ZYGO KMS-310 User manual

KMS-310/400
Supervisor's Manual
October 1998
Zygo Corporation
Advanced Imaging Systems
650 North Mary Avenue
Sunnyvale, CA 94086
Telephone: (408) 434-1000
Fax: (408) 434-0759

KMS-310/400 Supervisor’s Manual
Zygo Corporation
Advanced Imaging Systems
650 North Mary Avenue
Sunnyvale, California
Tel: 408-434-1000
Fax: 408-434-0759
http://www.zygo.com
Copyright © 1998 by Zygo Corporation. All rights reserved. Contents of this publication may not
be reproduced in any form without written permission from the copyright owner.
KMS-310/400 is a trademark of Zygo Corporation.
Notice
The information contained in this document is subject to change without notice. Zygo Corporation
makes no warranty of any kind with regard to this material, including, but not limited to, the
implied warranties of merchantability and fitness for a particular purpose. Zygo Corporation shall
not be liable for errors contained herein or for incidental or consequential damages in connection
with the furnishing, performance or use of this manual.

KMS-310/400 Supervisor's Manual i
Contents
CHAPTER1: ABOUT THIS MANUAL...........................................................................................................................1-1
INTENDED AUDIENCE....................................................................................................................................................1-2
MANUAL ORGANIZATION...............................................................................................................................................1-2
CONVENTIONS.............................................................................................................................................................1-3
Cautions................................................................................................................................................................1-3
Tips........................................................................................................................................................................1-3
Typographical and Keyboard Conventions ...........................................................................................................1-3
CONTACTING TECHNICAL SUPPORT..............................................................................................................................1-4
CHAPTER 2: SAFETY PRECAUTIONS.......................................................................................................................2-1
MACHINE SAFETY LABELS ............................................................................................................................................2-2
Caution and Warning Symbols..............................................................................................................................2-2
Safety Label Locations..........................................................................................................................................2-3
OBJECTIVE ANTI-CRASH PROTECTION ........................................................................................................................2-10
LIGHT SOURCE SAFETY..............................................................................................................................................2-11
Mercury Xenon Lamphouse................................................................................................................................2-11
Halogen Light Box...............................................................................................................................................2-11
Metal Halide Light Box ........................................................................................................................................2-12
Halogen Lamphouse...........................................................................................................................................2-12
Mercury Lamphouse............................................................................................................................................2-12
Xenon Lamphouse..............................................................................................................................................2-12
ISOPROPYL ALCOHOL SAFETY ....................................................................................................................................2-13
Potential Hazards................................................................................................................................................2-13
Emergency Response.........................................................................................................................................2-14
MERCURY SAFETY.....................................................................................................................................................2-16
Potential Hazards................................................................................................................................................2-16
Emergency Response.........................................................................................................................................2-16
MACHINE ERGONOMIC FEATURES...............................................................................................................................2-18
CHAPTER 3: SYSTEM OVERVIEW.............................................................................................................................3-1
PRODUCT OVERVIEW...................................................................................................................................................3-2
Script Routines......................................................................................................................................................3-2
Product Applications..............................................................................................................................................3-3
System Configurations..........................................................................................................................................3-3
Frame Grabber......................................................................................................................................................3-3
Data Output...........................................................................................................................................................3-3
SUBSYSTEM OVERVIEW................................................................................................................................................3-4
Electronic Measurement Subsystem.....................................................................................................................3-4
Optical Display Subsystem....................................................................................................................................3-9
Mechanical Subsystem .......................................................................................................................................3-14
FUNCTIONAL OVERVIEW.............................................................................................................................................3-16
System Control....................................................................................................................................................3-16
Image Input.........................................................................................................................................................3-16
Image Processing................................................................................................................................................3-16
Image Measurement...........................................................................................................................................3-17
CHAPTER 4: USER INTERFACE.................................................................................................................................4-1
OVERVIEW...................................................................................................................................................................4-2
Modes of Operation...............................................................................................................................................4-2
Screen Components..............................................................................................................................................4-2
SOFTWARE CONTROLS.................................................................................................................................................4-4

Contents
ii
Using the Keypad..................................................................................................................................................4-4
Keypad/Keyboard Key Equivalents.......................................................................................................................4-7
Hot Keys................................................................................................................................................................4-7
SOFTWARE ORGANIZATION.........................................................................................................................................4-10
Standby Screen...................................................................................................................................................4-11
Supervisor Master Menu.....................................................................................................................................4-12
Measure Screen..................................................................................................................................................4-14
Statistics Menu....................................................................................................................................................4-16
ID Information Menu............................................................................................................................................4-18
Select Program Menu.........................................................................................................................................4-20
Data Map Menu...................................................................................................................................................4-22
Program Setup Menu..........................................................................................................................................4-24
Sequence Setup Menu........................................................................................................................................4-26
Operator Lockouts Menu.....................................................................................................................................4-28
Calibrate Menu....................................................................................................................................................4-30
System Setup Menu............................................................................................................................................4-32
Save Program Menu...........................................................................................................................................4-34
Exit to DOS.........................................................................................................................................................4-35
Return to Standby Selection ...............................................................................................................................4-36
CHAPTER 5: SYSTEM SETUP.....................................................................................................................................5-1
OVERVIEW ..................................................................................................................................................................5-2
CONFIGURE ILLUMINATION SETTINGS............................................................................................................................5-4
Set Up the Transmitted Condenser.......................................................................................................................5-4
Set Up Transmitted Illumination............................................................................................................................5-8
Adjust Illumination Controls.................................................................................................................................5-10
Adjust Focus Control...........................................................................................................................................5-12
DEFINE CALIBRATION PARAMETERS............................................................................................................................5-14
Select Calibration Parameters............................................................................................................................5-15
Calibrate the Microscope ....................................................................................................................................5-15
Calibrate Horizontal Settings...............................................................................................................................5-16
Calibrate Vertical Settings...................................................................................................................................5-16
Configure Single-point Calibration ......................................................................................................................5-17
Save the Calibration Settings..............................................................................................................................5-22
DEFINE SYSTEM OPTIONS..........................................................................................................................................5-23
Display the System Setup Window.....................................................................................................................5-23
Set Map Colors...................................................................................................................................................5-24
Change your Supervisor Access Code...............................................................................................................5-25
Change Objective Assignments on the Turret ....................................................................................................5-25
SET OBJECTIVE PARFOCALITY AND PARCENTRICITY.....................................................................................................5-27
ADJUST AUTOFOCUS PARAMETERS ............................................................................................................................5-29
Set Column Autofocus........................................................................................................................................5-29
Set Piezo Autofocus Algorithm............................................................................................................................5-31
CHAPTER 6: CREATING AUTOMATED SCRIPTS.....................................................................................................6-1
OVERVIEW ..................................................................................................................................................................6-2
Script Features......................................................................................................................................................6-2
Script Command Types.........................................................................................................................................6-7
Matrix File Input and Output................................................................................................................................6-10
SCRIPT CREATION .....................................................................................................................................................6-14
Overview.............................................................................................................................................................6-14
Plan the Script.....................................................................................................................................................6-14
Locate Feature Edges.........................................................................................................................................6-14
Set Up Align and Deskew for the Mask...............................................................................................................6-15
Set Up Planarity for the Mask.............................................................................................................................6-15
Obtain Substrate Information..............................................................................................................................6-15

KMS-310/400 Supervisor's Manual iii
Move to Features to be Measured......................................................................................................................6-15
Call the Measurement Subroutine.......................................................................................................................6-16
Suggested Order of Script Sequence..................................................................................................................6-16
EXAMPLE SCRIPT.......................................................................................................................................................6-17
Example Script....................................................................................................................................................6-17
SCRIPT LOCATOR.......................................................................................................................................................6-22
Listing by Alphabetical Order ..............................................................................................................................6-22
Listings by Function.............................................................................................................................................6-30
Comment and Debug Commands.......................................................................................................................6-30
Stage, Column, and Optical Positioning and Turret Command...........................................................................6-33
Illumination Values Commands...........................................................................................................................6-34
Z-Axis Position Commands: Piezo Stack............................................................................................................6-35
Z-Axis Position Commands: Column Motor ........................................................................................................6-35
X-, Y-Axis Position Commands: Stage Motors....................................................................................................6-36
Planarization Commands....................................................................................................................................6-38
Operator Interface Commands............................................................................................................................6-39
Data Output Matrix Commands...........................................................................................................................6-41
Log File Commands............................................................................................................................................6-42
Script Flow Commands.......................................................................................................................................6-43
Edge Detection Pattern Recognition Commands................................................................................................6-44
Bitmap/Image Pattern Recognition Commands..................................................................................................6-44
Autofocus Commands.........................................................................................................................................6-45
Find Surface Command......................................................................................................................................6-45
Fast Focus Commands.......................................................................................................................................6-46
Column Focus Command....................................................................................................................................6-47
SCRIPT COMMANDS ...................................................................................................................................................6-48
AF_EXEC............................................................................................................................................................6-48
AF_SET...............................................................................................................................................................6-48
AF_STAT.............................................................................................................................................................6-48
ALIGN..................................................................................................................................................................6-49
BOX.....................................................................................................................................................................6-49
CALL...................................................................................................................................................................6-49
CLEARPIC..........................................................................................................................................................6-50
CLOCK................................................................................................................................................................6-50
COMMENT..........................................................................................................................................................6-50
DEBUG................................................................................................................................................................6-51
DESKEW.............................................................................................................................................................6-51
EDGES................................................................................................................................................................6-52
EDGEPOS...........................................................................................................................................................6-53
EDGEROUGHNESS (EDGER)...........................................................................................................................6-54
END.....................................................................................................................................................................6-55
ERASE................................................................................................................................................................6-55
EXIT....................................................................................................................................................................6-55
FASTSURF.........................................................................................................................................................6-55
FF_SET...............................................................................................................................................................6-56
FF_WIN...............................................................................................................................................................6-56
FINDSURF..........................................................................................................................................................6-56
FOCUSFAST.......................................................................................................................................................6-57
FOCUSIMG.........................................................................................................................................................6-57
GETMOTCNTS...................................................................................................................................................6-57
GETPOS.............................................................................................................................................................6-57
GETSTOP...........................................................................................................................................................6-58
GETTEXT............................................................................................................................................................6-58
GETVAR..............................................................................................................................................................6-58
GETWIN..............................................................................................................................................................6-59
GET_MOT_Z.......................................................................................................................................................6-60

Contents
iv
GET_Z.................................................................................................................................................................6-60
GO_ORIGIN........................................................................................................................................................6-60
GOSTOP.............................................................................................................................................................6-61
GRABSTAT.........................................................................................................................................................6-61
GSPAWN............................................................................................................................................................6-61
INCLUDE............................................................................................................................................................6-62
IDINFO................................................................................................................................................................6-63
JUMP..................................................................................................................................................................6-64
LINE....................................................................................................................................................................6-64
LOADCALIB........................................................................................................................................................6-64
LOADCF..............................................................................................................................................................6-65
LOADPROG........................................................................................................................................................6-65
LOADSUBM........................................................................................................................................................6-65
LOCKOUT...........................................................................................................................................................6-66
LOGMEASURE...................................................................................................................................................6-66
LOOP..................................................................................................................................................................6-66
LUMAUTO...........................................................................................................................................................6-67
LUMAVG.............................................................................................................................................................6-67
LUMDUMP..........................................................................................................................................................6-67
LUMMARK..........................................................................................................................................................6-68
LUMREAD...........................................................................................................................................................6-68
LUMSET..............................................................................................................................................................6-68
MAPMENU..........................................................................................................................................................6-69
MASK_ORIGIN...................................................................................................................................................6-69
MASK_PLANE....................................................................................................................................................6-70
MARK..................................................................................................................................................................6-71
MATH..................................................................................................................................................................6-71
MATRIXCLEAR...................................................................................................................................................6-72
MATRIXCLOSE..................................................................................................................................................6-73
MATRIXOPEN....................................................................................................................................................6-73
MATRIXSET........................................................................................................................................................6-74
MATRIXVALUE...................................................................................................................................................6-74
MATRIXWRITE...................................................................................................................................................6-75
MEASURE..........................................................................................................................................................6-76
MEASURE_ALGORITHM...................................................................................................................................6-76
MENU..................................................................................................................................................................6-76
MESSAGE..........................................................................................................................................................6-77
METER................................................................................................................................................................6-77
MOT_Z_MOVE...................................................................................................................................................6-77
MOT_Z_REL.......................................................................................................................................................6-78
MOVEPOL..........................................................................................................................................................6-78
MOVEPOL_NM...................................................................................................................................................6-79
MOVEPOLZ........................................................................................................................................................6-79
MOVEPOLZ_NM.................................................................................................................................................6-80
MSR_DEFAULT..................................................................................................................................................6-80
MSR_ERROR.....................................................................................................................................................6-81
MSR_STATS.......................................................................................................................................................6-81
OPERATOR........................................................................................................................................................6-81
OPMARK.............................................................................................................................................................6-82
ORIGIN...............................................................................................................................................................6-82
PATREC_FIND...................................................................................................................................................6-83
PATREC_GET....................................................................................................................................................6-84
PATREC_SAVE..................................................................................................................................................6-85
PATREC_SHOW................................................................................................................................................6-85
PAUSE................................................................................................................................................................6-86
PICSHOW...........................................................................................................................................................6-86

KMS-310/400 Supervisor's Manual v
PICTURE.............................................................................................................................................................6-86
PICTURETIFF.....................................................................................................................................................6-86
PICTUREVGA.....................................................................................................................................................6-86
PLANECALC.......................................................................................................................................................6-87
PLANEPT............................................................................................................................................................6-87
POSMOVE..........................................................................................................................................................6-87
POSMOVE_NM...................................................................................................................................................6-88
POSPOL..............................................................................................................................................................6-88
POSPOL_NM......................................................................................................................................................6-88
PRINT..................................................................................................................................................................6-88
PRINTER.............................................................................................................................................................6-88
PRINTSTR..........................................................................................................................................................6-89
PROGNUM..........................................................................................................................................................6-89
QUIT....................................................................................................................................................................6-89
RECALL..............................................................................................................................................................6-89
RECPT................................................................................................................................................................6-90
RELMOVE...........................................................................................................................................................6-90
RELMOVE_NM...................................................................................................................................................6-90
REL_POL............................................................................................................................................................6-90
REL_POL_NM.....................................................................................................................................................6-91
REL_POLZ..........................................................................................................................................................6-91
REL_POLZ_NM..................................................................................................................................................6-91
RESULT..............................................................................................................................................................6-91
RETURN.............................................................................................................................................................6-92
RP_DISPLAY......................................................................................................................................................6-92
RP_EXEC............................................................................................................................................................6-92
RP_READ...........................................................................................................................................................6-92
RP_WIN..............................................................................................................................................................6-92
SEQEDGE...........................................................................................................................................................6-93
SEQNAME..........................................................................................................................................................6-94
SEQOUTPUT......................................................................................................................................................6-94
SEQWIN..............................................................................................................................................................6-94
SETSTOP............................................................................................................................................................6-95
SHOWPIC...........................................................................................................................................................6-95
SILENT................................................................................................................................................................6-95
SITENAME..........................................................................................................................................................6-95
SPAWN...............................................................................................................................................................6-95
START.................................................................................................................................................................6-96
STATEDGE.........................................................................................................................................................6-96
STATMSR...........................................................................................................................................................6-96
STATMSR3.........................................................................................................................................................6-97
STATS.................................................................................................................................................................6-98
TEXT...................................................................................................................................................................6-98
TIME....................................................................................................................................................................6-98
TURRET..............................................................................................................................................................6-98
TURRETFF.........................................................................................................................................................6-99
TURRETPOS......................................................................................................................................................6-99
UPDATE..............................................................................................................................................................6-99
XHAIR...............................................................................................................................................................6-100
Z_MOVE............................................................................................................................................................6-100
Z_REL...............................................................................................................................................................6-100
CHAPTER 7: OPERATION...........................................................................................................................................7-1
OVERVIEW...................................................................................................................................................................7-2
ACCESS AND EXIT THE SUPERVISOR MASTER MENU SCREEN.........................................................................................7-4
Access the Supervisor Master Menu Screen........................................................................................................7-4

Contents
vi
Return to Standby Screen.....................................................................................................................................7-6
Exit to DOS...........................................................................................................................................................7-7
SET UP A PROGRAM.....................................................................................................................................................7-8
Access the Select Program Screen ......................................................................................................................7-9
Open an Existing Program..................................................................................................................................7-10
Copy an Existing Program..................................................................................................................................7-11
Create a New Program.......................................................................................................................................7-12
Delete a Program................................................................................................................................................7-12
Define Program Parameters ...............................................................................................................................7-13
Set Operator Lockouts........................................................................................................................................7-14
Set up Measurement Sequences........................................................................................................................7-16
Set Up the Measurement Window......................................................................................................................7-18
Select Measurement Options..............................................................................................................................7-25
Set Up the Measurement Axis............................................................................................................................7-26
MEASURE..................................................................................................................................................................7-28
Access the Production Menu ..............................................................................................................................7-28
Load a Plate........................................................................................................................................................7-29
Select a New Program (Optional) .......................................................................................................................7-32
Change ID Entries (Optional)..............................................................................................................................7-33
Clear Statistics (Optional) ...................................................................................................................................7-34
Measure in Manual Mode....................................................................................................................................7-35
Measure in Semi-Auto Mode...............................................................................................................................7-38
Measure (auto mode)..........................................................................................................................................7-41
MANAGE MEASUREMENT DATA...................................................................................................................................7-42
Manage Statistics................................................................................................................................................7-43
Manage ID Entries..............................................................................................................................................7-44
Configure a Data Map.........................................................................................................................................7-45
CHAPTER 8: MAINTENANCE......................................................................................................................................8-1
OVERVIEW ..................................................................................................................................................................8-2
Preventive Maintenance Schedule........................................................................................................................8-2
Maintenance Procedures Overview......................................................................................................................8-4
LAMP REPLACEMENT AND ALIGNMENT ..........................................................................................................................8-5
Visually Check Lamps...........................................................................................................................................8-5
Align the Transmitted Condenser..........................................................................................................................8-5
Replace the Transmitted Quartz Halogen Lamp...................................................................................................8-8
Replace the Transmitted Metal Halide Lamp........................................................................................................8-9
Replace and Align the Confocal KLH-1 Lamphouse...........................................................................................8-11
Replace and Align the Confocal Nikon HMX 3/4 Lamphouse.............................................................................8-15
STAGE MAINTENANCE................................................................................................................................................8-19
Level the Floating Table......................................................................................................................................8-19
Level the Piezo Fine Focus.................................................................................................................................8-20
Adjust the Mask Holder Guide Rails ...................................................................................................................8-20
Set the Column Stops.........................................................................................................................................8-22
ELECTRONICS CABINET MAINTENANCE .......................................................................................................................8-23
Check Air Filters..................................................................................................................................................8-23
Check Fans.........................................................................................................................................................8-24
SYSTEM CLEANING....................................................................................................................................................8-25
Wipe Down the System.......................................................................................................................................8-25
Clean the Ocular Eyepieces and Condenser......................................................................................................8-25
CHAPTER 9: ERROR MESSAGES..............................................................................................................................9-1
SYSTEM ERROR MESSAGES.........................................................................................................................................9-2
SCRIPT ERROR MESSAGES ..........................................................................................................................................9-3
APPENDIX A.................................................................................................................................................................A-1

KMS-310/400 Supervisor's Manual vii
ISOPROPYL ALCOHOL...................................................................................................................................................A-2
Product Identification.............................................................................................................................................A-2
Hazardous Components........................................................................................................................................A-3
Physical Data ........................................................................................................................................................A-4
Fire and Explosion Hazard Data...........................................................................................................................A-4
Health Hazard Data...............................................................................................................................................A-5
Reactivity Data......................................................................................................................................................A-7
Spill and Disposal Procedures ..............................................................................................................................A-7
Protective Equipment............................................................................................................................................A-8
Storage and Handling Precautions........................................................................................................................A-8
Transportation Data and Additional Information....................................................................................................A-9
MSDSFOR MERCURY (METAL)..................................................................................................................................A-10
Product Identification...........................................................................................................................................A-10
Hazardous Components......................................................................................................................................A-11
Physical Data ......................................................................................................................................................A-12
Fire and Explosion Hazard Data.........................................................................................................................A-12
Health Hazard Data.............................................................................................................................................A-13
Reactivity Data....................................................................................................................................................A-15
Spill and Disposal Procedures ............................................................................................................................A-15
Protective Equipment..........................................................................................................................................A-15
Storage and Handling Precautions......................................................................................................................A-16
Transportation Data and Additional Information..................................................................................................A-16
GLOSSARY..................................................................................................................................................................G-1
INDEX.............................................................................................................................................................................I-1

Contents
viii

About This Manual
Intended Audience
Manual Organization
Conventions
Contacting Technical Support
1

1-2 Chapter 1: Introduction
Intended Audience
This manual is written for users with a thorough understanding of measurement
and inspection analysis concepts and terms.
This manual can be used by those unfamiliar with the KMS-310/400 system as a
learning tool, and by experienced users as a reference.
The primary users of this manual are process engineers and senior-level fab
technicians.
Manual Organization
This manual is organized into nine chapters:
Chapter 1: About this Manual provides general information about this
manual.
Chapter 2: Safety provides general information about machine safety labels,
safe system operation, caution and warning symbols, as well as anti-crash
protection, light source safety and isopropyl alcohol and mercury lamp
safety.
Chapter 3: System Overview introduces the KMS-310/400 system and
includes an overview of subsystem components, as well as a theory of
operation for the measurement process.
Chapter 4:User Interface provides an overview of supervisor-mode
software organization and screen-level selections.
Chapter 5: System Setup provides detailed instructions for system
initialization, alignment of mechanical elements, as well as setup of the
objectives, lamps, axes and LAN network.
Chapter 6: Script Creation provides an overview of scripting terms and
essential concepts, as well as an overview of the script creation process.
Chapter 7: Operation provides a task overview and step-by-step procedures
for setting up key system parameters, defining system options, measuring
and managing measurement data.
Chapter 8:Maintenance provides a preventive maintenance checklist and
detailed procedures for each maintenance procedure called out in the PM
checklist.
Chapter 9:Error Messages provides a list of error messages for KMS-
310/400 system software.

KMS-310/400 Supervisor's Manual 1-3
Conventions
Several conventions are used in this manual to emphasize special information,
including:
warnings and cautions
tips, notes and cautions
typographical and keyboard commands
Cautions
Special warnings and cautions to the reader are emphasized with the following
convention:
!
Caution: This text can be used for machine/equipment cautions, as
w
ell as warnings. The only difference will be the first word; either
c
aution or warning.
Tips
Special tips or notes to the reader are emphasized with the following convention:
L
T
ip: This text can be used for special notes, examples or tips. The
o
nly difference will be the first word: which will read as note, tip or
e
xample.
Typographical and Keyboard Conventions
When you are instructed to enter specific information or press certain keys, the
following conventions are used:
Selections, commands, and field names are shown in italics.
Text you are requested to enter is printed in courier type.
Keys you press on the keyboard are shown in brackets, such as [ESC],
[ENTER] or [space bar].
Issuing commands by holding down the first key and pressing the second
key are shown as [key1] + [key2], such as [ALT] + [PRINTSCRN].

1-4 Chapter 1: Introduction
Contacting Technical Support
For technical assistance, contact your Zygo Service or Applications Engineer at
(408) 434-1000.
For information on your system options, or to purchase additional options or site
licenses, contact your Zygo Sales Representative or Zygo Corporate Sales.

Safety Precautions
Machine Safety Labels
Objective Anti-Crash Protection
Light Source Safety
Isopropyl Alcohol Safety
Mercury Safety
Machine Ergonomic Features
2

2-2 Chapter 2: Safety Precautions
Machine Safety Labels
This section provides a general explanation of the different warning and caution
labels used on the KMS-310/400 system, as well as a description and location for
each specific warning and caution label on the system.
LImportant note: Read the operating instructions carefully and completely before
operating the KMS-310/400 system. All warnings and cautions in this manual
and on the system should be strictly followed.
Caution and Warning Symbols
Table 2-1 lists the caution and warning symbols used throughout the KMS-
310/400 system and provides a general description for each label.
Table 2-1. Caution and Warning Symbols (1 of 2)
Symbol Type of Warning Description
Operation warnings and cautions Alerts you to important
operating and maintenance
instructions provided in this
manual.
Dangerous voltage warning Alerts you to the presence of
uninsulated dangerous voltage in
the KMS-310/400 enclosure.
This label indicates dangerous
voltage of a sufficient magnitude
to constitute risk of electric
shock to persons.
Protective conductor warning Alerts you to the presence of a
protective conductor terminal
(protective earth ground).
Pinch point warning Alerts you to a potential pinch-
point in this area.
Hot surface warning Alerts you of a potential hot
surface on a lamphouse.
Always allow the lamphouse to
cool for at least 20 minutes
before handling.

KMS-310/400 Supervisor’s Manual 2-3
Table 2-1. Caution and Warning Symbols (2 of 2)
Symbol Type of Warning Description
Infrared radiation hazard
warning Alerts you to a potential infrared
radiation hazard.
Never remove a lamphouse or
disconnect fiber optics while the
lamp is on.
Never stare directly into the
beam path of any system light
source.
Ultraviolet radiation warning Alerts you to a potential
ultraviolet radiation hazard.
Never remove a lamphouse or
disconnect fiber optics while a
lamp is on. Never stare directly
into the beam path of any system
light source.
Safety Label Locations
This section provides a location and detailed explanation for each caution and
warning label on the KMS-310/400, including those found on the:
automated stage
halogen transmitted light source
Hg-Xe power supply
mercury or xenon lamphouse
metal halide lamphouse and power supply
K2 coupler
electronics tower (back, sides and inside bottom)
transparent electrical shock guard

2-4 Chapter 2: Safety Precautions
Automated Stage Safety Labels
The automated stage warning labels are shown in Figure 2-1.
Figure 2-1. Automated Stage Warning Labels
12
3
Halogen Transmitted Light Source Safety Labels
The halogen transmitted light source safety labels, located on the front and top of
the unit, are shown in Figures 2-2 and 2-3.
Figure 2-2. Halogen Transmitted Light Source Safety Label (Top)
1
1Alerts you to a
potential pinch-point
in this area.
2Alerts you to a
potential pinch-point
in this area.
3Alerts you to a
potential pinch-point
in this area.
1Alerts you to a
potential hot surface
on the lamphouse.
Always allow the
lamphouse to cool
for at least 20
minutes before
handling.

KMS-310/400 Supervisor’s Manual 2-5
Figure 2-3. Halogen Transmitted Light Source Safety Label (Front)
1
Hg-Xe Power Supply Safety Labels
The Hamamatsu Hg-Xe power supply safety label is shown in Figures 2-4.
Figure 2-4. Hamamatsu Hg-Xe Power Supply Safety Label
12
1Alerts you to a potential
infrared radiation hazard.
Never remove a lamphouse or
disconnect fiber optics while the
lamp is on. Never stare directly
into the beam path of any
system light source.
1Never turn on
the power if the
lamp is not installed.
If you do, you are in
danger of being
electrocuted.
2Make sure the
light source power
supplies are turned
off before replacing
the lamp.

2-6 Chapter 2: Safety Precautions
Mercury Xenon Lamphouse Safety Labels
The KLH-1 mercury xenon lamphouse safety labels, located on the main
lamphouse and fiber-optic units, are shown in Figures 2-5 and 2-6.
Figure 2-5. Mercury Xenon Lamphouse Safety Labels (Main Lamphouse Unit)
1
2
Figure 2-6. Mercury Xenon Lamphouse Safety Labels (Fiber Optics Unit)
2
1
1Make sure light source
power supplies are turned
off before attempting to
replace the lamp.
2Make sure light source
power supplies are turned
off before attempting to
replace the lamp.
Never turn on the power if
the lamp is not installed. If
you do, you are in danger
of being electrocuted.
1Make sure light source power
supplies are turned off before attempting
to replace the lamp.
2Alerts you of a potential infrared
radiation hazard. Never remove a
lamphouse or disconnect fiber optics
while the lamp is on. Never stare directly
into the beam path of any system light
source.
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1
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