Varian TriScroll 300 Series User manual

DRAFT 6/11/03
MODULE REPLACEMENT
MANUAL
vacuum technologies
TriScrollTM 300 Series
Dry Scroll
Vacuum Pump
Manual No. 699904285
Revision E
May 2003
[phone]
idealvac.com
idealvac.com

DRAFT 6/11/03
Copyright 2003
Varian Vacuum Technologies
Varian TriScroll™ 300
Dry Scroll Vacuum Pump
TriScroll is a trademark of Varian Vacuum Technologies.
Loctite and PST are registered trademarks of Loctite Corporation.
Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company.

iii
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 6/11/03
Contents
Declaration of Conformity
Preface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .vi
Safety Considerations . . . . . . . . . . . . . . . . . . . . . . .vi
Related TriScroll Manuals . . . . . . . . . . . . . . . . . . .viii
Maintenance and Tool Kits . . . . . . . . . . . . . . . . . .viii
Factory Service Options . . . . . . . . . . . . . . . . . . . . .ix
Serial Numbers Notes . . . . . . . . . . . . . . . . . . . . . . .ix
Contacting Varian Vacuum Technologies . . . . . . . .ix
General Information . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Equipment Required to Install Pump Module . . . . . . 1
Tools Required to Install Pump Module . . . . . . . . . . 1
Maintenance Took Kit . . . . . . . . . . . . . . . . . . . . . . . . . 2
TriScroll Disassembly. . . . . . . . . . . . . . . . . . . . . . . . . . 4
TriScroll Reassembly . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Pump Conditioning and Performance Verification . 11
Request for Return Health and Safety Certification

declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
We
Wir
Nous
Nosotros
Wij
Noi
Varian, Inc.
Lexington, MA, 02421-3133 USA
121 Hartwell Avenue
Vacuum Technologies
Frederick C. Campbell
Operations Manager
Vacuum Technologies
March 2003
Lexington, Massachusetts, USA
Varian, Inc.
TriScroll Series Vacuum Pump
D
ec
l
ara
ti
on o
f
C
on
f
orm
ity
98/37/EEC, Machinery Directive
EN 1012-2:1996 Compressors and Vacuum pumps Safety Reqmts; Part 2 Vacuum Pumps
EN 1050:1996 Safety of machinery - principles for risk assessment
EN 60204-1 Electrical equipment of industrial machines; general requirements
73/023/EEC, Low Voltage Directive
EN 60034 part 1 Rotating electrical machines - Part 1: Rating and performance
89/336/EEC, Electromagnetic Compatibility Directive
EN 61000-4-2 Testing and Measurement Techniques - Electrostatic Discharge Immunity Test

TriScroll 300 Dry Scroll Vacuum Pump
vi
Preface
This manual provides the information you need to successfully perform replacement of the entire
module of your Varian TriScrollTM Dry Vacuum Pump. Module replacement is performed as an
alternative to performing a complete overhaul and rebuild (Major Maintenance) and is sold as one of
the options recommended when the pump base pressure has risen to an unacceptably high level for
your application. If you have questions that are not addressed in this manual, please contact the nearest
Varian Vacuum Technologies service facility listed on the rear cover of this manual.
Safety Considerations
READ THE FOLLOWING INSTRUCTIONS. TAKE ALL NECESSARY PRECAUTIONS.
The following format is used in this manual to call attention to hazards:
Maintenance personnel must be aware of all hazards associated with this equipment. They must
know how to recognize hazardous and potentially hazardous conditions, and know how to avoid them.
The consequences of work performed by unskilled or improperly trained maintenance personnel, or
careless operation of the equipment employed in the specified maintenance procedures can be serious.
Every maintenance person must read and thoroughly understand the materials discussed and the
instructions provided in this manual, as well as any additional information provided by Varian Vacuum
Technologies.
All warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local,
state/province, and national agencies regarding specific requirements and regulations. Address any
safety, operation, and/or maintenance questions to the nearest Varian Vacuum Technologies location.
WARNING The warning messages are for attracting
the attention of the operator to a partic-
ular procedure or practice which, if not
followed correctly, could lead to serious
injury.
CAUTION The caution messages are displayed
before procedures, which if not fol-
lowed, could cause damage to the
equipment.
NOTE The notes contain important informa-
tion taken from the text.

vii
TriScroll 300 Dry Scroll Vacuum Pump
WARNING Disconnect power from the
TriScroll 300 before performing any
maintenance procedure.
Allow the pump to cool before perform-
ing any maintenance procedure.
Approximate cool-down time is one to
two hours.
CAUTION Wipe all O-rings clean with a lint-free
cloth before installation to ensure that
no foreign matter is present to impair
the seal.
Do not use alcohol, methanol or other
solvents on O-rings. To do so causes
deterioration and reduces their ability to
hold a vacuum.
If applicable, apply a small amount of
Krytox®GPL 224 grease and wipe the
O-rings “shiny” dry.
NOTE Varian Vacuum Technologies recom-
mends replacing all O-rings during rou-
tine maintenance or during any
maintenance procedure requiring that
O-rings be removed.
Unless otherwise stated, apply
Loctite®242 or Loctite PST®567 to the
first few threads only. Apply just enough
to obtain a seal.
WARNING The TriScroll 300 weighs 26.4 kg
(58 lbs). To avoid injury, use proper lift-
ing techniques when moving the pump.

TriScroll 300 Dry Scroll Vacuum Pump
viii
Related TriScroll Manuals
Manuals related to the installation and operation, tip seal replacement, and major maintenance for the
TriScroll 300 series pumps are listed in the following table:
Maintenance and Tool Kits
Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form. A
description of each kit and ordering information is provided in the following table:
Title Applicable TriScroll Model Part Number
Major Maintenance Manual All TriScroll 300 Series Models 699904260
Tip Seal Replacement Manual All TriScroll 300 Series Models 699904280
Installation and Operation Manual All TriScroll 300 Series Models 699904265
Description Contents Applicable TriScroll
Model
Part Number
Major Maintenance Kit All bearings, bearing seals, bearing
lubricant, O-rings, and tip seals
required to rebuild TriScroll 300
Series pumps.
All TriScroll 300 Series
models
PTSS0300MK
Maintenance Tooling Kit All fixtures and tools required to
perform any maintenance on
TriScroll 300 Series pumps.
All TriScroll 300 Series
models
PTSS0300TK
Replacement Tip Seal Set Replacement tip seals and static
O-rings for TriScroll 300 Series
pumps.
All TriScroll 300 Series
models
PTSS0300TS
NOTE: The Maintenance Tool Kit is also required for tip seal replacement.

ix
TriScroll 300 Dry Scroll Vacuum Pump
Factory Service Options
Varian offers factory-rebuild service or advance exchange of complete TriScroll Pumps or TriScroll
Pump Modules. Contact your nearest Varian Vacuum Technologies sales office for price and availability
information. Select your preferred service option from the table below.
Serial Numbers Notes
This manual applies to TriScroll 300 series with serial numbers beginning with LP, and ascending from
LPB80124. For service on TriScroll series pumps with serial numbers J7000001 to A8000108, contact
your nearest Varian Vacuum Technologies office.
TriScroll 300 series pumps with serial number above LPC80250 have 1/4-18 National Pipe Threads in
the bearing purge, gas ballast, and exhaust ports. Pumps with serial numbers below LPC80250 were
manufactured with 1/4-19 British Standard Pipe Threads. Contact your nearest Varian Vacuum
Technologies office if mating hardware is required.
Contacting Varian Vacuum Technologies
In the United States, you can contact Varian Vacuum Technologies Customer Service at
1-800-8VARIAN. See the back cover of this manual for a listing of our sales and service offices.
Internet users:
❑Send email to Customer Service & Technical Support at [e-mail]
❑Visit our web site at www.varianinc.com/vacuum
❑Order on line at www.evarian.com
Factory Service Options Part Number
Advance Exchange TriScroll 300 Single Phase EXPPTS03001
Advance Exchange TriScroll 300 Three Phase EXPPTS03003
Advance Exchange TriScroll 310 Single Phase EXPPTS03101
Advance Exchange TriScroll 310 Three Phase EXPPTS03103
Advance Exchange TriScroll 300 Pump Module Only EXPTS0300SC
Advance Exchange TriScroll 310 Pump Module Only EXPTS0310SC
Service/Rebuild TriScroll 300 Pump (Single or Three Phase) PTS0300KMA
Service/Rebuild TriScroll 310 Pump (Single or Three Phase) PTS0310KMA
Service/Rebuild TriScroll 300 Pump Module Only PTS0300SCRP
Service/Rebuild TriScroll 310 Pump Module Only PTS0310SCRP

1
TriScroll 300 Dry Scroll Vacuum Pump
DRAFT 6/11/03
General Information
Varian TriScroll 300 series pumps are designed to provide years of trouble-free service if maintenance
procedures and intervals are observed. Bearing grease replenishment and tip seal replacement is
recommended when the pump base pressure has risen to an unacceptably high level for your
application. Bearings, rotary seals and O-rings should also be replaced if the pump exhibits humming
or grinding noises from the bearings. Main bearing life may be shortened if your application requires
the pumping of high quantities of water vapor. Use of the bearing purge will keep this water from
impacting bearing life.
Equipment Required to Install Pump Module
❑Pump Module
Tools Required to Install Pump Module
❑4 MM Hex key
❑5 MM Hex key
❑6 MM Hex key
Included in Maintenance Tool Kit: #PTSS0300TK (page 2)

TriScroll 300 Dry Scroll Vacuum Pump
2
DRAFT 6/11/03
Maintenance Took Kit