ADT 8020 User manual

P/N 98020-9005-000-00
October 2018
Your Resource for Advanced Dicing Solutions
ADT 8020
Fully Automatic Twin
Dicing System
Maintenance Manual

Advanced Dicing Technologies Ltd.
Advanced Dicing Technologies Ltd. — www.adt-dicing.com
5 Hamada St., Hi-Tech Park (South), P.O.Box 87, Yokneam 20692, Israel
Tel.: [phone], Fax: [phone]
Confidential
This information is the property of ADT Ltd.
Any reproduction, publication or distribution to a third party is strictly forbidden, unless written
permission is given by an authorized agent of ADT.

ADT 8020 Fully Automatic Twin Dicing System Maintenance Manual
Table of Contents
P/N 98020-9005-000-00
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TABLE OF CONTENTS
Before You Begin _______________________ 1-1
1.1 Introduction _______________________________________ 1-2
1.2 Conventions _______________________________________ 1-2
1.2.1 Symbols_________________________________________________ 1-2
1.2.2 Navigation _______________________________________________ 1-2
1.2.3 Abbreviations and Acronyms_________________________________ 1-3
1.3 Safety Information __________________________________ 1-4
1.3.1 Hazards_________________________________________________ 1-4
1.3.2 Safety Features ___________________________________________ 1-6
1.4 Reference Documents _______________________________ 1-8
1.5 About this Manual __________________________________ 1-8
General Information_____________________ 2-9
2.1 System Description ________________________________ 2-10
2.2 Front Panel_______________________________________ 2-11
2.2.1 Emergency Stop _________________________________________ 2-11
2.2.2 ON and OFF/STOP Buttons ________________________________ 2-11
2.2.3 Power Lights ____________________________________________ 2-11
2.3 Dicer____________________________________________ 2-12
2.4 Material Handling System (MHS)______________________ 2-13
2.4.1 Cassette Compartment ____________________________________ 2-13
2.4.2 MTS___________________________________________________ 2-14
2.4.3 Cleaner ________________________________________________ 2-16
2.5 Powering Up and Down Procedures ___________________ 2-17
2.5.1 Powering Up the System___________________________________ 2-17
2.5.2 Powering Down the System ________________________________ 2-17
2.6 Logging In to the System ____________________________ 2-19
2.7 Initializing the System ______________________________ 2-20
2.8 Graphical User Interface ____________________________ 2-21
2.8.1 Dice Screen Description ___________________________________ 2-24

Table of Contents
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Maintaining the System_________________ 3-27
3.1 Periodic Maintenance_______________________________ 3-28
3.2 Required Tools and Materials ________________________ 3-29
3.3 Daily Maintenance _________________________________ 3-30
3.3.1 Inspecting the Surrounding (water leaks) ______________________ 3-31
3.3.2 Inspecting the Safety Labels ________________________________ 3-31
3.3.3 Checking the Air Supply Pressure____________________________ 3-31
3.3.4 Inspecting the Cutting Chuck________________________________ 3-32
3.3.5 Cleaning the Height Device _________________________________ 3-32
3.3.6 Maintaining the Spindle and Cleaning the BBD__________________ 3-34
3.4 Weekly Maintenance _______________________________ 3-37
3.4.1 Cleaning the Microscope Lens ______________________________ 3-37
3.4.2 Cleaning the Dicer________________________________________ 3-38
3.4.3 Cleaning the Waste Strainer ________________________________ 3-39
3.4.4 Database Backup ________________________________________ 3-40
3.5 Monthly Maintenance _______________________________ 3-41
3.6 Half Year Maintenance______________________________ 3-41
3.7 Annually Maintenance ______________________________ 3-41

ADT 8020 Fully Automatic Twin Dicing System Maintenance Manual
List of Figures
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LIST OF FIGURES
Figure 2-1. Model 8020 External Parts at a Glance_____________________________ 2-10
Figure 2-2. Front Panel __________________________________________________ 2-11
Figure 2-3. Dicer _______________________________________________________ 2-12
Figure 2-4. Cassette Compartment _________________________________________ 2-13
Figure 2-5. MTS ________________________________________________________ 2-14
Figure 2-6. Pre-Align Station (top view) ______________________________________ 2-14
Figure 2-7. Cleaner _____________________________________________________ 2-16
Figure 2-8. Login Dialog Box ______________________________________________ 2-19
Figure 2-9. Init Status Indicator ____________________________________________ 2-20
Figure 2-10. Main Menu Screen ___________________________________________ 2-21
Figure 2-11. Dice Screen (Axis Control) _____________________________________ 2-24
Figure 2-12. Dicer Sensors _______________________________________________ 2-26
Figure 2-13. MHS Sensors _______________________________________________ 2-26
Figure 3-1. Air Supply Gauge _____________________________________________ 3-31
Figure 3-2. Cutting Chuck ________________________________________________ 3-32
Figure 3-3. Change Blade (step 1 of 2) ______________________________________ 3-34
Figure 3-4. Cooling Block_________________________________________________ 3-35
Figure 3-5. Spindles Sticker_______________________________________________ 3-35
Figure 3-6. Change Blade (step 2 of 2) ______________________________________ 3-36
Figure 3-7. Maintenance Cover ____________________________________________ 3-38
Figure 3-8. Waste Strainer________________________________________________ 3-39

List of Tables
Advanced Dicing Technologies Ltd.
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LIST OF TABLES
Table 1-1. Safety Labels __________________________________________________ 1-7
Table 2-1. Access Levels_________________________________________________ 2-19
Table 2-2. Graphical User Interface Description-1______________________________ 2-21
Table 2-3. Graphical User Interface Description-2______________________________ 2-23
Table 2-4. Axis Control Buttons ____________________________________________ 2-25
Table 3-1. Periodic Maintenance ___________________________________________ 3-28

ADT 8020 Fully Automatic Twin Dicing System Maintenance Manual
Before You Begin
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1-1
Before You Begin
The following chapter introduces the Model 8020 System and
includes the following sections:
1.1 ....Introduction ......................................................page 1-2
1.2 ....Conventions ......................................................page 1-2
1.3 ....Safety Information ...........................................page 1-4
1.4 ....Reference Documents .......................................page 1-8
1.5 ....About this Manual............................................page 1-8

Before You Begin
Introduction
Advanced Dicing Technologies Ltd.
1-2
1.1 Introduction
ADT 8020 is a Fully Automatic Twin Dicing System with two facing spindles
that can simultaneously dice workpieces of up to 8-inch in diameter. It
operates with the ADT intuitive New graphic User Interface (NUI).
•Before you begin working with ADT 8020 Dicing Saw, carefully read the
following safety instructions.
•Before beginning a procedure, read the procedure through to the end.
Understanding the entire procedure prevents unnecessary loss of time
and error, and possible injury.
1.2 Conventions
The Conventions section explains basic symbols and navigation concept used
in this manual and includes a glossary of abbreviations and acronyms.
1.2.1 Symbols
The following symbols have been inserted on the left-hand side of the
operating instructions to make it easier for the User to perform procedures.
Symbol Description
Note: Information given in a note describes how the System
functions or provides a tip on how best to use it.
Caution: Information given in a message labeled “caution” refers
to the safe operation of the System and provides warnings where
the possibility for loss of data or damage to the equipment exists.
Danger: Information given in a message labeled “danger” warns
of possible hazard to personnel and extreme hazard to the Model.
1.2.2 Navigation
We have adopted the following shortened instruction form for navigating to
the various software elements.
Shortened Instruction Replaces
From the Main Menu screen, select:
Maintenance > System > Hardware
Configuration
From the Main Menu screen:
1) Press Maintenance; the Maintenance
screen opens.
2) Press System; the System view
opens.
3) Press Hardware Configuration; the
Hardware Configuration options list is
displayed.

ADT 8020 Fully Automatic Twin Dicing System Maintenance Manual
Before You Begin
P/N 98020-9005-000-00
1-3
1.2.3 Abbreviations and Acronyms
Amp------- Ampere
BBD ------- Broken Blade Detector
ESD ------- Electrostatic Discharge Device
Gf ---------- Grams of force
GUI-------- Graphical User Interface
Hz---------- Hertz (frequency)
in. ---------- Inch
in. Hg----- Inch of Mercury (vacuum pressure unit)
kgf*cm --- Kilograms of force times lever length, in centimeters (torque unit)
mil --------- 0.001 inch
mm -------- Millimeter
MHS ------ Material Handling System
MPU ------ Main Power Unit
MTS ------- Material Transferring System
ms---------- Millisecond
NCH------- Non-Contact Height device
NUI-------- New User Interface
psi --------- Pounds per Square Inch
scfm------- Standard Cubic Feet per Minute (gas flow unit).
UPS ------- Interruptible Power Supply
UVL ------- Ultraviolet Light
V------------ Volts
VAC ------- AC Voltage
VDC ------- DC Voltage

Before You Begin
Safety Information
Advanced Dicing Technologies Ltd.
1-4
1.3 Safety Information
Advanced Dicing Technologies Ltd. believes that the safety of personnel
working with and around our Systems is the most important consideration.
Before operating the system or performing maintenance operations, read and
be familiarized with the safety information:
•Obey and follow all warnings and cautions documented in the manual.
•Comply with all approved and established precautions for operating
electrical and mechanical equipment.
•Allow only trained and authorized personnel to perform maintenance
tasks.
•Verify that all power, air, and water facilities are turned off before
beginning maintenance procedures, or before replacing or repairing parts
(including inserting or removing connectors or boards).
1.3.1 Hazards
The following hazards are documented in the manual.
1.3.1.1 Electrical Shock
Danger
High voltage is present at points throughout the system. Contact can result in
injury or death. Before opening system covers or performing maintenance
tasks ensure that no voltage is present.
1) Power down the system.
2) Disconnect the AC power cord plug from the wall outlet and wait ten
minutes for any remaining current to dissipate.
3) Turn off the Uninterruptible Power Supply (UPS) on systems where a
UPS is present.

ADT 8020 Fully Automatic Twin Dicing System Maintenance Manual
Before You Begin
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1-5
1.3.1.2 Moving Parts
Danger
There are two types of hazards that deal with moving parts.
•Components (e.g., spindle and blade, axes): the spindle and blade rotate
at high speeds and can cause injury even after the power has been
turned off.
The axes of the system move close to the covers and walls.
Never touch the spindle or the blade while they are still in motion.
Wait until the rotation stops completely before working on or near
moving parts.
Do not insert hands when any of the axes are moving.
Do not operate the system while any of the covers are partially or
completely open.
•Hands, loose clothing, jewelry and other loose or dangling items: can
become caught in moving or rotating parts.
1.3.1.3 Burns
Danger
Do not touch the solenoid valves inside the system. Some solenoid valves
may reach high temperatures and direct contact can cause burns.
1.3.1.4 High Water and Air Pressure
Observe standard operating procedures to avoid contact with high pressure
air and water, which can cause physical harm, especially to eyes.
1.3.1.5 Bodily Injury
Be careful not to drop any cover that is removed from the system. Dropping a
cover can cause bodily injury or damage to the cover.

Before You Begin
Safety Information
Advanced Dicing Technologies Ltd.
1-6
1.3.2 Safety Features
The ADT 8020 Dicing Saw is equipped with the following safety features.
Look at them and become familiar with these features.
•Emergency Stop Button: press the red Emergency Stop button to stop
all system activity and cut off power to the system.
•Circuit Breaker Switch: close the circuit breaker switch (located on
the rear of the system) if it is necessary to immediately cut off power to
the system.
•Grounding Cables: grounding cables are attached to the inside of some
of the system panels. An ESD (Electrostatic Discharge Device) should be
worn when handling the grounding cables.
•Interlocks: lock the covers so that they cannot be opened during dicing.
•Safety Labels: the labels are affixed to the potentially hazardous
sections of this machine.
1.3.2.1 Emergency Stop
Use the Emergency Stop button to immediately stop all system operation and
avert potential harm to the user or system.
The Emergency Stop button is located on the system’s front panel.
To perform an emergency stop:
Press the Emergency Stop button.
Note
After pressing the Emergency Stop button:
•The main circuit breaker shuts off, cutting power to the system.
•All system operations come to an immediate halt.
The air tank continues supplying air to the spindle for a short period to
prevent damage to the spindle.
To regain power after an emergency stop:
1. Insert the Emergency Stop button key.
2. Pull out the Emergency Stop button.
3. Turn the main circuit breaker on.

ADT 8020 Fully Automatic Twin Dicing System Maintenance Manual
Before You Begin
P/N 98020-9005-000-00
1-7
1.3.2.2 Safety Labels
The safety and warning labels are affixed near or on the potentially
hazardous sections of this machine. It is important you pay attention and
understand the precautions and warning indicated by the safety labels,
before using this machine.
Table 1-1. Safety Labels
Label Location Meaning
On the dicer access
door
This is an automatic sliding door that is
automatically opened (pneumatically) and is
closed during machine operation.
On the dicer access
door
Behind these covers are sharp blades that
rotate at high speed and can cause injury.
These doors/covers must be kept closed when
the spindles are rotating.
Open only after the spindles stop rotating.
On the spindle’s door
On the maintenance
cover
On the cassette
compartment door
The elevator moves up and down. Keep your
hands away from the elevator while it is in
motion.
On the dress and
inspection drawer
On the spinner access
door
The spinner behind this door rotates at high
speed and can cause injury.
This door must be kept closed when the
spinner is rotating.
Open only after the spinner stops rotating.
On the MTS cover Behind this cover is a moving belt and a
moving finger, which can cause injury.
The cover should be kept closed during
machine operation.
Remove only when the MTS and finger are
not moving.
On the maintenance
cover
Behind this cover is a moving wafer table and
rotating spindles, which can cause injury.
This cover must be kept closed during
machine operation.
Remove only after the spindles stop rotating
and the machine is in idle mode or off.
On the ionizer cover Behind this cover is high voltage that can
cause injury or death.
Turn off the power to the machine before
removing this cover

Before You Begin
Reference Documents
Advanced Dicing Technologies Ltd.
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1.4 Reference Documents
For further information, see the following document:
•ADT Model 8020 Operation Manual.
It provides information and procedures for operating and working with
the 8020 Fully Automatic Twin Dicing System.
•ADT Model 8020 Schematics and Illustrated Parts Book (IPB).
It provides drawings and schematics, including Bill of Material (BOM), of
the Model 8020 main assemblies.
•Option Documentation.
It provides details on special options that may be installed on your dicing
machine.
•Software Release Notes.
It provides the most updated information on new options and features.
1.5 About this Manual
This Maintenance Manual explains the periodic maintenance and inspection
procedures that are required to be performed by the customer to ensure
proper operation of the ADT 8020 Fully Automatic Twin Dicing System.

ADT 8020 Fully Automatic Twin Dicing System Maintenance Manual
General Information
P/N 98020-9005-000-00
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General Information
The general information chapter provides essential information
for operating the system, and includes the following sections:
2.1 ....System Description........................................... page 2-10
2.2 ....Front Panel....................................................... page 2-11
2.3 ....Dicer..................................................................page 2-12
2.4 ....Material Handling System (MHS) ................... page 2-13
2.5 ....Powering Up and Down Procedures................. page 2-17
2.6 ....Logging In to the System ................................. page 2-19
2.7 ....Initializing the System..................................... page 2-20
2.8 ....Graphical User Interface.................................. page 2-21

General Information
System Description
Advanced Dicing Technologies Ltd.
2-10
2.1 System Description
The System Description section is composed of the following two subsections:
•Main Subsystems Description (Front Panel, Dicer, Vision system, MTS,
Elevator and Cleaner).
•Graphic User Interface (Model 8020 application description).
Following Figure 2-1 describes the elements located on the visual surface of
the Model 8020 system.
Light Tower
Main Monitor
Emergency Stop
Button
Tools Compartments
Cassette
Compartment Door
Cassette
Compartment
Air Gun
Flow Meter Valves
Dicer Access Door
Secondary Monitor
Figure 2-1. Model 8020 External Parts at a Glance
2
6
4
1
3
7
8
5
9
4
10

ADT 8020 Fully Automatic Twin Dicing System Maintenance Manual
General Information
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2-11
2.2 Front Panel
The Front Panel is located on the front of the system and includes the
following controls and indicators:
Main Monitor
Emergency Stop
Button
ON Button
STOP/OFF Button
AC Input Indicator
Dicing Chamber
Illumination Switch
USB Port
Figure 2-2. Front Panel
2.2.1 Emergency Stop
The Emergency Stop button is used when a hazardous condition develops in
the system or when the system must be stopped immediately.
2.2.2 ON and OFF/STOP Buttons
The ON and STOP > OFF buttons provide the following functionality:
The ON button powers on the components and the system
computer, which then begins loading the NUI application.
The OFF/STOP button stops system operation. When pressed
twice it shuts down the system. To start the system up again,
press ON and wait for the User Password window to appear on
the monitor.
2.2.3 Power Lights
The power lights indicate the power status of the Main Power Unit (MPU):
•The AC Input (green) light indicates presence of AC power in the System.
•The ON button light indicates the system is ON.
1
2
3
4
6
5
7

General Information
Dicer
Advanced Dicing Technologies Ltd.
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2.3 Dicer
The Dicer is where Workpieces are aligned and then cut.
Vision System
(retracted)
Spindle (H1)
Height Device
(NCH)
Wash/Air Pipes
(option)
Spindle (H2)
Frame with Wafer
on Turntable Cutting
Chuck
Dress Station
(option)
Figure 2-3. Dicer
The dicer includes the following main and sub-components:
•Cutting Axes:
X-Axis: the axis on which the cutting table moves.
Y1 and Y2 Axes: the axis on which the spindles move to the front and
rear of the system.
Z1 and Z2 Axes: the axis on which the spindles move up and down in
relation to the cutting table.
Theta Axis: the axis on which the cutting table moves in a circular
pattern.
Rotational Axis (Spindles): the axes on which the spindles turn.
•Cooling Blocks (on each of the spindles).
•Height Device (Non-Contact Height device).
•Cutting Chuck (quick-change).
•Vision System (Microscope, Camera and Illumination).
Note
The system has a protection feature for the vision system. When dicing is
initialized, the vision system retracts upwards and rests behind a physical
barrier that protects the system from foreign matter. The vision system is
lowered down from its protected location only during inspection procedures.
2
3
5
7
4
6
1

ADT 8020 Fully Automatic Twin Dicing System Maintenance Manual
General Information
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2.4 Material Handling System (MHS)
The Material Handling System (MHS) includes three sub-systems:
•Cassette Compartment (section 2.6.1)
•Material Transferring System (section 2.6.2)
•Cleaner (section 2.6.3)
2.4.1 Cassette Compartment
The cassette compartment includes an Elevator with a Cassette Adapter on
its top surface, for placing a Cassette filled with workpieces to be processed,
and a Dress and Inspection drawer.
Cassette (single)
Cassette Adapter
Dress and
Inspection Drawer
Figure 2-4. Cassette Compartment
1
2
3

General Information
Material Handling System (MHS)
Advanced Dicing Technologies Ltd.
2-14
2.4.2 MTS
The Material Transfer System (MTS) is a workpiece handling system that
simultaneously transfers workpieces through the workpiece process cycle
(Cassette Pre-Align station Dicer Cleaner Cassette).
Clean Arm
Pre-Align Station
Figure 2-5. MTS
The MTS includes the following main components and sub-components:
•Pre-Align station (section 2.6.2.1)
Finger (section 2.6.2.1.1)
Post Cutting Arm (section 2.6.2.1.2)
•Clean Arm (section 2.6.2.2)
2.4.2.1 Pre-Align Station
The Pre-Align Station mechanically aligns the workpiece after it is pulled out
of the cassette, before going to the dicing process, and before it is returned to
the cassette after the cleaning process.
Finger
Aligning Rails
MTS Post Cleaning Pipe
Figure 2-6. Pre-Align Station (top view)
1
2
1
2
3