Telemark ST Series User manual

ST SERIES ELECTRON BEAM
POWER SUPPLY
INSTRUCTION MANUAL
Copyright ©TELEMARK, 1995-2020 –All rights reserved
Manual Rev 1.0.0 June 2020
telemark.com
Download the current version of this manual at
https://telemark.com/e-beam-power-supplies/solid-state/
Brand and product names are trademarks or registered trademarks of their respective companies

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TABLE OF CONTENTS
1INTRODUCTION..........................................................................7
1.1 INTENDED PURPOSE .........................................................................7
1.2 USER RESPONSIBILITY......................................................................7
1.3 SYSTEM DESCRIPTION ......................................................................8
1.3.1 The High Voltage Power Supply ............................................................................ 8
1.3.2 The Filament Output Transformer.......................................................................... 8
1.3.3 The ST Controller................................................................................................... 8
1.3.4 The Handheld Controller (Optional) ....................................................................... 8
1.4 LIABILITIES AND WARRANTY ............................................................9
1.5 SAFETY ................................................................................................9
1.5.1 Personnel Qualifications ........................................................................................ 9
1.5.2 General Safety Instructions.................................................................................... 9
1.5.3 Illustrations of Risks and Hazards.......................................................................... 9
1.5.4 General Safety Concerns..................................................................................... 11
1.5.5 High Voltage Safety ............................................................................................. 12
2SPECIFICATIONS .....................................................................15
2.1 ST POWER SUPPLY MODELS..........................................................15
2.2 MECHANICAL SPECIFICATIONS......................................................16
2.2.1 The High Voltage Power Supply .......................................................................... 16
2.2.2 The ST Filament Output Transformer .................................................................. 17
2.2.3 The ST Controller................................................................................................. 18
2.2.4 The Handheld (Optional)...................................................................................... 19
2.3 ELECTRICAL SPECIFICATIONS .......................................................20
2.4 ENVIRONMENTAL .............................................................................21
2.5 STANDARDS ......................................................................................21
2.6 USE AND OPERATING MODES ........................................................21

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2.7 INTERFACES .....................................................................................22
2.7.1 Interlocks (Required)............................................................................................ 22
2.7.2 Remote I/O (Optional) .......................................................................................... 22
3INSTALLATION .........................................................................23
3.1 UNPACKING.......................................................................................23
3.1.1 Component Lists .................................................................................................. 24
3.2 RACK INSTALLATION........................................................................26
3.3 GROUNDING......................................................................................27
3.4 CONNECTING THE ST POWER SUPPLY.........................................29
3.4.1 HVPS Connections .............................................................................................. 31
3.4.2 Filament Output Transformer Connections.......................................................... 32
3.4.3 ST Controller Connections................................................................................... 32
3.4.4 SYSTEM INTERCONNECTION .......................................................................... 33
3.4.5 Mains Connection ................................................................................................ 34
3.5 INTERLOCK I/O..................................................................................35
3.5.1 High Voltage Power Supply Interlock I/O............................................................. 35
3.5.2 ST Controller Interlock I/O ................................................................................... 36
4STANDARD OPERATION .........................................................37
4.1 HVPS FUNCTIONS AND INDICATORS.............................................37
4.2 ST CONTROLLER FUNCTIONS AND INDICATORS.........................39
4.2.1 High Voltage Functions ........................................................................................ 40
4.2.2 Control Select Functions ...................................................................................... 41
4.2.3 Source Functions ................................................................................................. 42
4.3 OPERATION .......................................................................................43
4.3.1 Initial Start-Up ...................................................................................................... 43
4.3.2 Standard Operation.............................................................................................. 44
4.3.3 Handheld Operation ............................................................................................. 45
5REMOTE OPERATION..............................................................47
5.1 REMOTE USER I/O PINOUTS ...........................................................48
6MAINTENANCE AND STORAGE..............................................53
6.1 PREVENTIVE MAINTENANCE ..........................................................53

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6.2 STORAGE AND DISPOSAL ...............................................................54
6.2.1 Packaging ............................................................................................................ 54
6.2.2 Storage................................................................................................................. 54
6.2.3 Disposal ............................................................................................................... 54
6.2.4 WEEE................................................................................................................... 54
7TROUBLESHOOTING...............................................................55
7.1 BASIC TROUBLESHOOTING ............................................................55
7.1.1 HV Overvoltage Fault........................................................................................... 55
7.1.2 HV Overcurrent Fault ........................................................................................... 55
7.1.3 HV Out of Regulation ........................................................................................... 56
7.1.4 Arc Counter Fault ................................................................................................. 56
7.1.5 Rail Current Fault ................................................................................................. 57
7.1.6 Step Start Fault .................................................................................................... 57
7.2 CONTACTING SERVICE....................................................................58
8WARRANTY CONDITIONS .......................................................59
8.1 LIMITED WARRANTY ........................................................................59
9ADDENDUM ..............................................................................60

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TABLE OF FIGURES
Figure 1-1, Keep Foreign Material Out of the ST Power Supply ................................................11
Figure 1-2, Examples of High Voltage warning labels ...............................................................14
Figure 2-1, ST Power Supply Part Numbers .............................................................................15
Figure 2-2, ST HVPS Reference Dimensions............................................................................16
Figure 2-3, ST Filament Transformer Dimensions.....................................................................17
Figure 2-4, ST Controller Dimensions .......................................................................................18
Figure 2-5, Handheld ................................................................................................................19
Figure 2-6, ST Electrical Specifications.....................................................................................20
Figure 3-1, ST Power Supply Component List ..........................................................................24
Figure 3-2, High Voltage Power Supply Model Part Numbers ...................................................24
Figure 3-3, Cable Kit Components ............................................................................................25
Figure 3-4, Suggested Grounding Connections.........................................................................28
Figure 3-5, Interconnections for the ST Power Supply ..............................................................30
Figure 3-6, HVPS Rear Panel Connections...............................................................................31
Figure 3-7, Filament Output Transformer Connections to HVPS ...............................................32
Figure 3-8, ST Controller Rear Panel Connections ...................................................................32
Figure 3-9, MAIN POWER, Line Input.......................................................................................35
Figure 3-10, EPO Connections .................................................................................................35
Figure 3-11, Interlock Pinouts ...................................................................................................36
Figure 4-1, HVPS Front Panel Functions ..................................................................................37
Figure 4-2, HVPS Rear Panel Functions...................................................................................38
Figure 4-3, Controller Front Panel.............................................................................................39
Figure 4-4, High Voltage Control Functions...............................................................................40
Figure 4-5, Control Select Functions .........................................................................................41
Figure 4-6, Source Control Functions........................................................................................42
Figure 5-1, Remote I/O Pinout, Top Row ..................................................................................49

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Figure 5-2, Remote I/O Pinout, Bottom Row .............................................................................50
Figure 6-1, WEEE Symbol ........................................................................................................54
Figure 9-1, Connections ST series 400VAC Version................................................................61
Figure 9-2, Connections ST series 208VAC Version................................................................62
Figure 9-3, J4 Remote User I/O Connector ...............................................................................63
Figure 9-4, J4 Remote User I/O Connector ...............................................................................64

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1 INTRODUCTION
This user manual contains important information about the installation, functionality,
start-up and operations of the Telemark ST Series High Voltage Electron Beam Power
Supply. Read this manual carefully to ensure correct installation and operating
conditions are met for its intended use.
1.1 INTENDED PURPOSE
The Telemark ST High Voltage Electron Beam Power Supply is a constant voltage, high
frequency, switching power supply intended to deliver power to a single Electron Beam
(EB) source which uses electro-magnetic deflection or a combination of permanent
magnet and electro-magnetic focusing.
Typically, it is used with other Telemark Electron Beam equipment such as an Electron
Beam Sweep Generator, a Crucible Indexer, and/or a Deposition Process Controller or
the user’s PLC system. The Telemark ST High Voltage Electron Beam Power Supply
delivers up to -10kV (-8kV for ST-4) voltage output with a maximum emission current
depending on model specifications and configuration. (See chapter 2.3 and Figure 2-6,
ST Electrical Specifications for more info.)
The Telemark ST High Voltage Electron Beam Power Supply will be referred to as the
ST Power Supply for the remainder of this manual.
1.2 USER RESPONSIBILITY
The user is responsible for proper operation and ordinary maintenance of the
equipment, following procedures described in this manual, including reference
documents. Proper operation includes timely replacement of parts that are missing,

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broken or plainly worn. If the user has a reasonable doubt about understanding the use
or installation of a component, Telemark Service should be contacted.
It is vitally important that the user properly install the equipment as described in Chapter
3 (Installation) of this manual.
The warranty will be void if the equipment is improperly installed and/or
improperly grounded.
Alteration of the design or any function of the equipment will void the warranty and is
entirely the responsibility of the user.
1.3 SYSTEM DESCRIPTION
The ST Power Supply is comprised of three main units: The High Voltage Power
Supply, the Filament Output Transformer, and the ST Controller.
1.3.1 The High Voltage Power Supply
The High Voltage Power Supply (usually abbreviated HVPS) produces the High Voltage
and Filament Current outputs. It also controls the power and regulation of these outputs
for use in Electron Beam deposition applications. It receives the control values from the
ST Controller and produces the desired outputs to be joined at the Filament Output
Transformer for use with the Electron Beam source emitter assembly.
1.3.2 The Filament Output Transformer
The Filament Output Transformer (usually abbreviated FOT) uses the line voltage
filament control output and steps down the voltage to increase the output current for use
with the emitter assembly filament. It also joins the negative polarized High Voltage DC
output of the ST Power Supply to the high current output of the Filament Output
Transformer and sends the combined outputs through High Voltage Feed-throughs
mounted in the chamber wall to the Electron Beam source emitter to produce the
desired emission rate.
1.3.3 The ST Controller
The ST Controller serves as an interface for the common modes of operation of the ST
Power Supply. It converts the inputs from one of three separate input modes (Local,
Handheld, and Remote) and sends that information to the High Voltage Power Supply
to produce the desired outputs.
1.3.4 The Handheld Controller (Optional)
The Handheld controller offers more freedom of movement while controlling the ST
Power Supply output. The Handheld Controller allows the user to view the source

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operation directly and control High Voltage and Emission output without having to move
back and forth to the ST Controller installed in the instrument rack.
1.4 LIABILITIES AND WARRANTY
Telemark is not liable for damages resulting from improper use of the device and any
guarantees expire, if the user, or a third party:
•ignores information contained in this manual
•utilizes the product in a manner inconsistent with the intended purpose
•makes any modification or alteration to the product
•uses any unauthorized accessories with the product
Telemark reserves the right to make changes without prior notice.
1.5 SAFETY
Telemark is concerned for your general welfare and safety. Please follow these safety
guidelines below to ensure you have a safe and productive operation of your ST Power
Supply.
1.5.1 Personnel Qualifications
All work described in this document may only be carried out by persons who have
suitable technical training and the necessary experience.
1.5.2 General Safety Instructions
For all work performed on this product, be sure to adhere to all the applicable safety
regulations and local and regional Electrical Codes. Observe all safety notices given in
this documentation and forward this information to all other users of the product.
1.5.3 Illustrations of Risks and Hazards
This Instruction Manual illustrates safety notes concerning risks and hazards as follows:
Indicates important information that must be adhered to.
Indicates risk of exposure to electrically energized components.

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Information on preventing any kind of physical injury.
Information on preventing extensive equipment and
environmental damage.
Information on correct handling or use. Disregarding
safety notes can lead to malfunctions or equipment
damage.
NOTE: Indicates particularly important, but not safety-relevant information.
DANGER
!
WARNING
!
CAUTION
!

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1.5.4 General Safety Concerns
Pay attention to the following safety notes:
Foreign Objects:
Contact with electrically energized parts is extremely
hazardous when any objects are introduced, or any
liquids penetrate the device.
Make sure that no objects enter the device. Keep the
device dry.
Figure 1-1, Keep Foreign Material Out of the ST Power Supply
Improper use:
Improper use can damage the ST Power Supply.
Use the ST Power Supply only as intended by
Telemark.
Improper installation and operation:
Improper installation and operation may damage the
ST Power Supply.
Strictly adhere to the installation and operational
guidelines.
WARNING
!
WARNING
!
DANGER
!

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1.5.5 High Voltage Safety
This power supply operates at a high enough voltage and possesses sufficient stored
energy to be capable of killing a person!
DO NOT TAKE SAFETY FOR GRANTED!
Pay strict attention to safety information and warnings in this manual.
This power supply produces extremely high voltages. DO NOT attempt to adjust any
load connection with High Voltage on. DO NOT attempt to open the power supply
enclosure unless the manual has been thoroughly reviewed and the internal layout is
understood. Never reach into the enclosure unless the power has been disconnected,
lock outs/tag outs applied, and the output is fully discharged. Be certain safety ground
connections are in place and secured.
DO NOT rely on the power supply’s instrumentation or controls to determine that the
output is safely discharged. The sensors and indicator LEDs are driven by amplifiers,
which are powered by an internal low voltage power supply. There may be dangerous
voltages present on the output, even if the unit appears “OFF”.
Assuming that High Voltage is always ON is the best way to avoid hazard to personnel.
Always shut off the supply circuit breaker(s) and follow an appropriate grounding
procedure to discharge the output before touching any exposed connections.
The High Voltage output is automatically discharged internally when HV is turned off.
Although redundancy is designed into the discharge circuit, in the unlikely event of
component failure the output may remain charged long after power is disconnected if it
is not manually discharged!
DO NOT allow anyone who has not reviewed this manual to perform any part of the
installation process or attempt servicing of the power supply. Any questions must be
brought to the attention of Telemark's service personnel.
DO NOT obstruct the cooling inlets or outlets. Overheating can result, which may
damage the power supply.

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Use decals or other warning labels on the High
Voltage shield, at the front of the E-beam chamber
and on the door(s) to the room(s) housing the
chamber and power supply to provide a warning that
lethal voltages are present.
Do not put any part of the body under a chamber
while a source is running.
Always use a grounding hook as a matter of habit
before touching any potentially High Voltage area,
even when the power supply is off.
Always keep one hand in a pocket.
Always maintain a respectful fear of high voltages:
familiarity does not make high voltages safe.
DANGER
!
DANGER
!

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Examples of High Voltage warning labels include, but are not limited to:
Figure 1-2, Examples of High Voltage warning labels

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2 SPECIFICATIONS
2.1 ST POWER SUPPLY MODELS
Figure 2-1, ST Power Supply Part Numbers
*An alternative to the standard ST-6 Power Supply. Max HV is reduced to -8kV, but emission is increased to 750mA
Part Number
Description
Output HV and Emission ranges
107-9941-1
ST-4 Power Supply, Cheetah, 208V
HV: 0 to -8kV; Emission: 0 to 500mA
107-9944-1
ST-4 Power Supply, Cheetah, 400V
HV: 0 to -8kV; Emission: 0 to 500mA
107-9951-1
ST-6* Power Supply, Cheetah, 208V, 8kV
HV: 0 to -8kV; Emission: 0 to 750mA
107-9954-1
ST-6* Power Supply, Cheetah, 400V, 8kV
HV: 0 to -8kV; Emission: 0 to 750mA
107-9961-1
ST-6 Power Supply, Cheetah, 208V, 10kV
HV: 0 to -10kV; Emission: 0 to 600mA
107-9964-1
ST-6 Power Supply, Cheetah, 400V, 10kV, CE
HV: 0 to -10kV; Emission: 0 to 600mA
107-9981-1
ST-8 Power Supply, Cheetah, 208V
HV: 0 to -10kV; Emission: 0 to 800mA
107-9984-1
ST-8 Power Supply, Cheetah, 400V, CE
HV: 0 to -10kV; Emission: 0 to 800mA
107-9991-1
ST-10 Power Supply, Cheetah, 208V
HV: 0 to -10kV; Emission: 0 to 1000mA
107-9994-1
ST-10 Power Supply, Cheetah, 400V, CE
HV: 0 to -10kV; Emission: 0 to 1000mA

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2.2 MECHANICAL SPECIFICATIONS
2.2.1 The High Voltage Power Supply
The High Voltage Power Supply (See Figure 2-2) occupies a standard 5U-19” rack
compartment.
Physical dimensions are:
Height: 8.73” (222mm)
Width: 19.00” (483mm)
Length: 23.58” (599mm) Overall, 22.07” (561mm) from rack face
Net Weight: 56 lb. (25.4kg)
Figure 2-2, ST HVPS Reference Dimensions
INCH [mm]

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2.2.2 The ST Filament Output Transformer
The ST Filament Transformer (See Figure 2-3) is placed at a point between the Power
Supply and the HV feedthroughs. It is usually placed or mounted below the deposition
chamber with the interconnecting cables routed to the High Voltage Power Supply in the
instrument rack.
Physical dimensions are: (not including cable length to HV feedthrough)
Height: 4.63” (118mm)
Width: 6.31” (161mm)
Length: 15.42” (392mm)
Net Weight: 5.5 lb. (2.5kg)
Figure 2-3, ST Filament Transformer Dimensions
4X #10-32 UNF
MOUNTING STUD
TO CHAMBER
HIGH VOLTAGE
FEEDTHRUS
INCH [mm]

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2.2.3 The ST Controller
The ST Controller (See Figure 2-4) provides external controls for the operation of the
ST Power Supply. It occupies a standard 1U 19” rack compartment.
Physical dimensions are:
Height: 1.72” (43.7mm)
Width: 19.00” (483mm)
Length: 9.13” (232mm) Overall, 8.11” (206mm) from rack face
Net Weight: 4 lb. (1.8kg)
Figure 2-4, ST Controller Dimensions
1.72
INCH [mm]
8.11

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2.2.4 The Handheld (Optional)
The Handheld controller offers more freedom of movement while controlling the ST
Power Supply output. Comes with 15ft interconnect cable.
Physical dimensions are:
Height: 1.94” (49.3mm)
Width: 3.49” (88.7mm)
Length: 5.9” (150mm)
Net Weight: 1 lb. (0.45kg)
Figure 2-5, Handheld

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2.3 ELECTRICAL SPECIFICATIONS
Parameter
ST-4
208VAC
ST-4 CE
400VAC
ST-6
208VAC
ST-6 CE
400VAC
Line Voltage
198-220VAC
380-420VAC
198-220VAC
380-420VAC
Line Frequency
50/60Hz
50/60Hz
50/60Hz
50/60Hz
Line Current
16A
9A
23A
12A
Output Voltage
0 to -8kV
0 to -8kV
0 to -10kV
(optional 0 to -8kV)
0 to -10kV
(optional 0 to -8kV)
Max Output Ripple
0.5%rms
0.5%rms
0.5%rms
0.5%rms
Voltage Regulation
0.2%
0.2%
0.2%
0.2%
Emission Current
500mA
500mA
600mA
(-8kV option is
0 to -750mA)
600mA
(-8kV option is
0 to -750mA)
Filament Current *
0 to 40A
0 to 40A
0 to 40A
0 to 40A
Parameter
ST-8
208VAC
ST-8 CE
400VAC
ST-10
208VAC
ST-10 CE
400VAC
Line Voltage
198-220VAC
380-420VAC
198-220VAC
380-420VAC
Line Frequency
50/60Hz
50/60Hz
50/60Hz
50/60Hz
Line Current
30A
15A
37A
20A
Output Voltage
0 to -10kV
0 to -10kV
0 to -10kV
0 to -10kV
Max Output Ripple
0.5%rms
0.5%rms
0.5%rms
0.5%rms
Voltage Regulation
0.2%
0.2%
0.2%
0.2%
Emission Current
800mA
800mA
1000mA
1000mA
Filament Current *
0 to 40A
0 to 40A
0 to40A
0 to 40A
Figure 2-6, ST Electrical Specifications
*All ST Power Supplies are also available with optional 50A maximum filament current
supplies –please contact Telemark if 50A output current is required
Specifications subject to change without notice
NOTE: The above specified line currents are average maximum
currents at full load and at lowest specified line voltage.
It is considered good practice to select slow blow circuit breakers (or
fuses) with at least one step up in current rating (e.g. +5A). Line feed
cable size must be chosen accordingly.