SPI Supplies plasma prep III User manual

Version 1.0 9/11
SPI Supplies
Plasma Prep III Plasma Cleaner
Operation Manual
SPI # 11055-AB 11055-AX
Structure Probe, Inc. / SPI Supplies
206 Garfield Ave.
West Chester, PA 19380
Toll-free from USA/Canada: 1-(800)-2424-SPI
Phone: [phone]
FAX: [phone]
E-mail: [e-mail]

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Structure Probe, Inc. / SPI Supplies
Street address for UPS, FedEx, DHL, other couriers, trucks
206 Garfield Ave.
West Chester, PA19380
Mailing address P.O. Box 656 West Chester,
PA 19381-0656 USA
Toll-free from USA/Canada: 1-(800)-2424-SPI
Phone: [phone]
FAX: [phone]
E-mail: [e-mail]
For further information regarding any of the other products designed and manufactured by SPI Supplies, contact your
local representative or directly to SPI Supplies at the address above, or visit www.2spi.com
•Carbon and Sputter Coaters
•Osmium Plasma Coaters
•Ion Mills
•Plasma Reactor for ashing and etching
•High Vacuum Bench Top Evaporators
•Critical Point Dryers
•Electron Microscopy Supplies, Consumables and Accessories

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Warranty
The SPI Supplies unit you have purchased is guaranteed to be free of defects in workmanship on the day of
shipment. This warranty covers parts and labor for a period of one year, excluding shipping charges or
consumables. Breakage of glassware is specifically excluded from this warranty.
Proper use of your unit, according to the operation manual, should result in trouble-free operation. Any improper
use of the SPI Supplies unit through modifications or unreasonable operating procedures will void this warranty.
Disclaimer
SPI Supplies instruments are designed for simplicity of installation and operation. This manual provides full and
complete information in both these areas. SPI Supplies therefore assumes no liability or responsibility of any
kind for damage or injury resulting from incorrect installation or operation of the machine.
If anyquestions arise, call SPI Supplies from the USA/Canada 1-800-2424-SPI or 1-610-436-5400 for assistance.
For all other countries, contact our nearest agent or SPI Supplies directly. A listing of our agents may be found
on our website at:
http://www.2spi.com/info/agents/

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1 Contents
1.1 Manual Layout
This Operation Manual is divided up into the following major sections, each section dealing with
specific topics, as follows:
Section 1 – Contents
Section 2 - Health and Safety
General section which applies to all SPI Supplies products detailing the very important issues of Health
and Safety applicable when using sample preparation equipment.
Section 3 - Introduction
Introduces this manual.
Section 4 - General Description
Identifies each of the equipment items and provides an overview of their functions and how they work.
Section 5 - Installation
Instructions on how this Instrument should be installed and the connections which should be made
between the equipment items.
Section 6 - Operation
Instructions on how to start-up and run the instrument.
Section 7 - Maintenance
Instructions on routine maintenance checks and determining if the system is functioning correctly.
Information on how to identify faults in the system and how to rectify these faults.
Section 8 – Spare parts and consumables
Section 9 – Technical Diagrams

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1.2 Section Contents
Section1 – Contents................................................................................................... 4
1.1 Manual Layout.................................................................................................4
1.2 Section Contents .............................................................................................5
1.3 Illustrations ......................................................................................................6
Section 2 – Health and Safety ...................................................................................7
2.1 Safety Policy....................................................................................................7
2.2 Servicing..........................................................................................................7
2.2.1 Disclaimer.....................................................................................................7
2.2.2 Operators and Service Engineers................................................................7
2.3 Hazard Signals and Signs...............................................................................8
2.3.1 Hazard Signal Words – Definition ................................................................8
2.4 Good Working Practices..................................................................................9
2.5 Plasma Prep III Plasma Cleaner Specific Potential Safety Hazards...............9
Section 3 – Introduction........................................................................................... 11
3.1 Return of Goods ............................................................................................ 11
3.2 Returns Procedure ........................................................................................ 11
Section 4 – Description............................................................................................12
4.1 Overview........................................................................................................12
4.2 Typical Plasma Process ................................................................................12
4.3 Technical Specifications ................................................................................13
4.4 Equipment Controls and Indicators ...............................................................14
4.4.1 Front Panel.................................................................................................14
4.4.2 Rear Panel .................................................................................................15
4.5 Equipment Description ..................................................................................16
4.5.1 RF Generator .............................................................................................16
4.5.2 Vacuum System .........................................................................................16
4.5.3 Gas Supply System....................................................................................16
4.5.4 Reaction Chamber .....................................................................................16
Section 5 – Installation.............................................................................................17
5.1 Site Requirements.........................................................................................17
5.2 Assembly.......................................................................................................17
5.2.1 Installing the Outer Chamber.....................................................................17
5.2.2 Engaging the TEM Specimen Stage Adapter.............................................18
5.2.2 Vacuum Pump Installation..........................................................................18
5.2.3 Connecting the Process Gas .....................................................................19
Section 6 – Operation...............................................................................................20
6.1 Overview........................................................................................................20
6.1.1 Initial Pump Down and Operation ..............................................................20
6.1.2 Loading Samples........................................................................................21
6.1.3 Shut Down Procedure................................................................................21
6.2 Connecting the Plasma Prep III Process Controller......................................22
Section 7 – Maintenance..........................................................................................23
7.1 Overview........................................................................................................23

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7.2 O-ring Maintenance.......................................................................................23
7.3 Cleaning.........................................................................................................23
7.4 Vacuum System Adjustments........................................................................24
7.5 Replacement Parts........................................................................................24
Section 8 – Replacement Parts...............................................................................25
Section 9 – Technical Diagrams..............................................................................26
1.3 Illustrations
Figure 2.1 – Hazard Warning Symbols ........................................................................8
Figure 2.2 – Typical Warning Symbols.........................................................................8
Figure 4.4.1 – Front Panel..........................................................................................14
Figure 4.4.2 – Rear Panel..........................................................................................15
Figure 5.2.1 – Chamber Cross-section......................................................................18
Table 8.1 – Replacement Parts..................................................................................25
Figure 9.1 – Logic Flow Chart....................................................................................26
Figure 9.2 – Plasma Prep III Plasma Cleaner Chassis Wiring Diagram....................27
Figure 9.3 – Plasma Prep III Plasma Cleaner Control Panel Schematic...................28
Figure 9.4 – Plasma Prep III Plasma Cleaner RF Control Board Schematic.............29

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2 HEALTH AND SAFETY
Safety is very important when using any instrumentation and all users of our equipment should read
this section.
This section of the Manual applies to all specimen preparation equipment supplied by SPI Supplies,
not just the particular instrument for which the manual refers.
Included in this section are details on warning notations and good working practices.
2.1 Safety Policy
This section contains important information relating to all health and safety aspects of the equipment.
As such it should be read, and understood, by all personnel using the instrument whether as an
operator or in a service capacity.
SPI Supplies is committed to providing a safe working environment for its employees and those that
use its equipment.
SPI Supplies regularly reviews its operations to make environmental, health and safety improvements
in line with applicable legislation.
The equipment has been designed as a free-standing instrument. SPI Supplies cannot be held
responsible for any damage, injury or consequential loss arising from the use of its equipment for any
other purposes, or any unauthorized modifications made to the equipment.
All service work carried out on the equipment should only be undertaken by suitably qualified personnel.
SPI Supplies is not liable for any damage, injury or consequential loss resulting from servicing by
unqualified personnel. SPI Supplies will also not be liable for damage, injury or consequential loss
resulting from incorrect operation of the instrument or customer modification of the instrument.
2.2 Servicing
2.2.1 Disclaimer
All service work on the equipment should be carried out by qualified personnel. SPI Supplies cannot
be liable for damage, injury or consequential loss resulting from servicing from unqualified personnel.
SPI Supplies will also not be liable for damage, injury or consequential loss resulting from incorrect
operation of the instrument or modification of the instrument.
2.2.2 Operators and Service Engineers
A normal operator of the equipment not trained in or qualified for service work on the equipment and
may cause a hazard to himself/herself or others if such work is attempted. Operators should therefore
restrict themselves to the normal operation of the equipment and not remove covers from the
electronic equipment or dismantling of the instruments, or otherwise attempt to thwart the intent of the
safety interlock system.
Service Engineers who are suitably trained to assess and isolate electrical, mechanical and vacuum
hazards should be the only personnel who access the equipment.

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2.3 Hazard Signals and Signs
2.3.1 Hazard Signal Words - Definitions
WARNING
Warnings are given where failure to observe the instruction could result in injury or death
to people.
CAUTION
Cautions are given where failure to observe the instructions could result in damage to
the equipment associated equipment and process.
Figure 2.1 - Hazard Warning Symbols
WARNING
Do NOT depress button “P” as this will change the program.
Figure 2.2 - Typical Warning sign as shown in this Manual

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2.4 Good Working Practices
It is essential that good hygienic working practices are adopted at all times especially in an ultra high vacuum
or cleanroom environment and are generally of the “Common sense” type. Some simple good practice rules
are:
If in doubt don't.
If in doubt ask.
When handling solvents wear face mask, gloves, apron and work only in a well ventilated
area.
Mop up any spillages immediately, using procedures appropriate for the spilled material.
When handling or decanting mineral oils wear protective clothing.
Aerosols of mineral oils, such as that produced by gas ballasting, can prove to be hazardous
and an exhaust is recommended.
Before attempting to service electrical apparatus, isolate from the mains.
Treat all unknown substances as hazardous.
Dispose of substances in an appropriate manner.
Use the correct tool for the job.
Keep a straight back and bend from the knees when lifting heavy objects.
Wear protective clothing when using liquid nitrogen.
Affix pressurised gas cylinders firmly to walls or racks. Use the correct regulating valves on
gas cylinders and always transport cylinders using the appropriate specialist trolley.
Obey safety regulations regarding lifts, hoists and machine tools.
Always make sure you understand a procedure well before attempting it for the first time.
2.5 Plasma Prep III Plasma Cleaner Specific Potential Safety Hazards
The following Safety Hazards are specific to the SPI Supplies Plasma Prep III Plasma Cleaner
CAUTION
Be sure to keep all vacuum parts, especially any O-rings or seals clean and free from excessive
moisture, chips, dust etc. All such parts should be replaced if suspected of damage.
CAUTION
Do not handle any parts to be placed in the glass chamber with your bare hands. Contamination such
as skin oil may cause trouble to the ultimate pressure.

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WARNING
Use care when handling or installing the glass outer chamber, as they are extremely fragile.
WARNING
Be careful when handling the vacuum oil, because it is very hot just after the pump is operated.
WARNING
Never run the rotary vacuum pump without vacuum oil.
WARNING
The used vacuum oil and oil mist traps should be disposed safely in accordance with all local and
national safety and environmental requirements.
WARNING
Since the gas most commonly used in the Plasma Prep Plasma Cleaner is oxygen (O2), NO OPEN
FLAME and NO SMOKING signs should be posted near the instrument.
WARNING
There are two micro-switch interlocks engineered into the Plasma Prep III Plasma Cleaner to prevent
injury to operating personnel. They are:
A. RF Shield Interlock – This switch cuts off AC power to the RF power supply. This
ensures that the Plasma Prep III Plasma Cleaner will not function without the shield
in place.
B. Cover, Right Side, Center – This This switch shuts off all primary power to the
Plasma Prep III Plasma Cleaner. It is to prevent the operation of the system while
the top of the unit is off.