Zeiss 4QBSD User manual

Instruction Manual
Carl Zeiss Microscopy - Electron and Ion Beam Microscopy
4QBSD
Pneumatically driven detector for
field emission scanning electron microscopes

Instruction Manual 4QBSD
Pneumatically driven detector for eld emission scanning electron microscopes
Original instructions
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Promenade 10
07745 Jena, Germany
[email protected]
www.zeiss.com/microscopy
Carl Zeiss Microscopy GmbH
Carl-Zeiss-Straße 22
73447 Oberkochen, Germany
© by Carl Zeiss Microscopy GmbH
Document name: Instruction Manual 4QBSD
Revision: en03
Effective from: January 2014
346000-8067-000
This document or any part of it must not be translated, reproduced or transmitted in any form or by any means, electronic or
mechanical, including photocopying, recording, or by any information or retrieval system. Violations will be prosecuted.
The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the
absence of a specic statement, that such names are exempt from the relevant protective laws and regulations and therefore
free for general use.
Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent
upgrade thereof may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured
to do so, nor may they be copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-
up copy for safety purposes. Due to an ongoing process of improvement Carl Zeiss Microscopy reserves the right to make
modications of this document without notice.

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Table of contents
1. About this manual ........................................................................................ 3
2. Safety summary ........................................................................................... 5
2.1. Intended use ..................................................................................................... 5
2.2. Prevention of accidents and of improper use ............................................... 6
2.3. Safety summary ............................................................................................... 7
2.3.1. Hazards related to personal injury ........................................................................... 7
2.3.2. Hazards not related to personal injury ..................................................................... 8
2.3.4. STOP button ............................................................................................................ 9
3. Description ................................................................................................. 10
3.1. Overview ......................................................................................................... 10
3.1.1. Detector head ........................................................................................................ 11
3.2. Principle of operation .................................................................................... 12
3.2.1. BSD modes ........................................................................................................... 13
3.3. Technical data ................................................................................................ 15
3.3.1. Product identification ............................................................................................. 15
3.3.2. Specification .......................................................................................................... 15
3.4. System requirements ..................................................................................... 15
3.5. Customer service ........................................................................................... 16
4. Installation .................................................................................................. 16
5. Operation .................................................................................................... 17
5.1. Preparing the work with the 4QBSD ............................................................. 17
5.2. Obtaining an image ........................................................................................ 23
5.2.1. Inserting the 4QBSD ............................................................................................. 23
5.2.2. Selecting a BSD mode .......................................................................................... 24
5.2.3. Selecting a feature on the specimen surface ........................................................ 26
5.2.4. Optimising the image ............................................................................................. 27
5.2.4.1. Automatically setting the gain range ............................................................................. 27
5.2.4.2. Manually setting the gain range .................................................................................... 28
5.2.4.3. Setting the BSD bandwidth ........................................................................................... 29
5.2.4.4. Automatically adjusting brightness and contrast ........................................................... 30
5.2.4.5. Saving and recalling segment settings.......................................................................... 32
5.3. Stopping the 4QBSD in an emergency ........................................................ 33
5.3.1. Stopping the moving detector ................................................................................ 33

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5.4. Saving and recalling stage coordinates (licence: STAGECO) ...................34
5.4.1. Saving and editing stage coordinates .................................................................... 34
5.4.2. Recalling stage coordinates .................................................................................. 35
5.5. Finishing the work with the 4QBSD ..............................................................36
6. Maintenance and repair .............................................................................39
6.1. Resetting touch alarm ....................................................................................39
6.2. Lubricating the rod .........................................................................................40
6.3. Troubleshooting .............................................................................................41
7. De-installation and disposal ......................................................................41
8. Abbreviations ..............................................................................................42
9. Directives and standards ...........................................................................42
10. Index ..........................................................................................................43

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1. About this manual
This instruction manual is considered to be part of the 4QBSD.
Read the instructions carefully. Keep the instruction manual nearby the 4QBSD and hand it over
to future owners of the FESEM, the 4QBSD is built in.
This instruction manual is designed for users who have been trained by an authorised ZEISS ex-
pert to operate the FESEM.
Operators of the detector must not deviate from the instructions provided in this document.
Reference to
related docu-
ments
For detailed information regarding the operating software refer to the Software Manual
SmartSEM®.
Safety
instructions The safety instructions in this manual are classified as follows:
DANGER
This safety symbol and signal word indicates an imminently hazardous situation.
Disregarding this warning WILL result in death or serious injury.
WARNING
This safety symbol and signal word indicates a potentially hazardous situation.
Disregarding this warning COULD result in death or serious injury.
CAUTION
This symbol and signal word draws your attention to a potentially hazardous
situation.
Disregarding this warning MAY result in minor or moderate injury.
CAUTION
This signal word used without a safety symbol indicates a potentially hazardous
situation.
Disregarding this warning MAY result in property damage.
Moreover you will find the following type of information:
IMPORTANT
This symbol and signal word draws your attention to important and useful
information.

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Typographical
conventions For the description of software, the following typographical conventions are used:
Definition
of terms The following terms are used in this instruction manual:
Typography Meaning
Press <ENTER>. Press the ENTER key on the keyboard.
Type <key1, key2>. Type key 1 first, then type key 2 on the keyboard.
Type <Ctrl + Alt + Del>. Simultaneously type CTRL key, ALT key and DEL
key on the keyboard.
Click on the High voltage icon.
Select Aperture size from the drop-down list. Icons, buttons, menus and panels are printed in bold.
Select Aperture size 30 µm.
Set FIB Fil V Target to zero.Values to be selected are printed in italics.
Text Meaning
Click.... Press the left mouse button.
Double-click... Double-click on the left mouse button.
SmartSEM®Operating software for ZEISS field emission scanning electron micro-
scopes.
ZEISS service representative Specially trained service expert, either ZEISS staff or authorised serv-
ice partner of ZEISS.
4QBSD Pneumatically driven detector used to detect backscattered electrons.

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2. Safety summary
2.1. Intended use
The 4QBSD is an option to ZEISS FESEM models of the following series:
•SUPRA®series
•ULTRA series
•NVision 40
•AURIGA®series
•MERLIN™
The 4QBSD is used to detect backscattered electrons, that have been scattered under very low
angles.
The 4QBSD is suitable to produce high quality material contrast (COMPO) and topographic
contrast (TOPO) images.
Using the 4QBSD for any other purpose maybe dangerous and is not allowed.

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2.2. Prevention of accidents and of improper use
CAUTION
Risk of injury or damage due to improper operation of the FESEM.
Read the user documentation carefully.
Do not operate the FESEM until you have completely read and understood this instruction
manual and the entire user documentation delivered with the FESEM. You will find the
user documentation in the FESEM document folder.
CAUTION
Risk of property damage due to improper maintenance, service, or repair.
The warranty might be voided.
Follow the instructions given in this instruction manual.
IMPORTANT
All pursuing tasks of maintenance, service, and repair not described in this instruction
manual have to be performed by authorised ZEISS service representatives only.

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2.3. Safety summary
2.3.1. Hazards related to personal injury
DANGER
Danger to life: Hazardous voltage inside the FESEM.
Only service representatives trained and authorised by ZEISS are allowed to service the
FESEM and to perform work on the electrical system of the FESEM.
CAUTION
Danger of bruising.
The 4QBSD is driven pneumatically.
Do not put your hand in the travel while the 4QBSD is being inserted.
CAUTION
TEM oil 300 may be irritating to skin and eyes.
Avoid contact with skin. Wear suitable gloves.
In case of contact with the eyes, rinse immediately with plenty of water and seek medical
advice.
After contact with the skin, wash immediately with plenty of water and soap.
CAUTION
Isopropanol is highly flammable and irritating to the eyes.
Vapours may cause drowsiness and dizziness.
Keep away from sources of ignition. No smoking.
In case of contact with the eyes, rinse immediately with plenty of water and seek medical
advice.
Avoid contact with skin. Wear suitable gloves.
Do not breath vapour.

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2.3.2. Hazards not related to personal injury
CAUTION
Danger of damaging the 4QBSD when moving the stage.
Macros may influence the movement of the stage.
Do not start user-defined macros which impede the safe stage movement.
CAUTION
Danger of damaging the 4QBSD
The Z-axis of the stage moves with delay.
Before recalling a stage position, ensure that you haven’t changed the Z-position of the
stage in between.
CAUTION
Danger of damaging the 4QBSD when moving the specimen stage.
Retract the 4QBSD when you have finished 4QBS imaging.
CAUTION
Danger of contaminating the vacuum system when using unsuitale lubricants.
Only use TEM oil 300 for lubricating the rod.

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2.3.3. STOP button
In order to avoid property damage, the 4QBSD
can be stopped at any position.
Therefore, a STOP button is integrated in the
BSD Control panel.

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3. Description
3.1. Overview
Fig. 1.1: Components of the 4QBSD
1 Adjustment knob for X-axis 4 Rod
2 Adjustment knob for Z-axis 5 Electronic box
3 Adjustment knob for Y-axis
3
5
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3.1.1. Detector head
Fig. 1.2: Views of the detector head
1 Detector head
2 Bottom view on diodes (4 quadrants)
2
1

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3.2. Principle of operation
Fig. 1.3: 4QBSD diagram
•The primary electron beam travels through the objective lens and hits the
specimen (2).
•BSEs (3) are released from the specimen
•BSEs are detected by the diodes (four quadrants, 4) and generate an electrical
signal
The operation of the 4QBSD is controlled via the BSD Control panel.
The 4QBSD is inserted and retracted pneumatically.
1 Specimen 3 Top view on diodes (4 quadrants)
2 BSE trajectories
1
2
3

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3.2.1. BSD modes
The 4QBSD offers two main operation (BSD) modes:
•Composition (BSD:COMPO):
Electrons from heavy elements (high atomic number) are backscattered more strongly than
light elements (low atomic number). Therefore, they appear brighter in the image.
Thus, backscattered electrons can be used to detect contrast between areas with different
chemical compositions.
Fig. 1.4: Material contrast
•Surface topography (BSD:TOPO):
Highlights changes of the specimen surface angle. Topographic contrast arises because the
number and trajectories of backscattered electrons and the number of secondary electrons
depend on the angle of incidence between the beam and the specimen surface.
Fig. 1.5: Topographic contrast

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BSD modes The BSD modes can be selected in the Smart-
SEM®user interface.
The BSD Control panel summarises the
functions:
•BSD: COMPO
selects composition imaging.
•BSD:TOPO
selects surface topography
•BSD:Set TOPO
saves the current segment configuration as a
new TOPO mode
At the top, the diode polarity is displayed.
The diodes can have the following status:
•Normal (+): The signal is added to the
total signal.
•Inverted (-): The signal is inverted before
being added to the total signal.

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3.3. Technical data
3.3.1. Product identification
3.3.2. Specification
3.4. System requirements
Requirements to run the 4QBSD:
•SmartSEM®version 5.03 or higher
Workstation 4QBSD ZEISS part no.
SUPRA®series
ULTRA series
NVision 40
AURIGA®
4QBSD 347806-9055-000
SUPRA®60
ULTRA 60
AURIGA®60
4QBSD (long version) 347606-9055-000
MERLIN™4QBSD-Pneumatic 346006-9055-000
Feature Specification
Travel 320 mm
Travel speed 30-60 mm/s
Repeatability X-axis: ± 5 µm
Y-axis: ± 5 µm
Z-axis: ± 25 µm
Fine adjustment X-, Y-, Z-axis: ± 5 mm

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3.5. Customer service
For customer service please contact your local ZEISS service representative.
A list of ZEISS locations and authorised service partners can be found at:
http://www.zeiss.com/microscopy
In case of questions regarding radiation protection please contact theZEISS Radiation Safety Of-
ficer
Dr. Wolfgang Sold, ZEISS AG, 73447 Oberkochen, Germany
phone: [phone]
e-mail: [email protected]
IMPORTANT
To maintain best possible performance of the FESEM it is essential to perform preventive
maintenance on a regular base.
Moreover, it is recommended that you conclude a service contract with your local ZEISS
service organisation or representative.
This will ensure a continuous trouble-free operation of the FESEM.
4. Installation
The 4QBSD is either factory-installed or retrofitted by an authorised ZEISS
service representative.

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5. Operation
CAUTION
Danger of damaging the 4QBSD when moving the stage.
Macros may influence the movement of the stage.
Do not start user-defined macros which impede the safe stage movement.
5.1. Preparing the work with the 4QBSD
Before working with the 4QBSD, the detector has to be adjusted.
1 Go to the Detectors tab in the SEM Control
panel.
2SelectInLens or SE2 from the drop-down
menu.
SmartSEM®switches to the selected detector.
3 Select the lowest magnification.
4SelectDetection/BSD Control....

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The BSD Control panel opens.
CAUTION
Danger of bruising.
The 4QBSD is driven pneumatically.
Do not put your hand in the travel while the 4QBSD is being inserted.‘
5 Click on BSD in.
The stage lowers to leave enough free space for
the 4QBSD. The 4QBSD moves in.