Zeiss BSD4 User manual

BSD4 Detector
Pneumatically driven detector for
field emission scanning electron microscopes
Instruction Manual

Instruction Manual BSD4 Detector
Optional detector for eld emission scanning electron microscopes
Original instructions
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena, Germany
[email protected]
www.zeiss.com/microscopy
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Straße 22
73447 Oberkochen, Germany
© Oberkochen 2013 by Carl Zeiss Microscopy GmbH - all rights reserved
Document name: Instruction Manual BSD4 Detector
Revision: en01
Effective from: December 2013
349506-8020-000
This document or any part of it must not be translated, reproduced or transmitted in any form or by any means, electronic or
mechanical, including photocopying, recording, or by any information or retrieval system. Violations will be prosecuted.
The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the
absence of a specic statement, that such names are exempt from the relevant protective laws and regulations and therefore
free for general use.
Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent
upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured
to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-
up copy for safety purposes. Due to an ongoing process of improvement Carl Zeiss Microscopy reserves the right to make
modications of this document without notice.

`çåíÉåíë
fåëíêìÅíáçå=j~åì~ä=_paQ=ÉåMN fff
Table of contents
1. About this manual ........................................................................................ 5
2. Safety summary ........................................................................................... 7
2.1. Intended use ..................................................................................................... 7
2.2. Prevention of accidents and of improper use ............................................... 8
2.3. Safety summary ............................................................................................... 9
2.3.1. Hazards related to personal injury ........................................................................... 9
2.3.2. Hazards not related to personal injury ................................................................... 10
2.3.3. STOP button .......................................................................................................... 11
3. Description ................................................................................................. 12
3.1. Overview ......................................................................................................... 12
3.1.1. Detector head ...................................................................................................... 13
3.2. Principle of operation .................................................................................... 14
3.2.1. BSD modes ........................................................................................................... 15
3.3. Technical data ................................................................................................ 17
3.3.1. Product identification ............................................................................................. 17
3.3.2. Specification .......................................................................................................... 17
3.4. System requirements ..................................................................................... 17
3.5. Customer service ........................................................................................... 18
4. Installation .................................................................................................. 18
5. Operation .................................................................................................... 19
5.1. Preparing the work with the BSD4 detector ................................................ 19
5.2. Obtaining an image ........................................................................................ 24
5.2.1. Inserting the BSD4 detector .................................................................................. 24
5.2.2. Selecting a BSD mode .......................................................................................... 25
5.2.3. Optimising the image ............................................................................................. 27
5.2.3.1. Automatically setting the gain range ............................................................................. 27
5.2.3.2. Manually setting the gain range .................................................................................... 28
5.2.3.3. Saving and recalling segment settings.......................................................................... 29
5.3. Stopping the BSD4 detector in an emergency ............................................ 31
5.3.1. Stopping the moving detector ................................................................................ 31
5.4. Saving and recalling stage coordinates (licence: STAGECO) ................... 32
5.4.1. Saving and editing stage coordinates ................................................................... 32
5.4.2. Recalling stage coordinates .................................................................................. 33
5.5. Using the Quad mode .................................................................................... 34
5.6. Finishing the work with the BSD4 detector ................................................. 35

fs fåëíêìÅíáçå=j~åì~ä=_paQ=ÉåMN
`çåíÉåíë
6. Maintenance and repair .............................................................................38
6.1. Resetting touch alarm ....................................................................................38
6.2. Lubricating the rod .........................................................................................39
6.3. Troubleshooting .............................................................................................40
7. De-installation and disposal ......................................................................40
8. Abbreviations ..............................................................................................41
9. Directives and standards ...........................................................................41
10. Index ..........................................................................................................43

fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =R=çÑ=QQ
NK=^Äçìí=íÜáë=ã~åì~ä
1. About this manual
This instruction manual is considered to be part of the BSD4 detector.
Read the instructions carefully. Keep the instruction manual nearby the BSD4 detector and hand
it over to future owners of the FESEM.
This instruction manual is designed for users who have been trained by an authorised ZEISS ex-
pert to operate the FESEM, the BSD4 detector is built in.
Operators of the detector must not deviate from the instructions provided in this document.
Reference to
related docu-
ments
For detailed information regarding the operating software refer to the Software Manual
SmartSEM®.
Safety
instructions The safety instructions in this manual are classified as follows:
CAUTION
This symbol and signal word draws your attention to a potentially hazardous
situation.
Disregarding this warning MAY result in minor or moderate injury.
CAUTION
This signal word used without a safety symbol indicates a potentially hazardous
situation.
Disregarding this warning MAY result in property damage.
Moreover you will find the following type of information:
IMPORTANT
This symbol and signal word draws your attention to important and useful information.

S=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN
NK=^Äçìí=íÜáë=ã~åì~ä
Typographical
conventions For the description of software, the following typographical conventions are used:
Definition
of terms The following terms are used in this instruction manual:
Typography Meaning
Press <ENTER>. Press the ENTER key on the keyboard.
Type <key1, key2>. Type key 1 first, then type key 2 on the keyboard.
Type <Ctrl + Alt + Del>. Simultaneously type CTRL key, ALT key and DEL
key on the keyboard.
Click on the High voltage icon.
Select Aperture size from the drop-down list. Icons, buttons, menus and panels are printed in bold.
Select Aperture size 30 µm.
Set FIB Fil V Target to zero.Values to be selected are printed in italics.
Text Meaning
Click.... Press the left mouse button.
Double-click... Double-click on the left mouse button.
SmartSEM®Operating software for ZEISS field emission scanning electron micro-
scopes.
ZEISS representative Specially trained service expert, either ZEISS staff or authorised serv-
ice partner of ZEISS.
BSD4 detector Pneumatically driven detector used to detect backscattered electrons.

fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =T=çÑ=QQ
OK=p~ÑÉíó=ëìãã~êó
2. Safety summary
2.1. Intended use
The BSD4 detector is an option to ZEISS FESEM models of the following series:
•MERLIN®
•MERLIN®Compact
•MERLIN®VP Compact
•Crossbeam 340/540
•Crossbeam 360/560
The BSD4 detector is used to detect backscattered electrons.
TheBSD4detectorissuitabletoproducehigh qualitymaterial contrast (COMPO) andtopographic
contrast (TOPO) images.
Using the BSD4 detector for any other purpose maybe dangerous and is not allowed.

U=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN
OK=p~ÑÉíó=ëìãã~êó
2.2. Prevention of accidents and of improper use
CAUTION
Risk of injury due to improper operation of the FESEM.
Read the user documentation carefully.
Do not operate the FESEM until you have completely read and understood this instruction
manual and the entire user documentation delivered with the FESEM. You will find the user
documentation in the FESEM document folder.
CAUTION
Risk of property damage due to improper operation of the FESEM.
Read the user documentation carefully.
Do not operate the FESEM until you have completely read and understood this instruction
manual and the entire user documentation delivered with the FESEM. You will find the user
documentation in the FESEM document folder.
CAUTION
Risk of property damage due to improper maintenance, service, or repair.
The warranty might be voided.
Follow the instructions given in this instruction manual.
IMPORTANT
All pursuing tasks of maintenance, service, and repair not described in this instruction
manual have to be performed by authorised ZEISS representative only.

fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =V=çÑ=QQ
OK=p~ÑÉíó=ëìãã~êó
2.3. Safety summary
2.3.1. Hazards related to personal injury
CAUTION
Risk of bruising.
The BSD4 detector is driven pneumatically.
Do not put your hand in the travel while the BSD4 detector is being inserted.
CAUTION
TEM oil 300 may be irritating to skin and eyes.
Avoid contact with skin. Wear suitable gloves.
In case of contact with the eyes, rinse immediately with plenty of water and seek medical
advice.
After contact with the skin, wash immediately with plenty of water and soap.
CAUTION
Isopropanol is highly flammable and irritating to the eyes.
Vapours may cause drowsiness and dizziness.
Keep away from sources of ignition. No smoking.
In case of contact with the eyes, rinse immediately with plenty of water and seek medical
advice.
Avoid contact with skin. Wear suitable gloves.
Do not breath vapour.

NM=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN
OK=p~ÑÉíó=ëìãã~êó
2.3.2. Hazards not related to personal injury
CAUTION
Risk of damaging the BSD4 detector when moving the stage.
Macros may influence the movement of the stage.
Do not start user-defined macros which impede the safe stage movement.
CAUTION
Risk of damaging the BSD4 detector.
The Z-axis of the stage moves with delay.
Before recalling a stage position, ensure that you haven’t changed the Z-position of the
stage in between.
CAUTION
Risk of damaging the BSD4 detector when moving the specimen stage.
Retract the BSD4 detector when you have finished imaging.
CAUTION
Risk of contaminating the vacuum system when using unsuitale lubricants.
Only use TEM oil 300 for lubricating the rod.

fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =NN=çÑ=QQ
OK=p~ÑÉíó=ëìãã~êó
2.3.3. STOP button
In order to avoid property damage, the BSD4 detector
can be stopped at any position during movement.
Therefore, a BSD Stop button is integrated in the
BSD Control panel.

NO=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN
PK=aÉëÅêáéíáçå
3. Description
3.1. Overview
Fig. 1.1: Components of the BSD4 detector
1 Adjustment knob for X-axis 4 Rod
2 Adjustment knob for Z-axis 5 Electronic box
3 Adjustment knob for Y-axis
3
5
12 4

fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =NP=çÑ=QQ
PK=aÉëÅêáéíáçå
3.1.1. Detector head
Fig. 1.2: Views of the detector head
1 Detector head
2 Bottom view on diodes (5 segments)
2
1

NQ=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN
PK=aÉëÅêáéíáçå
3.2. Principle of operation
Fig. 1.3: BSD4 detector diagram
•The primary electron beam travels through the objective lens and hits the
specimen (1).
•BSEs (2) are released from the specimen
•BSEs are detected by the diodes (five segments, 3) and generate an electrical
signal
The operation of the BSD4 detector is controlled via the BSD Control panel.
The BSD4 detector is inserted and retracted pneumatically.
1 Specimen 3 Top view on diodes (5 segments)
2 BSE trajectories
1
2
3

fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =NR=çÑ=QQ
PK=aÉëÅêáéíáçå
3.2.1. BSD modes
The BSD4 detector offers two main operation (BSD) modes:
•Composition (BSD:COMPO):
Electrons from heavy elements (high atomic number) are backscattered more strongly than
light elements (low atomic number). Therefore, they appear brighter in the image.
Thus, backscattered electrons can be used to detect contrast between areas with different
chemical compositions.
Fig. 1.4: Material contrast
•Surface topography (BSD:TOPO):
Highlights changes of the specimen surface angle. Topographic contrast arises because the
number and trajectories of backscattered electrons and the number of secondary electrons
depend on the angle of incidence between the beam and the specimen surface.
Fig. 1.5: Topographic contrast

NS=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN
PK=aÉëÅêáéíáçå
BSD modes The BSD modes can be selected in the Smart-
SEM®user interface.
The BSD Control panel summarises the
functions:
•BSD: COMPO
selects composition imaging (the four seg-
ments arranged in a circle are used in normal
mode).
•BSD:TOPO
selectssurfacetopography (the four segments
arranged in a circle are used, two in normal
mode and two in inverted mode)
•BSD:Set TOPO
saves the current segment configuration as a
new TOPO mode
At the top, the diode polarity is displayed.
The diodes can have the following status:
•Normal (+): The signal is added to the
total signal.
•Inverted (-): The signal is inverted before
being added to the total signal.
•Off ( ): No signal is being added to the
total signal.

fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =NT=çÑ=QQ
PK=aÉëÅêáéíáçå
3.3. Technical data
3.3.1. Product identification
3.3.2. Specification
3.4. System requirements
Requirements to run the BSD4 detector:
•SmartSEM®version 5.07 or higher
Workstation BSD4 detector Part no.
MERLIN®
MERLIN®Compact
MERLIN®VP Compact
Crossbeam 340/540
BSD4 detector 349506-9016-000
Crossbeam 360/560 BSD4 detector (long version) 349506-9016-010
Feature Specification
Travel 4inch chamber: 200 mm
6inch chamber: 270mm
Travel speed 30-60 mm/s
Repeatability X-axis: ± 5 µm
Y-axis: ± 5 µm
Z-axis: ± 25 µm
Fine adjustment 4inch chamber:
X-axis: 4 mm
Y-axis: 9 mm
Z-axis: 13 mm
6inch chamber:
X-axis: ± 4 mm
Y-axis: ± 11 mm
Z-axis: ± 16 mm

NU=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN
QK=fåëí~ää~íáçå
3.5. Customer service
For customer service please contact your local ZEISS representative.
A list of ZEISS locations and authorised service partners can be found at:
http://www.zeiss.com/microscopy
In case of questions regarding radiation protection please contact the ZEISS Radiation Safety Of-
ficer
Dr. Wolfgang Sold, Carl Zeiss AG, 73447 Oberkochen, Germany
phone: [phone]
e-mail: [email protected]
IMPORTANT
To maintain best possible performance of the FESEM it is essential to perform preventive
maintenance on a regular base.
Moreover, it is recommended that you conclude a service contract with your local ZEISS
service organisation or representative.
This will ensure a continuous trouble-free operation of the FESEM.
4. Installation
The BSD4 detector is either factory-installed or retrofitted by authorised ZEISS representative.

fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN =NV=çÑ=QQ
RK=léÉê~íáçå
5. Operation
CAUTION
Risk of damaging the BSD4 detector when moving the stage.
Macros may influence the movement of the stage.
Do not start user-defined macros which impede the safe stage movement.
5.1. Preparing the work with the BSD4 detector
Before working with the BSD4 detector, the detector has to be adjusted.
1 Go to the Detectors tab in the SEM Control
panel.
2 Select InLens or SE2 from the drop-down
menu.
SmartSEM®switches to the selected detector.
3 Select the lowest magnification.
4 Select Detection/BSD Control....

OM=çÑ=QQ fåëíêìÅíáçå=j~åì~ä=_paQ=ÇÉíÉÅíçê=ÉåMN
RK=léÉê~íáçå
The BSD Control panel opens.
CAUTION
Risk of bruising.
The BSD4 detector is driven pneumatically.
Do not put your hand in the travel while the BSD4 detector is being inserted.‘
5 Click on BSD in.
The stage lowers to leave enough free space for the BSD4 detector. The BSD4 detector moves in.
IMPORTANT
Imaging results are best, when the BSD4 detector is centered.The BSD4 detector should
not be visible in the InLens/SE2 image.