 TURBO MOLECULAR PUMP RECONDITION
8.1 Turbo Molecular Pump Return Request . . . . . . . . . . . . . . . . 40
8.2 Turbo Molecular Pump Decontamination. . . . . . . . . . . . . . . . 41
8.3 Touch-Down Bearing Replacement . . . . . . . . . . . . . . . . . . . . 41
8.4 Check of the rotor blades. . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Section 9 TROUBLESHOOTING
9.1 Vacuum Pressure Rise . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44
9.2 Abnormal Noise and/or Vibration . . . . . . . . . . . . . . . . . . . . . . 44

Table of contents
xii 263-13236
This page is intentionally left blank.

1
1OUTLINE AND
DESCRIPTIONS
1.1 Outline
1.2 Descriptions
1.2.1 Outside drawing of Pump Main Unit
1.2.1.1 Outside drawing of series of TMP-3203
1.2.1.2 Outside drawing of TMP-3403LMC
1.2.2 Standard Accessories

SECTION 1 OUTLINE AND DESCRIPTIONS
2263-13236
11.1 Outline
The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a
backing vacuum pump to create a high vacuum in a vacuum chamber.
Typical Applications ; Semiconductor equipments,
Industrial equipments,
R&D applications,
The other ultra high vacuum applications.
The turbo molecular pump (one standard set) consists of the following items.
・Pump 1
・Power Supply Unit 1
・Control Cable 1
・Motor Cable 1
・Standard Accessories 1 Set
This instruction manual explains the operation of the pump unit. For more detailed instructions
regarding the power supply unit, please refer to the Power Supply Unit Instruction Manual.

1.2 Descriptions
3
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
1
1.2 Descriptions
1.2.1 Outside drawing of Pump Main Unit
1.2.1.1 Outside drawing of series of TMP-3203
Fig.1-1 TMP-3203Mand TMP-3203MC
INLET
FLANGE
Parts number ABCEF G φHφJn-φd
TMP-3203M TMP-3203MC
VG350 P/N 262-78430-62 P/N 262-78430-72 287 294 289 375 420 22 φ450 φ420 12-φ15
ISO320B
Special P/N 262-78430-63 P/N 262-78430-73 287 294 289 375 420 22.5 φ425 φ395 12-φ13
VG300 P/N 262-78430-67 P/N 262-78430-77 307 314 309 395 440 18.5 φ400 φ370 12-φ13
VG250 P/N 262-78430-68 P/N 262-78430-78 331 338 333 419 464 18.5 φ350 φ320 12-φ13

SECTION 1 OUTLINE AND DESCRIPTIONS
4263-13236
1
Fig.1-2 TMP-3203LMand TMP-3203LMC
INLET
FLANGE
Parts number ABCDEF G φHφJn-φd
TMP-3203LM TMP-3203LMC
VG350 P/N 262-78430-42 P/N 262-78430-52 287 294 289 270 375 420 22 φ450 φ420 12-φ15
ISO320B
Special P/N 262-78430-43 P/N 262-78430-53 287 294 289 270 375 420 22.5 φ425 φ395 12-φ13
VG300 P/N 262-78430-47 P/N 262-78430-57 307 314 309 290 375 440 18.5 φ400 φ370 12-φ13
VG250 P/N 262-78430-48 P/N 262-78430-58 331 338 333 314 419 464 18.5 φ350 φ320 12-φ13

1.2 Descriptions
5
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
1
1.2.1.2 Outside drawing of TMP-3403LMC
Fig.1-3 TMP-3403LMC
INLET
FLANGE Parts number ABCDE F φGKφHn-φd
VG350 P/N 262-78503-52 287 294 270 375 420 22 φ450 360 φ420 12-φ15
ISO320B
Special P/N 262-78503-53 287 294 270 375 420 22.5 φ425 360 φ395 12-φ13
VG300 P/N 262-78503-57 307 314 290 395 440 18.5 φ400 380 φ370 12-φ13
VG250 P/N 262-78503-58 331 338 314 419 464 18.5 φ350 404 φ320 12-φ13
F

SECTION 1 OUTLINE AND DESCRIPTIONS
6263-13236
11.2.2 Standard Accessories
Series of TMP-3203
TMP-3403LMC
(Note) One of followings.
Description Q'ty Notes Parts number
1Gasket for inlet flange
(Note) 1
O-ring gasket for VG350
O-ring gasket for VG300
O-ring gasket for ISO320B Special
O-ring gasket for VG250
036-13516
036-13515
036-15554-55
036-13514
2Bolt set for inlet flange
(Note) 1
VG350：Hex Head, M12 ×40, 12PC
(A2-70)
VG300：Hex Head, M12 ×35, 12PC
(12.9)
ISO320B Special：Hex Head,
M12 ×40, 12PC (12.9)
VG250：Stud Bolt, M12 ×47, 12PC
(12.9)
─
3 Centering with O-ring 1 KF40 035-06004-14
4Clamp 1 KF40 035-06004-03
5 Instruction manual 1 English 263-13236
Description Q'ty Notes Parts number
1Gasket for inlet flange
(Note) 1
O-ring gasket for VG350
O-ring gasket for VG300
O-ring gasket for ISO320B Special
O-ring gasket for VG250
036-13516
036-13515
036-15554-55
036-13514
2Bolt set for inlet flange
(Note) 1
VG350：Hex Head, M12 ×40, 12PC
(12.9)
VG300：Hex Head, M12 ×35, 12PC
(12.9)
ISO320B Special：Hex Head,
M12 ×40, 12PC (12.9)
VG250：Stud Bolt, M12 ×47, 12PC
(12.9)
─
3 Centering with O-ring 1 KF40 035-06004-14
4Clamp 1 KF40 035-06004-03
5 Instruction manual 1 English 263-13236

2
2IDENTIFICATION AND
FUNCTION
2.1 Pump Main Unit