Strasbaugh nCompass 7AB-II User manual

nCompass
(Model 7AB-II)
Automatic Edge Grinder
Operations and
Maintenance Manual
S T R A S B A U G H
825 Buckley Road
San Luis Obispo, California 93401
Phone: [phone]
Fax: [phone]

Copyright © 2002, 2003 by Strasbaugh. All rights reserved.
Document prepared by: Technical Publications Group

Operations and Maintenance Manual Introduction
Version 1.1-April 2003 1 -1
1
Introduction
•Overview of Manual
•Ordering Replacement Parts

Strasbaugh nCompass (Model 7AB-II) Automatic Edge Grinder
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INTRODUCTION
Overview of Manual 3
Ordering Replacement Parts 4

Operations and Maintenance Manual Introduction
Version 1.1-April 2003 1 -3
INTRODUCTION
Your new machine will provide a long life of precision production and minimum
maintenance if the fundamentals of good operation are observed. This Operation and
Maintenance Manual describes safety, installation, operator functions, preventive
maintenance, and service for your Strasbaugh Model 7AB-II Automatic Edge Grinder.
OVERVIEW OF MANUAL
The Safety section provides detailed safety practices and information for your machine.
Safety guidelines and rules are listed to safely operate your machine. Safety graphics and
their meanings give the reasons for their placement on your machine. Read and observe
all safety labels carefully and completely. Please note that not all of the safety graphics
presented will appear on your machine. The lockout/tagout procedure has been provided
for you to copy and use when servicing your machine. Read the entire Safety section
before operating your machine!
The Installation, Operator Functions, and Maintenance sections of this manual present tips
and instructions for placing and operating your machine. The Installation portion of this
manual offers help for locating, lifting, moving, leveling, and connecting utilities to your
machine. The Operator Functions section provides information on using, adjusting, and
maintaining your machine.
The Machine Parts section makes it easy for you to order any parts from Strasbaugh
needed for your machine. The machine Assembly Drawings section provides detailed
drawings of your machine with all of the part numbers labeled. The Customer Parts list
provides the part item number, name, and quantity.

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ORDERING REPLACEMENT PARTS
Engineering changes are occasionally made to improve the operation of the machine model.
This makes the precise matching of machines and parts important. Replacement part
orders can be facilitated easily by Strasbaugh when you provide the following information:
•machine name
•machine serial number
•replacement part item number
•replacement part name
•quantity required

Operations and Maintenance Manual Safety
Version 1.1 -April 2003 2 -1
2
Safety
•General Information
•Visual Hazard Alerts
•Interlocks -Safety Interlock Door Switches
•Waste Disposal
•Lockout Safety Procedures

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SAFETY
Overview 3
General Information 4
Visual Hazard Alerts 6
Hazard Magnitude Levels 6
Three-Panel Alert Graphics 7
Power Interrupts and Interlocks 11
Emergency Off Button 11
Safety Interlock Door Switches 12
Waste Disposal 13
Electrical Disconnect 13
Lockout Safety Procedure 14
Lockout Procedure 15
Appendix to Lockout Safety Procedure 18
Training, Lockout/Tagout, per 29 CFR 1910.147 18

Operations and Maintenance Manual Safety
Version 1.1 -April 2003 2 -3
SAFETY
OVERVIEW
The safety information in this chapter is intended to provide for safe operation and
maintenance of Strasbaugh edge profiling equipment.
A checklist of basic safety instructions addresses general operation. The Visual
Hazard Alerts section explains the system of hazard alert graphics used on the
machines and in Strasbaugh manuals and on the machines themselves. The Power
Interrupts and Interlocks section explains machine motion shutdown and interlock
switches on access doors, followed by instructions on waste disposal, electrical
disconnect, and a detailed lockout safety procedure.

Strasbaugh nCompass (Model 7AB-II) Automatic Edge Grinder
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GENERAL INFORMATION
Strasbaugh grinding machines are designed for safe operation. However, caution
must be exercised when operating this machine. Failure to adhere to these safety
instructions and to good safety practices in general may result in personal injury or in
damage to the machine. Hearing protection should not be necessary, since the 7AB-
II producesless than 70 db(A) sound pressure during normal operation.
It is the responsibility of the user to be sure that the machine is in safe operating
condition at all times. The user is also responsible for insuring that operators and
maintenance personnel follow approved operating and maintenance procedures. The
following is a list of safety instructions:
•Operating a machine with loose wafers inside is harmful to the machine and the
wafers. Always remove loose parts and obstructions before beginning
machine operation.
•DO NOT put hands or objects near the polishing head or drive mechanisms
while the machine is in motion unless it is absolutely necessary.
•Keep all guards and covers in place and in good repair.
•Interlocks and other safety circuits or devices may not be overridden except by
trained maintenance personnel using approved procedures. Operators must
not override interlocks or safety devices under any circumstances.
•Keep all control and electrical cabinet doors closed and latched.
•Disconnect power and padlock the power disconnect switch when servicing or
repairing the machine.
•DO NOT operate the machine without proper electrical grounding.
•DO NOT wear loose clothing that could be caught by machine parts in motion.
•Wear SAFETY GLASSES whenever working near moving machinery.
•Always heed visual hazard alert labels and messages.

Operations and Maintenance Manual Safety
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•Recommendation Only: Avoid long-term exposure to low frequency
electromagnetic fields. The data concerning low-frequency electromagnetic
health effects is inconclusive, but a 1995 IEEE engineering publication
recommends “prudent avoidance” of prolonged and continuous exposure.
Maintenance personnel are advised to avoid standing at open power panel doors
for extended periods with the power on. Pregnant women, in particular, should
heed this advice. Closing power panel doors effectively shields all personnel
from any perceived hazardous fields. Studies have been and are being conducted
by the U. S. Department of Energy to determine what risks, if any, are posed by
low frequency electromagnetic field exposure.
•Always consult with your supervisor if your task or procedure is unclear or if
you believe that your assignment could result in unsafe conditions or equipment
damage.
REMEMBER:
The safe way is the best way.

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VISUAL HAZARD ALERTS
To aid in the safe operation of Strasbaugh machines, visual hazard alert graphics are placed
in appropriate locations throughout the manual and on the machines themselves. These
graphics alert users to the existence of pinch points, areas of potential entanglement, hot
surfaces, chemical and electrical hazards.
HAZARD MAGNITUDE LEVELS
The definitions of keywords (signal words) used to define hazard levels are shown
below:
Keyword Definition
Danger
Immediate hazards which will result in severe personal
injury or death.
Warning
Hazards or unsafe practices which could result in severe
personal injury or death.
Caution
Hazards or unsafe practices that could result in minor
personal injury or in product or property damage.

Operations and Maintenance Manual Safety
Version 1.1 -April 2003 2 -7
THREE-PANEL ALERT GRAPHICS
The three-panel alert graphics used in Strasbaugh products consist of:
1. a keyword such as Danger, Warning, Caution (see table above)
2. a graphic hazard symbol and, typically,
3. a text box identifying the hazard, the result(s) of ignoring the hazard,
and instructions on avoiding the hazard.
Several representative graphic hazard symbols used in Strasbaugh manuals and on the
machines are presented below, together with information on when to be aware of the
hazard. For the purpose of avoiding injury, these labels are displayed in appropriate places
on the machines and in the operation and maintenance manuals. Although the text box
information is written for multiple machines, it may change as needed to identify
hazards in specific instances and provide more precise avoidance instructions.
Also note: The labels pictured here include common international symbols for various
hazards. Some labels may differ from these in their symbols.
CAREFULLY READ AND OBSERVE ALL CAUTIONS AND INSTRUCTIONS
ON HAZARD LABELS, BOTH ON THE MACHINES AND IN THE MANUAL
REFERENCES.
Note that some machines may not include all of the safety labels presented below. If you
do not see a safety label on your machine or see a safety label on the machine that is not
explained in this manual, please consult with your Safety Advisor, Supervisor, or
Strasbaugh for an explanation.

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Alert Graphic:
Symbol:
•Pinch Points
When to be Aware:
•whenever machine parts are moving.
•immediately before and during auto mode operation.
•immediately before and during manual operation.
Warning: Components may continue to move briefly after the process cycle is
completed.
Alert Graphic:
Symbol:
•Entanglement
When to be Aware:
•whenever machine parts are moving
•during maintenance and calibration procedures involving spindle rotation, table
rotation, conditioning brush rotation, or robot movement.

Operations and Maintenance Manual Safety
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POWER INTERRUPTS AND INTERLOCKS
The Model 7AB’s safety systems include an Emergency Shutoff button (EMO), a
power disconnect interlock on the power cabinet, magnetic sensors on both hinged
access hatches and tool-operated latches on the remaining doors.
EMERGENCY OFF BUTTON
The fastest way to shut down the machine is to press the EMERGENCY OFF
button (EMO) on the main control panel. This red mushroom button with a yellow
collar is also an approved way to turn off the machine.
This button cuts off operational power to the entire machine, including the control
computer graphical user interface (GUI). The Power On light remains lit.
Operations cannot be restarted until the EMERGENCY OFF button is pulled or
twisted clockwise to the “out” position, and all other precautions, such as securing
all interlocked doors, are observed. The Machine On button on the main control
panel must then be pushed to restart the machine.
NOTE: You may lose any unsaved work on the system when the EMO
automatically powers down the control module. Any recipe or
parameter changes in process will be interrupted. To shut
down the machine for any extended period, save your work and
press the EMO.

Strasbaugh nCompass (Model 7AB-II) Automatic Edge Grinder
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Figure 2-1 Emergency Off Button
SAFETY SWITCHES AND DOOR LATCHES
The second safety shutoff system is on the main power cabinet door. The power
disconnect, to the upper right of the door, prevents opening the door without first
pushing the power disconnect lever to the off position. A medium flat-bladed
screwdriver must then be used in conjunction with the door handle in order to open
the door and permit access to the cabinet.
The third safety shutoff system consists of magnetic sensors on both the Send and
Receive hinged access covers that operate independently of the EMO system. These
sensors automatically stop all motion in either the Send or Receive cabinets
respectively, and work independently of each other. These are not technically
interlocks, since they do not actually lock the hinged access covers, and motion
resumes automatically when they are closed. With the exception of “door” #7,
which is bolted in place, the remaining doors have tool-operated latches to restrict
access. All of these safety systems and latches should be individually checked on a
weekly basis, and prior to machine use after a prolonged shutdown.
Machine power and machine air may be locked-out for safety and maintenance
purposes as described in the Energy Source Isolation section of this chapter.
Do not override safety equipment! To ensure the safety
of machine operators, check to make sure that the doors are
securely fastened before operating the machine.

Operations and Maintenance Manual Safety
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WASTE DISPOSAL
The Model 7AB-II is designed to edge grind silicon wafers along with de-ionized water.
The Silicon-DI water waste mixture must be disposed of in a manner consistant with
applicable ordinances and regulations. Should any exotic or hazardous materials be used,
appropriate precautions should be taken not only during processing, but also during clean
up and disposal of any hazardous materials or waste.
Please Note: The 7AB was not designed to grind hazardous materials such as
Germanium or Gallium Arsenide and does not have an Exhaust Fail alarm.
For all chemicals and exotic or hazardous materials used with Strasbaugh machines:
•Know and prepare for any potential hazards relating to grinding materials other than
Silicon, including the need for additional exhaust and protective measures.
•Be aware of any personnel safety hazards. See chemical suppliers’ material safety
data sheets (MSDS).
•Be aware of local, state, and federal regulations regarding waste disposal. Consult
with your supervisor or company safety officer if there is any question.
ENERGY SOURCE ISOLATION
ATTENTION STRASBAUGH MACHINE OWNER!
Machine power and machine air may be locked-out for safety and maintenance purposes,
please see the Power Distribution and Plumbing Description chapters respectively for
specifics. Under certain circumstances the machine may require an additional electrical
disconnect appropriate for your machine power needs, which is not included unless
otherwise specified. For power disconnect information, please refer to the Power
Distribution chapter and consult your Strasbaugh representative if you have further
questions.
DECONTAMINATION AND
DECOMMISSION
At the end of the machine’s service life, it should be decontaminated in accordance with
SEMI standard S12-0298, dismantled and recycled in an appropriate manner. Any
hazardous materials used in machine processes over the life of the machine will determine
the extent of decontamination that may be necessary.

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LOCKOUT SAFETY PROCEDURE
(Reproduce for shop copy. Fill-in specific data or check off as appropriate.)
EQUIPMENT LOCATION:
MACHINE SERIAL NUMBER:
MANUFACTURER:
STRASBAUGH
PROCEDURE AUTHORIZED BY:
DATE:
PHONE:
DEPARTMENT:
OSHA regulations state, "The procedures shall clearly and specifically outline the scope, purpose,
authorization, rules and techniques to be utilized for the control of hazardous energy, and the
means to enforce compliance, including but not limited to the following:
A. A specific statement of the intended use of the procedure.
B. Specific procedural steps for shutting down, isolating, blocking and securing machines or
equipment to control hazardous energy.
C. Specific procedural steps for the placement, removal and transfer of lockout devices or tagout
devices and the responsibility for them.
D. Specific requirements for testing a machine or equipment to determine and verify the
effectiveness of lockout devices, tagout devices, and other energy control measures.
SOURCES OF ENERGY FOR THIS EQUIPMENT:
Electrical 110 VAC. ___ Gas ___ Hydraulic ___
Electrical 208 VAC. ___ Chemical ___ Pneumatic (compressed air) _√_
Electrical 230 VAC. _√_ Thermal ___ Other (specify) __________ ___
Electrical 480 VAC. ___
STORED ENERGY (Remember energy can be stored!):
Raised Load ___ Air Tank ___ Coiled Springs ___
Chemical ___ Charged Capacitors _√_Hydraulic Pressure ___
Battery ___ Pneumatic Pressure _√_ Other (specify) __________ ___
MACHINE MAINTENANCE MANUAL:
See the machine maintenance manual(s) before attempting any activities for which this procedure
applies. The maintenance manual(s) are usually the best single source of information vital to the
understanding of the machine and hazards which may be present.

Operations and Maintenance Manual Safety
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LOCKOUT PROCEDURE
• Per ANSI Z244.1-1982
• Lockout procedure for Strasbaugh Polishing, Lapping, Grinding, and Cutting Machines
PURPOSE
This procedure establishes the minimum requirements for lockout of energy sources
that could cause injury to personnel. All maintenance personnel, operators, and
machine owner employees shall comply with the procedure.
RESPONSIBILITY
The responsibility for seeing that this procedure is followed is binding upon all
machine maintenance personnel. All machine maintenance personnel shall be
instructed in the safety significance of the lockout procedure by the information
contained herein and instruction provided by the machine owner designated safety
personnel. Each new or transferred affected operator or maintenance person shall be
instructed accordingly in the purpose and use of the lockout procedure.
PREPARATION FOR LOCKOUT
Maintenance personnel authorized to perform lockout shall be certain as to which
switch, valve or other energy isolating devices apply to the equipment being locked
out. More than one energy source (electrical, mechanical, or others) may be
involved. Employees shall clarify the identification of questionable sources with
their supervisors. Before lockout commences, job authorization should be obtained.

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SEQUENCE OF LOCKOUT PROCEDURE
1. Notify all affected employees that a lockout is required and the reason
therefore.
2. If the equipment is operating, shut it down by the normal stopping procedure
(depress stop button, open toggle switch, etc.).
3. For each energy source, operate the switch, valve, or other energy isolating
device so that the energy source(s) (electrical, mechanical, hydraulic, etc.) is
disconnected or isolated from the equipment.
Stored energy, such as that in capacitors, springs, elevated machine members,
rotating flywheels, hydraulic systems, and air, gas, steam, or water pressure,
etc., must also be dissipated or restrained by methods such as grounding,
repositioning, blocking, bleeding-down, etc.
4. Lockout the energy isolating devices with an assigned individual lock.
5. After ensuring that no personnel are exposed and as a check on having
disconnected the energy sources, operate the push button or other normal
operating controls to make certain the equipment will not operate.
CAUTION: Return operating controls to neutral position after the test.
6. The equipment is now locked out.
RESTORING EQUIPMENT TO SERVICE
1. When the job is complete and equipment is ready for testing or normal service,
check the equipment area to see that no one is exposed.
2. When equipment is all clear, remove all locks. The energy isolating devices
may be operated to restore energy to equipment.