ZYGO KMS-310 User manual

KMS-310/400
Supervisor's Manual
October 1998
Zygo Corporation
Advanced Imaging Systems
650 North Mary Avenue
Sunnyvale, CA 94086
Telephone: [phone]
Fax: [phone]

KMS-310/400 Supervisor’s Manual
Zygo Corporation
Advanced Imaging Systems
650 North Mary Avenue
Sunnyvale, California
Tel: [phone]
Fax: [phone]
http://www.zygo.com
Copyright © 1998 by Zygo Corporation. All rights reserved. Contents of this publication may not
be reproduced in any form without written permission from the copyright owner.
KMS-310/400 is a trademark of Zygo Corporation.
Notice
The information contained in this document is subject to change without notice. Zygo Corporation
makes no warranty of any kind with regard to this material, including, but not limited to, the
implied warranties of merchantability and fitness for a particular purpose. Zygo Corporation shall
not be liable for errors contained herein or for incidental or consequential damages in connection
with the furnishing, performance or use of this manual.

KMS-310/400 Supervisor's Manual i
Contents
CHAPTER1: ABOUT THIS MANUAL...........................................................................................................................1-1
INTENDED AUDIENCE....................................................................................................................................................1-2
MANUAL ORGANIZATION...............................................................................................................................................1-2
CONVENTIONS.............................................................................................................................................................1-3
Cautions................................................................................................................................................................1-3
Tips........................................................................................................................................................................1-3
Typographical and Keyboard Conventions ...........................................................................................................1-3
CONTACTING TECHNICAL SUPPORT..............................................................................................................................1-4
CHAPTER 2: SAFETY PRECAUTIONS.......................................................................................................................2-1
MACHINE SAFETY LABELS ............................................................................................................................................2-2
Caution and Warning Symbols..............................................................................................................................2-2
Safety Label Locations..........................................................................................................................................2-3
OBJECTIVE ANTI-CRASH PROTECTION ........................................................................................................................2-10
LIGHT SOURCE SAFETY..............................................................................................................................................2-11
Mercury Xenon Lamphouse................................................................................................................................2-11
Halogen Light Box...............................................................................................................................................2-11
Metal Halide Light Box ........................................................................................................................................2-12
Halogen Lamphouse...........................................................................................................................................2-12
Mercury Lamphouse............................................................................................................................................2-12
Xenon Lamphouse..............................................................................................................................................2-12
ISOPROPYL ALCOHOL SAFETY ....................................................................................................................................2-13
Potential Hazards................................................................................................................................................2-13
Emergency Response.........................................................................................................................................2-14
MERCURY SAFETY.....................................................................................................................................................2-16
Potential Hazards................................................................................................................................................2-16
Emergency Response.........................................................................................................................................2-16
MACHINE ERGONOMIC FEATURES...............................................................................................................................2-18
CHAPTER 3: SYSTEM OVERVIEW.............................................................................................................................3-1
PRODUCT OVERVIEW...................................................................................................................................................3-2
Script Routines......................................................................................................................................................3-2
Product Applications..............................................................................................................................................3-3
System Configurations..........................................................................................................................................3-3
Frame Grabber......................................................................................................................................................3-3
Data Output...........................................................................................................................................................3-3
SUBSYSTEM OVERVIEW................................................................................................................................................3-4
Electronic Measurement Subsystem.....................................................................................................................3-4
Optical Display Subsystem....................................................................................................................................3-9
Mechanical Subsystem .......................................................................................................................................3-14
FUNCTIONAL OVERVIEW.............................................................................................................................................3-16
System Control....................................................................................................................................................3-16
Image Input.........................................................................................................................................................3-16
Image Processing................................................................................................................................................3-16
Image Measurement...........................................................................................................................................3-17
CHAPTER 4: USER INTERFACE.................................................................................................................................4-1
OVERVIEW...................................................................................................................................................................4-2
Modes of Operation...............................................................................................................................................4-2
Screen Components..............................................................................................................................................4-2
SOFTWARE CONTROLS.................................................................................................................................................4-4

Contents
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Using the Keypad..................................................................................................................................................4-4
Keypad/Keyboard Key Equivalents.......................................................................................................................4-7
Hot Keys................................................................................................................................................................4-7
SOFTWARE ORGANIZATION.........................................................................................................................................4-10
Standby Screen...................................................................................................................................................4-11
Supervisor Master Menu.....................................................................................................................................4-12
Measure Screen..................................................................................................................................................4-14
Statistics Menu....................................................................................................................................................4-16
ID Information Menu............................................................................................................................................4-18
Select Program Menu.........................................................................................................................................4-20
Data Map Menu...................................................................................................................................................4-22
Program Setup Menu..........................................................................................................................................4-24
Sequence Setup Menu........................................................................................................................................4-26
Operator Lockouts Menu.....................................................................................................................................4-28
Calibrate Menu....................................................................................................................................................4-30
System Setup Menu............................................................................................................................................4-32
Save Program Menu...........................................................................................................................................4-34
Exit to DOS.........................................................................................................................................................4-35
Return to Standby Selection ...............................................................................................................................4-36
CHAPTER 5: SYSTEM SETUP.....................................................................................................................................5-1
OVERVIEW ..................................................................................................................................................................5-2
CONFIGURE ILLUMINATION SETTINGS............................................................................................................................5-4
Set Up the Transmitted Condenser.......................................................................................................................5-4
Set Up Transmitted Illumination............................................................................................................................5-8
Adjust Illumination Controls.................................................................................................................................5-10
Adjust Focus Control...........................................................................................................................................5-12
DEFINE CALIBRATION PARAMETERS............................................................................................................................5-14
Select Calibration Parameters............................................................................................................................5-15
Calibrate the Microscope ....................................................................................................................................5-15
Calibrate Horizontal Settings...............................................................................................................................5-16
Calibrate Vertical Settings...................................................................................................................................5-16
Configure Single-point Calibration ......................................................................................................................5-17
Save the Calibration Settings..............................................................................................................................5-22
DEFINE SYSTEM OPTIONS..........................................................................................................................................5-23
Display the System Setup Window.....................................................................................................................5-23
Set Map Colors...................................................................................................................................................5-24
Change your Supervisor Access Code...............................................................................................................5-25
Change Objective Assignments on the Turret ....................................................................................................5-25
SET OBJECTIVE PARFOCALITY AND PARCENTRICITY.....................................................................................................5-27
ADJUST AUTOFOCUS PARAMETERS ............................................................................................................................5-29
Set Column Autofocus........................................................................................................................................5-29
Set Piezo Autofocus Algorithm............................................................................................................................5-31
CHAPTER 6: CREATING AUTOMATED SCRIPTS.....................................................................................................6-1
OVERVIEW ..................................................................................................................................................................6-2
Script Features......................................................................................................................................................6-2
Script Command Types.........................................................................................................................................6-7
Matrix File Input and Output................................................................................................................................6-10
SCRIPT CREATION .....................................................................................................................................................6-14
Overview.............................................................................................................................................................6-14
Plan the Script.....................................................................................................................................................6-14
Locate Feature Edges.........................................................................................................................................6-14
Set Up Align and Deskew for the Mask...............................................................................................................6-15
Set Up Planarity for the Mask.............................................................................................................................6-15
Obtain Substrate Information..............................................................................................................................6-15

KMS-310/400 Supervisor's Manual iii
Move to Features to be Measured......................................................................................................................6-15
Call the Measurement Subroutine.......................................................................................................................6-16
Suggested Order of Script Sequence..................................................................................................................6-16
EXAMPLE SCRIPT.......................................................................................................................................................6-17
Example Script....................................................................................................................................................6-17
SCRIPT LOCATOR.......................................................................................................................................................6-22
Listing by Alphabetical Order ..............................................................................................................................6-22
Listings by Function.............................................................................................................................................6-30
Comment and Debug Commands.......................................................................................................................6-30
Stage, Column, and Optical Positioning and Turret Command...........................................................................6-33
Illumination Values Commands...........................................................................................................................6-34
Z-Axis Position Commands: Piezo Stack............................................................................................................6-35
Z-Axis Position Commands: Column Motor ........................................................................................................6-35
X-, Y-Axis Position Commands: Stage Motors....................................................................................................6-36
Planarization Commands....................................................................................................................................6-38
Operator Interface Commands............................................................................................................................6-39
Data Output Matrix Commands...........................................................................................................................6-41
Log File Commands............................................................................................................................................6-42
Script Flow Commands.......................................................................................................................................6-43
Edge Detection Pattern Recognition Commands................................................................................................6-44
Bitmap/Image Pattern Recognition Commands..................................................................................................6-44
Autofocus Commands.........................................................................................................................................6-45
Find Surface Command......................................................................................................................................6-45
Fast Focus Commands.......................................................................................................................................6-46
Column Focus Command....................................................................................................................................6-47
SCRIPT COMMANDS ...................................................................................................................................................6-48
AF_EXEC............................................................................................................................................................6-48
AF_SET...............................................................................................................................................................6-48
AF_STAT.............................................................................................................................................................6-48
ALIGN..................................................................................................................................................................6-49
BOX.....................................................................................................................................................................6-49
CALL...................................................................................................................................................................6-49
CLEARPIC..........................................................................................................................................................6-50
CLOCK................................................................................................................................................................6-50
COMMENT..........................................................................................................................................................6-50
DEBUG................................................................................................................................................................6-51
DESKEW.............................................................................................................................................................6-51
EDGES................................................................................................................................................................6-52
EDGEPOS...........................................................................................................................................................6-53
EDGEROUGHNESS (EDGER)...........................................................................................................................6-54
END.....................................................................................................................................................................6-55
ERASE................................................................................................................................................................6-55
EXIT....................................................................................................................................................................6-55
FASTSURF.........................................................................................................................................................6-55
FF_SET...............................................................................................................................................................6-56
FF_WIN...............................................................................................................................................................6-56
FINDSURF..........................................................................................................................................................6-56
FOCUSFAST.......................................................................................................................................................6-57
FOCUSIMG.........................................................................................................................................................6-57
GETMOTCNTS...................................................................................................................................................6-57
GETPOS.............................................................................................................................................................6-57
GETSTOP...........................................................................................................................................................6-58
GETTEXT............................................................................................................................................................6-58
GETVAR..............................................................................................................................................................6-58
GETWIN..............................................................................................................................................................6-59
GET_MOT_Z.......................................................................................................................................................6-60

Contents
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GET_Z.................................................................................................................................................................6-60
GO_ORIGIN........................................................................................................................................................6-60
GOSTOP.............................................................................................................................................................6-61
GRABSTAT.........................................................................................................................................................6-61
GSPAWN............................................................................................................................................................6-61
INCLUDE............................................................................................................................................................6-62
IDINFO................................................................................................................................................................6-63
JUMP..................................................................................................................................................................6-64
LINE....................................................................................................................................................................6-64
LOADCALIB........................................................................................................................................................6-64
LOADCF..............................................................................................................................................................6-65
LOADPROG........................................................................................................................................................6-65
LOADSUBM........................................................................................................................................................6-65
LOCKOUT...........................................................................................................................................................6-66
LOGMEASURE...................................................................................................................................................6-66
LOOP..................................................................................................................................................................6-66
LUMAUTO...........................................................................................................................................................6-67
LUMAVG.............................................................................................................................................................6-67
LUMDUMP..........................................................................................................................................................6-67
LUMMARK..........................................................................................................................................................6-68
LUMREAD...........................................................................................................................................................6-68
LUMSET..............................................................................................................................................................6-68
MAPMENU..........................................................................................................................................................6-69
MASK_ORIGIN...................................................................................................................................................6-69
MASK_PLANE....................................................................................................................................................6-70
MARK..................................................................................................................................................................6-71
MATH..................................................................................................................................................................6-71
MATRIXCLEAR...................................................................................................................................................6-72
MATRIXCLOSE..................................................................................................................................................6-73
MATRIXOPEN....................................................................................................................................................6-73
MATRIXSET........................................................................................................................................................6-74
MATRIXVALUE...................................................................................................................................................6-74
MATRIXWRITE...................................................................................................................................................6-75
MEASURE..........................................................................................................................................................6-76
MEASURE_ALGORITHM...................................................................................................................................6-76
MENU..................................................................................................................................................................6-76
MESSAGE..........................................................................................................................................................6-77
METER................................................................................................................................................................6-77
MOT_Z_MOVE...................................................................................................................................................6-77
MOT_Z_REL.......................................................................................................................................................6-78
MOVEPOL..........................................................................................................................................................6-78
MOVEPOL_NM...................................................................................................................................................6-79
MOVEPOLZ........................................................................................................................................................6-79
MOVEPOLZ_NM.................................................................................................................................................6-80
MSR_DEFAULT..................................................................................................................................................6-80
MSR_ERROR.....................................................................................................................................................6-81
MSR_STATS.......................................................................................................................................................6-81
OPERATOR........................................................................................................................................................6-81
OPMARK.............................................................................................................................................................6-82
ORIGIN...............................................................................................................................................................6-82
PATREC_FIND...................................................................................................................................................6-83
PATREC_GET....................................................................................................................................................6-84
PATREC_SAVE..................................................................................................................................................6-85
PATREC_SHOW................................................................................................................................................6-85
PAUSE................................................................................................................................................................6-86
PICSHOW...........................................................................................................................................................6-86

KMS-310/400 Supervisor's Manual v
PICTURE.............................................................................................................................................................6-86
PICTURETIFF.....................................................................................................................................................6-86
PICTUREVGA.....................................................................................................................................................6-86
PLANECALC.......................................................................................................................................................6-87
PLANEPT............................................................................................................................................................6-87
POSMOVE..........................................................................................................................................................6-87
POSMOVE_NM...................................................................................................................................................6-88
POSPOL..............................................................................................................................................................6-88
POSPOL_NM......................................................................................................................................................6-88
PRINT..................................................................................................................................................................6-88
PRINTER.............................................................................................................................................................6-88
PRINTSTR..........................................................................................................................................................6-89
PROGNUM..........................................................................................................................................................6-89
QUIT....................................................................................................................................................................6-89
RECALL..............................................................................................................................................................6-89
RECPT................................................................................................................................................................6-90
RELMOVE...........................................................................................................................................................6-90
RELMOVE_NM...................................................................................................................................................6-90
REL_POL............................................................................................................................................................6-90
REL_POL_NM.....................................................................................................................................................6-91
REL_POLZ..........................................................................................................................................................6-91
REL_POLZ_NM..................................................................................................................................................6-91
RESULT..............................................................................................................................................................6-91
RETURN.............................................................................................................................................................6-92
RP_DISPLAY......................................................................................................................................................6-92
RP_EXEC............................................................................................................................................................6-92
RP_READ...........................................................................................................................................................6-92
RP_WIN..............................................................................................................................................................6-92
SEQEDGE...........................................................................................................................................................6-93
SEQNAME..........................................................................................................................................................6-94
SEQOUTPUT......................................................................................................................................................6-94
SEQWIN..............................................................................................................................................................6-94
SETSTOP............................................................................................................................................................6-95
SHOWPIC...........................................................................................................................................................6-95
SILENT................................................................................................................................................................6-95
SITENAME..........................................................................................................................................................6-95
SPAWN...............................................................................................................................................................6-95
START.................................................................................................................................................................6-96
STATEDGE.........................................................................................................................................................6-96
STATMSR...........................................................................................................................................................6-96
STATMSR3.........................................................................................................................................................6-97
STATS.................................................................................................................................................................6-98
TEXT...................................................................................................................................................................6-98
TIME....................................................................................................................................................................6-98
TURRET..............................................................................................................................................................6-98
TURRETFF.........................................................................................................................................................6-99
TURRETPOS......................................................................................................................................................6-99
UPDATE..............................................................................................................................................................6-99
XHAIR...............................................................................................................................................................6-100
Z_MOVE............................................................................................................................................................6-100
Z_REL...............................................................................................................................................................6-100
CHAPTER 7: OPERATION...........................................................................................................................................7-1
OVERVIEW...................................................................................................................................................................7-2
ACCESS AND EXIT THE SUPERVISOR MASTER MENU SCREEN.........................................................................................7-4
Access the Supervisor Master Menu Screen........................................................................................................7-4

Contents
vi
Return to Standby Screen.....................................................................................................................................7-6
Exit to DOS...........................................................................................................................................................7-7
SET UP A PROGRAM.....................................................................................................................................................7-8
Access the Select Program Screen ......................................................................................................................7-9
Open an Existing Program..................................................................................................................................7-10
Copy an Existing Program..................................................................................................................................7-11
Create a New Program.......................................................................................................................................7-12
Delete a Program................................................................................................................................................7-12
Define Program Parameters ...............................................................................................................................7-13
Set Operator Lockouts........................................................................................................................................7-14
Set up Measurement Sequences........................................................................................................................7-16
Set Up the Measurement Window......................................................................................................................7-18
Select Measurement Options..............................................................................................................................7-25
Set Up the Measurement Axis............................................................................................................................7-26
MEASURE..................................................................................................................................................................7-28
Access the Production Menu ..............................................................................................................................7-28
Load a Plate........................................................................................................................................................7-29
Select a New Program (Optional) .......................................................................................................................7-32
Change ID Entries (Optional)..............................................................................................................................7-33
Clear Statistics (Optional) ...................................................................................................................................7-34
Measure in Manual Mode....................................................................................................................................7-35
Measure in Semi-Auto Mode...............................................................................................................................7-38
Measure (auto mode)..........................................................................................................................................7-41
MANAGE MEASUREMENT DATA...................................................................................................................................7-42
Manage Statistics................................................................................................................................................7-43
Manage ID Entries..............................................................................................................................................7-44
Configure a Data Map.........................................................................................................................................7-45
CHAPTER 8: MAINTENANCE......................................................................................................................................8-1
OVERVIEW ..................................................................................................................................................................8-2
Preventive Maintenance Schedule........................................................................................................................8-2
Maintenance Procedures Overview......................................................................................................................8-4
LAMP REPLACEMENT AND ALIGNMENT ..........................................................................................................................8-5
Visually Check Lamps...........................................................................................................................................8-5
Align the Transmitted Condenser..........................................................................................................................8-5
Replace the Transmitted Quartz Halogen Lamp...................................................................................................8-8
Replace the Transmitted Metal Halide Lamp........................................................................................................8-9
Replace and Align the Confocal KLH-1 Lamphouse...........................................................................................8-11
Replace and Align the Confocal Nikon HMX 3/4 Lamphouse.............................................................................8-15
STAGE MAINTENANCE................................................................................................................................................8-19
Level the Floating Table......................................................................................................................................8-19
Level the Piezo Fine Focus.................................................................................................................................8-20
Adjust the Mask Holder Guide Rails ...................................................................................................................8-20
Set the Column Stops.........................................................................................................................................8-22
ELECTRONICS CABINET MAINTENANCE .......................................................................................................................8-23
Check Air Filters..................................................................................................................................................8-23
Check Fans.........................................................................................................................................................8-24
SYSTEM CLEANING....................................................................................................................................................8-25
Wipe Down the System.......................................................................................................................................8-25
Clean the Ocular Eyepieces and Condenser......................................................................................................8-25
CHAPTER 9: ERROR MESSAGES..............................................................................................................................9-1
SYSTEM ERROR MESSAGES.........................................................................................................................................9-2
SCRIPT ERROR MESSAGES ..........................................................................................................................................9-3
APPENDIX A.................................................................................................................................................................A-1

KMS-310/400 Supervisor's Manual vii
ISOPROPYL ALCOHOL...................................................................................................................................................A-2
Product Identification.............................................................................................................................................A-2
Hazardous Components........................................................................................................................................A-3
Physical Data ........................................................................................................................................................A-4
Fire and Explosion Hazard Data...........................................................................................................................A-4
Health Hazard Data...............................................................................................................................................A-5
Reactivity Data......................................................................................................................................................A-7
Spill and Disposal Procedures ..............................................................................................................................A-7
Protective Equipment............................................................................................................................................A-8
Storage and Handling Precautions........................................................................................................................A-8
Transportation Data and Additional Information....................................................................................................A-9
MSDSFOR MERCURY (METAL)..................................................................................................................................A-10
Product Identification...........................................................................................................................................A-10
Hazardous Components......................................................................................................................................A-11
Physical Data ......................................................................................................................................................A-12
Fire and Explosion Hazard Data.........................................................................................................................A-12
Health Hazard Data.............................................................................................................................................A-13
Reactivity Data....................................................................................................................................................A-15
Spill and Disposal Procedures ............................................................................................................................A-15
Protective Equipment..........................................................................................................................................A-15
Storage and Handling Precautions......................................................................................................................A-16
Transportation Data and Additional Information..................................................................................................A-16
GLOSSARY..................................................................................................................................................................G-1
INDEX.............................................................................................................................................................................I-1

Contents
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