Veeco MS40 User manual

Table Of Contents
Section 1: General Information
1.1 Introduction 1-1
1.2 Unpacking & Inspection 1-3
1.3 Installation 1-7
1.4 Features & Specifications 1-8
1.5 General Description 1-11
Section 2: Operating the MS-40
2.1 Introduction 2-1
2.2 Operator Controls & Indicators 2-3
2.3 Starting the MS-40 Leak Detector 2-19
2.4 Leak Testing 2-20
2.5 Operation With an External Pump 2-22
2.6 Shut Down Procedure 2-25
2.7 Setting Test Parameters 2-25
2.8 Setting Additional Parameters 2-31
2.9 Test Aids & Procedures 2-32
Section 3: Theory of Operation
3.1 Introduction 3-1
3.2 Direct Flow & Reverse Flow Modes. 3-4
3.3 Functional Description of Operation 3-6
3.4 Description of Major Components 3-11
Section 4: Service & Maintenance
4.1 Introduction 4-1
4.2 Service Mode 4-1
4.3
VIC Leak Detectio
Calibration & Tuning 4-2
4.4 Periodic Service 4-4
n
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C toc-i

4.5 Contamination of the Vacuum System 4-8
VIC Leak Detectio
n
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
VIC Leak Detectio
n
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
4.6 Venting the Vacuum System 4-11
4.7 Cleaning Requirements 4-12
4.8 Calibration Requirements 4-19
4.9 General Service & Repair 4-21
4.10 Troubleshooting Aids 4-32
Section 5: Parts List
5.1 Introduction 5-1
5.2 Recommended Spare Parts for the MS-40 5-2
5.3 Other Components 5-5
Appendix A:
Glossary of Terms Used in Leak Detection
Appendix B:
A.V.S. Standards for Testing of Mass Spectrometer Leak Detectors
Appendix C:
Leakage Conversion Factors
Appendix D:
Remote Port Specifications
Appendix E:
Profile and Revision Switch Positions
Appendix F:
MS-40 Quick Reference
1109-186-00 Rev. A toc-ii

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
General Information
1.1 Introduction
This Operations & Maintenance Manual describes in detail the
information needed to understand the operation and functions of the
VIC MS-40 Fully Automatic Portable Leak Detector (illustrated in
Figure 1-1), and provides the information needed to service and maintain
the unit in optimal working condition. This manual has been divided into
five chapters:
• Chapter 1 General Information
• Chapter 2 Operating the MS-40
• Chapter 3 Theory of Operation
• Chapter 4 Service & Maintenance
• Chapter 5 Parts Lists
Chapter 1, General Information, describes the features of the MS-40 Leak
Detector, its basic operation, unpacking and inspection of the unit, installation
requirements as well as specifications for the unit.
Chapter 2, Operating the MS-40, details the controls necessary to operate
the MS-40, both during normal operation of the unit as well as when
placed in Service Mode. All external connectors and their
applicability to the unit and its functions are also discussed. This chapter
also includes an explanation of what occurs during the unit’s start-up
procedure, a description of the leak test modes, an explanation of sniff
testing procedures, a step-by-step description of how to perform actual
leak testing, operations involving the optional external pump, an
explanation of what occurs during the unit’s shutdown procedure, the
setting of the unit’s testing parameters, and MS-40 self-testing procedures.
Chapter 3, Theory of Operation, has been included in order to give the
MS-40 user information on how the unit functions. Maintenance
personnel servicing the unit will find this most useful, since a thorough
technical understanding of how the unit operates is critical when
performing the repairs and service discussed in the following chapter.
1109-186-00 Rev. C 1-1

Figure 1-1
VIC Model MS-40 Portable Automatic Leak Detector
1109-186-00 Rev. C 1-2

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
Chapter 4, Service & Maintenance, describes in further detail the unit’s
Service Mode, the necessary tuning/calibration procedures for the MS-40,
required periodic service procedures and recommended service intervals,
detection and correction of contamination within the vacuum system,
procedures for venting the vacuum system, cleaning requirements and
procedures, calibration of measurement components, valve block service and
repair, repair/replacement of the unit’s electronics and a full listing of front
panel error codes, their probable causes and our recommended corrective
actions.
Chapter 5, MS-40 Parts Lists, contains a full list of recommended spare parts
and a complete listing of the spare parts available from VIC.
This manual provides the specific documentation needed to operate and
service the MS-40 Leak Detector. The MS-40 System is a highly technical
system that incorporates many sophisticated technologies. In view of this,
every effort has been made to automate both the unit’s operation and
maintenance procedures. It is imperative, however, that operations and service
personnel familiarize themselves with the operations and maintenance
procedures in this manual in order to maximize the efficiency of the unit, as
well as minimize downtime caused by improper service and repair.
1.2 Unpacking & Inspection
The MS-40 is shipped in a specially constructed package that minimizes the
possibility of damage during transit. The shipping carton and packing
materials should be saved for future use. Note that a Bill of Material is packed
within the carton indicating all of the items shipped with the unit.
Prior to unpacking the unit, inspect the exterior carton for any signs of
damage. After unpacking the unit, inspect the leak detector itself for any
obvious damage. If damage to the unit is found, a claim should be filed
immediately with the shipping carrier and a copy of that claim must also be
forwarded to Vacuum Instrument. Should the MS-40 fail to function as
required, or fail to meet its specifications, contact the Customer Service
Department at VIC (Vacuum Instrument, 2099 Ninth Avenue Ronkonkoma,
NY 11779, 631-737-0900) or your local representative. Please note that
Vacuum Instrument must be contacted prior to the return of any damaged
equipment.
Once the leak detector has been removed from its package, the MS-40 must
be opened and all shipping material removed from the unit’s internal
roughing and turbo-molecular pumps. To access the internal roughing
pump, the front panel must be opened to access the turbo-molecular pump,
1109-186-00 Rev. C 1-3

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
the back panel must be opened. Both panels are hinged at the bottom and
held with a single screw at the top of each panel. To open a panel, loosen
the captive screw at the top of the panel (a 1/4 turn is sufficient to unloosen
the screw) and gently lower the door. Make sure that the surface the unit is
placed on a flat surface (VIC Cart, P/N 0137-705-00, recommended).
Remove all shipping materials and tie-down wraps from the internal
pumps.
The MS-40 is shipped without oil in the internal roughing pump, which must
be filled prior to use. In addition, to protect the pump during shipment, it is
fitted with two blanks that cover its intake and filter connections. Remove
these blanks and attach the flex hosing and filter (refer to Figure 1-2 for a
diagram illustrating the proper installation for the hose and filter connections)
with the provided centering rings and clamps. Also, the unit’s purge tubing
(refer to Figure 1-2) is fitted with a 1/4” ferrule blank. Unscrew the blank and
reattach the tubing as indicated in Figure 1-2.
Parts List for Figure 1-2:
ILLUSTRATION # PART NUMBER DESCRIPTION
1 1660-362-00 110/120v (60Hz)
1660-362-01 220/240v (50 Hz) Pump
2 1621-183-00 Ferrule Nut
3 1750-046-00 Poly-flo Tubing, Purge Line
4 1620-726-00 Elbow / with ferrule nut
5 1621-231-12 KF16 Centering Ring
6 1621-239-02 KF16 Clamp
7 0137-205-00 Manifold, Roughing Pump
8 1680-055-00 Exhaust Filter
KF16 to 1/4 NPT Adapter
9 1620-743-00 3/8 MPT x ¼ Bushing
1109-186-00 Rev. C 1-4

VIC Leak Detectio
n
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
To fill the pump with oil, unscrew the black cap to the right of the exhaust
filter. Using the oil (1990-924-00) and the funnel (1331-191-00) provided
in the installation kit, slowly fill the pump until the level in the sight glass
is approximately 1/4” below the fill line. Replace the black oil fill cap.
When all shipping material has been removed, all pump connections have
been made and the pump has been filled with oil, replace the right side
panel and close the front and rear doors.
NOTE:
The MS-40 Leak Detector is factory tested and calibrated
prior to shipment and once installed, is ready for use.
An Installation Kit (VIC P/N 0137-800-00) is included with the unit when it
is shipped. The kit contains:
Part Number Description
1680-055-00 Exhaust Filter
0103-141-01 Filament Kit (box of 5)
1331-191-00 Funnel
1330-391-00 7/64 Allen Wrench
1990-924-00 VMP-19 Oil (1 liter)
0137-807-00 Kit, Cart Mounting
0137-804-00 N2 Kit
1621-224-02 Adapter, KF16 to 1/4” NPT
1621-227-05 QC Adapter, KF25 to 1 1/8”
0126-284-00 Blank Plug, 1/18
1620-731-00 Elbow, 1/4 NPT to 3/8 Tube
1750-054-00 Tubing, Tygon, 1/4”
1109-186-00 Rev. C 1-5

6
3 4 2
5
7
1
9
8
FIGURE 1 - 2
INTERNAL ROTARY VANE MECHANICAL PUMP
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VIC Leak Detectio
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2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1.3 Installation
The MS-40 has been designed as a completely self-contained portable leak
detector and therefore has the capability to work in a wide range of
environments. However, before installation in a work area, certain
requirements must be met.
• A properly grounded electrical supply (115V/60Hz/10A,
230-240V/50Hz/5A, 100V/50Hz/10A, or 100V/60Hz/10A as
labeled on rear of unit) must be available for the unit.
• A user supplied helium supply is usually necessary for the unit
(but not for all testing, e.g., sealed parts should already be pre-
bombed with helium). The MS-40 can use either a Mass 3 or
Mass 4 helium supply. Virtually any standard purity helium
may be used during leak testing. Depending on the type of leak
testing that will be performed, a spray probe (for vacuum
testing), a sniffer assembly (for sniff testing) or a test cup (for
pressure bombing testing) will be necessary. All of these items
are available directly from Vacuum Instrument.
• The recommended ambient temperature range for the unit is
from 10°C to 40°C. Also, excessively humid environments
should be avoided.
• Depending upon the immediate environment, an external
exhaust facility may be necessary. A bulkhead is installed on
the rear of the MS-40 that is intended for user-provided 3/8”
polyflow tubing. Note that the bulkhead is not connected to the
internal exhaust filter of the unit but must be connected by the
User. The tubing is then attached to a functional exhaust system.
WARNING!
Only qualified service personnel should operate the unit when either
the front or rear panels are open. Potentially lethal high voltages are
continually applied to the circuit boards and other areas within the
unit during its operation. Although these areas are shielded and well
marked, failure to follow this precaution may possibly lead to severe
injury or death.
1109-186-00 Rev. C 1-7

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1.4 Features & Specifications
FEATURES
Sensitivity: 4 x 10-11 std cc/sec air equivalent
Leak Rate Range: 10 to 4 x 10-11 std cc/sec air equivalent
(with optional external pump)
10 x 10-4 to 4 x 10-11 std cc/sec air equivalent
(without external pump)
Start-Up: Fully functional in less than 3 minutes. Consists of:
Turbo-molecular pump acceleration, a complete set
of self-diagnostics, turning on filament, checking
and assuring Hi-Vac status, measuring system
offsets and measuring background helium
Internal Calibrator: Helium 4, 1 x 10-8 to 3 x 10-8 std cc/sec air
equivalent with integral solenoid valve
Testable Masses: Helium Mass 3 or 4
Tuning: Automatic
Calibration: Automatic for Helium 4 using an internal calibrator
of 1 x 10-8 to 3 x 10-8 std cc/sec air equivalent
Auto Zero: Automatic zeroing of leak rate while in test mode
initiated by pressing the ZERO pushbutton
Background Continuous automatic compensation for system back
Compensation: ground
Remote Control Molded A.B.S. plastic laminate over tactile
Unit: membrane switch array Controls similar to User
Panel
RS-232C Port: Two standard bi-directional ports. One port
dedicated to the remote control unit. The second
port is dedicated to data transfer to an external
computer or control module.
1109-186-00 Rev. C 1-8

Vacuum Instrument Corp.
Vacuum Instrument Corp.
2099 Ninth Avenue
2099 Ninth Avenue
Ronkonkoma, NY 11779
Ronkonkoma, NY 11779
631.737.0900
631.737.0900
Ranging: Without an external roughing pump, begins at the
[Automatic/Standard least sensitive gross range (10-4). The unit ranges
Mode] downward until a leak is detected or until it reaches
its most sensitive range (10-10). With the optional
external pump, if a gross leak is detected, the unit
ranges up to the appropriate decade. If a gross leak
is not detected the unit ranges downward until a leak
is detected or until it reaches its most sensitive
range.
Ranging: May operate at any range, selectable by the operator.
[Manual Mode] The 100to 10-3 range is only available when the
optional external pump has been installed.
Measurement Units: Pressure: millitorr or millibar (selectable with a
switch located underneath the Service Panel accessible
when the unit’s front panel has been opened)
Leak Rate: std cc/sec (standard cubic centimeters/
second) or mbar l/sec (millibar liters/second)
PUMPS
Mechanical Pump: Internal 1.5 CFM dual stage rotary vane pump
Turbo Pump: 60 liter/second turbo-molecular pump
External Pump: Optional 7 or 16 CFM dual stage rotary vane
(Mechanical pump)
PERFORMANCE SPECIFICATIONS
Sensitivity: 4 x 10-11 Std cc/sec air equivalent (direct mode)
4 x 10-10 Std cc/sec air equivalent (reverse mode)
Resolution: 14 at Mass 4
Response Time: Reverse Mode < 3 seconds
Fine Mode < 2 seconds
Test Time: <2.5 seconds on a blank port to a pre-selected range
in the reverse flow test mode
1109-186-00 Rev. C 1-9

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
Noise & Drift: <4% on 10-10 range
Testable Masses: 3 and 4
Maximum 10 x 10-4 std cc/sec air equivalent (without external
Measurable Leak: pump) 10 std cc/sec air equivalent (with optional
external pump)
Maximum Inlet Gross Mode: Atm (with optional external pump)
Pressure: Reverse Mode: 7.5 Torr
Direct Mode: 100 mTorr
Test Mode Leak Gross: 10 to 1 x 10-3 std cc/sec helium
Reverse: 10 x 10-4 to 6 x 10-10
Direct: 10 x 10-5 to 6 x 10-11
ELECTRONICS & USER INTERFACE
System Controller: Microprocessor based; four integrated boards used:
Acontrols the unit’s computer, logic and sensors
B controls the unit’s mass spectrometer voltage supplies
C controls the unit’s displays and controls
D controls the unit’s handheld remote
Display: Green LED alphanumeric and bar graph
displays
Data Input: Through dedicated function keys
MISCELLANEOUS
Power Requirements: 115V, 60Hz, 10 Amp
230-240V, 50Hz, 5 Amp
100V, 50Hz, 10 Amp
100V, 60Hz, 10 Amp
Dimensions: 15.5”H x 20.5”W x 14.25”D
Weight: 84.5 lbs.
1109-186-00 Rev. C 1-10

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1.5 General Description
The MS-40 is a fully automatic, dual mode, turbo-molecular pumped
portable leak detector. Each of its two modes (Reverse Flow or Direct
Flow) is automatically selected by the leak detector based on the currently
selected leak rate range.
Reverse Flow Mode permits rapid testing for leaks in test objects that are
characterized by a high degree of out-gassing. Testing can start at test port
pressures of Atm for leaks from 10 to 1 x 10-3 std cc/sec (Gross Mode
testing) when using the optional external pump or pressures of 7.5 Torr
for leaks between 10 x 10-4 and 6 x 10-10 std cc/sec (Intermediate Mode
testing) for units not equipped with an external pump.
Direct Flow Mode is most useful for testing objects that demand clean
testing and higher sensitivity. In this mode, the leak detector measures
leaks from 10 x 10-9 to 6 x 10-11 std cc/sec, at a test port pressure of 100
millitorr or less. However, this mode is also capable of determining
larger leaks. Once the unit is in this mode and a larger leak has been
detected, the unit will range back to the appropriate decade.
The MS-40 uses two types of automatic testing: an automatic test mode
with automatic ranging and an automatic test mode with manual ranging.
In automatic ranging mode, the leak detector automatically ranges
downward (to more sensitive leak rate ranges) until a leak is found. When
using manual ranging, the operator of the leak detector controls the range
in which a particular test object is tested.
In the Automatic Test Mode, when using Automatic Ranging, all the
functions of the leak detector, including the evacuation (pump down) of
the test object and the functions of all pumps and valves are controlled by
the MS-40 computer. Additionally, all measurements and display
information about the leak rate and system performance are under the
control of the computer.
The Automatic Test Mode, when using Manual Ranging, is identical to
the Automatic Testing/Automatic Ranging mode except that the User
pre-selects the range (e.g., 10-5 std cc/sec) for testing. If a measured leak is
either above or below the pre-selected decade, the leak detector operator
can manually range the unit either up or down. The remainder of the
testing procedure is handled by the MS-40 computer in exactly the same
manner as with the Automatic Ranging Mode.
1109-186-00 Rev. C 1-11

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1.5.1 Standard Operation
This is the normal operating mode for the MS-40. During operation, the User
need only use the right (uncovered) portion of the display panel (the User
Panel is illustrated in Figure 2-1). All functions to be accessed and display
information needed to leak test an object are found on this panel. The panel
displays bar graphs indicating test port pressure and leak rate values.
Additionally, the panel indicates the current leak range mode, an accept/reject
indicator that indicates if the leak being tested is above or below the test set
point, and whether the unit is in test or standby mode. The user panel also has
toggles for automatic or manual ranging (including greater/lesser
pushbuttons), audio volume pushbuttons, an auto- zero pushbutton, a sniff
mode indicator and START and VENT pushbuttons (START is used to
commence the testing cycle as well as to interrupt the testing cycle without the
chance of accidentally venting the system, while VENT is used to interrupt
testing and/or to vent the test port).
1.5.2 Service Mode
WARNING!
The Service Mode of the MS-40 is intended for use by
qualified Vacuum Instrument personnel or Users specifically
trained by Vacuum Instrument. Under no circumstances
should any individual be assigned access to this mode
without a complete knowledge of vacuum systems as well as
the MS-40 System. Use by an unqualified operator may
result in damage to the unit and/or personal injury.
Service Mode is initiated by first opening the rear panel of the unit (loosen the
1/4-turn screw at the top of the panel, then gently lower the door), and then
pressing the black toggle button at the top right hand side of the circuit board
that is attached to the panel. Once the toggle has been pressed, the unit is
placed in Service Mode and the Service Mode indicator is illuminated.
Service Mode disables the automatic valve controls and allows the User to
manually control all of the valves within the vacuum system. The valves are
controlled by a cluster of labeled momentary switches located on the left of
the User Panel. The LED indicator on each switch is lit when the valve is
open. Included within the vacuum system are: the auto-calibrator valve,
external rough valve, fine (direct) valve, fore-line (reverse) valve, gross testing
valve, purge valve, roughing valve, sniffer valve and the vent valve.
1109-186-00 Rev. C 1-12

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
Grouped to the right of the Service Mode Indicator are a series of LED
indicators. The Service Mode allows the setting of the unit’s Amplifier
Gain, Anode Voltage, Calibration Temperature and Internal Calibration
Value in conjunction with the arrow buttons and LED alphanumeric
display to the right of the indicators. Additionally, the user may view the
unit’s calibration temperature, the emission current of the filament within
the unit’s spectrometer, the error code present (indicating a possible fault
within the unit), the current supplied to the filament in the
mass spectrometer, the calibration standard (e.g., 2 x 10-8 std cc/sec @
24°C) of the internal calibrator, the leak rate of the test object (a numeric
value - the same leak rate as displayed by the bar graph on the User
Panel), the pressure measured at the test port and the total number of
hours the unit has been in operation.
Below the indicators and to the right of the valve controls are two sets of
momentary switches. In either Standard or Service Modes, they allow the
User to turn on/off the filament within the mass spectrometer, choose
between two different filaments within the spectrometer, and perform an
actual test on the calibrator or optimize the mass spectrometer. When
strictly in Service Mode, the User is also able to choose between either a
helium or air standard for leak rate measurement or choose whether the
MS-40 will measure either with Mass 3 or 4 helium.
1109-186-00 Rev. C 1-13

Operating The MS-40
2.1 Introduction
This chapter contains the information needed by the user to operate the
MS-40 Leak Detector and perform leak checks on a test object. This
chapter is grouped into three general sections:
1Operator Controls & Indicators
2Starting & Operating the Leak Detector
3Testing Aids & Procedures
While this chapter contains sufficient information to operate the MS-40
leak detector, we suggest that you read Chapter 3, Theory of
Operation, prior to any actual testing. An overall understanding of
the various phases of a test cycle will help the operator use the leak
detector more effectively and efficiently.
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C 2-1

FIGURE 2 – 1
MS-40 USER PANEL
1109-186-00 Rev. C 2-2

VIC Leak Detectio
n
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
2.2 Operator Controls & Indicators
The following Controls & Indicators are located on the User Panel at
the top right front of the unit. Items are listed from left to right, top to
bottom (see Figure 2-1 for an illustration of the User Panel).
LEAK RATE BAR GRAPH
An LED bar graph indicating the mantissa of the measured
leak rate of the test object. For a full leak rate reading, this
meter is used in conjunction with the Numeric Display. The
bar graph display is in standard cubic centimeters per second
or in millibar liters per second.
NUMERIC DISPLAY
A two-digit alphanumeric display with two separate functions.
During testing, the display will normally indicate the exponent
of the current leak rate. For example, if the leak rate is 3 x 10-7
std cc/sec, the Leak Rate Bar Graph will indicate 3while the
Numeric Display will indicate the number 7. The second
function of the display has been programmed to provide error
codes when a system fault has occurred (see Section 4.10 for a
list of error codes, their description and corrective action).
The display will indicate code EE while at the same time on
the Service Panel the Error Code indicator will be lit and the
Service Panel alphanumeric display will indicate the error
code.
TEST PORT
A bar graph that displays the pressure at the test port. Scaled
for either millitorr or millibar. The test port pressure is also
displayed in digital format on the Service Panel Alphanumeric
Display.
ACCEPT
During leak testing, this indicator will illuminate when the leak
measured is less than the programmed reject rate (or
maximum acceptable leak rate) and the unit is also in or below
the range of the reject value. The reject rate is set by the
user from the Service Panel (see Section 2.7).
1109-186-00 Rev. C 2-3