SURUGA SEIKI H410 Series User manual

User’s Manual
Laser Auto-Collimator
H410 series
Thank you very much for purchasing this product.
Read this manual thoroughly before using the product.
After done reading this manual, store in a safe place for
easy reference.
SG19-236-001E

i
Safety Cautions
Introduction
This document is a “User’s Manual” of H410 series laser auto-collimator (hereinafter, referred to as “this
product”).
In this “User’s Manual”, information and basic operation methods on this product are described. Read
this document thorouJhl\to use this product effectiYel\and safet\, and suf¿cientl\understand its con-
tents.
Symbols and Meaning
In this document, items to be followed to avoid injuries of the operators who use this product and other
people, and damage to physical properties are indicated with the following symbols.
Danger
If not followed, it indicates that “It is highly possible to cause death or serious injuries”.
Warning
If not followed, it indicates that “It is possible to cause death or serious injuries”.
Caution
If not followed, it indicates that “It is possible to cause light injuries or only physical property
damages”.
NOTE
It describes items to pay attention when operating and handling this product.
Info
It describes reference items useful when operating and handling this product.

SafetyCautions
ii
Handling of this Product
●Before starting or operating this product, please check the functions and performance of this product
are operating correctly.
●If this product is not working properly, take suf¿cient safety measures to prevent various damages, and
contact our sales of¿ce.
●:hen this product is used out of standards indicated in the speci¿cations or in a modi¿ed state, be
cautious that we cannot cover the functions and performance under the warranty.
●When this product is used by combining with other devices, please consider carefully, because its
functions and performance may not be satis¿ed due to the use condition and environment.
●Do not use this product to protect human bodies and a part of human bodies.
●This product is not designed to be used in areas where explosion proof is necessary. Do not use this
product in areas where explosion proof is necessary.
●Including peripheral devices, do not apply rapid temperature changes to each device. Condensation
may cause the device to fail.
●IPU (Image Processing Unit) to connect to this product should be placed vertically. Do not place it side
way.
●Do not wipe this product with wet cloth, benzine, and thinner. It may cause discolorization and
deformation of this product. When heavy soil is present, soak a cloth to a diluted neutral detergent,
wipe it by squeezing off the detergent well, and wipe it dry with a soft cloth.
Caution on Installation Environment
Caution
Do not install this product in the following places in order to use this product normally or
safely.
-Highly humid place, dusty place, and place with bad ventilation.
-Places where temperature gets high such as by direct sunlight.
-1ear Àammable locations.
-Places where there are corrosive gases and inÀammable gases.
-Places where vibration and shock are directly applied.
-Places where splash from water, oil, and drugs gets on this product.
-Places where static electricity is likely to be generated.
-Tilted and unstable places.
Measures Against Noise
Caution
When installing this product near noise sources such as a power source and high-voltage
lines, the noise may cause malfunction and damage. Take measures such as use of noise
¿lters, a separate piping of various cords, and attaching an insulation to the controller and
measurement parts.

SafetyCautions
iii
Effects of Ambient Temperature
Caution
Changes of ambient temperature may cause measurement errors. Always try to make it
constant. The use environment temperature of this product is 0 to 40°C, and the performance
guarantee temperature is 23°C ± 5°C.
Use of Ambient Lighting
Caution
Do not use this product near a lighting facility where ON/OFF in a high frequency is repeated.
When it cannot be avoided, install a shielding plate to minimize its effect.
Caution When Using
Warning
●Usewithacorrectpowersourcevoltage.Itmaycausefire,electricshock,anddamage.
●Donotdisassemble/modifytheunit.Itmaycausefireandelectricshock.
Caution
●Whenattaching/detachingthecord,alwaysturnthepowersourceOFFofthemainbodyand
devicesconnectedtothemainbody.Itmaycausedamage.
●DonotturnthepowersourceOFFwhilesettingtheitems.Apartorallofsettingdatamaybelost.
●Donotblocktheventilationholeofthemainbody.Insidetemperatureincreasesanditmayresult
indamage.
Effects of Dirt and Dust
Caution
In the following cases, measurement errors may be generated due to the effect of dirt, dust, or
water and oil.
-Adhesion to the cover glass: Blow a clean air to remove the dirt on the cover glass. If it is
extremely dirty, wipe off with a soft cloth soaked in alcohol.
-Adhesion to a measurement target surface: Blow with a clean air, and wipe off the dirt.
-Penetration from Àoating to the optical axis region and by splash: Take measures by installing a
protection cover and air purge.
Measured Target
When the shape of measured target and surface state are different, measurement errors may be gener-
ated. In the case, use an existing target object, and correct with the angle correction function.

SafetyCautions
iv
Effects of Vibration
If a measurement target object is vibrating, the measured values may vary. In the case, a more precise
measurement is possible by increasing the number of measurement values to calculate an average.
Effects of Air Fluctuation
A slow air Àuctuation may cause measured values to vary.
In such a case, the following measure is effective.
-Cover the measurement part with a wind-proof cover.
Measures for Errors
Warning
In the next case, promptly turn the power source OFF. If this product is kept using in an
abnormal state, it may cause damage.
Please contact our sales agency for repair.
-When water and foreign objects enter inside.
-This product is dropped and the case is damaged.
-Smoke comes from the controller and it smells strange.
CE Marking
This product comply with CE marking for the following complying standards and conditions. When this
product is used in EU countries, keep the following conditions.
-EMI: EN61326-1 Class-A
-EMS: EN61326-1
* All cable lengths for input and output containing the power source cable to connect IPU are less than 30 m.

SafetyCautions
v
Safe Use of Laser Product
This product is laser class 1 product.
Use this product paying attention to the following items.
●Donotlooklaserlightdirectlyforalongtime.
●Donotdisassemblethisproduct.
Caution
Use of controls or adjustments or performance of procedures other than those speci¿ed here
in may result in hazardous radiation exposure.
Warning Label
Display contents of this product’s warning labels and their pasting positions are shown next.
●Display contents of laser label.
●Pasting location of laser label.

vi
Contents
Safety Cautions i
Introduction..................................................................................................................... i
Handling of this Product ............................................................................................... ii
Caution on Installation Environment ........................................................................... ii
Measures Against Noise.........................................................................................................ii
Effects of Ambient Temperature............................................................................................. iii
Use of Ambient Lighting......................................................................................................... iii
Caution When Using..................................................................................................... iii
Effects of Dirt and Dust.......................................................................................................... iii
Measured Target.................................................................................................................... iii
Effects of Vibration................................................................................................................. iv
Effects of Air Fluctuation ........................................................................................................ iv
Measures for Errors...................................................................................................... iv
CE Marking .................................................................................................................... iv
Safe Use of Laser Product ............................................................................................ v
Warning Label.........................................................................................................................v
1 Preparations 1-1
System Con¿gurations .............................................................................................. 1-2
Each Part’s Name and Function................................................................................ 1-3
IPU ..................................................................................................................................... 1-3
Sensor Head....................................................................................................................... 1-4
IPU Installation............................................................................................................ 1-5
Installation of Each Part.............................................................................................1-5
Installation of the sensor head............................................................................................ 1-5
Mount the sensor head to the stand (HA-14) ..................................................................... 1-6
Installation of Touch Panel Monitor..................................................................................... 1-7
Installation of Peripheral Devices ....................................................................................... 1-8
Applying Power Source ............................................................................................. 1-8
Function Overview...................................................................................................... 1-9
List of Functions ................................................................................................................. 1-9
Flow of Measurement ............................................................................................... 1-11
2 Setting 2-1
Setting Method............................................................................................................ 2-2
Basic Flow of Setting ..........................................................................................................2-2
How to view the [Settings] screen ...................................................................................... 2-4
List of Settings Menu ..........................................................................................................2-5
Value Input Method.............................................................................................................2-6

Contents
vii
Use of Setting File ...................................................................................................... 2-7
Loading of Setting File........................................................................................................2-7
Copying Setting File ...........................................................................................................2-9
Resetting Setting File ....................................................................................................... 2-10
Name Change of Setting File ............................................................................................2-11
Setting of Basic Conditions .............................................................................. 2-13
Setting of Detail Conditions .............................................................................. 2-14
Setting of Measurement Conditions [Measurement] ........................................................ 2-15
Settings of Camera [Camera] ........................................................................................... 2-25
Settings of Display State [Display].................................................................................... 2-25
System Settings ................................................................................................. 2-27
Settings of System Con¿guration [Con¿guration]............................................................. 2-27
Settings of Angle Calibration [Calibration] ........................................................................ 2-30
Veri¿cation of System Information [Information] ............................................................... 2-30
3 Measuring 3-1
Overview of Measurement Screen ............................................................................ 3-2
Settings of the Measurement Mode .......................................................................... 3-3
Settings of the Judgment Area.................................................................................. 3-5
Veri¿cation of Measurement and Judgment Results .............................................. 3-9
The Measurement Mode is Single...................................................................................... 3-9
When the Measurement Mode is Multi Relative ............................................................... 3-10
The Measurement Mode is Multi Absolute ........................................................................3-11
The Measurement Mode is Offset Tilt............................................................................... 3-12
4 Angle Calibration 4-1
Overview of Angle Calibration................................................................................... 4-2
Wedge Substrate and Wedge Mirror that can be Used (made by Suruga Seiki) ............... 4-2
Angle Calibration ........................................................................................................ 4-3
5 Control from Peripheral Devices 5-1
Connection Speci¿cations with Peripheral Devices ............................................... 5-2
Connection with RS232C ................................................................................................... 5-2
Connection with Ethernet ................................................................................................... 5-3
Data Communication Format..................................................................................... 5-4
Measurement Results Output Formats............................................................................... 5-4
Device Control with External Commands ................................................................ 5-5
List of External Commands ................................................................................................ 5-5
Command Format............................................................................................................... 5-8
Communication Error........................................................................................................ 5-30

Contents
viii
6 Using Input/Output Terminal 6-1
Name of Input/Output Terminal and Function.......................................................... 6-2
Equivalent Circuit Scheme ................................................................................................. 6-3
Timing Chart................................................................................................................ 6-6
Internal Trigger Mode ......................................................................................................... 6-6
External Trigger Mode ........................................................................................................ 6-7
Details of Strobe Signal ...................................................................................................... 6-8
Details of Zero Set Signal................................................................................................... 6-8
7 Speci¿cation 7-1
Main Speci¿cations .................................................................................................... 7-2
IPU...................................................................................................................................... 7-2
Sensor Head....................................................................................................................... 7-3
Sensor Head Cable ............................................................................................................ 7-4
External Dimensions .................................................................................................. 7-4
IPU HPU-1000.................................................................................................................... 7-4
Sensor Head H410-175R .................................................................................................. 7-5
8 Troubleshooting 8-1
LED display state........................................................................................................ 8-2
Error messages........................................................................................................... 8-2
Phenomena and measures ........................................................................................ 8-3
Warranty On the Back

1
1-1
System Con¿gurations ........................................1-2
Each Part’s Name and Function..........................1-3
IPU Installation......................................................1-5
Installation of Each Part.......................................1-5
Applying Power Source .......................................1-8
Function Overview ...............................................1-9
Flow of Measurement.........................................1-11
Preparations
Preparations such as system con¿gurations and function
overview of this product that are necessary before using this
product are explained.

1 Preparations
1-2
System Con¿gurations
In addition to take measurement by itself, this product can be used according to purposes by combining
with commercially available devices.
PC
Control and measurement values
can be loaded from PC with
RS232C communication and
Ethernet communication.
Touch panel monitor
Measurement display and input
operation can be performed. DC 24 V power source
PLC
Programmable Logic Controller
Measurement control and measurement
values can be loaded.
IPU
(ImageProcessingUnit)
SensorHead
RS232C
Cross cable
Monitor
Cable
Ethernet cable
Touch panel
Connection cable
Monitor power source
Connection cable
Sensor head
connection cable
I/O cable

1 Preparations
1-3
Each Part’s Name and Function
Each part’s name and function are described.
IPU
①State display lamp
Turns on in green when the power is ON.
Turns on in red when there are problems like errors.
②Ethernet connector
Connects to peripheral devices like PC. (ĺPage 5-1)
③Head connector
Connects with the sensor head (1). (ĺPage 1-5)
④USB connector
Connects the touch panel connection cable (USB cable).
(ĺPage 1-7)
⑤Monitor connector
Connects the monitor cable (VGA cable D-sub 15-pin).
(ĺPage 1-7)
⑥Monitor power source connector
Connects the monitor power source cable. (ĺPage 1-7)
⑦RS232C connector
Connects to peripheral devices like PC. (ĺPage 5-1)
⑧12-core connector
Connects to a device that operates input/output signals such as PLC. (ĺPage 6-2)
⑨DC 24 V power source connector
Connects to the DC 24 V power source. (ĺPage 1-8)
①
②
③
④
⑤
⑥
⑦
⑧
⑨

1 Preparations
1-4
Sensor Head
①IPU connection connector
Connects to IPU.
②State display lamp
Turns on in green when the power is ON.
Turns on in red when there are problems
like errors.
③Laser emission port
Emits laser.
Warning
Do not direct the laser emission port to
eyes.
①
②
③

1 Preparations
1-5
IPU Installation
IPU should be installed in the following environment.
NOTE
Do not place it side way.
30 mm
or more
10 mm
or more
10 mm
or more
Cable
Clearance
80 mm
or more
Installation of Each Part
Installation of the sensor head
Connect by using the sensor head connection cable.

1 Preparations
1-6
Mount the sensor head to the stand HA-14
When using the stand (HA-14), install by following the next steps.
1
Assemble the stand.
Mount the rod on the base of the stand.
2
Mount the tilt stage to the stand.
Fix the tilt stage with the screws attached to the stand.

1 Preparations
1-7
3
Mount the sensor head to the tilt stage.
Fix the sensor head with the screws attached to the tilt stage.
Installation of Touch Panel Monitor
Attach the monitor cable, touch panel connection cable, and power source connection cable to the
connector respectively.

1 Preparations
1-8
Installation of Peripheral Devices
●Installation of PC
Attach by using the RS232C cable or the Ethernet cable.
For details, see “5 Control from Peripheral Devices” (ĺPage 5-1).
●Installation of PLC
Attach to the 12-core connector by using the I/O cable.
For details, see “6 Using Input/Output Terminal” (ĺPage 6-1).
Applying Power Source
Connect to the power source by using the AC adapter.
To the outlet

1 Preparations
1-9
Continued to next page
Function Overview
This product is an auto-collimator that ¿nds tilting of the target object from the laser light entered to the
CMOS (Complementary Metal Oxide Semiconductor) sensor.
It mainly has the following features.
●Able to measure ¿ve spots at maximum simultaneously.
●Light source besides a laser light can be used as an emission light.
●Operation can be performed with the touch panel monitor, and various settings and peripheral devices
for measurement are not necessary.
●Can control from peripheral devices like PC.
●Able to utilize the command mode of the processing unit HIP-1200.
List of Functions
It is the function comparative table with HIP-1200.
Function This product HIP-1200
Angle measurement
(Standard measurement function)
Single spot żż
Multi-spot (in label order) 5 spots at maximum
(Order of sizes/Orders of angles
from the origin spot)
3 spots at maximum
(Order of sizes/Orders of angles
from the origin spot)
Angle measurement
(Application function)
Measurement
(Precision motor variation
measurement)
íż
DC tilt measurement
(Tilt of actuator)
íż
3 beam measurement
(Grating rotation adjustment)
íż
Angle analysis Area center of gravity żż
Luminance center of gravity żż
Luminance peak żż
Convenient function Luminance value display żż
Zoom function żż
Image rotation (XY axis
switching)
żż
Image inversion żż
Pass/fail judgment
Judgment range
Circle żż
Square (Rad/Tan) żż
Pass/fail judgment
Judgment condition
Offset judgment żż
Multi-spot Speci¿ed spot żż
Multi-spot All spots żż

1 Preparations
1-10
Function This product HIP-1200
DIGITAL I/O No. of output/input points 4/8 1/2
Output 1 Common for output
signal
żí
Output 2 Judgment result
strobe
żí
Output 3 Judgment result żż
Output 4 Trigger busy żí
Input 1 Common for input
signal
żí
Input 2 Result hold żż
Input 3 Zero set żż
Input 4 Measurement start
trigger (24V)
żí
Input 5 Laser ON ()żí
Input 6 Laser ON (-) żí
Input 7 Measurement start
trigger ()
żí
Input 8 Measurement start
trigger (-)
żí
Ethernet Interface TCP í
Command control żí
Data output CSV format í
Serial communication Interface RS-232C RS-232C
Command control żż
Data output CSV format CSV format