VACGEN OMNIAX Series Manual

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Operating and Maintenance Handbook
OMNIAX TRANSLATOR SERIES
Copyright Notice 2015 by VACGEN. All rights reserved. Information contained in this handbook is
subject to change without notice and does not represent a commitment on the part of VACGEN. No
part of this document may be copied or distributed, transmitted, transcribed, stored in a retrieval
system or translated into any human or computer language, in any form or by any means, electronic,
mechanical, magnetic, optical, manual or otherwise or disclosed to third parties without the express
written permission of VACGEN, Maunsell Road, Castleham Industrial Estate, St, Leonards on Sea,
East Sussex, TN38 9NN, UK

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WARRANTY
1. Subject to fair wear and tear and the due, observance of any installation user, storage, operating or
maintenance instructions the Seller undertakes to replace or, at its option repair free of charge to the
purchaser, any goods which the purchaser can establish are defective by reason of defective
workmanship or materials which are returned to the Seller, carriage paid, within 12 months of the date
of dispatch by the Seller. In the event, however, that the Seller supplies spare parts either direct, or
that are fitted or installed or replaced by the Sellers' service center such spare parts will be subject to
a warranty period of six months only.
2. The Purchaser cannot return any product for warranty repair without the prior approval of VACGEN
and the issue of a Goods Return Number (GRN). This shall be obtained by contacting the service
center at VACGEN. All returned products must be accompanied by a completed Declaration of
Contamination form. Customers must, in the first instance, contact the local selling agent.
3. We reserve the right to decline to service equipment, we consider is in any way hazardous until a
clearance or safety certificate, in a form satisfactory to VACGEN, has been completed and returned
by the customer.
REPAIR
The following additional terms and conditions apply in the event that the customer elects to use the
services of VACGEN workshop on a chargeable basis.
1. At its own cost the customer shall dispatch the equipment to the workshop, carriage paid, suitably
packaged, protected and insured, bearing, a Goods Return Number (GRN)and a completed
Declaration of Contamination certificate obtained from VACGEN in advance of shipment.
2. During the period that the equipment is on VACGEN premises, VACGEN will insure the equipment
against all risks.
3. Vacuum Generator will provide an acknowledgement of the receipt together with an estimate of the
repair charges. Such estimates are carried out on a visual basis and are therefore intended as a
guide only. Formal fixed price repair quotations are available and involve the disassembly of the
equipment to determine the full extent of
the work necessary to restore the equipment to an acceptable standard. In the event that the
customer chooses not to proceed with the repair VACGEN will make a charge to cover this
examination effort.
Note:
The above are extracts from VACGEN Conditions of sale. Complete copies can be obtained from:
VACGEN, Maunsell Road, Castleham Industrial Estate St. Leonards on Sea, East Sussex, TN38
9NN, United Kingdom.

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1. INTRODUCTION
1.1 HEALTH AND SAFETY INFORMATION
This equipment is a component for use with vacuum systems. Whilst every effort has been made to
eliminate hazards, its safe use is also dependant on the system to which it will be connected.
The owner of the equipment must ensure that all users are aware of the Health and Safety
information contained in this handbook. If the equipment is sold or passed to another owner, this
handbook must be included with the equipment.. If in doubt contact VACGEN.
Warning: This equipment must be installed by qualified personnel.
Warning: It is the responsibility of the user to consider the safety requirements of hazardous
materials used with this equipment and the consequence of any leakage, however caused. Consider
possible reactions with materials of construction. Any equipment returned to VACGEN must have the
correct Declaration of Contamination securely fastened to the outside of the packaging.
Warning: Harmful gases may be evolved if this equipment is heated to temperatures above the
maximum specified bakeout temperature.
Warning: Lubricants used in this assembly may cause irritation to sensitive skin. Wear protective
clothing.
Warning: Where cryogenic liquids are used with the equipment, it is the responsibility of the user to
ensure that the correct safety precautions are taken when handling and storing these materials.
Warning: Safe disposal of the equipment is the responsibility of the user.
Warning: It is the responsibility of the user to fit emergency stops to automated equipment.
Warning: Keep clear of moving pans.
Warning: Do not use this equipment with positive internal pressure above the specified maximum.
Warning: Some equipment may develop extreme hot or cold surfaces. Wear protective clothing.
Warning: Equipment must be fully earthed to prevent dangerous electrostatic charge build-up.

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1.2 GENERAL
The OMNIAX is a high precision, high rigidity, UHV specimen translator of modular construction,
suitable for a range of X, Y and Z motions. The modular construction means that the specification can
be upgraded or modified by the addition or replacement of well defined modules.
The OMMAX has been designed for ease of use and most functions should be straightforward. This
handbook outlines the general considerations for installation, use and maintenance.
Most manipulator configurations utilising the OMNIAX translator will also use drives and
instrumentation that are not included in this handbook. This handbook should therefore be read in
conjunction with documentation supplied for the other equipment.
1.3 SPECIFICATIONS
Support tubes:
Omniax translators can be supplied with either 50mm bore (54mm OD) or
29 mm bore (32mm OD) options.
Positional control:
X, Y: Micrometer or stepper motor
Z: Handwheel or stepper motor
Pressure range:
1 bar to 10-11mbar
Operating temperature:
-20oC to +55oC
Baking temperature:
230oC (motors, instrument cables and other non-bakeable ancillary
hardware removed.)
Standard base flange:
NW100CF (151.5mm (6") OD) or NW150CF ( 202.5mm (8") OD).
Traveling flange:
NW63CF (114mm (4.5") OD)
Environment:
This equipment is intended for use in clean, dry environments. For use in other conditions, please
contact VACGEN Technical Sales.
Materials of Construction:
All units are manufactured mainly from austenitic stainless steel or aluminum alloy. Stainless steel is
used for parts that form the vacuum envelope. Demountable vacuum seals use copper gaskets.
Bearings surfaces may include martensitic stainless steel, bronze alloys and PTFE polymer
compounds. Atmosphere side bearing surfaces are normally lubricated with high temperature
'Carbaflo' grease or fluid. The micrometers are conditioned for bakeout to 230oC. Motors contain non-
bakeable plastic and must be removed for bakeout. Atmosphere side fixing screw threads are treated
with ZTL thread lubricant.

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1.4 BASIC DIMENSIONS
Figure 1 - Basic dimensions and layout of Omniax

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1.5 Z MOTION
Z Travel
A1
C
Weight
(1) (kg)
100
184 to 284
374
40
200
186 to 386
477
42
400
186 to 586
677
46
600
229 to 829
920
52
800
273 to l073
1164
56
1000
317 to 1317
1408
61
Caution: these limits are not protected by limit stops or switches
Notes
(1) The weight of the Omniax
manipulator will vary depending on
configuration details.
(2) Motor specifications assume the
use of a VACGEN motor
drive-controller.
(3) Repeatability assumes the drive
is always from the same direction,
and at constant temperature
conditions.
(4) The T208 XY stage can only be
used with the 028mm ID support
tube. If used with the 50mm ID
support tube, travel
must be limited to ±15mm
vectorial.
(5) The XY travel is limited by the
vectorial sum of the X and Y
movement, i.e: (X2+Y2). Some
examples are shown in the table
below.
Examples of vectorial sums
For ±1 2.5mm; Xmax = 12.5 10 8.8 5 3
(X2+Y2)=12.5 Ymax = 0 7.5 8.8 11.4 12.1
For ±25mm; Xmax = 25 20 17.6 12 3
(X2+Y2)=25.0 Ymax = 0 15 17.6 21.9 24.8 1
Z-SLIDE SPECIFICATIONS:
Resolution 10 microns manual
0.5 microns motorised (2)
Repeatability (3) 10 microns manual (3)
1 micron motorised (2)(3)
Maximum Speed 4mm/s motorised (2)
1.6 XY MOTION
Basic code Bellows
XY Travel of XY stage A2 bore OD
±0 T000 80 95
±12.5(5) T108 135 85
±25.0(4)(5) T208(4) 167 85(4)
±25.0(1) T211 175 108
XY STAGE SPECIFICATIONS:
Resolution 5 microns manual
0.5 microns motorised (2)
Repeatability (3) 5 microns manual (3)
1 micron motorised (2)(3)
Maximum Speed 4mm/s motorised (2)

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2. INSTALLATION
2.1 IMPORTANT - READ BEFORE UNPACKING
Warning: Take care when lifting the unit that the weight and position do not exceed comfortable
limits. When installing the device make sure that it is adequately supported at all times.
Warning: Do not operate any of the controls until the XY shipping pin and all transit items have been
removed. Failure to do so may result in serious damage to both the translator and vacuum system.
a. With two or more persons, lift out the translator using the lifting handles. DO NOT use bellows,
drives or instrumentation as lifting points. Take care not to hit or damage any protruding parts of the
translator. Lie the translator on its back or stand vertically on the attached frame.
b. Carefully inspect the translator for visual signs of damage. The packaging is designed to with
stand shock and vibration but some of the fixing screws may become loose, more especially with air
freight shipment. All parts should be secure and there should be no 'play' in any of the movements. All
screws should be securely fastened but not excessively tight.
c. Any damage in transit should be, reported to the carrier and to VACGEN at Hastings, or your local
agent, within three days. Retain the packaging.
d. Remove the shipping pin and all transit items before operating any of the controls.
2.2 INSTALLATION GUIDELINES
Warning: This equipment must be installed by qualified personnel.
Warning: It is the responsibility of the user to consider the safety requirements of hazardous
materials used with this equipment and the consequence of any leakage, however caused. Consider
possible reactions with materials of construction. Any equipment returned to VACGEN must have the
correct Declaration of Contamination securely Fastened to the outside of the packaging.
Warning: Lubricants used in this assembly may cause irritation to sensitive skin. Wear protective
clothing.
Warning: It is the responsibility of the user to fit emergency stops to automated equipment.
Warning: Equipment must be fully earthed to prevent dangerous electrostatic charge buildup.
a. The OMNIAX will operate when mounted in any orientation. However, because of the weight of the
translator, very careful consideration must be given to ensuring that the level of stress exerted onto
the chamber and within the translator itself is as low as possible. Where practical the translator should
be vertically mounted. For horizontally mounted units, special mounting arrangements are required.
See Appendix A.
b. It is not possible to generalize on mounting arrangements for other orientations. Any supporting
cradle must allow for X & Y motions as well as supporting the weight of the frame. Also the centre of
gravity will vary as the Z motion is used. Normally this is not significant but must be considered where
very long Z travels (800mm and greater) are used or where heavy equipment is being moved on the Z
slide.
c. Bolt to the system flange using the correct size bolts and gaskets as indicated in the table below.
For tapped flanges use a thread lubricant, such as VACGEN ZTL on the bolt threads. Use washers
under bolt heads or nuts.

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Flange details
Flange Size: NW63CF NW100CF NW150CF NW200CF
(4.5” OD) (6” OD) (8” OD) (10” OD)
Gasket size (VG reel): ZCU64 ZCU100 ZCU150 ZCU200
Tapped holes: M8 M8 M8 M8
Clearance holes (mm): O8.4 O8.4 O8.4 O8.4
d. Install equipment to the top flange, using the same guidelines as the base flange.
e. Fit and adjust the micrometers or motors as described in the sections below. When installing use
only the lifting handles. These are found at the base and top of all manipulators and should remain
attached until the translator is correctly mounted.
f. Before operation, remove the lifting handles and the shipping pin.
2.3 XY MICROMETER INSTALLATION
Caution: Note the vectorial limits of travel as given in the 'XY Motion' section of the introduction.
Exceeding these limits can permanently damage the bellows. There are NO stops fitted to restrict
vectorial movement.
a. Some micrometers are supplied with the barrels intentionally loose in the housing. With the
shipping pin in position, adjust the micrometers to read the central position of the stage. The
graduated thimble can be rotated to 'zero' the scale. Tighten the clamp and remove the shipping pin
for use.
Warning: It is the responsibility of the user to fit emergency stops to automated equipment. (Note:
VACGEN stepper motor controllers have a facility for adding emergency stops.)
2.4 XY MOTOR INSTALLATION
a. Motor wiring details are given in Appendix B.
b. Bolt the stainless steel block and lead screw assembly to the slide.
c. Screw the anti-backlash assembly onto the lead screw.
d. Carefully fit the main mounting block over this assembly. Secure the anti-backlash assembly by
tightening the single lead screw, located under the plate, against the central spacer. It may be
necessary to unscrew the anti-backlash assembly to achieve this.
c. Rotate the anti-backlash assembly so that the mounting block is within 1mm of the side of the XY
Table. (Tip: The pulley can be turned around and used as a convenient handwheel.)
f. Remove the shipping pin and loosen the stainless steel block holding the lead screw.
g. Bolt the mounting block to the side of the Table using 3 x M6 bolts.

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Figure 2 - Motor on T108, T208 and T211 tables
2.5 XY MOTOR LIMIT SWITCHES
a. Remove the shipping pin and switch off any power to the motors.
b. Use the manual knob to move either motor from the central position to either limit of travel.
c. Loosen the limit protection microswitch and adjust its position until the switch can be heard to
operate (click) at the limit position. Repeat for the other limit of travel.
d. Return the first motor to the central position before attempting to set the second pair of
microswitches.
Caution: Microswitches do not protect against vectorial limits unless they are set to the 45ovector, i.e.
X=Y=5.5mm for =612.5mm stages, or X=Y=17.6mm for +25.0 stages. It is important that both
microswitches are correctly adjusted so that there is no risk of driving into the end stops as this may
damage the support tube, XY bellows or drive mechanism.
Caution: Microswitches are intended for emergency use only. Do not use microswitches as position
indicators or datum markers. Stepper motors may overrun by several steps when a microswitch is
activated, particularly if traveling at speed. Always check the datum position and reset as necessary.
2.6 Z MOTOR INSTALLATION
Note: Changing the side to which the motor is fitted is possible, but will cause the direction of motion
to reverse. It is therefore necessary to reverse the microswitches.

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a. The motor is assembled with a housing and the sprung part of an Oldham coupling. This assembly
is fitted over the locator which is permanently mounted to the Z slide of the Omniax.
b. As the motor is being fitted, rotate the motor shaft by hand to engage the coupling. Once
positioned, tightened the thumbscrew into the groove on the locator to secure the motor.
Figure 3 - Z Motor arrangements
2.7 Z MOTOR LIMIT SWITCHES
Caution: It is important that both microswitches are correctly adjusted so that there is no risk of
driving the knee into the end stops as this may damage the drive mechanism or lead screw.
Caution: Microswitches are intended for emergency use only. Do not use microswitches as position
indicators or datum markers. Stepper motors may overrun by several steps when a microswitch is
activated, particularly if traveling at speed. Always check the datum position and reset as necessary.
The microswitches are located inside the cover extrusion and are removed for bakeout with the
extrusion. Move the knee away from the switches by at least 25mm before removal or replacement of
this cover. The microswitches should be factory set. Check by slowly driving the Z-slide to either end
of travel until the switch operates, preventing further movement in that direction. To reset the
microswitches;
a. Position the knee at the limit position required.
b. Loosen the two screws holding the microswitch mounting bracket to the cover extrusion and slide
the bracket to a position where the microswitch makes contact.
c. Re-tighten the two screws and check, by slowly running the knee onto the switch, that contact is
being made consistently.