Zeiss BSD4 User manual
BSD4 Detector
Pneumatically driven detector for
field emission scanning electron microscopes
Instruction Manual
Instruction Manual BSD4 Detector
Optional detector for eld emission scanning electron microscopes
Original instructions
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena, Germany
www.zeiss.com/microscopy
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Straße 22
73447 Oberkochen, Germany
© Oberkochen 2013 by Carl Zeiss Microscopy GmbH - all rights reserved
Document name: Instruction Manual BSD4 Detector
Revision: en01
Effective from: December 2013
349506-8020-000
This document or any part of it must not be translated, reproduced or transmitted in any form or by any means, electronic or
mechanical, including photocopying, recording, or by any information or retrieval system. Violations will be prosecuted.
The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the
absence of a specic statement, that such names are exempt from the relevant protective laws and regulations and therefore
free for general use.
Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent
upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured
to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-
up copy for safety purposes. Due to an ongoing process of improvement Carl Zeiss Microscopy reserves the right to make
modications of this document without notice.
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Table of contents
1. About this manual ........................................................................................ 5
2. Safety summary ........................................................................................... 7
2.1. Intended use ..................................................................................................... 7
2.2. Prevention of accidents and of improper use ............................................... 8
2.3. Safety summary ............................................................................................... 9
2.3.1. Hazards related to personal injury ........................................................................... 9
2.3.2. Hazards not related to personal injury ................................................................... 10
2.3.3. STOP button .......................................................................................................... 11
3. Description ................................................................................................. 12
3.1. Overview ......................................................................................................... 12
3.1.1. Detector head ...................................................................................................... 13
3.2. Principle of operation .................................................................................... 14
3.2.1. BSD modes ........................................................................................................... 15
3.3. Technical data ................................................................................................ 17
3.3.1. Product identification ............................................................................................. 17
3.3.2. Specification .......................................................................................................... 17
3.4. System requirements ..................................................................................... 17
3.5. Customer service ........................................................................................... 18
4. Installation .................................................................................................. 18
5. Operation .................................................................................................... 19
5.1. Preparing the work with the BSD4 detector ................................................ 19
5.2. Obtaining an image ........................................................................................ 24
5.2.1. Inserting the BSD4 detector .................................................................................. 24
5.2.2. Selecting a BSD mode .......................................................................................... 25
5.2.3. Optimising the image ............................................................................................. 27
5.2.3.1. Automatically setting the gain range ............................................................................. 27
5.2.3.2. Manually setting the gain range .................................................................................... 28
5.2.3.3. Saving and recalling segment settings.......................................................................... 29
5.3. Stopping the BSD4 detector in an emergency ............................................ 31
5.3.1. Stopping the moving detector ................................................................................ 31
5.4. Saving and recalling stage coordinates (licence: STAGECO) ................... 32
5.4.1. Saving and editing stage coordinates ................................................................... 32
5.4.2. Recalling stage coordinates .................................................................................. 33
5.5. Using the Quad mode .................................................................................... 34
5.6. Finishing the work with the BSD4 detector ................................................. 35
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6. Maintenance and repair .............................................................................38
6.1. Resetting touch alarm ....................................................................................38
6.2. Lubricating the rod .........................................................................................39
6.3. Troubleshooting .............................................................................................40
7. De-installation and disposal ......................................................................40
8. Abbreviations ..............................................................................................41
9. Directives and standards ...........................................................................41
10. Index ..........................................................................................................43
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1. About this manual
This instruction manual is considered to be part of the BSD4 detector.
Read the instructions carefully. Keep the instruction manual nearby the BSD4 detector and hand
it over to future owners of the FESEM.
This instruction manual is designed for users who have been trained by an authorised ZEISS ex-
pert to operate the FESEM, the BSD4 detector is built in.
Operators of the detector must not deviate from the instructions provided in this document.
Reference to
related docu-
ments
For detailed information regarding the operating software refer to the Software Manual
SmartSEM®.
Safety
instructions The safety instructions in this manual are classified as follows:
CAUTION
This symbol and signal word draws your attention to a potentially hazardous
situation.
Disregarding this warning MAY result in minor or moderate injury.
CAUTION
This signal word used without a safety symbol indicates a potentially hazardous
situation.
Disregarding this warning MAY result in property damage.
Moreover you will find the following type of information:
IMPORTANT
This symbol and signal word draws your attention to important and useful information.
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Typographical
conventions For the description of software, the following typographical conventions are used:
Definition
of terms The following terms are used in this instruction manual:
Typography Meaning
Press <ENTER>. Press the ENTER key on the keyboard.
Type <key1, key2>. Type key 1 first, then type key 2 on the keyboard.
Type <Ctrl + Alt + Del>. Simultaneously type CTRL key, ALT key and DEL
key on the keyboard.
Click on the High voltage icon.
Select Aperture size from the drop-down list. Icons, buttons, menus and panels are printed in
bold.
Select Aperture size 30 µm.
Set FIB Fil V Target to zero.Values to be selected are printed in italics.
Text Meaning
Click.... Press the left mouse button.
Double-click... Double-click on the left mouse button.
SmartSEM®Operating software for ZEISS field emission scanning electron micro-
scopes.
ZEISS representative Specially trained service expert, either ZEISS staff or authorised serv-
ice partner of ZEISS.
BSD4 detector Pneumatically driven detector used to detect backscattered electrons.
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2. Safety summary
2.1. Intended use
The BSD4 detector is an option to ZEISS FESEM models of the following series:
•MERLIN®
•MERLIN®Compact
•MERLIN®VP Compact
•Crossbeam 340/540
•Crossbeam 360/560
The BSD4 detector is used to detect backscattered electrons.
TheBSD4detectorissuitabletoproducehigh qualitymaterial contrast (COMPO) andtopographic
contrast (TOPO) images.
Using the BSD4 detector for any other purpose maybe dangerous and is not allowed.
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2.2. Prevention of accidents and of improper use
CAUTION
Risk of injury due to improper operation of the FESEM.
Read the user documentation carefully.
Do not operate the FESEM until you have completely read and understood this instruction
manual and the entire user documentation delivered with the FESEM. You will find the user
documentation in the FESEM document folder.
CAUTION
Risk of property damage due to improper operation of the FESEM.
Read the user documentation carefully.
Do not operate the FESEM until you have completely read and understood this instruction
manual and the entire user documentation delivered with the FESEM. You will find the user
documentation in the FESEM document folder.
CAUTION
Risk of property damage due to improper maintenance, service, or repair.
The warranty might be voided.
Follow the instructions given in this instruction manual.
IMPORTANT
All pursuing tasks of maintenance, service, and repair not described in this instruction
manual have to be performed by authorised ZEISS representative only.
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2.3. Safety summary
2.3.1. Hazards related to personal injury
CAUTION
Risk of bruising.
The BSD4 detector is driven pneumatically.
Do not put your hand in the travel while the BSD4 detector is being inserted.
CAUTION
TEM oil 300 may be irritating to skin and eyes.
Avoid contact with skin. Wear suitable gloves.
In case of contact with the eyes, rinse immediately with plenty of water and seek medical
advice.
After contact with the skin, wash immediately with plenty of water and soap.
CAUTION
Isopropanol is highly flammable and irritating to the eyes.
Vapours may cause drowsiness and dizziness.
Keep away from sources of ignition. No smoking.
In case of contact with the eyes, rinse immediately with plenty of water and seek medical
advice.
Avoid contact with skin. Wear suitable gloves.
Do not breath vapour.
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2.3.2. Hazards not related to personal injury
CAUTION
Risk of damaging the BSD4 detector when moving the stage.
Macros may influence the movement of the stage.
Do not start user-defined macros which impede the safe stage movement.
CAUTION
Risk of damaging the BSD4 detector.
The Z-axis of the stage moves with delay.
Before recalling a stage position, ensure that you haven’t changed the Z-position of the
stage in between.
CAUTION
Risk of damaging the BSD4 detector when moving the specimen stage.
Retract the BSD4 detector when you have finished imaging.
CAUTION
Risk of contaminating the vacuum system when using unsuitale lubricants.
Only use TEM oil 300 for lubricating the rod.
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