
1Safety.........................................................................................................................................4
1.1 Residual risks....................................................................................................................................4
1.2 Information and obligations for the operator .....................................................................................6
1.3 Impermissible operating conditions...................................................................................................6
1.4 Emissions..........................................................................................................................................6
2Description of device................................................................................................................7
2.1 Intended use .....................................................................................................................................7
2.2 Scope of delivery...............................................................................................................................7
2.3 Description of device.........................................................................................................................8
3Technical data.........................................................................................................................10
4Transport / storage .................................................................................................................10
5Installation...............................................................................................................................10
6Special note on the operation of the plasma process..........................................................11
6.1 General description .........................................................................................................................11
6.2 Carrying out surface treatment .......................................................................................................12
6.3 Measures to take after the surface treatment .................................................................................12
7Operation.................................................................................................................................13
7.1 Inserting / removing the module......................................................................................................13
7.2 Installation .......................................................................................................................................14
7.3 User menu.......................................................................................................................................16
7.4 Process tools...................................................................................................................................18
7.5 Working with module „Standard“.....................................................................................................19
7.6 Working with module „Nearfield“.....................................................................................................19
7.7 Working with other modules............................................................................................................19
8Taking out of service ..............................................................................................................20
9Maintenance............................................................................................................................20
9.1 Cleaning ..........................................................................................................................................20
9.2 Replacing a module ........................................................................................................................20
10 Troubleshooting .....................................................................................................................21
11 Environment............................................................................................................................22
11.1 Disposal ..........................................................................................................................................22
12 Conformity / standards...........................................................................................................22
12.1 CE ...................................................................................................................................................22
12.2 Product standards ...........................................................................................................................22
12.3 Licenses ..........................................................................................................................................22
13 Spare parts..............................................................................................................................23
(ES) Equipements Scientifiques SA - Département Composants & Modules - 127 rue de Buzenval BP 26 - 92380 Garches
Tél. 01 47 95 99 84 - Fax. 01 47 01 16 22 - e-mail: [email protected] - Site Web: www.es-france.com