Telemark TT-10 User manual

MODEL TT-10/15 (T2)
ELECTRON BEAM SOURCE
POWER SUPPLY
INSTRUCTION MANUAL
Part Number 108-0100-2
Copyright © TELEMARK, 1990-1999 - All rights reserved
November, 2000
www.telemrk.com
Brand or product names are trademarks or
registered trademarks of their respective companies

SAFETY WARNING
HIGH (POTENTIALLY LETHAL) VOLTAGES ARE PRESENT WITHIN THESE
MODULES. GREAT CARE MUST BE EXERCISED WHEN PERFORMING
MAINTENANCE. HUMAN CONTACT WITH THE VOLTAGES CAN BE FATAL.
Make sure that the input power is turned off before removing covers. Short all
capacitors with a grounding hook. Do not test live circuits unless absolutely
necessary.
If it becomes necessary to test live circuits, all test meter connections must be
made with the power OFF. Test leads should be in good repair and have sufficient
insulation for a test voltage of at least twice that to be measured. The test meters
should be securely mounted and should not be touched after power is turned on.
Do not work in cramped spaces or cluttered areas. TROUBLESHOOTING OF
THIS NATURE SHOULD BE CARRIED OUT ONLY BY QUALIFIED PERSONNEL
UTILIZING STANDARD SAFETY PROCEDURES.
DANGER - HIGH VOLTAGE
ii
Telemark TT-10/15 Power Supplies

WARRANTY
The TT-10/15 Electron Beam Source Power Supplies are guaranteed against
faulty materials, function, and workmanship for a period of 12 months after
shipment from the Telemark factory. This warranty is valid only for normal use
when regular maintenance is performed as instructed. This warranty shall not
apply if repairs have been performed or alterations made by anyone other than an
authorized Telemark representative, or if damage occurs through abuse, misuse,
negligence, or accident. No charge will be made for repairs made at a Telemark
service facility during the warranty period. Simply return the malfunctioning
module, freight prepaid. Telemark reserves the right to determine the appropriate
warranty adjustment.
USER RESPONSIBILITY
The user is responsible for proper installation, operation and ordinary maintenance
of the equipment, following procedures described in this manual. If the user has a
doubt about use or installation of a component, your Telemark representative or
the factory should be called.
It is vitally important that the user properly installs the equipment, with particular
attention to correct grounding methods, as described in Chapter 3 (Installation) of
this manual. The Warranty will be void if the equipment is improperly installed
and/or improperly grounded.
Alteration of the design or any function of the equipment voids the warranty and is
entirely the responsibility of the user.
iii
Telemark TT-10/15 Power Supplies

TABLE OF CONTENTS
SAFETY WARNING
WARRANTY
USER RESPONSIBILITY
LIST OF ILLUSTRATIONS
1
GENERAL DESCRIPTION
Functional Description ...................1-1
System Components ...................1-2
2
SPECIFICATIONS
Control Module ......................2-1
HV/Power Cabinet .....................2-1
Filament Transformer ...................2-2
Standard XY Sweep with Memory Module ........2-2
3
INSTALLATION
Introduction ........................3-1
Mechanical.........................3-1
System Grounding Practice ................3-1
Inter-module Connections .................3-5
Control Module ......................3-5
iv
Telemark TT-10/15 Power Supplies

4
CONTROLS AND
INDICATORS
Control Module ......................4-1
HV/Power Cabinet .....................4-4
Standard Sweep Control Module Chassis.........4-5
XY Sweep Controller (with Memory Module) (Optional). . 4-6
Standard Sweep Select Module (Memory Module) ....4-7
5
OPERATION
Introduction ........................5-1
Preliminary Precautions ..................5-1
Startup ...........................5-1
Operation .........................5-2
XY Sweep (with Memory Module) Setup .........5-3
XY Sweep with Memory Module Operation ........5-4
Shutdown .........................5-4
v
Telemark TT-10/15 Power Supplies

LIST OF ILLUSTRATIONS
Fig. Title Page
1-A Control General View ........................1-2
1-B Cabinet General View ........................1-3
3-A Single Source Vacuum Tank Grounding Installation. 3-2
3-B Multi Source Vacuum Tank Grounding Installation . . 3-3
3-C Source Filament Transformer Connections........3-4
3-D Source Inter-Module Connections...............3-6
3-E Control Module Connections ...................3-8
3-F HV/Power Cabinet Connections ................3-10
4-A Control Module, Front View....................4-2
4-B HV/Power Cabinet, Front View .................4-5
vi
Telemark TT-10/15 Power Supplies

1
GENERAL DESCRIPTION
Functional Description
The Telemark Model TT-10/15 Power supply is a direct current, regulated high
voltage power supply. It is intended for use with high volume production EB
(electron beam) sources as used in the vacuum evaporation industry. The
TT-10/15 can be operated from the controller or a remote station.
The TT-10/15 is compatible with EB sources that use electromagnetic deflection or
combinations of electromagnetic deflection and permanent magnet focusing.
Emission current regulated filament power is supplied to the EB sources.
The High Voltage/Power Cabinet is produced to accommodate one, two or three
sources. The number of Source Filament Control modules determines the number
of sources that can be driven.
There are two versions of the TT-10/15 control modules: Source 1 Control and
source 2/3 Control.
The Source 1 Control contains:
1High Voltage Control and digital indicators(There is only one
HV control for the main Power supply.)
2Source 1 Control
Note: Source 1 Control may be used stand-alone or with a Source 2/3 Control.
The Source 2/3 Control contains:
1Source Control
A system of safety interlocks with the vacuum system is provided to protect both
the operator and the equipment.
GENERAL DESCRIPTION 1-1
Telemark TT-10/15 Power Supplies

System Components
The TT-10/15 Electron Beam Power Supply consists of the following:
1HV Control / Source 1 Control Module
2Source 2 Control Module - 2 and 3 source systems only
3Source 3 Control Module - three source systems only
4Sweep Module - one per EB source is also needed in standard
operation
5High Voltage / Power Cabinet
6Filament transformer - one per EB source)
1-2 GENERAL DESCRIPTION
Telemark TT-10/15 Power Supplies
Figure 1-A
Control
General
View

GENERAL DESCRIPTION 1-3
Telemark TT-10/15 Power Supplies
Figure 1-B
Cabinet
General
View

1-4 GENERAL DESCRIPTION
Telemark TT-10/15 Power Supplies

2
SPECIFICATIONS
Control Module
•Input Power
208/240 volts, 3-phase, 60 Hz.
•High Voltage Regulation
Less than 2% of max.
•High Voltage Ripple
Less than 100 volts pk-pk
•Current cutback level
TT-10: 0.2 to 1.0 amps, adjustable.
TT-15: 0.2 to 1.5 amps, adjustable.
•Current cutback response
Less than 100 microseconds
HV/Power Cabinet
•Input Power
D models: 208/240 volts, 3-phase, 60 Hz. TT-10: 50 amps.
(plus 15A for control circuitry) TT-15: 60 amps.
E models: 380/415 volts, 3-phase, 50 Hz. TT-10: 40 amps.
TT-15: 50 amps.
•Output voltage range
1 to 10 kilovolts DC (negative)
SPECIFICATIONS 2-1
Telemark TT-10/15 Power Supplies

•Output current (maximum)
TT-10: 1.0 amp.
TT-15: 1.5 amps.
Filament Transformer
•Primary voltage
0 to 220 volts, 1-phase, 50/60 Hz
•Secondary Power
8 volts at 50 Amps
•Insulation rating, secondary to primary and core
22 kV DC
Note: Other transformer voltages are available upon special request.
Standard XY Sweep with Memory Module
•Input Power
switchable ranges of 110—120VAC @ 2A, or
208—240V @ 1A; single-phase, 50/60Hz.
•Output power
Dual Channel (longitudinal and lateral): plus or minus 1.5 amps. (mfg.
adjustable) maximum, into a load with impedance of less than 15Ω.
•Frequency range
Triangle Pattern mode: 6 to 50Hz;
Circle/Spiral mode: circling at 5Hz, but can collapse into spiral at rates
of 0.5 to 6Hz.
•LED Bargraphs
Lateral and Longitudinal LED bargraphs indicating amplitude/position
changes
SWEEP SELECT MODULE (Memory Module)
•Four (identical) Output Module pattern-bank selections
•Pattern Banks are selectable manually or remotely
2-2 SPECIFICATIONS
Telemark TT-10/15 Power Supplies

3
INSTALLATION
Introduction
Please see Figure 1-A, General View, Power Supply
The TT Electron Beam Power Supply Control and Sweep are designed to be
mounted in a standard 19 inch electronic instrument cabinet. Any suitable place
on a vacuum system that has a standard 19 inch wide opening may be used. The
control module could, for example, be set directly on a system cabinet top for easy
access. The High Voltage/Power Cabinet is a free-standing cabinet. The
installation procedures are described below.
Mechanical
The Control and Sweep modules must be placed in a level 19 inch rack or other
suitable cabinet that is capable of supporting a minimum of 25 pounds. The High
Voltage/Power Cabinet must be placed in a level foundation capable of supporting
a minimum of 500 pounds. There should be ample clearance at the back to allow
proper air flow. All modules must be secured in the cabinet before electrical
connections are made.
System Grounding Practice
See Figure 3-A or 3-B, Vacuum Tank Grounding Installation
A good ground is necessary to assure safe and proper operation of the power
supply. The following practices are recommended to assure a good ground.
INSTALLATION 3-1
Telemark TT-10/15 Power Supply

NOTE - THE POWER SUPPLY MUST BE CONNECTED TO AN
ISOLATED EARTH GROUND AS SHOWN IN FIG. 3-A AND 3-B,
FAILURE TO CONNECT THE POWER SUPPLY TO AN
ISOLATED EARTH GROUND COULD CAUSE SEVERE
DAMAGE TO THE POWER SUPPLY AND/OR AUXILIARY
ELECTRONIC CONTROL EQUIPMENT AND WILL VOID
THE WARRANTY.
Vacuum Tank Ground
The vacuum tank and power supply cabinet must be connected to a good earth
ground. Under normal conditions, a good earth ground will consist of two 3/4 inch
diameter copper clad steel rods driven through the floor and into the earth near the
tank location.
The ground rods should be connected to the vacuum tank and the filament
transformer by a #6 or larger gauge copper cable. If the distance from the
grounding rods to the tank is more than 10 feet, but less than 20 feet, increase the
size of the copper cable to #4 gauge. For distances of 20 to 60 feet, use 2 inch by
.035 inch copper strap. For distances over 60 feet, consult the factory. Do not use
braided wire and be sure that the connection is made to clean metal. The rods
3-2 INSTALLATION
Telemark TT-10/15 Power Supply
Figure 3-A
Single Source
Vacuum Tank
Grounding
Installation

must be approximately 6 feet apart and the resistance between the rods (without
the cable connection) should be 3 ohms or less. The resistance of the soil can be
reduced by adding copper sulfate or salt water around the rods. A drip system may
be required to insure maintenance of a proper ground.
NOTE - BE SURE THAT THE POWER SUPPLY CANNOT BE
TURNED ON DURING THE FOLLOWING TEST.
At least once a year the wire between the two rods should be disconnected and
the soil resistance checked. The resistance should never be over 3 ohms. The
climate and soil conditions in your area may dictate performing this test more
often. After this test has been completed, reconnect the cable to both rods before
returning the power supply to service.
If the equipment is to be installed in the upper floors of a building where the
installation described above is not feasible, the system may be grounded by
connecting the vacuum chamber to the steel structure of the building. This should
be done only after verifying that the building structure itself has a good earth
INSTALLATION 3-3
Telemark TT-10/15 Power Supply
Figure 3-B
Multi Source
Vacuum Tank
Grounding
Installation

ground. If no building ground exists, rods must be driven in sufficient number and
connected to the building structure to assure a suitable ground.
Do not depend on water pipes for the system ground connection. It is safe to
assume that, because of multiple joints and sealing compounds, water pipes will
not be an earth ground. Keep in mind that this is RF as well as DC ground. Do
not make a ground loop by connecting the low impedance ground cable to the
power supply incorrectly. As shown in Fig. 3-A and 3-B, the ground cable runs
from the ground source to the tank first. Then connect the cable from the tank to
the source filament transformer.
The power supply is connected to ground using the HV cable’s shield connection.
The power supply may sustain major damage if power is applied before the ground
is connected. Connect cabinet ground to vacuum tank.
Filament Transformer
The mounting base of the filament transformer must be connected to the tank
ground. This is best done by connecting a #6 wire from the tank to the ground
stud on the transformer. If the filament transformer has no stud at the bottom of
the core, connect ground to the transformer base bracket. Be sure to scrape away
the paint at the mounting bolt if it has not been done. This insures that the
transformer core does not rise above ground potential during operation.
3-4 INSTALLATION
Telemark TT-10/15 Power Supply
Figure 3-C
Source
Filament
Transformer
Connections

High Voltage Shielded Cable
See Figure 3-C
Approximately 20 feet of RG-213/U high voltage coaxial cable is provided for connection
of the power supply output to the source transformer and is shipped connected to
emission control module.
Approximately 5 inches of outer covering should be removed, and the shield stripped back
so the insulated center conductor is exposed. The shield should then be connected to the
tank ground at the transformer. The same care should be taken in making these
connections as that taken in connecting earth ground to the tank and transformer.
The center conductor should be attached to the secondary center-tap on the top of Source
Filament transformer. The cable is supplied with appropriate connections.
You must have a HV cable for each source from the power supply.
In addition, you have been supplied two 3 foot lengths of special coaxial cable
(#6 AWG with 40KVDC dielectric insulation) to be used from the filament transformer
output to the vacuum tank high voltage feedthrus. If a different length is desired, please
contact the factory.
Inter-module Connections
See Figure 3-D or 3-E
Control to HV/Power
•J4 of Controller to Power Supply “HV Control”
J4 is a 25-pin D-sub connector located on the rear panel of the HV module. The 25 wires
carry many signals both for commands and feedback information in analog form.
HV Power Supply Source Module to Sweep
•Rectangle plug, 2-pin plus ground
This line carries single phase line voltage (220V) to the Sweeper Module.
Control Module
This section applies to all Control Modules, (Single or Multi-gun)
Interlock Connections - J1
The external interlocks are connected to the power supply through J1 (9 pin D-sub), which
is located on the rear of the control module. Each controller (HV Control/Source 1 and
Source 2/3) has an independent interlock circuit. See Figure 3-D or 3-E, Control Module
Connections for details. 22 gauge ribbon cable or round cable should be used for the
interlock installation that is described below.
•Auxiliary Interlock 2 - Source 1, 2 and 3
INSTALLATION 3-5
Telemark TT-10/15 Power Supply

3-6 INSTALLATION
Telemark TT-10/15 Power Supply
Figure 3-D
Source
Inter-Module
Connections

This interlock is provided for the insertion of additional interlocks that the user may
require to turn the source off. These may include crucible rotation interlocks, etc. The
normally open contacts of each interlock should be connected in series and terminated
through pins 1 and 6 of J1 should be closed for normal operation.
•Source Water Interlock - Source 1, 2 and 3
Install a water flow switch in the return line of the cooling system for the electron beam
source. This switch should close when there is sufficient water flow to cool the source
and associated shields. Connect the switch to pins 2 and 7 of J1.
•High Vacuum Interlock -Source
This interlock insures that there is sufficient vacuum within the tank before the source
can be energized. This level of vacuum normally coincides with that required for the
energizing of the vacuum gauge filaments and most units have auxiliary contacts for
this purpose. Their connection should be such that pins 3 and 8 of J1 are shorted when
the filaments of the vacuum gauge are energized.
•Auxiliary Interlock1-HV
This interlock is provided for the insertion of additional interlocks that the user may
require to turn the HV off. These may include emergency off push buttons, etc. The
normally open contacts of each interlock should be connected in series and terminated
through pins 3 and 8 of J1 should be shorted or closed during normal operation.
•Tank/High Voltage Access - HV
These interlocks are to be connected to pins 2 and 7 of J1. Install series connected,
normally open switches on the doors and high voltage panels so that they are closed
only when the doors of the chamber and all panels are in place.
This interlock should be closed only when there is no possible chance of coming into
contact with high voltage.
•Vacuum Interlock - HV
A vacuum switch should be installed on the tank so that it is closed when there is a
slight vacuum within the tank. This switch is connected to pins 1 and 6 of J1.
Remote Emission Adjust - J4
J4 is a 15 pin D-sub connector. Remote Emission Adjust is a differential input. Install
the rate signal (zero to -10 volts) to pin 14 and ground to pin 6 of J4. The amplitude of
this signal should increase when it is desired to increase the evaporation rate. Also,
pins 9 and 4 must be jumpered for proper operation.
INSTALLATION 3-7
Telemark TT-10/15 Power Supply
WARNING - ALL STATEMENTS REGARDING
OPERATOR AND EQUIPMENT SAFETY ARE VOID IF
THE EXTERNAL INTERLOCKS ARE NOT INSTALLED
AS REQUIRED.

The three position Emission Current Mode switch selects which signal controls the source
current value. Remote control adjust is through J4 from a PLC (Programmable Logic
Control). Hand held control using the optional hand held current control unit that plugs into
J4.
Filament Transformer Primary Connection - J1005
The filament transformer primary must be connected to pins 1 and 3, square connector of
source control module(s) on back of power supply. The phase angle controlled line
voltage sets the source current. The source current cannot be turned on if any of the
interlock LEDs are off.
25’ Cables are supplied for each EB Source ordered.
HV/Power Cabinet
See Fig 3-C, Source Filament Transformer Connections
Electrical, interlock and control connections are outlined in the following sections.
Installation should only be performed by qualified personnel.
High Voltage Connection - C1
See figure 3-D
The high voltage connection is made with RG-213/U cable and the shield should be
connected as described in the previous section, High Voltage Shielded cable. The tank
end of the cable should be connected to the filament transformer. Care must be taken to
install the shield away from high voltage. A minimum of one inch of air clearance is
required.
3-8 INSTALLATION
Telemark TT-10/15 Power Supply
Figure 3-F
HV/Power
Cabinet
Connections