Strasbaugh 7AA User manual

Version 1.2 - April 18, 1996
Model 7AA
Wafer Grinder
Operation
and
Maintenance
Manual
STRASBAUGH
825 Buckley Road
San Luis Obispo, CA 93401
Phone: [phone]
Fax: [phone]

Copyright © 1996 by Strasbaugh. All rights reserved.

Strasbaugh Table of Contents
Version 1.2 - April 18, 1996; Update 11/6/96 iii U
Table of Contents
Chapter 1 Introduction 1 - 1
About the 7AA Manual 3
About the Model 7AA Wafer Grinder 4
Guarantee/Warranty Certificate 5
Safety 7
General Operation 8
Visual Hazard Alerts 10
Hazard Magnitude Levels 10
Three-Panel Alert Graphics 11
Interlocks - Safety Interlock Door Switches 15
Sprayer Use 16
Slurry Compounds 16
Waste Disposal 16
Lockout Safety Procedure 17
Lockout Procedure 18
Appendix to Lockout Safety Procedure: 20
Training, Lockout/Tagout, Per 29 CFR 1910.147 20
Gallium Arsenide and Germanium Use 22
Material Safety Data Sheets for Products Used in Machine
Maintenance 30
Chapter 2 Installation 2 - 1
Receiving 4
Location 5
Leveling 5
Facilities Requirements 6

Operation and Maintenance Manual Model 7AA Wafer Grinder
iv U Version 1.2 - April 18, 1996; Update 11/6/96
Chapter 3 Machine Description 3 - 1
Control System Overview 3
Power Distribution 3
Servo Control Loop 4
24 VDC Inputs 4
24 VDC Outputs 5
AC Outputs 5
CRT Video 6
Mechanical Overview 7
Grind Assembly Bed 7
Work Spindle Carriage 7
Grind Spindle Support 7
Grind Spindle Feed Mechanism 8
Pneumatic/Fluid System Overview 9
Chapter 4 Operator Functions 4 - 1
Machine Operation Description 3
Overview - Machine Cycle Sequence With Wafer Transport System 3
Wafer Transport System 5
Machine Cycle Sequence Without Wafer Transport System 8
Control Panel 9
CRT Display Menus 10
Special Key Functions 11
Basic Operation 13
Summary 13
Step 1 - Machine Power Up 14
Step 2 - Machine Initialization 15
Step 3 - Grind Parameter Entry 17
Step 4 - Grind Mode Selection 22
Step 5 - Place Cassettes On Elevators 23
Step 6 - Start Machine Auto Cycle 24

Strasbaugh Table of Contents
Version 1.2 - April 18, 1996; Update 11/6/96 vU
Chapter 5 Machine Setup 5 - 1
Machine Parameter Entry 3
Adjust R.P.M.'S 5
Chapter 6 Preventive Maintenance 6 - 1
Daily Preventive Maintenance 3
Weekly Preventive Maintenance Schedule 4
Monthly Preventive Maintenance Schedule 6
Chapter 7 Mechanical Maintenance
Procedures 7 - 1
Manual Control Of Machine 4
Grind Operation Procedures 6
Spindle Speed Settings 6
Grind Wheel Replacement 7
Wheel Truing And Dressing 8
Grind Wheel Coolant 10
Work Chuck Replacement 11
Work Chuck Grinding 12
Chuck Grind Mode 12
Procedure 13
Grind Spindle Alignment 14
Spindle Pretravel Adjustment 17
Dynamic Offset 20
Wheel Wear Compensation 22
Determining Work Chuck Position 24
Elevator Calibration 25
Cassette In Place 25
Wafer In Slot 26
Cassette Slot Location 28
Lubrication 30

Operation and Maintenance Manual Model 7AA Wafer Grinder
vi U Version 1.2 - April 18, 1996; Update 11/6/96
Chapter 8 Software Calibration Procedures 8 - 1
Machine Diagnostics 4
Offline Storage Support Utilities 5
Installation 5
Operating Instructions 5
Transfer Grind Parameters From Machine To Disk 'F1' 5
Transfer Grind Parameters From Disk To Machine 'F2' 6
Edit/Create Single Grind Parameters 'F3' 6
Edit/Create Dual Grind Parameters 'F4' 7
Directory Of Grind Parameters 'F5' 7
Directory Of Wafer Data Files 'F6' 7
Active I/O Status Update 'F7' 8
Wafer Capturing Utilities 'F8' 8
Terminal Mode 'F9' 9
Exit To Dos 'F10' 9
Error Messages 9
Password And I.D. Numbers 9
Control Variables And Contacts 10
Chapter 9 Pneumatic Adjustments 9 - 1
Pneumatic Regulator Adjustment 4
Speed Controls 5
Air Bearing Spindle Maintenance 6
Vacuum Switch Adjustment 7
D.I. Water Flow Valves 9
Cooling Water Flow Valve 10

Strasbaugh Table of Contents
Version 1.2 - April 18, 1996; Update 11/6/96 vii U
Chapter 10 Troubleshooting 10 - 1
Frequently Encountered Problem Conditions 3
Error Conditions And Messages 5
Error Condition Lights 7
Servo Error Codes 8
Appendices
Engineering Drawings
Part Lists
Safety Reference
Manufacturers’ Data

Operation and Maintenance Manual Model 7AA Wafer Grinder
viii U Version 1.2 - April 18, 1996; Update 11/6/96
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Strasbaugh, Inc.
7AA Operation/Maint. Manual Vers. 1.2; Revision Record No. O/M-1.1, 4/18/96 Page - 1of 2
REVISION RECORD
for
Manual Update
Machine: Model 7AA Wafer Grinder
Manual Title, Volume (if
applicable), And Version: Operation and Maintenance
Manual; Version 1.1 - Undated
updated with this revision to
Version 1.2, 4/18/96
Revision Record No. and
Date: No. O/M-1.1; 4/18/96
Notes: Changes made in compliance with EC qualification safety requirements.
Summary of changes:
•Manual contents were reorganized and reformatted following organization, layout, and design
standard to current Strasbaugh manuals.
•Operator functions were isolated from maintenance procedures.
•Safety graphics were added to procedures.
•Strasbaugh “generic” safety information package was incorporated in Chapter 1
(Introduction).
•Multiple references were added directing users to Strasbaugh 7AA maintenance video three-
volume set and Giddings and Lewis PiC409 Family User’s Manual.

Strasbaugh, Inc.
7AA Operation/Maint. Manual Vers. 1.2; Revision Record No. O/M-1.1, 4/18/96 Page - 2of 2
DIRECTIONS:
1. Discard the manual pages listed in the left column below. Insert the replacement pages listed
in the right column.
2. File this notice after the Table of Contents.
Pages To Be Discarded Pages To Be Inserted
•pp. 1 through 66
(Version 1.1 - undated) •Version 1.2 - 4/18/96 (168 pp. of text - title pages, detailed table of contents,
chapters 1 through 10, appendices)

Strasbaugh, Inc.
7AA Operation/Maint. Manual Vers. 1.2; Revision Record No. O/M-1.1, 11/6/96 Page - 1of 2
REVISION RECORD
for
Manual Update
Machine: Model 7AA Wafer Grinder
Manual Title, Volume (if
applicable), and Version: Operation and Maintenance
Manual; Version 1.2 - 4/18/96
Revision Record No. and
Date: No. O/M-1.1; 11/6/96
Notes: Manual changes shown below reflect addition of MSDS sheets for Shell
Tellus (R) Oil 10 to Safety section.
DIRECTIONS:
1. Discard the manual pages listed in the left column below. Insert the replacement pages listed
in the right column.
2. File this notice after the Table of Contents.
Pages To Be Discarded Pages To Be Inserted
•pp. iii through iv
(Version 1.2 - April 18, 1996) •pp. iiiU through ivU (Version 1.2 - April 18, 1996; Update 11/6/96)
Item: Changes to main Table Of Contents
reflecting addition of MSDS sheets for Shell Tellus
(R) Oil 10 to Safety section.

Strasbaugh, Inc.
7AA Operation/Maint. Manual Vers. 1.2; Revision Record No. O/M-1.1, 11/6/96 Page - 2of 2
Pages To Be Discarded Pages To Be Inserted
•pp. 1-1 through 1-2
(Version 1.2 - April 18, 1996) •pp. 1-1U through 1-2U (Version 1.2 - April 18, 1996; Update 11/6/96)
Item: Changes to Ch. 1 Table Of Contents
reflecting addition of MSDS sheets for Shell Tellus
(R) Oil 10 to Safety section.
•pp. 1-29 through 1-30
(Version 1.2 - April 18, 1996) •pp. 1-29U through 1-30U (Version 1.2 - April 18, 1996; Update 11/6/96)
Item: Changes to Chapter 1 reflecting addition of
MSDS sheets for Shell Tellus (R) Oil 10 to Safety
section.
•none •Shell Tellus (R) Oil 10 MSDS sheets
(8 pp.)
Note: Insert immediately after page 1-30U.
Item: Addition of MSDS sheets for Shell Tellus
(R) Oil 10 to Safety section.

Strasbaugh Introduction
Version 1.2 - April 18, 1996; Update 11/6/96 1 - 1U
1
Introduction
•ABOUT THE 7AA MANUAL
•ABOUT THE MODEL 7AA
WAFER GRINDER
•GUARANTEE/WARRANTY
•SAFETY

Operation and Maintenance Manual Model 7AA Wafer Grinder
1 - 2U Version 1.2 - April 18, 1996; Update 11/6/96
ABOUT THE 7AA MANUAL 3
ABOUT THE MODEL 7AA WAFER GRINDER 4
GUARANTEE/WARRANTY CERTIFICATE 5
SAFETY 7
General Operation 8
Visual Hazard Alerts 10
Hazard Magnitude Levels 10
Three-Panel Alert Graphics 11
Interlocks - Safety Interlock Door Switches 15
Sprayer Use 16
Slurry Compounds 16
Waste Disposal 16
Lockout Safety Procedure 17
Lockout Procedure 18
Appendix To Lockout Safety Procedure: 20
Training, Lockout/Tagout, per 29 CFR 1910.147 20
Gallium Arsenide And Germanium Use 22
Gallium Arsenide (GaAs) 22
Germanium (Ge) 26
Material Safety Data Sheets For Products Used In Machine Maintenance 30
Shell Tellus (R) Oil 10

Strasbaugh Introduction
Version 1.2 - April 18, 1996; Update 11/6/96 1 - 3U
INTRODUCTION
ABOUT THE 7AA MANUAL
In addition to the information listed in this manual, refer also to the
following when performing adjustments to the 7AA:
•the Strasbaugh 7AA Maintenance Videos (a three-volume set).
•the Giddings and Lewis PiC409 Family User’s Manual.

Operation and Maintenance Manual Model 7AA Wafer Grinder
1 - 4U Version 1.2 - April 18, 1996; Update 11/6/96
ABOUT THE MODEL 7AA
WAFER GRINDER
The Model 7AA Wafer Grinder is designed specifically for mechanical
grinding to remove material from the backside (the side opposite the
electronics) of semiconductor wafers to a desired thickness. A fully
automated machine, the 7AA transports wafers from dual feed
cassettes, precision grinds each wafer to thickness, rinses and dries
each wafer, measures wafer thickness, and unloads the processed
wafers into dual receive cassettes. Managed by a two-axis, closed loop
programmable control, all operations are fully automatic.
Air bearing spindles drive the grinding wheel(s) and the wafer chuck.
Required flatness, stock removal, and surface finish combinations can
be achieved at maximum production rates with the built in option of
single or two step grinding. The single step surface grind is used for
rapid stock removal or fine finish, depending upon the grit size of the
single diamond wheel. The two step grind, with coarse and fine grit
wheels concentrically mounted, may do both rapid stock removal and
fine finishing in a single wafer handling operation. The 7AA’s anti-
deflection construction features a heavy duty cast iron column and head
rigidly secured to a steel weldment base which runs the length of the
machine. Head adjustment provides simple alignment between wheel
and work spindle, assuring flatness.

Strasbaugh Introduction
Version 1.2 - April 18, 1996; Update 11/6/96 1 - 5U
GUARANTEE/WARRANTY
CERTIFICATE

Operation and Maintenance Manual Model 7AA Wafer Grinder
1 - 6U Version 1.2 - April 18, 1996; Update 11/6/96
This page intentionally left blank.

Strasbaugh Introduction
Version 1.2 - April 18, 1996; Update 11/6/96 1 - 7U
SAFETY
The safety information below is intended to provide relevant
information and appropriate associated procedures for safe operation
and maintenance of the Strasbaugh 7AA Wafer Grinder.
A checklist of basic safety instructions addresses general operation.
The visual hazard alerts section explains the system of hazard alert
graphics used in Strasbaugh manuals and on the machines themselves.
The section on safety interlock door switches reviews machine motion
shutdown/suspension interlocks designed to take effect when machine
cabinet doors are opened. Brief instructions on sprayer use, slurry
compounds, and waste disposal precede a detailed lockout safety
procedure and explicit information on the use of gallium arsenide and
germanium.

Operation and Maintenance Manual Model 7AA Wafer Grinder
1 - 8U Version 1.2 - April 18, 1996; Update 11/6/96
GENERAL OPERATION
The Strasbaugh polishing, grinding, lapping, and cutting
machines have been designed for safe operation. However,
caution should be exercised while operating this machine. Failure
to adhere to the following safety instructions and to good safety
practices may result in injury to personnel or damage to the
machine.
It is the responsibility of the user to be sure that the machine is in
safe operating condition at all times. The user is also responsible
for insuring that the operators and maintenance personnel follow
approved operating and maintenance procedures. The following is
a list of safety instructions:
•Operating a machine with loose wafers inside is harmful to the
machine and wafers -- Always remove loose wafers and
obstructions before beginning machine operation.
•DO NOT at any time put hands or objects beyond the operator
doors while the machine is in motion.
•Keep all guards and covers in place and in good repair.
•DO NOT bypass safety interlocks.
•Keep all control and electrical cabinet doors closed and latched.
•Disconnect power when servicing or repairing the machine.
•DO NOT operate the machine without proper electrical
grounding.
•DO NOT wear loose clothing which could be caught by
machine parts in motion.
•Wear SAFETY GLASSES whenever working near moving
machinery.
•Always heed visual hazard alert labels and messages.