ZIROX XS22 User manual

ZIROX Sensoren & Elektronik GmbH
Am Koppelberg 21, D-17489 Greifswald [phone], Fax: -29 E-mail: [e-mail]
ZIROX Oxygen Measuring Technology
Measuring System
Vacuum probe XS22
Electronic unit E2010
for oxygen measurements in vacuum applications
Manual
Operating voltage: 24 V DC

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XS22_E2010

Measuring system XS22-E2010 Contents
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XS22_E2010
Table of contents
1 Introduction .................................................................................................................... 5
1.1 How to use this manual........................................................................................... 5
1.2 Copyright................................................................................................................. 5
1.3 Commonly used symbols ........................................................................................ 5
1.4 Safety instructions................................................................................................... 6
1.5 Application of the measuring system....................................................................... 6
2 Overview of the measuring system................................................................................. 7
3 Technical data................................................................................................................ 8
3.1 Probe XS22............................................................................................................. 8
3.2 Evaluation electronics E2010 .................................................................................. 9
4 Composition and operation of E2010.............................................................................10
4.1 Front, keys .............................................................................................................10
4.2 Rear, connections ..................................................................................................11
5 Installation and initiation ................................................................................................13
5.1 Installation..............................................................................................................13
5.2 Reference air supply for ZIROX®probes ................................................................13
5.3 Probe mounting......................................................................................................13
5.4 Waiting for operating state......................................................................................13
6 Parametrization .............................................................................................................14
6.1 Menu operation – an example................................................................................14
6.2 Display ...................................................................................................................14
6.3 Adjustable parameters ...........................................................................................15
6.4 Zero calibration ......................................................................................................16
6.5 Span gas calibration...............................................................................................16
6.6 Reset calibration ....................................................................................................16
6.7 Error messages during calibration..........................................................................16
6.8 Menu navigation of calibration (diagram)................................................................17
7 Status display/error messages ......................................................................................18
8 Potential fault causes and fault clearance .....................................................................19
9 Details for the use of ZrO2-probes in vacuum technology ..............................................21
9.1 Theoretical relations...............................................................................................21
9.2 Instructions for calibration ......................................................................................22
10 Warranty....................................................................................................................25
11 Declaration of conformity ...........................................................................................27

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Measuring system XS22-E2010 1 Introduction
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XS22_E2010
1 Introduction
1.1 How to use this manual
This manual describes composition, mode of operation and use of the
oxygen measuring system for vacuum processes (VMS) developed by
ZIROX GmbH.
Address of manufacturer:
ZIROX Sensoren & Elektronik GmbH
Am Koppelberg 21
D-17489 Greifswald
Tel.: [phone]
Fax: [phone]; e-mail: [e-mail]
The manufacturer guarantees that this manual was written in accordance
with the functional and technical features of the delivered oxygen measuring
system.
This manual is not subject to the amendment service. If the manufacturer
modifies the VMS with the aim of making technical improvements, the user
is responsible for inserting the additional or updated pages supplied.
Proper operation of the VMS can only be ensured if the contents of this
manual are known. Therefore, all chapters of this manual must be read
carefully prior to operating the VMS.
Pages, charts and figures are numbered consecutively.
1.2 Copyright
This equipment manual is copyright protected.
It must not be partially or completely reproduced, copied, or distributed,
without prior written permission of the manufacturer. The use for competitive
advantages or the distribution to third parties are not authorized either.
All rights reserved.
1.3 Commonly used symbols
Symbol for imminent danger:
This symbol refers to imminent danger to persons’ life and health.
In case of disregard fatal injuries may result.
Symbol for indirect danger:
This symbol indicates indirect danger.
The degree of the damage depends on the circumstances and the actions of
the persons involved.
In case of disregard destruction or damage of the measuring probe, the
electronics assembly or other material assets as well as minor injuries may
result.
danger
attention

Measuring system XS22-E2010 1 Introduction
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Symbol for proper handling:
This symbol appears where the manual refers to the adherence to rules,
instructions and proper operation.
In case of disregard damage or destruction of the VMS or its single
components may result.
1.4 Safety instructions
The following safety instructions inform about potential danger during the
operation of the oxygen measuring system (VMS). They must be strictly
followed by the responsible staff.
A failure
-free and functional operating of the VMS can only be ensured with
knowledge of this manual. Please read all the chapters of this equipment
manual carefully before the installation and initiation.
The VMS is to be used for the functional operation only (see 1.5).
The VMS is to be installed, operated and serviced by trained staff
only.
Special safety in
structions for potential danger
in certain working
processes are given in relevant text passages.
1.5 Application of the measuring system
The measuring system is used for in situ measurements of oxygen in gases.
Typical examples are:
•Measurings in vacuum processes (PVC, CVD, other plasma
processes)
•Measurings in process gases conducted under non-standard
pressure (e.g. surface treatment processes)
•Measurings in science and research
The measuring gas can be temporarily reducing1. It must by no means
represent an explosive compound since the probe with its heater works as
an ignition source.
A consultation with the manufacturer is required before measurings in
corrosive gases, the danger of condensate formation or failure of carbon.
1Different conditions of oxygen in the measuring gas must be distinguished:
Free oxygen: Oxygen molecules in the gas are independent without a bond to other gas components (inert gases
such as N2or Ar). In combustion engines this is called “lean mixture”.
Bound oxygen: Free oxygen molecules do not exist in the gas, only in bound form e.g. as water vapor. Higher
temperatures cause a dissociation and oxygen molecules are available. Since the dissociation degree increases
with the temperature, the measurement result depends on the temperature. In combustion engines this is called
“rich mixture”.
Possibly, free oxygen can react with potential burnable gases at the hot platinum electrode. The result can be a
reducing gas.
NOTE
attention
danger

Measuring system XS22-E2010 2 Overview
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2 Overview of the measuring system
The measuring system serves the measuring of the oxygen partial pressure
in vacuum. It consists of a probe and an integrated control and signal
processing electronics and an integrated control and evaluation electronics
(E2010). The probe can be directly installed in vacuum systems.
The electronic unit E2010, developed for panel mounting, provides the power
supply for ZIROX® sensors, evaluates signals and displays measuring
results in the form of a standard signal (4-20 mA) for process control.
The electronics realizes the following functions:
•Power supply and control of sensor heating
•Processing of the thermoelectric and cell voltage of the probe to the
oxygen concentration
•Output of the oxygen concentration as a standard signal
•Calibration
•Reference air supply by internal pump (option)
The probe is provided with a KF40-flange. Others on request.
Because of its specially adapted construction for vacuum applications, the
probe is not suitable for measurements of oxygen concentrations in the
percentage range. The relative error under normal pressure is > 20%.
The probe must not be used in gases with high thermal conductivity (e.g. H2,
He, NH3) at ambient pressure.
The sensor element of the vacuum probe consists of a partially closed solid
electrolyte tube. The reference electrode and a resistance heater are located
inside the tube. The measuring electrode outside the solid electrolyte tube
contains a thermocouple for the temperature regulation of the sensor
element. The protective tube as part of the probe is required for the
symmetric creation of a heating field and serves the protection of the sensor
from parasitic coating. Without a protective tube, the required probe
temperature cannot be reached and the thermal asymmetry increases
significantly.
Unlike probes, which are used under normal pressure, the vacuum probe is
not calibration-free. Reasons are the inside heater of the sensor tube used
in this probe and the energy removal of the heated sensor element
depending on the pressure and the ambient gases. Due to the lack of
isothermal electrodes, the validity of the Nernst equation is not given.
Usually, running the production unit with empirically determined sensor
signals is sufficient for the process management. The calibration by the
manufacturer is conducted under normal pressure as a calibration of the
asymmetry voltage (zero-point-calibration).
In operating status the ceramic front heats up to a temperature of
about 700 °C. Burn hazard!
danger

Measuring system XS22-E2010 3 Technical Data
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3 Technical data
3.1 Probe XS22
Pressure range 1.5·bar…1·10
-7
Pa
Measuring range 210 mbar …1·10
-21
mbar O
2
Measuring gas temperature Max. 200 °C Max. 60 °C at flange
Diameter of the probe 16 mm
Length of the probe 140…300 mm User-specific
Thermocouple Type B
Heater voltage 24 V Approx. 30 W,
Adjusted 17 W
Heater resistance 20 Ω
Installation requirements DN25KF /DN40KF Other flanges on
request
Temperature of electrodes 700 °C Controlled by electronics
He-leak rate <10
-8
mbar l/s
Reference air flow n/a
Offset voltage with protection tube -15...-20 mV
Figure 1: Probe XS22

Measuring system XS22-E2010 3 Technical Data
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3.2 Evaluation electronics E2010
Power supply........................................ 24 V DC +/- 10%
Power consumption ............................. 30 W
Fuse..................................................... 2.5 A resetting
Protection degree................................. IP 30 (Front IP52)
Working temperature............................ 0...40 °C
Storage temperature ............................ 0...50°C
Set temperature.................................... 700 °C
Display ................................................ Double-spaced LCD-display, 2 x 16 digits
Input signal........................................... Sensor and thermoelectric
Output signal ....................................... 4...20 mA (0…10 V option)
Dimensions W x H x D.......................... 96 mm x 96 mm x 125 mm
Weight.................................................. Approx. 650 g
Keypad ................................................ 2 keys (membrane keypad)
Alarm indication ................................... Current output goes to 0 mA
Interface .............................................. RS232

Measuring system XS22-E2010 4 Composition
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4 Composition and operation of E2010
4.1 Front, keys
The display and the keys for parametrization are located on the front.
Menu key: scroll or select the requested parameter
ENTER key: activate or enter adjusted parameter (save change)
Figure 2: Front view E2010 with keys and display

Measuring system XS22-E2010 4 Composition
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4.2 Rear, connections
All connections and outputs are located on the rear.
Figure 3: Rear view E2010 with connections
Terminal strip X1 (probe connections)
Terminal strip X2 (Power supply/output signal)
Pin Description Cable
1 AINCOM brown
2 Vz white
3 Vt blue
4 Heating+ black
5 Heating- grey
Pin Description
1 +24V DC
2 GND
3 OUT +
4 OUT -

Measuring system XS22-E2010 4 Composition
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Digital output:………… RS 232-Interface (9600 Baud)
Pin assignment RS 232
The RS232 interface must be connected with a computer by SUB-D-cable
(9pol., 1:1, uncrossed)!
Transfer rate: max. 9600 Baud, adjustable
Protocol of the serial interface (CR = carriage return)
Set Feedback signal
(example)
Transferred
measuring value Parameter
M2CR M2x.xxExxCR
M22.06E+05 2.06*105ppm O2Oxygen concentration in
ppm
A1CR A1xxx.xCR
A120.9 20.9 mV Cell voltage in mV
A2CR A2xxx.xCR
A2749.9 749.9 °C Measuring temperature
in °C
The parameters are set by the keys of the front cover (see chapter 4.1).
PC-software for display and storage of the measuring values is available on request
(extra charge).
Error messages via RS232
ERROR0 Transfer error RS232 (or wrong command)
ERROR1 Warm-up (cell temperature too low, < 30 min)
ERROR2 Cell temperature too low (< set temp. – 10 °C, > 30 min)
ERROR3 Thermocouple broken
ERROR6 System error
Stop bits 1 Parity no
Data bits 8 Handshake without
MD
TXD
RXD

Measuring system XS22-E2010 5 Installation
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NOTE
5 Installation and initiation
5.1 Installation
Connect the circuit points on the rear of the device with the corresponding
points of the ZIROX-sensor or the ZIROX-probe.
The operating voltage is 24 V DC.
5.2 Reference air supply for ZIROX®probes
This paragraph only applies to special probe constructions, which require
reference air supply because of their length.
Reference air input of the sensor and the reference air output of the E2010
must be connected by a flexible hose (inner diameter 3 mm). The reference
air flow is preset by the manufacturer.
After starting the system (E2010 with connected sensor) the reference air
flow must be checked by an inserted flow meter (5 - 10 l/h resp. approx. 100
- 200ml/min) and, if applicable, adjusted via display.
5.3 Probe mounting
The probes are mounted with a flange DN40 KF (according to order, others
on request).
When pulled out after a running process the probe is very hot. Burn and fire
hazards!
5.4 Waiting for operating state
Depending on the connected sensor the E2010 needs a certain period of
time until the operating state is reached (for further information see technical
data of sensor). Due to thermal balancing effects, the sensor needs approx.
60 minutes until the ultimate operating state after reaching the operating
temperature.
The keys are locked before reaching the operating state!

Measuring system XS22-E2010 6 Parametrization
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6 Parametrization
6.1 Menu operation – an example
After switch-on, the warm-up starts. From 400 °C on, the current
temperature is displayed in the second line. After reaching the
working temperature, the oxygen concentration is displayed in
the first line.
By pressing several values can be displayed in the second
line (see chapter 4.1).
With help of both keys, an offset-calibration („zero point
calibration“) in clean air and a span gas calibration is possible.
The complete menu is shown schematically in figure 4, p. 18.
The sensor can stay very hot for a while after switch-off and
during operation.
CAUTION – VERY HOT – DO NOT TOUCH!
6.2 Display
E2010
Start display, approx.3sec
Version 2.4.6
Software version
E2010
Start display, approx.3sec
THERMOCO. TYP B
Thermocouple type
WARM
-
UP
Warm-up of the ZIROX-sensor
Temp: 450 °C
O2: 20.64 V
ol%
Temp: 700 °C
O2: 20.64 Vol%
Vz:
-
2 mV
Temp: 555 °C
***WARM UP***
Uz: xx.x mV
O2: 20.6
V
ol.
-
%
Calibration

Measuring system XS22-E2010 6 Parametrization
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O2: 20.64 Vol%
SETTINGS
O2: 20.64 Vol%
CALIB.ZERO POINT
O2: 20.64 Vol%
CALIB. SPAN
GAS
6.3 Adjustable parameters
The following parameters are adjustable in the menu SETTINGS.
OUTPUT VALUE
Valid for display and analog output!
Vol % O2
Vol ppm O2, mbar O2, atm O2, Vz [mV]
OUTPUT VALUE
log[10]
linear (for Vz linear only)
OUTPUT 4
-
20 mA
Current output
ZERO: 400 ppm
Zero point 400 ppm corresponds to 4 mA
OUTPUT 4
–
20 mA
SPAN: 206400 ppm
Terminal value 206400 ppm corresponds to
20 mA
RETURN ?
NO YES
SAVE VALUES ?
NO YES

Measuring system XS22-E2010 6 Parametrization
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6.4 Zero calibration
The E2010 has a calibration function. Based on that function the zero point
calibration and, if requested, the span gas calibration can be conducted (see
figure 6). The zero calibration must be conducted in clean air.
It serves the balance of the offset voltage of the ZrO2-sensor. The offset is
caused by the construction (when the electrode has a disadvantageous
position in the heating field) and can occur due to aging of the sensor.
Before calibration, the sensor is flushed with ambient air. The gas flow is set
by internal or external pump at the value which is used for measuring the
measuring gas.
With the zero calibration, the working point in ambient air is calibrated with
20.64 vol. % O2.
6.5 Span gas calibration
After calling the SPAN GAS concentration in the calibration menu (see figure
6, p. 22) the setting options are activated by pressing the enter key. The
flashing digit can be set by pressing the menu key. After changing all the
digits this menu is deactivated by ENTER and left by the menu key.
Now the calibration can be started.
6.6 Reset calibration
If in the main menu CALIB.ZERO POINT or CALIB. SPAN GAS is displayed
and both keys are pressed for 3 seconds, RESET CAL.ZERO? or RESET
CAL.SPAN will be displayed.
By pressing ENTER, the calibration values will be reset to 0 or 1.
6.7 Error messages during calibration
CALIBR. FAILED
OUT OF RANGE
//limits: ±50mV resp. ±50% of Vz
CALIBR. FAILED
* TIMEOUT *
//no steady measuring value in 20sec.
NOTE

Measuring system XS22-E2010 6 Parametrization
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6.8 Menu navigation of calibration (diagram)
Fig. 4: Diagram offset and span gas calibration

Measuring system XS22-E2010 7 Status
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7 Status display/error messages
No. Display LED red LED green
1 OK off on
2 Limit value on on
3 Probe temperature < 700 °C
flashing off4 Thermocouple broken
5 System error
In status 3 to 5 the current output is 0 mA!

Measuring system XS22-E2010 8 Fault causes and clearance
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8 Potential fault causes and fault clearance
The following list presents an overview of potential fault appearances. Faults not in the list
require a consultation with the manufacturer.
Symptoms Fault causes Fault clearance
Red LED off (no supply
voltage)
No supply voltage at the
probe
Check power supply
Internal fuse switched off Send probe to service
Green LED off (no ready-
signal)
Probe is too cooled by gas
flow
Install probe flow-protected
Heater of the probe defective Send probe to service
Thermocouple defective Send probe to service
Output signal > range Current / voltage transformer
for cell voltage is overdriven
Convert amplifier to higher
measuring range 1200 mV

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